Electric Actuator/Slider Type

LEFS32 -700 1041 1071 706 830 12 5 750 LEFS32 -750 1091 1121 756 880 12 5 750 LEFS32 -800 1141 1171 806 930 14 6 900 17 Series LEFS Electric Actuator/Slider Type Ball Screw Drive Dimensions: In-line Motor LEFS LEFB LEJS LEJB LEY LEYG LECYM/LECYU Model Selection LEFS40 Encoder cable (7) 4 x M8 x 1.25 thread depth 13 (170) Motor cable (7) 106 60 Body mounting reference plane Note 1) 74 58

CM2

Rubber bumper50 to 750 mm/s (Standard equipment) Air cushion50 to 1000 mm/s DReduced piston rod deflection -X The clearance between the bushing and the piston rod, and between the tube and the wear ring have been decreased to achieve higher accuracy.

Electric Actuator / Slider Type 《 AC Servo Motor 》

Initial value Recommended value Electronic gear numerator *3 PA06 1 32768 Electronic gear denominator *3 PA07 1 2500 1500 750 3000 2000 1000 3750 2500 1250 Feel length multiplication (STM) (Multiplier) PA05 0 0(Less than stroke 1000)/ 0001(Stroke 1000 or more) Home position return type PC02 0 3Stopper type Home position return direction PC03 0001 1 (Motor side) Home position return Speed

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

6 to 400 24 to 1200 16 to 800 8 to 400 30 to 1200 20 to 850 10 to 300 Speed*1 [mm/s] 501 to 600 30 to 1200 20 to 850 10 to 300 Actuator specifications Parallel Stroke range Up to 500 20 to 900 12 to 600 6 to 300 24 to 800 16 to 650 8 to 325 30 to 750 20 to 550 10 to 300 501 to 600 30 to 750 20 to 550 10 to 300 Max. acceleration/deceleration [mm/s2] 3000 Positioning repeatability [mm] 0.01

Process Gas Diaphragm Valve

Specifications Wetted Parts Material AZ3652 Select compatible materials of construction for the gas Vacuum to 250 psig (1.7 MPa) 375 psig (2.6 MPa) 750 psig (5.1 MPa) -40 to 71 C (No freezing) AZ4652 S 316L SS Electropolish + Passivation Ni-Co Alloy PCTFE (Option: Polyimide) Operating Parameters Gas Operating pressure Proof pressure Burst pressure Ambient and operating temperature Cv Wetted

Air Suction Filter / In-line Type With One-touch Fittings Series ZFC

Inch size Body type Option (With/Without bracket) Symbol Bore size Applicable model Symbol Flow rate (l/min (ANR)) Filtration area (mm2) Symbol Nil B Option None (Without bracket) With bracket ZFC05 ZFC10 ZFC20 05 10 20 10 20 50 470 750 1255 01 03 07 09 1/8" 5/32" 1/4" 5/16" Inch size (Release button: Orange) Principal Parts Material Replacement Element Part No.

Air Cylinder NCM Series Stainless Steel Cylinders

40-140'F(5-m'c 2 -20 inch/sec {50 -500 mm/sec) 2 -30 jnch/sec (50-750 mm/sec) Not required (prelubricated at factory) Standard Stroke LLst Owhen mounting, completelyflush the piping and be careful that dust and chips do not erterthe cylinder. )Load of piston rod should always be aligned parallel with the cylinder axis.

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

Pressure: 0.5MPa Pressure: 0.5MPa speed Effective area Load ratio: 50% Load ratio: 50% (mm/s) mm2 Cylinder stroke: 60mm Cylinder stroke: 300mm (Cv) 6 10 16 20 25 32 40 150 300 VQD1151U M5 X 0.8 (Large flow 1.5 450 capacity) (0.08) 600 Characteristic values mentioned in the catalog are typical values and are not to be guaranteed. 750 1.13-1 Series VQD1000 Precautions Be sure to read before

Adsorption Plate

adsorbs without deforming A 0.015 0.030 FL Rz 3.2 Flatness 15 m Suction Suction Adsorption surface size 50 to 150 G Rz JIS 3.2 A Adsorption surface area Closeup picture Adsorption surface cross-section Adsorption surface 1 mm Parallelism 30 m Adsorption surface Mounting surface Superior surface parallelism of the adsorption surface and body part surface allow for highly precise mounting. 750

ASP

ASS ASR ASQ Flow Rate and Effective Area KE Model ASP330F ASP430F ASP530F ASP630F TMH 8 8 10 10 12 Metric size 6, 8 6 1/4" 5/16" 1/4" 5/16" 3/8" 3/8" 1/2" Tubing O.D. 5/16" Inch size JIS Symbol Flow rate (l/min(ANR)) Controlled flow (Free flow) 180 600 750 1100 1190 330 350 Effective area (mm2) 9.3 11.6 17 18.4 2.9 5.2 5.4 Note) Flow rate values are measured at 0.5 MPa and 20C.

DeviceNet-E

S. ) 4095] H EX O ut put pressure 0% F. S. ( =0) 100% F.

Compact Cylinder with Air Cushion and Lock Series RLQ

K ( across flats) H (With locking) 80 9 6.5 10 18 50 YB-03 32, 40 120 11 6.5 12 22 60 YB-05 50, 63 d2 d1 L UT C UA (mm) UA C d1 d2 H k L UT Weight (g) 25 Part No.

ITV_D-E

I nst al l at i on on equi pm ent i n conj unct i on w i t h at om i c energy, rai l w ay, ai r navi gat i on, vehi cl es, m edi cal equi pm ent , f ood and beverages, recreat i on equi pm ent , em ergency st op ci rcui t s, cl ut ch and brake ci rcui t i n press appl i cat i ons, or saf et y equi pm ent . C.

LEJ-OM004xx

Select cable type and len gth surely. e xamp le S2S2Standard c able 2m+ d river LEC SS2 S2 Standard c able2m Nil Witho ut cab le and driver 100 to 120 LECSB1S B1 200 to 230 LECSB2S B2 100 to 120 LECSC1-S C1 *5 Mo tor cable and enc o der cable are included as a ccessories.

LEF-OM002xx

24 to 1200 16 to 800 8 to 520 Controller type: LECP6 LECP1 LECPMJ JXC91 501600 20 to 900 12 to 540 6 to 270 24 to 1200 16 to 800 8 to 400 Note2) 601700 20 to 630 12 to 420 6 to 230 24 to 930 16 to 620 8 to 310 Stroke Speed range 701800 20 to 550 12 to 330 6 to 180 24 to 750 16 to 500 8 to 250 [mm/s] 801900 24 to 610 16 to 410 8 to 200 9011000 24 to 500 16 to 340 8 to 170 500 10 to 500 5

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

15, 25 CY CY1H CY1F MG Standard stroke (mm) Maximum stroke Cushion Piping directions Bore size (mm) Model Height Overall length mm mm 150 200 250 300 350 400 450 500 550 600 50 100 CX 10 15 25 15 10 25 240 350 310 For 100mm stroke cylinder Series Series 10 500 CY1F CY1H CY1F CY1H MY2H Concentrated piping on right 28 34 46 46 63 198 225 205 294 260 DBuilt-in shock absorber 39.5 CY1F 15 750

Brake mechanism added

Bore size (mm) Standard stroke (mm) Range of manufacturable stroke* Without rod boot With rod boot Without rod boot With rod boot 40 25 to 850 25 to 700 Up to 1200 Up to 950 50 25 to 800 25 to 650 Up to 1150 Up to 900 63 25 to 800 25 to 650 Up to 1150 Up to 900 80 25 to 750 25 to 600 Up to 1100 Up to 900 100 25 to 750 25 to 600 Up to 1100 Up to 850 Refer to pages 692 to 697 for cylinders

CJ2

Rubber bumper50 to 750 mm/s (Standard equipment) Air cushion50 to 1000 mm/s The installation is simple because a tool can be placed directly over the cover for installation. The bearing portions of the rod cover and the clevis have been improved in wear resistance to ensure the longevity of the cylinder.

-- NCM seies

40-140'F(5-m'c 2 -20 inch/sec {50 -500 mm/sec) 2 -30 jnch/sec (50-750 mm/sec) Not required (prelubricated at factory) Standard Stroke LLst Owhen mounting, completelyflush the piping and be careful that dust and chips do not erterthe cylinder. )Load of piston rod should always be aligned parallel with the cylinder axis.

A

20 ~ 750 37 40 102 78 25 52 14 21 21 M 12 x 1.75 11 17 M 22 x 1.5 37 1/2 116 0 100 ~ 750 20 ~ 750 37 40 116 92 30 52 14 21 21 M 12 x 1.75 11 17 M 26 x 1.5 40 1/2 126 0 With Gaiter Without Gaiter Bore (mm) ZZ ZZ H f h e l 146 154 40 51 15 59 65 167 50 15 66 58 75 159 178 15 66 75 63 1/4 Stroke 170 58 213 204 15 80 71 80 80 215 224 100 72 15 81 90 D I M E N S I O N S R E A R M A L E C L E