Compact Cylinder: Standard Type Double Acting, Single Rod Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 2

connector Special function Type Electrical entry 32 to 100 12 to 100 0.5 (Nil) 3 (L) 5 (Z) None (N) AC DC In-line In-line Perpendicular Perpendicular 3-wire (NPN equivalent) IC circuit 5V A76H A96 A96V Grommet 200 V Reed switch Solid state switch A72H A73H A93 A93V A72 A73 A73C Yes 100 V Relay, PLC 2-wire 12 V 24 V Connector Diagnostic indication (2-color indication) A79W Grommet F7NV F7PV

S

NRB031-025/NRBC031-025 D-A76H Reed 4 ~ 8 VDC 20mA NCDPX2N15 D-E76A NCX2N25 D-A73C Reed 24VDC 5 ~ 40mA NCDBX2N25 NRB050-030/NRBC050-030 D-A80C Reed 24VAC/DC or less 50mA NCDPX2N25 D-F79 3 Wire Solid State NPN 28VDC or less 150mA or less D-F7P 3 Wire Solid State PNP 100mA or less D-J79 2 Wire Solid State 24VDC (10~28V) 5 ~ 150mA D-F7NV 3 Wire Solid State NPN 28CVDC or less 150mA or less D-F7PV

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

NPN) IC 5 V A76H A96V A96 Reed switch Solid state switch Grommet A72 A73 A73C A79W F7NV F7PV F7BV J79C F7NWV F7BWV F7BAV A72H A73H F79 F7P J79 F79W F7PW J79W F7BA F79F 200 V A93V F9NV F9PV F9BV F9NWV F9PWV F9BWV A93 F9N F9P F9B M9N M9P M9B F9NW F9PW F9BW F9BA Yes Yes 12 V 100 V Relay, PLC 2-wire 24 V Connector 12 V Grommet Diagnostic indication (2-color) 3-wire (NPN) 3-wire

Compact End Lock Cylinder Series CBQ2

A73C A80C A79W F7NV F79 Action F9NV F9N D Double acting F7PV F7P F9PV F9P Cushion F7BV J79 C Rubber bumper F9BV F9B Solid state switch J79C Body option F7NWV F79W F9NWV F9NW Standard (rod end female thread) Rod end male thread Nil M F7PW F9PWV F9PW Mounting bracket part nos.

MHT2

IC circuit A76H A96V A96 5 V Grommet A72 A73 A72H A73H 200 V Reed switch Solid state switch 100 V 12 V A93V A93 Relay, PLC 2-wire 24 V A73C 12 V Connector Diagnosis (2-color indication) Grommet A79W 3-wire (NPN) F79 M9NV M9N F7NV 5 V 12 V IC circuit Grommet 3-wire (PNP) F7P M9PV M9P F7PV J79 M9BV M9B F7BV J79C 12 V 2-wire Connector 3-wire (NPN) F79W F7NWV F9NWV F9NW Relay, PLC IC circuit

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Mounting bolt Mounting bolt Spring Return Spring Extend D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 Model C Mounting bolt Model C Mounting bolt CQ2B12-5S -10S CQ2B16-5S -10S CQ2B20-5S -10S CQ2B25-5S -10S CQ2B32-5S -10S CQ2B40-5S -10S CQ2B50-10S -20S CQ2B12-5T -10T CQ2B16-5T -10T CQ2B20-5T -10T CQ2B25-5T -10T CQ2B32-5T -10T CQ2B40-5T -10T CQ2B50-

MU

Calculation Example 1: MUB40-15S(T) Basic weight0.62kg 2 pcs. 5 10 15 15 Example 2: MUC50-5S(T) Basic weight1.06 Additional weight (mounting bracket)0.40 1.06 + 0.40 = 1.46 kg 1 pc. 5 5 10 15 Construction Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !

Compact Cylinder High Magnetic Field Design CDQ2BP Series

SealKir 25, 30, 35, 40. 45, 50, 75, 100 25 30,35,4A, 45,50.75, tOD 25, 30, 35.40, 45, 50, 75, 100 .Ho{ to make interrediaie slroke rtrmediale stroke berwen 50-l0o (5s,60,65 ...) are obtained throlgh the use ol spaceB (5. 10, 1s,20mm) (Example) CDQBPSo-55 oMr S[4C would install a 20mrn width spacer in rire cDQ2Bp 50 750M. ll lool brackel is required, order 2 pcs/cylindef.

MHT2

IC circuit A76H A96V A96 5 V Grommet A72 A73 A72H A73H 200 V Reed switch Solid state switch 100 V 12 V A93 A93V Relay, PLC 2-wire 24 V A73C 12 V Connector Diagnosis (2-color indication) Grommet A79W 3-wire (NPN) F79 M9N M9NV F7NV 5 V 12 V IC circuit Grommet 3-wire (PNP) F7P M9P M9PV F7PV J79 M9B M9BV F7BV J79C 12 V 2-wire Connector 3-wire (NPN) F79W F9NW F9NWV F7NWV Relay, PLC IC circuit

LFE-OMZ0012

O: Acceptable X: Not acceptable (1) Operate fluids with electric conductivity of 5S/cm or more. The electric conductivity is a ratio which shows how easily the electricity flows. Note that this product can not be used for fluids with low conductivity.

CQS

Model C D 25 30 25 30 25 30 30 35 Mounting bolt M3 x 25l x 30l M3 x 25l x 30l M5 x 25l x 30l M5 x 30l x 35l CQSB12-5S -10S CQSB16-5S -10S CQSB20-5S -10S CQSB25-5S -10S Example) Bolt M3 x 25l 4 pcs. 6.5 Single acting, Spring return Single acting, Spring extend 6.5 Mounting bolt 6.5 Mounting bolt 8.5 Single Acting, Spring Extend Model C D 25 30 25 30 25 30 30 35 Mounting bolt M3 x 25l x 30l

MU

Calculation: (Example 1) MUB40-15S(T) Basic weight 0.62 kg RQ (Example 2) MUC50-5S(T) Basic weight 1.06 Additional weight (Mounting bracket) 0.40 1.06 + 0.40 = 1.46 kg MU Construction DSpring return -X B 20Data B section MU25 Spring extend B A A section MU25 Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !

MU

Calculation: (Example 1) MUB40-15S(T) Basic weight 0.62 kg RQ (Example 2) MUC50-5S(T) Basic weight 1.06 Additional weight (Mounting bracket) 0.40 1.06 + 0.40 = 1.46 kg MU Construction DSpring return -X B 20Data B section MU25 Spring extend B A A section MU25 Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

D-F7NV D-F7PV D-F7BV Auto switch model DC (+) Brown D11 13 13 0.5 Lead wire length (m) 50 57 57 3 Main circuit of switch 20OUT Black 81 92 92 5 DC () Blue Dimensions 3.5 mounting hole D-F7PV Indicator light DC (+) Brown Main circuit of switch Main circuit of switch OUT Black DC () Blue D-F7BV OUT (+) Brown Most sensitive position OUT () Blue 12-13-13 14 Solid State Switch Rail Mounting Style

CJ2

In-line 3 wire (NPN) C76 A76H 5V IC Yes Reed switch Solid state switch A72 A73 A80 A73C A80C A79W F7NV F7PV F7BV J79C F7NWV A72H A73H A80H 200V Ex.

Auto Switch Guide Reed Switches/Solid State Switches For Air Grippers (Rotary Actuators) 1

D-F7NV D-F7PV D-F7BV Auto switch model DC (+) Brown D11 13 13 0.5 Lead wire length (m) 50 57 57 3 Main circuit of switch 20OUT Black 81 92 92 5 DC () Blue Dimensions 3.5 mounting hole D-F7PV Indicator light DC (+) Brown Main circuit of switch Main circuit of switch OUT Black DC () Blue D-F7BV OUT (+) Brown Most sensitive position OUT () Blue 12-13-13 14 Solid State Switch Rail Mounting Style

CDQ2BP series

SealKir 25, 30, 35, 40. 45, 50, 75, 100 25 30,35,4A, 45,50.75, tOD 25, 30, 35.40, 45, 50, 75, 100 .Ho{ to make interrediaie slroke rtrmediale stroke berwen 50-l0o (5s,60,65 ...) are obtained throlgh the use ol spaceB (5. 10, 1s,20mm) (Example) CDQBPSo-55 oMr S[4C would install a 20mrn width spacer in rire cDQ2Bp 50 750M. ll lool brackel is required, order 2 pcs/cylindef.

CXT

AC DC Perpendicular In-line Perpendicular In-line 3 wire (Equivalent to NPN) A96V A96 A76H 5V IC A72H A72 200V Yes Grommet Reed switch Solid state switch A73 A73H 100V 12V A93V A93 Relay PLC 2 wire A90V A90 A80 A80H IC 100V 5V, 12V No 24V A73C 12V Yes No Connector A80C IC 5V, 12V 24V A79W Grommet Diagnosis indicator (2 color) Yes F7NV F79 IC 5V, 12V 3 wire (NPN) F9NV F9N 12V F7PV

High Vacuum Slit Valve

XGT31-50336C XGT311-50336A1-1A For XGT31-50336-A C Bonnet ASSY XGT311-50336A1-1C For XGT31-50336-C C XGT311-50336A1-1F For XGT31-50336-F C Gate ASSY XGT300-2-1S Body O-ring (FKM) XGT300-9-10S AS568-273 FKM XGT300-9-9S For XGT31-50336-1 AS568-271 Gate O-ring Kalrez4079 XGT300-9-11S For XGT31-50336-2 AS568-271 Actuator O-ring (FKM) XGT300-9-7S AS568-177 Wiper XGT300-4-9S Fixed bolt XGT300-2-5S

CJ2

16) Applicable load Type 0.5 (Nil) 3 (L) 5 (Z) None (N) DC AC Perpendicular In-line 3-wire (NPN equivalent) A76H C76 5 V IC circuit Reed switch Solid state switch Grommet A72H A73H A72 A73 A73C C73 C73C 200 V 100 V 2-wire Yes Yes 12 V Relay, PLC Connector 24 V With diagnostic output (2-color indication) A79W Grommet 3-wire (NPN) 3-wire (PNP) F79 F7P J79 F79W F7PW J79W F7BA F7NV F7PV