Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Magnetic body (Iron plate, etc.) 750 CQS 2122CQS/ 1011Compact Cylinder 10112122Standard: CQSB12 to 25, CQSB12 to 25 12 17.5 5 M3 x 0.5 effective depth 6 2 x M5 x 0.8 2 x 2 x 6.5 counterbore 5.5 M5 x 0.8 (Piping port) (Relief port) 2 x 2 x M4 x 0.7 effective depth 7 Note 2) 2 x 3.5 through 32 0.5 15.5 25 6 Flat washer 5 10 4 4 3.5 27 + Stroke 15.5 30.5 + Stroke 25 16 17.5 5 5.5 2 x M5 x 0.8

VQ4000

Dust-tight, Jet-proof Enclosure: Enclosure: Optional IP65 rating Optional IP65 rating Cylinder operation speed Cylinder bore size mm Valve width mm Cv Rubber seal (Metal seal) Cylinder speed mm/s Individual wiring style 40 50 63 80 100 125 140 150 kit (Connector) C 300 24.5 2.2 (2.0) 450 600 750 Pressure: 0.5MPa, Load rate: 50% Note) Cylinder speed varies according to piping construction

Compact Cylinder with Air Cushion Series RQ

L UT C UA 12 7 25 9 34 11.5, depth 7.5 YB-03 32, 40 12 9 32 11 42 14.5, depth 8.5 YB-05 50 mm Part no. Applicable bore size (mm) UA C d1 d2 H K L UT Weight (g) Weight (g) Bore size (mm) T1 T2 V W RS Part no.

Digital Flow Switch (Integrated display type)

PF2M701 (1 L/min) PF2M702 (2 L/min) PF2M705 (5 L/min) PF2M710 (10 L/min) -97No.PF-OMW0007-E PF2M725 (25 L/min) PF2M750 (50 L/min) PF2M711 (100 L/min) PF2M721 (200 L/min) -98No.PF-OMW0007-E Dimensions PF2M7#-C4/C6/C8/N7(-L) (mm) Model A P PF2M701/702/705/710-C4(-L) 59.1 2.8 depth 8.4 PF2M701/702/705/710/725/750-C6(-L) 59.9 2.8 depth 8.4 PF2M725/750-N7(-L) 67.5 2.8 depth 8.4 PF2M711/721-C8(

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Body size Body size 20 L/min 100 L/min Symbol Filtration area 750 mm2 Specifications Different diameters (IN side < OUT side) Different diameters (IN side > OUT side) Blue element Filtration: 10 m FKM/Oil free (Seal) Nylon Symbol X01 X02 X03 X04 X05 X06 5 7 1260 mm2 Applicable tubing O.D.

CG1

Up to 750 Bore (mm) Pin part No.

Sine Rodless Cylinder Series REBR Direct Mount Type

operating pressure 10 to 60C Ambient and fluid temperature 50 to 600mm/s Piston speed Non-lube Lubrication 0 to 250st: +1.0, 251 to 1000st: +1.4, 1001st and up: +1.8 Stroke length tolerance 0 0 0 Direct mount type Mounting Standard Strokes Maximum stroke with switch (mm) Bore size (mm) Standard stroke (mm) Maximum manufacturable stroke (mm) 150, 200, 250, 300, 350, 400 450, 500 15 1000 750

In-line Air Filter

ZFC1 ZFC3 ZFC5 ZFC7 5 20 L/min 750 mm 2 7 100 L/min 1260 mm 1 2 2 3.2 3 4 4 6 5 8 6 10 7 12 Inch size A 1/8 B 5/32 D 1/4 E 5/16 F 3/8 7 - 2-2 Specifications Specifications Remarks Fluid Air, Nitrogen This product cannot be used in an environment exposed to chemicals. The maximum operating pressure varies depending on the temperature.

Table of Contents

750 750 850 850 6 9 9 9 12 12 12 16 16 460 665 693 693 1162 1162 1162 1416 1416 19 19 19 19 19 19 19 27 27 80 M16 x l 250 M16 x l 250 M16 x l 250 M16 x l 300 M16 x l 300 M16 x l 300 M16 x l 500 M24 x l 500 M24 x l 500 AT6C AT11C AT22C AT37C AT55C AT75C AT125C AT150C AT220C 1 2 Rc 1/2 Rc 3/4 Rc 1 Rc 1 Rc 1 1/4 Rc 1 1/4 Rc 2 Rc 2 Rc 2 Rc 110 110 110 180 180 180 260 260 Rc 3 4 Rc 1 1 2 1 2

ZP

Front matter 30 Symbol/Type U: Flat C: Flat with rib UT: Thin flat B: Bellows Compact Pad 3, 4, 5, 6, 7, 8 Pad diameter 7 types of 3 to 8 are added.

LJ1H

Positioning distance (mm) 1500 750 100 10 1 10 151.1 76.1 11.1 2.1 1.2 100 16.1 8.6 2.1 1.2 1.1 Speed (mm/s) 250 7.2 4.2 1.6 1.2 1.1 500 4.3 2.8 1.5 1.2 1.1 Values will vary slightly depending on the operating conditions.

ZP

), Thin flat with ribs (CT) Thin flat Thin flat with ribs ZP 10 UT N 7 7 Pad diameter ZX Material 12 12 Y Y 10 N 10 NBR ZR 13 S 13 Silicon rubber A A 16 U 16 Urethane rubber B B ZM F Fluoro rubber GN ZPUT ZPCT Conductive NBR Pad type ZH GS Conductive silicon rubber UT Thin flat Dimensions (mm) Dimensions (mm) CT Thin flat with ribs ZU A A B B Y Y Model Model ZP10UT ZP10CT 10 10 11 11 1 0.8

Series VQ Metal Seal/Rubber Seal Body Ported

: AS3000F-06 (S=6.5mm2) Cylinder stroke 100mm Fitting (One-touch fitting) Effective area (mm2)(Cv) Cylinder Speed (mm/s) Model AS3000F-06 (S=6.5mm2) Cylinder stroke 50mm 10 6 16 20 25 32 40 40 50 63 80 100 150 300 450 600 750 150 300 450 600 750 6 4.5 (0.25) VQ1000 (Metal seal) 6 6.3 (0.35) VQ1001 (Rubber seal) Series VQ2000 Cylinder bore size (mm) Series CJ2 Pressure 0.5MPa Load factor 25%

Digital Flow Switches, Series PF2A, Series PF2W

OUT1OUT2OUT3OUT4OUT5 AC100~240V Pulse counter M/C Flow control for each branch line For Air P.2 50l/min 10l/min 500l/min 200l/min 100l/min 12000l/min 6000l/min 3000l/min Flow rate measurement range l/min Integrated display type Remote type Output specifications Port size (Rc, NPT, G) 1/8 1/4 3/8 1/2 11/2 1 2 Switch output Analog output Accumulated pulse output Display unit Sensor unit PF2A710 750

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

VQZ3000 VFS VS 0.7 0.9 VS7 Bore size (mm) Cylinder speed (mm/s) Base mounted (With sub-plate) Cv Series CJ2 Series CM2 Series CA1 6 10 16 20 25 32 40 40 50 63 80 100 150 300 VQZ1000 Body width 10 450 0.3 V V V 600 750 150 300 VQZ2000 Body width 15 0.6 450 V 600 V V 750 150 300 VQZ3000 Body width 18 0.9 450 V V V V V 600 750 Cylinder speed marked with can be controlled by speed controller

Guide Cylinder Series MGG

900st 1.5 800st 700st 1 600st st: Stroke (mm) 400st 500st 0.5 100st 200st 300st 0 0 50 100 150 200 250 300 350 400 450 500 550 600 Allowable end load F (N) MGGM 100Stroke 4 (Slide bearing type) 3.5 3 Deflection Y (mm) 1300st 2.5 1200st 1100st 2 1000st 1.5 900st 800st 1 600st 700st st: Stroke (mm) 500st 0.5 400st 100st 200st 300st 0 0 100 50 150 200 250 300 350 400 450 500 550 600 650 700 750

JXCx-OMU0004

900 200 900 100 900 50 900 8 150 1000 75 1000 300 1000 200 1000 75 1000 9 200 1200 100 1200 400 1200 250 1200 100 1200 10 250 1400 125 1400 500 1400 300 1400 125 1400 11 300 1600 150 1600 600 1600 400 1600 150 1600 12 350 1800 175 1800 700 1800 500 1800 175 1800 13 400 2000 200 2000 800 2000 540 2000 200 2000 14 450 2500 225 2500 900 2500 600 2500 225 2500 15 700 3000 360 3000 1100 3000 750

CV/MVGQ

pressure 10 to 50C (No freezing) Ambient and fluid temperature RE A B Rubber bumper Cushion Not required (Non-lube) Lubrication REC JIS Class 2 Thread tolerance + 1.0 0 Stroke length tolerance CX 10, 16 Applicable bore size (mm) 1.8 mm2 (0.1) Effective area of valve (Cv factor) CY Port size M5 x 0.8 MQQ M Mounting Basic style, Axial foot style, Rod side flange style Piston speed 10: 50 to 750

PSE540/560

Data PSE561 PSE560 PSE563 PSE564 Model 0 to 101 kPa 0 to 1 MPa 0 to 500 kPa 100 to 100 kPa 500 kPa Rated pressure range 1.5 MPa 750 kPa 500 kPa Proof pressure Model PSE56--28 PSE56Fluid Fluid, including gas, that will not corrode Stainlesss steel 316L Power supply voltage 12 to 24 VDC 10%, Ripple (p-p) 10% or less (With power supply polarity protection) 10 mA or less Current consumption

Series CJ5-S ø10, ø16 Stainless Steel Cylinder

Bore size (mm) 10 16 Action Double acting, Single rod Fluid Air Proof pressure 1 MPa Maximum operating pressure 0.7 MPa Minimum operating pressure 0.1 MPa Ambient and fluid temperature Without auto switch: 10 to 70C With auto switch: 10 to 60C Cushion Rubber bumper Lubrication Not required (Non-lube) JIS Symbol + 1.0 0 Stroke length tolerance Double acting, Single rod Piston speed 50 to 750