HRX-OM-W060

90 100 110 120 Circulating fluid flow [L/min] Fig. 8-9 Pump capacity(HRL100-A-20 CH1) 8.5.2 HRL200A20 CH1 0.6 60 0.5 50 Circulating fluid outlet Lifting head [m] Pressure [MPa] 0.4 40 0.3 30 Usable flow rate range 0.2 20 Circulating fluid return 0.1 10 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 130 Circulating fluid flow [L/min] Fig. 8-10 Pump capacity(HRL200-A-20 CH1) HRL Series 8.5 Pump

HRX-OM-Y098

fluid outlet 0.6 60 Pressure [MPa] 0.5 50 Lifting head [m] Usable flow rate range 0.4 40 0.3 30 Circulating fluid return 0.2 20 0.1 10 0 0 0 20 40 60 80 100 120 140 160 180 Circulating fluid flow[L/min] Fig. 8-11 Pump capacity(HRL300-A-20 CH1) 8.5.4 HRL-A-20CH2 0.6 60 0.5 50 Lifting head [m] Pressure [MPa] 0.4 40 Usable flow rate range Circulating fluid outlet 0.3 30 0.2 20 Chiller display

HRX-OM-X037

9.5.3 HRL300-A-40 CH1 0.7 Circulating 0.6 fluid outlet 0.5 Pressure [MPa] Lifting head [m] Usable flow rate range 0.4 0.3 Circulating fluid return 0.2 0.1 0 0 20 40 60 80 100 120 140 160 180 Circulating fluid flow [L/min] Fig. 9-25 Pump capacity(HRL300-A-40 CH1) 9.5.4 HRL-A/W-40 CH2 It is available in case of Pressure control mode or Set output mode.

CEx-OMI0064

NO. 19 NO. , 26 , 41 - 10-2 CEU5 , ROM , , ,SMC RAM , ,SMC 2ROM E ,, , , 2ROM E 2ROM 80 E , , ,SMC , 42 -

LEF-OM002xx

The AREA output signal is turned on from Area 1:80[mm] between Area 2:90[mm].

SFOD-OMT0005CN

DRIVE ON )No.3 1 OUT1 OUT5 OUT 4 OUT 3 OUT 2 OUT 1 OUT 0 2 OUT2 OFF OFF OFF OFF ON ON 3 OUT3 4 OUT4 (1)RESET ON OFF (2) (3) () OFF 0 5 OUT5 6 7 ON 8 BUSY () BUSY OFF 9 SVRE OFF OFFON ON 10 SETON SETON()ON OFF -33- Word Bit INP ON (BUSY OFF) INP ON INP ON INP ON ()INP ON )100 80% 40%(*1) *1 11 INP 0 () INP [ON] 100 80 40 12 AREA 12 ON 13 WAREA W1 W2 ON 14 ESTOP ON

6% (Full span)NPN open collector output: Max. 30 V, 80 mA PNP open collector output: Max. 80 mAWithin ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?0.12% (Full span)/C?2%F.S. 1 digitkPa Note 5) Minimum display: 10 to 50C (No condensation)IP65350 g

6% (Full span)NPN open collector output: Max. 30 V, 80 mA PNP open collector output: Max. 80 mAWithin ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?0.12% (Full span)/C?2%F.S. 1 digitkPa Note 5) Minimum display: 10 to 50C (No condensation)IP65350 g

6% (Full span)NPN open collector output: Max. 30 V, 80 mA PNP open collector output: Max. 80 mAWithin ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?0.12% (Full span)/C?2%F.S. 1 digitkPa Note 5) Minimum display: 10 to 50C (No condensation)IP65350 g

6% (Full span)NPN open collector output: Max. 30 V, 80 mA PNP open collector output: Max. 80 mAWithin ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?0.12% (Full span)/C?2%F.S. 1 digitkPa Note 5) Minimum display: 10 to 50C (No condensation)IP65350 g

6% (Full span)NPN open collector output: Max. 30 V, 80 mA PNP open collector output: Max. 80 mAWithin ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?0.12% (Full span)/C?2%F.S. 1 digitkPa Note 5) Minimum display: 10 to 50C (No condensation)IP65350 g

6% (Full span)NPN open collector output: Max. 30 V, 80 mA PNP open collector output: Max. 80 mAWithin ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?0.12% (Full span)/C?2%F.S. 1 digitkPa Note 5) Minimum display: 10 to 50C (No condensation)IP65350 g

6% (Full span)NPN open collector output: Max. 30 V, 80 mA PNP open collector output: Max. 80 mAWithin ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?0.12% (Full span)/C?2%F.S. 1 digitkPa Note 5) Minimum display: 10 to 50C (No condensation)IP65350 g

6% (Full span)NPN open collector output: Max. 30 V, 80 mA PNP open collector output: Max. 80 mAWithin ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?0.12% (Full span)/C?2%F.S. 1 digitkPa Note 5) Minimum display: 10 to 50C (No condensation)IP65350 g

6% (Full span)NPN open collector output: Max. 30 V, 80 mA PNP open collector output: Max. 80 mAWithin ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?0.12% (Full span)/C?2%F.S. 1 digitkPa Note 5) Minimum display: 10 to 50C (No condensation)IP65350 g

6% (Full span)NPN open collector output: Max. 30 V, 80 mA PNP open collector output: Max. 80 mAWithin ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?0.12% (Full span)/C?2%F.S. 1 digitkPa Note 5) Minimum display: 10 to 50C (No condensation)IP65350 g

6% (Full span)NPN open collector output: Max. 30 V, 80 mA PNP open collector output: Max. 80 mAWithin ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?0.12% (Full span)/C?2%F.S. 1 digitkPa Note 5) Minimum display: 10 to 50C (No condensation)IP65350 g

6% (Full span)NPN open collector output: Max. 30 V, 80 mA PNP open collector output: Max. 80 mAWithin ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?0.12% (Full span)/C?2%F.S. 1 digitkPa Note 5) Minimum display: 10 to 50C (No condensation)IP65350 g

6% (Full span)NPN open collector output: Max. 30 V, 80 mA PNP open collector output: Max. 80 mAWithin ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?0.12% (Full span)/C?2%F.S. 1 digitkPa Note 5) Minimum display: 10 to 50C (No condensation)IP65350 g

6% (Full span)NPN open collector output: Max. 30 V, 80 mA PNP open collector output: Max. 80 mAWithin ?1% (Full span)Within 0.5% (Full span)Within ?0.5% (Full span)Within 0.2% (Full span)Within ?0.12% (Full span)/C?2%F.S. 1 digitkPa Note 5) Minimum display: 10 to 50C (No condensation)IP65350 g