ASR

(mm) Port size Balancing pressure 6 8 10 12 Pressure valve ASR430F-02 ASR530F-02 ASR530F-03 ASR630F-03 ASR630F-04 Flow valve ASQ430F-02 ASQ530F-02 ASQ530F-03 ASQ630F-03 ASQ630F-04 R1/4 R1/4 R3/8 R3/8 R1/2 Pressure valve Flow valve Speed controller Speed controller 15-16-3 4 Air Saving Valve Pressure Valve Flow Valve Series ASR/Series ASQ How to Order Pressure valve: Series ASR ASR F20 4 3

KB

L2 A L1 D Rc(PT)1 8 KBS1-R1 KBS2-R2 KBS3-R3 KBS4-R4 17.8 28.5 33.8 57.1 11.0 14.0 17.0 20.0 25.0 30.0 34.5 35.0 28.0 33.5 38.5 39.0 14 17 19 24 13.6 17.6 25.2 27.0 3 8 Rc(PT)1 4 Rc(PT) Rc(PT) 1 2 Kl Ml Hl Dl MS Tl 2.1-78 Series KB 3 Other Piping Material Nipple: KBN Weight (g) Part No.

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

XSA Sealmaterial Part numbers indicating changed seal material and leakage XVD Compound No. 1349-80 2101-80 Symbol Leakage (Pam3/s or less) Note 1) Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 Changed part Note 2) Seal material FKM EPDM Barrel Perfluoro Symbol External 1.3 x 10-11 (FKM) 1.3 x 10-9 Nil XGT w, e w e N1 Nil A B C P1 70W 1.3 x 10-11 (FKM) 1.3 x 10-9 1.3 x 10-8 CYV Kalrez Q1 R1 R2 R3

Fluoropolymer Piping Equipment

LQ1E41-R4 LQ1E51-R2 LQ1E51-R3 LQ1E51-R4 LQ1E51-R5 LQ1E61-R2 LQ1E61-R3 LQ1E61-R4 LQ1E61-R5 3 8 x 6 6 x 4 4 x 2 10 x 8 8 x 6 6 x 4 4 x 3 12 x 10 10 x 8 8 x 6 6 x 4 LQ1E3A-R3 LQ1E4A-R2 LQ1E4A-R3 LQ1E4A-R4 LQ1E5A-R2 LQ1E5A-R3 LQ1E5A-R4 LQ1E6A-R2 LQ1E6A-R3 LQ1E6A-R4 LQ1E6A-R5 1/8" x 0.086" 1/4" x 5/32" 3/16" x 0.127" 1/8" x 0.086" 3/8" x 1/4" 1/4" x 5/32" 3/16" x 0.127" 1/2" x 3/8" 3/8" x 1/4

M-E05-1-LQ1

Nut Insert bushing Nut Insert bushing LQ1E3A-R3 3 4-11 LQ1-4N11 LQ1-4B11 2-03 LQ1-2N03 LQ1-2B03 LQ1E4A-R2 4 4-13 LQ1-4N13 LQ1-4B13 3-07 LQ1-3N07 LQ1-3B07 LQ1E4A-R3 4 4-13 LQ1-4N13 LQ1-4B13 2-05 LQ1-2N05 LQ1-2B05 LQ1E4A-R4 4 4-13 LQ1-4N13 LQ1-4B13 2-03 LQ1-2N03 LQ1-2B03 LQ1E5A-R2 5 6-19 LQ1-6N19 LQ1-6B19 3-11 LQ1-3N11 LQ1-3B11 LQ1E5A-R3 5 6-19 LQ1-6N19 LQ1-6B19 3-07 LQ1-3N07 LQ1-3B07 LQ1E5A-R4

IDX-OM-W053

Rc1/2 1) R3/4: 28 30Nm R1/2 ,R3/4 2. 3. (27mm)(22mm) () () () 12-4 1. (1 ) 2. 3. 0 12 2 13 R 13 R R (GFCI) GFCI 1 GFCI 13-2 13-1 1. 2. 3. 4. GFCI 5. 6. 7. 13 1 13 R 13-2 IDFA6E-20-R 5A 30mA 13-3 1) 2) 3) 9.5mm M5 1.25mm 2 L N 6.5mm M3 1.25mm 2 6-3 14-3 13 2 14 T 14 T T 14-2, 14-3 14-1 1. 2. 3. GFCI 4. 5. GFCI 6. 7. 8. 9.

KB

8 R1 2 R3 8 R1 4 R3 8 R1 4 Model T Connection thread KBB1-M5 KBB2-M6 KBB3-R1 KBB4-R2 Rc1 4 Rc1 8 M6 x 1 M5 x 0.8 Model T Connection thread KBS1-R1 KBS2-R2 KBS3-R3 KBS4-R4 Rc 1 2 Rc 3 8 Rc 1 4 Rc 1 8 15-2-110 Combination Examples KBV2-06 Component module 3 Other Pipng Material: KBN, KBD, KBR (P . 15-3-116) KBV2-06 3 KBH2-R2S 1 KBP2 1 KBP2 KB 2 D 1 KB 1 N KBH2-R2S KBV2-M5 Body size Model

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

or less 4 x R3 or less 4 x R3 or less 4 x R3 or less 4 x R3 or less 4 x R3 or less Panel thickness 1 to 3.2 mm Panel thickness 1 to 3.2 mm Note) Piping entry direction: Minimum dimensions for bottom piping.

AHC System Series MA

M3 x 10 (4 pcs.) 11 14 15 20 740 AHC System Series MA2 How to Order AHC unit AHC unit MA 210 Y M3 N R3 Tool adapter Robot adapter Without robot adapter 8 10 11 14 15 20 Nil S1 R1 R2 R3 R4 R5 Auto hand changer Air gripper for AHC Applicable shaft diameter Transportable mass Transportable mass 3 kg 2 AHC unit Electric specifications Air connection size M3 M3 x 0.5 None N Air gripper for AHC

2-Color Display Digital Flow Switch Series PFM

or less 4 x R3 or less 4 x R3 or less 4 x R3 or less 4 x R3 or less 4 x R3 or less Panel thickness 1 to 3.2 mm Panel thickness 1 to 3.2 mm Note) Piping entry direction: Minimum dimensions for bottom side piping.

Aluminum High Vacuum Angle Valve

Q1 R1 R2 R3 S1 T1 Kalrez 4079 SS592 SS630 SSE38 1232-70 3310-75 Chemraz Example) XLH-16-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd.

ASR

(mm) Port size Balancing pressure 6 8 10 12 Pressure valve ASR430F-02 ASR530F-02 ASR530F-03 ASR630F-03 ASR630F-04 Flow valve ASQ430F-02 ASQ530F-02 ASQ530F-03 ASQ630F-03 ASQ630F-04 R1/4 R1/4 R3/8 R3/8 R1/2 Pressure valve Flow valve Speed controller Speed controller 15-16-3 Air Saving Valve Pressure Valve Flow Valve Series ASR/Series ASQ How to Order Pressure valve: Series ASR ASR F20 4 3 0

K35-OMX0069

Example of fail-safe circuit Fail-safe circuit (7) (9) FU port FB port FA port (6) Air (8) Manual EB Manual EA cylinder G (3) Shut off valve Shut off valve (1) (2) E-STOP valve Servo valve Servo valve Air supply port (4) R3 port (5) (10) R2 port R1 port P port Air servo cylinder circuit (Main circuit) Components No.

Flame Resistant (Equivalent to UL-94 Standard V-0) Speed Controller with One-touch Fittings Elbow Type AS Series

AS-FE AS321F-03-W2 R3/8 AS421F-04-W2 R1/2 Applicable tubing materials FR double layer, FR soft nylon KE Note 1) Meter-out and meter-in types can be visually differentiated by the lock nut. The lock nut on the meter-out type is zinc chromated, while the meter-in type is black zinc chromate plated. Note 2) : Brass parts are electroless nickel plated, provided as standard.

Speed Controller with One-touch Fitting Elbow Type (Metal Body) AS Series

AS321-03-F10S AS421-04-F10S AS421-04-F12S 16 17 17 18.5 17 18.5 21 18.5 21 18.5 21 21 22 13 13 34 31 54 50 52 86 81 93 88 154 146 21 21.5 25.5 26 M5 x 0.8 28.3 25.5 13 9 25 8 22.2 11.2 R1/8 13.8 35.5 30.5 15.5 14.6 12 32.4 27.4 26.6 33.9 17.2 15.5 28.7 38.5 R1/4 17 40.3 35.3 19.5 34.8 29.8 18.6 18.2 34.5 32.7 33.3 32.7 33.3 44.3 44.9 45.5 44.9 45.5 R1/4 19 48.3 43.3 18.2 24.3 42.8 37.8 21 R3

High Vacuum Angle Valve

Temperature N1 P1 Q1 R1 R2 R3 S1 T1 U1 Main valve: Indicator/ Pilot port direction Symbol Nil Without indicator Kalrez Number of auto switches/Mounting position Symbol Nil Without auto switch 2 pcs. 1 pc. 1 pc.

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

. + 4 x (n pcs. 1) 36 360.3 4 x R3 or less 4 x R3 or less 67 or more 739 Series ZSE80/ISE80 Dimensions Panel mount (Bottom ported) 50 40 24.2 7.5 51.2 71.1 38.6 Panel-cut dimensions 360.3 36 x n pcs. + 4 x (n pcs. 1) 360.3 36 4 x R3 or less 4 x R3 or less 740 Series ZSE80/ISE80 2-Color Display Digital Pressure Switch For General Fluids F in brackets stand for the function codes.

K35-OMX0029

P port(Supply port)Supply pressure fitting (0.55 to 0.8 MPa) R1,R2,R3(*1) ports(Exhaust port)Silencer *1 A small amount of air in the cover tube is exhausted from R3 port. *2 Ports FA and FB are plugged before shipment.

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

or less 4 x R3 or less 4 x R3 or less Panel thickness 1 to 3.2 mm 1 This is the minimum value when the rear ported type is selected for the piping entry direction.

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com SET POS. 53 127 43 63 VX3 (Max. 50) 114 VXA 53 VN 43 63 LVC LVA LVH LVD LQ-GM LQ-GL LVQ LQ 50 LVN 50 207 85 TI/ TIL 342 85 LQ-GL 40 28 PA SET POS. 40 28 LQ-GM 4-R3 SET POS. 6 6 4-R3 6 6 PAX 4-R3 4-R3 (Max. 91) 325 PB (Max. 91) 191 87 60 87 60 112 112