Air Cylinder

301 to 1500 12 10 (12) 1/8 12.5 10 (12.5) M5 x 0.8 22 19.5 17 10 14 2 40 6 31 5.5 8 M10 x 1.25 29 69 (77) 32 Up to 300 301 to 1500 12 10 (12) 1/8 10.5 10 (10.5) 1/8 22 19.5 17 12 18 2 40 6 38 5.5 10 M10 x 1.25 35.5 71 (79) 40 Up to 300 301 to 1500 13 10 (13) 1/8 13 10 (10) 1/8 30 27 19 16 25 2 50 8 47 6 14 M14 x 1.5 44 78 (87) 50 Up to 300 301 to 1500 14 12 (14) 1/4 14 12 (14) 1/4 35 32

SQ1000/2000

Refer to w. r Option Nil 02 to 24 B None DIN rail length specified Note 2) 1 to 12 (24) Note 1) D side P All stations with back pressure check valve Special specification wiring Note 3) (except for double wiring) 1 to 9 (18) K J T D side D side D side U side D side U side D side U side 1 to 8 (16) 1 to 10 (16) Labeling plate (only for valves with side port specification) External pilot specification

V

-02 10 1.9 34 0.5 0.4 0.9 0.7 0.02 0.7 0.5 3/8 VXD2130-03 10 2.4 43 0.5 0.4 0.9 0.7 0.02 1 1 3/8 VXD2140-03 15 4.5 80 1.5 0.7 0.7 1 1 0.02 0.02 0.5 1/2 VXD2130-04 10 2.4 43 0.5 0.4 0.9 0.7 0.02 1 1 1/2 VXD2140-04 15 5.5 100 0.7 0.7 1 1 0.02 1 1 3/4 VXD2150-06 20 9.5 170 0.7 0.7 1 1 T E C H N I C A L SPECIFICATIONS E N E R G I Z E D C L O S E D T Y P E S E R I E S VXD 1MPa = 145PSI Minimum

Table of Contents

18 20 10 20 30 13 22 40 15 30 10 8 14 Size C D Note 1) Only side ports are available except basic type.

CJ2

) 1 3 (Same side) 3 (Different sides) 2 (Same side) 2 (Different sides) 1 90 55 50 15 10 105 60 60 15 10 105 65 65 15 10 35 10 5 45 10 5 40 15 10 45 5 5 30 5 5 55 15 10 40 15 10 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 D-C7 D-C80 D-A7H D-A80H Band mounting style (16) D-H7 D-H7W D-H7BAL D-H7NF D-A79W Rail mounting style (16) D-F7 D-J79 D-C73C D-C80C D-H7C D-F7V D-J79C D-F7W D-J79W D-F7BAL

Series SV

D D D D D D 3 2 1 Stations D side How to Order Solenoid Valves SV 1 1 0 0 F 5 Note) Available with manifold block for station additions. Refer to pages 77 and 81.

CA2

/Y7P/Y7PV D-Y7W/Y7WV D-Y7BAL D-Z7/Z80 D-Y59/Y69 D-Y7P/Y7PV D-Y7W D-Y7WV D-Y7BAL Auto switch model D-P5DWL Hs Bore size (mm) A B A B A 40 3 3.5 1 1.5 Ht 50 3.5 1 3 1.5 63 6 4 5.5 5 80 9.5 7 9 7.5 100 11 9 10.5 10 B Auto Switch Mounting Height Auto switch model D-Z7 D-Z80 D-Y59 D-Y7P D-Y7BAL D-Y7W D-P5DWL D-Y69 D-Y7PV D-Y7WV D-P5DWL Hs Auto switch Courtesy of Steven Engineering, Inc.-230

F

14.29 9.6 10 17.5 25.5 24.5 15.5 2.5 18 5/32 1/16 KQL03-33S 11.11 10.4 10 18 22 23 16 3 8 5/32 1/8 KQL03-34S 11.11 10.4 10 18 22 23 16 3 9 5/32 1/4 KQL03-35S 14.29 10.4 10 18 26 25 16 3 18 3/16 1/8 KQL05-34S 11.11 11.4 10 19.5 22.5 24 16.5 3.5 10 3/16 1/4 KQL05-35S 14.29 11.4 10 19.5 26.5 26 16.5 3.5 19 1/4 1/8 KQL07-34S 11.11 13.2 10 20.5 23.5 26 17 4.6 10 1/4 1/4 KQL07-35S 14.29 13.2 10

MY1

0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 YW 32 40 46 55 67 T 7 8 10 10 14 Model MY1B16 MY1B20 MY1B25 MY1B32 MY1B40 MY1B16 SMY1B16, #1 (#1 + #7) "P" indicates cylinder supply ports.

ZP

Basic Pad Dimensions/Models Single unit 10 to 40 w q ZP D N 10 D Model A B C D E Y q Pad dia.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

18 20 10 20 30 13 22 40 15 30 10 8 14 Size C D Note 1) Only side ports are available except basic type.

Table of Contents

L3 Max. 1 4 1 2 L1 L2 D Min. L3 Max.

REA/REB

10 86 10 M10 x 1.0 Rc 1/8 M6 x 1.0 31 10 M6 x 1.0 130 11 60 100 10 10 86 7 Rc 1/8 M8 x 1.25 M6 x 1.0 M14 x 1.5 10 39 120 160 70 9.2 12 11.5 100 15 M20 x 1.5 Rc 1/8 M8 x 1.25 47.5 17 M10 x 1.5 190 10.5 90 140 12 15 136 9.2 Rc 1/4 M10 x 1.5 M8 x 1.25 M20 x 1.5 14 56 PA dimensions are for split from center.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

18 20 10 20 30 13 22 40 15 30 10 8 14 Size C D Note 1) Only side ports are available except basic type.

REA/REB

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 20 Usable range 10 RHC 10 10 Usable range Usable range 5 5 MK(2) 5 RS Q G 1 0 1 2 3 4 5 6 1 1 2 3 4 5 6 1 0 0 1 2 3 4 5 6 7 8 9 10 11 12 13 7 8 9 10 11 7 8 9 10 1112 13 14 15 RS H A Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft

Electric Actuator/Slider Type

8 q @1 u A A i o @0 !6 @0 !1 !5 A-A t y @3 C B e !0 @2 C B r w D-D C-C B-B !2 !4 !7 D Body Table D !3 Component Parts No. Description Material Note 15 Cover plate Aluminum alloy Coating No.

ZP

9 9 35 35 M18 x 1.5 M18 x 1.5 9 Width across flats 16 Rc 1/8 9 10 Width across flats 16 Rc 1/8 10 Hexagon width across flats 21 J Hexagon width across flats 21 J Width across flats 37 4-M4 x 0.7 Width across flats 24 28 45 I I 3-M3 x 0.5 H H 10 10 G G F F E E Y Y 3 4 18 34 C C A A B B D D Dimensions Dimensions (mm) (mm) Model B A C D E F G H I J Y Model B A C D E F G H I J Y ZPX40HBJ25-B01

High Vacuum Angle Valve

No. 1 2 2-1 3 4 5 6 7 8 8-1 8-2 9 10 O-ring Part No.

REA/REB

D-J79C D-F7V D-F7NTL D-F7W/J79W D-F7WV D-F7BAL D-A7/A80 D-A7H/A80H D-A73C/A80C D-F7LF D-F79F Bore size (mm) B A 10 6 3 4.5 (mm) 15 6 4 4.5 Dimension A Dimension B 20 6 3 4.5 Auto switch model D-A72 D-A7H/A80H D-A73C/A80C D-F7/J79 D-J79C D-F7V D-A72 25 6 3 4.5 D-F7W/J79W D-F7WV D-F7LF Note 1) D-F7W/J79W D-F7WV D-F7LF Note 1) D-F79F D-F7BAL D-A7H/A80H 32 6 3 4.5 D-A73C/A80C D-F7/J79 D-J79C

VFR

3/8, 1/2 (P , A, B port) 2-Rc 3/8 (EA, EB port) 2 position double: VFR421 -E, VFR421 -D 0 1 0 1 3 position closed center: VFR431 -E, VFR431 -D 3 position exhaust center: VFR441 -E, VFR441 -D 3 position pressure center: VFR451 -E, VFR451 -D 0 1 0 1 0 1 0 1 0 1 0 1 2-6.5 (Mounting hole) Rc 1/8 (PE port) Manual override (Non-locking) Applicable cable O.D. 8 to 10 Rc 1/8 (PE port) Other dimensions