CE2

117.5 102 55 26.5 36 189 13 M12 x 1.75 16.5 25 to 750 25 to 600 80 40 19 25 14 76 52 31 41 25 92 30 15 21 11 37 131.5 116 56.5 35.5 36 198 16 M12 x 1.75 16.5 Without rod boot With rod boot W S P NN MM N Bore size (mm) h f e ZZ H ZZ 40 50 63 80 100 59 11.2 43 280.5 51 8 218.5 1/4 161.5 288.5 27 M14 x 1.5 66 11.2 52 304.5 58 0 235.5 3/8 175.5 312.5 30 M18 x 1.5 1/4 66 11.2 52 326 58 0 254

REC

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 11 17 19 21 0.3 RHC G 7 11 13 13 0.5 10 10 50 100 200 300 400 (mm/s) (Initial cushioning speed) 4 7 9 9 0.7 500 MK(2) Rod side trunnion style: U Head side trunnion style: T 32 42 48 52 0.3 Clevis style: C, D RS Q G C 22 30 35 37 0.5 Graph (2) Applicable

Rotary Table/Vane Style Series MSU

With auto switch: MDSUA1-S 1) 24: When using D-90/90A/S99/S99V/S9P/S9PV/T99/T99V 30: When using D-97/93A 2) 60: When using D-90/90A/97/93A 69: When using D-S99/S99V/S9P/S9PV/T99/T99V CRB2 CRBU2 CRB1 MSU CRJ CRA1 12.5 37 28 CRQ2 MSQ MSZ Angle adjustment bolt CRQ2X MSQX MRQ 2 x M3 x 0.5 (Port location: Side ported type only) 24 1 A port B port 18.5 2 60 (69) 29 D-97/93A 15 1 30 D155 Series

Air Slide Table Series MXJ

Operating port 2 x M3 x 0.5 Z ZZ H G 3 +0.03 0 depth 2.5 GA A 15 3.3 3.5 A 5.8 D4 x M4 x 0.7 3 +0.05 0 depth 2.5 3 3.5 A-A -X Model G GA H I J K M Z ZZ Individual -X MXJ6-5 MXJ6-10 MXJ6-15 11 17 17 5 17 27.5 42.5 37 43 11 17 17 5 17 27.5 42.5 37 43 13 22 20 7 20 31.5 47.5 42 48 179 Series MXJ Dimensions With stroke adjuster With adjuster on both ends MXJ6-CN With adjuster on extension end

Low Profile Air Gripper Series MHF2

0.8 thread depth 5.5 3 MRHQ (Mounting thread) MA Groove for auto switch mounting D20 74 463 Series MHF2 Dimensions MHF2-16D2 4H9 +0.030 0 depth 3 36 36 36 4H9 +0.030 0 depth 3 4 x M5 x 0.8 thread depth 12 (Mounting thread) 6 127.5 5 M5 x 0.8 50 Finger closing port 142 2 x M5 x 0.8 thread depth 5.5 122 26 10.6 (Mounting thread) E 20 20 24 33 E 4 x 4.3 through (Mounting hole) 0 0.1 1.2 27 37

FILTER REGULATOR

NPT ARP20P-320AS-01 Rc Plug assembly ARP20P-320AS-N01 G ARP20P-320AS-F01 NPT AR20P-370AS-01 Rc Plug AR20P-370AS-N01 PBT resin G AR20P-370AS-01 NPT AR20P-250AS Blanking plate assembly Note1) Bracket and Set nut assembly.

FILTER REGULATOR

NPT ARP20P-320AS-01 Rc Plug assembly ARP20P-320AS-N01 G ARP20P-320AS-F01 NPT AR20P-370AS-01 Rc Plug AR20P-370AS-N01 PBT resin G AR20P-370AS-01 NPT AR23KP-020AS Check valve assembly AR20KP-090AS Check valve plug assembly Note1) Bracket and Set nut assembly.

High Purity Chemical Valve/Air Operated/Compact Type Series LVD LVC LVA Space saving, compact type is available. Space saving, compact type is available. Space saving, compact type is available. LVH LVD Compact type is introduced as a new series to comple

One-touch fitting LQ3 Sensor (Breathing port) PB H G C PA A B N E J B (F) R 2 x V PB PA A B Pilot port threaded type (mm) Dimensions G H J K A B C D E F L M N P Q R V Model LVD1m-Sm LVD2m-Sm LVD3m-Sm LVD4m-Sm LVD5m-Sm 4 20 20 45 39 9.5 46 23 11.5 4.5 11 30 5 21 28 22.5 M5 x 0.8 (5/32") 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37

Non-rotating Double Power Cylinder Series MGZ ø40, ø50, ø63

Content 40 50 63 A set of above nos. 29, 34, 35, 36, 37, 38, 39 and 40.

Angular Air Gripper Series MHC2/MHCA2/MHCM2

DC (+) Brown 0.5 7 7 6 Lead wire length (m) 3 37 37 31 Switch main circuit OUT Black 5 61 61 51 DC () Blue Auto Switch Dimensions D-F9 Mounting screw M2.5 x 4l D-F9P, F9PV Slotted set screw 2 DC (+) Brown Indicator light Switch main circuit 2.7 2.8 22 OUT Black 2.6 4 DC () Blue Most sensitive position 6 D-F9B, F9BV OUT (+) Brown D-F9V Mounting screw M2.5 x 4l Slotted set screw 4.3 Switch

Hydraulic Cylinders

MA B D-F9BAL A Proper auto switch mounting positions (mm) 32 to 100 D-Z7, D-Z8, D-Y5 D-Y, D-Y7 D-Y7V, D-Y7WV D-Y7BAL B Bore size (mm) D-Z7 D-Z8 D-Y5 D-Y7 D-Y7W A 10 12 13 16.5 18.5 26.5 B 16.5 18.5 22.5 26 35 44.5 32 40 50 63 80 100 A B D-Y6 D-Y7V D-Y7WV Auto switch mounting heights (mm) SMC D-Y7BAL Bore size (mm) SMC MA 32 40 50 63 80 100 32.5 37 43 51.5 62 74.5 Approx.

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

Elbow: KPQL, KPGL Applicable tubing (M5) Effective area mm D1 Model L1 TPH TPS A H (width across flats) (M5) Applicable tubing O.D. mm Connection threads R Note 1) Weight g D2 M L2 L M M5 1/8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 KPGL04-M5 KPGL04-01 KPGL04-02 KPGL06-M5 KPGL06-01 KPGL06-02 KPGL08-01 KPGL08-02 KPGL10-02 KPGL10-03 KPGL12-03 KPGL12-04 17 21 25 18.5 23.5 27.5 26 30 33 34.5 37

S Couplers Series KK/KK13

Stainless steel FPM NBR NBR Stainless steel Stainless steel NBR Brass NBR Electroless nickel plated Electroless nickel plated 4 Series KK Dimensions/Plug (P) Male thread type A T L H L (mm) T Connection male thread Weight g Effective area mm L Min. bore A Body size H Width across flats Model L KK3P-01MS R 1/8 8.4 26.4 30.4 10 1/8 18.4 -02MS R 1/4 22.6 14.2 27.4 33.4 6 KK4P-01MS R 1/8 17 33 37

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

23 6 12.8 4.2 12.8 70 37 23 6 12.8 4.2 12.8 74.5 42.5 27.5 8 13.7 4.2 15.3 79.5 42.5 27.5 8 13.7 4.2 15.3 B C D E F G H ZH05DS-06-06-06 ZH05DL-06-06-06 ZH07DS-06-06-06 ZH07DL-06-06-06 ZH10DS-06-06-08 ZH10DL-06-06-08 ZH13DS-08-10-10 ZH13DL-08-10-10 14.2 14.2 S type: White color L type: Black color 14.2 Applicable tubing diameter N 14.2 Applicable tubing diameter E 17.2 17.2 20 20 ZX 93.3

Table of Contents

Series SV2000 for EX120 Dedicated Output Serial Wiring. 6 7 8 10 10 10 10 10 10 10 11 11 11 11 11 11 12 12 13 13 13 15 16 16 17 19 20 21 21 23 23 24 24 24 24 24 25 26 27 27 30 30 31 32 33 34 35 36 37 37 39 40 40 41 42 44 45 45 50 50 51 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

Table of Contents

M8 x 1.25 depth 16 45 110 22 19 23 142 10.5 170 80 37 194 17 depth 12 M12 x 1.75 depth 21 42 M10 x 1.5 depth 20 Bore size (mm) W Z Y X WH W V U T S R Q O N M L K J I P 20 25 32 40 50 30 140 80 30 23 36 40 86 12 26 12 21 M6 x 1 25 38 80 60 44 25 M5 x 0.8 30 153 80 37 25 44 47 98 13 31 12 21 M6 x 1 32 46 95 70 52 30 M5 x 0.8 25 161 82 37 28.5 50 53 112 16 38 12 21 M6 x 1 32 50 105 80 60 35

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

52.5 37 52.5 180 170 Other dimensions are the same as the single type.

LZ-OM004xx

E [Tightening torque] L[]ZC[]5[] 16 20 15.5 52.5 L[]ZC[]3[] 12 20 8 37 Model no. A B C D L[]ZC[]5[] M10 x 1.25 x 12 deep [24.5Nm] L[]ZC[]3[] M6 x 1.0 x 8 deep [5.2Nm] Model no. A [Tightening torque] L[]ZC[]3[] M3 x 0.5 x 3 deep [0.315Nm] L[]ZC[]5[] M4 x 0.7 x 4 deep [0.75Nm] L[]ZC[]3[] 8 14 Across flat 13 L[]ZC[]5[] 10 22 Across flat 21 *Use locking tool when m ounting foot.

High Pressure Coolant Valve

301 (303) 60 77 96 113 46 60 76 85 34 40 50 60 24 36 41 50 135 164.5 200 219 50 60 79 90 77 1 8 1 2 3 x 3 4 3 x 1 1 4 95.5 111 119 VNH VNH 1 4 VND Note) ( ): CE-compliant product (-Q) VCC Model J K L M N O P Q R S T U VNH1 -10A A B VNH2 -15A A B VNH3 -20A A B VNH4 -25A A B M5 x 0.8 depth 5.5 M6 x 1 depth 6 M8 x 1.25 depth 6 M8 x 1.25 depth 6 20 24 24 29 36 48 51 25 30 35 38 30 40 50 56 37

IDX-OM-W026

50Hz 3.9 5.7 8.4 11.0 m 60Hz 4.3 6.1 9.8 12.4 3/min (ANR)1 MPa 0.7 35 40 32 10 550 MPa 0.151.0 24085% (4) V AC200(50Hz) / AC200,220(60Hz) (2) A 4.3 / 4.7 3.3 / 3.5 4.3 / 4.7 3.3 / 3.5 6.0/6.6 7.2/8.0 (2) W 810 / 940 850 / 1070 810 / 940 850 / 1070 1450/1890 2000/2500 (3) A 10 15 R407C (HFC) g 42010 47010 73010 83010 55010 72010 R1 R11/2 R2 mm 10 1 2 kg 54 62 100 116 kW 22 37