10%3026Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 25 pin) (Refer to pages 92 and 93.)165UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

The SQ plug lead units are available with D-sub connector, flat ribbon cable connector or PC wiring system compatible flat ribbon cable kits.Fluid: Air/inert gas , Maximum operating pressure: 0.7MPa , Effective area mm² (Cv factor):0.40 to 0.71, Coil rated voltage: 12, 24VDC , Power consumption (current): 24VDC; 0.4W DC (17mA), 12VDC; 0.4W DC (34mA) , Ambient & fluid temperature: -10 to 50

10%3023Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)170UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

10%6046Refer to page 94.Contact input/output (D-sub 25 pin) and Serial RS-485 (D-sub 9 pin) (Refer to pages 92 and 93.)275UL, CE marking, SEMI (S2-0703, S8-0701, F47-0200), SEMATECH (S2-93, S8-95)

The SY is available in body ported or base mounted styles, and can be used individually or manifold mounted.Plug-in connector connecting base, Side ported, Available with external pilot, Connector types: D-sub, Flat ribbon cable (26, 20 or 10 pins), PC wiring, One-touch fittings, MFLD, DIN RAIL MT, SY3000, VALVE, SS5Y3 MANIFOLD SY3000, UL, SS5Y3 BUILT IN FITTING

Model: 10 (Side Ported), Connector Type: F (D-sub Connector, IP40, 25 Pins), Connector Entry Direction: 2 (Lateral), Valve Stations: 10 Stations, P,E Port Location: U (U Side, 2 to 10 Stations), SUP/EXH Block: Internal Pilot, A,B Port Size: C8 (ø8 One-touch Fitting), Mounting: D (DIN Rail Mounting w/o Name Plate), DIN Rail Option: 0 (w/o DIN Rail with Bracket)

Model: 10 (Side Ported), Connector Type: P (Flat Ribon Cable, 26 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 10 Stations, P,E Port Location: D (D Side, 2 to 10 Stations), SUP/EXH Block: Internal Pilot, A,B Port Size: C10 (ø10 One-touch Fitting)

Model: 10 (Side Ported), Connector Type: P (Flat Ribon Cable, 26 Pins), Connector Entry Direction: 1 (Upward), Valve Stations: 10 Stations, P,E Port Location: D (D Side, 2 to 10 Stations), SUP/EXH Block: Internal Pilot, A,B Port Size: N7 (ø1/4" One-touch Fitting)

Model: 10 (Side Ported), Number of Cores - Lead Wire: L1 (34 Cores), Lead Wire Length: 2 (1.5m), Valve Stations: 10 Stations, P,E Port Entry: D (D Side, 2 to 10 Stations), SUP/EXH Block Assembly: Internal Pilot, A,B Port Size: N7 (ø1/4" One-touch Fitting, Straight, Inch), Mounting: BA (Direct Mounting, Name Plate, w/o Station Number)

Model: 10 (Side Ported), Number of Cores - Lead Wire: L1 (34 Cores), Lead Wire Length: 3 (3m), Valve Stations: 10 Stations, P,E Port Entry: D (D Side, 2 to 10 Stations), SUP/EXH Block Assembly: Internal Pilot, A,B Port Size: C10 (ø10 One-touch Fitting, Straight, Metric)

AMX-OM-Q015E

Standard dew point -20oC, -15oC : about 10 min.

VP(A)300/500/700 Series (PILOT VALVE : V200)

When locking the manual override with the push-turn locking type (D or E type), be sure to push it down before turning. Turning without first pushing it down can cause damage to the manual override and other trouble such as air leakage, etc.

VEX-OMV0001

No.2 (-) (VEX150117011901 ) DIN DIN No. 1 2 DIN + 68 (VEX150117011901 ) AC100V AC200V DC (+ (-) 9 VEX-OMV0001 (12) (1) () (2) (3) (4) () (5) 3(R) (6) (4) (7) (8) (9) (10) (11) (22) (12) (13) (14) (15) 10 VEX-OMV0001 P2 (22) (16) (12) (22) (17) () (18) (19) 3(R) (3) (6) (4) (20) 2(A) (22) (21) 11 VEX-OMV0001 No

Exhaust Cleaner for Clean Rooms AMP Series

106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5

Precision Clean Regulator Series SRP

mounting hole 40 8.5 20 28 72.5 (when set = 75.5) Bleed exhaust hole 6.5 28 41 1.6 Port size A B IN OUT Model Port size D C B A 30 30 23.5 14 M5 x 0.8 SRP111-M5 40 40 22.5 15 Rc 1/8 SRP111-01 C D 3

HAA

Symbol Description Port size Nil Symbol Size Applicable model D Auto drain F Dust-protecting filter S Mounting bench 3 4 06 Rp socket 10 1B union 14 1 union HAA7 HAA15 HAA22, 37 1 2B Source voltage Symbol Voltage Applicable model 1 2 3 Single phase 100 VAC Single phase 200 VAC Three phase 200 VAC HAA7, 15 HAA7 HAA15, 22, 37 How to Calculate Outlet Air Temperature Outlet air temperature can

Specifications, Applicable valve: SV2000, P- and E-port entry position: D-side (2 to 10 stations), Specified DIN rail length: -, Protective Structure: -, Number of Input/Output Units: N/A, Number of Input Blocks: N/A, Number of Valves: 10

Specifications, Applicable valve: SV2000, P- and E-port entry position: D-side (2 to 10 stations), Specified DIN rail length: -, Protective Structure: -, Number of Input/Output Units: N/A, Number of Input Blocks: N/A, Number of Valves: 10

: Internal Pilot Specifications, Applicable valve: SV2000, P- and E-port entry position: D-side (2 to 10 stations), Specified DIN rail length: -, Protective Structure: -, Number of Input/Output Units: N/A, Number of Input Blocks: N/A, Number of Valves: 10

Silencer built-in, Applicable valve: SV2000, P- and E-port entry position: D-side (2 to 10 stations), Specified DIN rail length: -, Protective Structure: -, Number of Input/Output Units: N/A, Number of Input Blocks: N/A, Number of Valves: 10