Model: Side-Ported, Serial Interface, SI Unit Specification: EtherCAT - 32 Outputs - Connector M12, SI Unit Output Polarity: PNP, Valve Stations: 04 Stations, P, E Port Location: Both Sides, SUP/EXH Block: Internal Pilot, A, B Port Size: ø4 One-touch Fitting, Mounting: -, DIN Rail Option: -

Special Application: Copper, Fluorine & Silicon-free+Low Particle Generation, Body Size: 40, Reverse Flow: No, Thread: NPT, Port Size: 04 [1/2 (Size 40)], Accessory (Not Attached): B+G, Option 1: None, Option 2: Drain Guide+Name & Caution Plates for Bowl & Gauge in Imperail Units

Max Operating Pressure: 2MPa, Vessel Material, Wetted Parts: Stainless Steel 304, Element Length: B [ℓ500 (ℓ250 x 2)], Port Size: 04 [15 (1/2B)], Element Type: Sintered Metal, Stainless Steel Material, Nominal Filtration Accuracy: 10 μm, Element Seal Material: Non-asbestos

Stations: 04, System, Port Combinations: Ejector System, Common PV: ø5/16", Inch Size, Exhaust: 1 [Ejector System, Silencer Common Exhaust (End Plate on Both Sides)], Wiring: D-sub Connector, 25 Pins, Option: B+D+L, Manifold Assembly, Delivery Condition: Delivered as Individual Parts, not Assembled

Stations: 04, System, Port Combinations: Ejector System, Common PV: ø8, Metric Size, Exhaust: 1 [Ejector System, Silencer Common Exhaust (End Plate on Both Sides)], Wiring: D-sub Connector, 25 Pins, Option: B+D+L, Manifold Assembly, Delivery Condition: Delivered as Individual Parts, not Assembled

Stations: 04, System, Port Combinations: Vacuum Pump System, Common PV: ø5/16", Common PS: ø1/4", Inch Size, Exhaust: 2 [Vacuum Pump System, w/o Silencer; (Ejector System has Individual Exhaust Port)], Wiring: D-sub Connector, 25 Pins, Option: B+D, Manifold Assembly, Delivery Condition: -

Stations: 04, System, Port Combinations: Ejector System, Common PV: ø8, Metric Size, Exhaust: 2 [Vacuum Pump System, w/o Silencer; (Ejector System has Individual Exhaust Port)], Wiring: D-sub Connector, 25 Pins, Option: B+D, Manifold Assembly, Delivery Condition: Delivered as Individual Parts, not Assembled

Stations: 04, System, Port Combinations: Ejector System, Common PV: ø5/16", Inch Size, Exhaust: 1 [Ejector System, Silencer Common Exhaust (End Plate on Both Sides)], Wiring: D-sub Connector, 25 Pins, Option: B+D, Manifold Assembly, Delivery Condition: Delivered as Individual Parts, not Assembled

Size: 4 (40), Valve Type: 1 (Normally Closed), Body Material: C (Brass), Seal Material: E (EPDM), Port Size: 04 (Thread; 1/2), Thread Type: N (NPT), Rated Voltage: B (24 VAC), Electrical Entry: CS (Conduit, w/Surge Voltage Suppressor), Oil-free Option: D (Oil-free)

Size: 4 (40), Body Material: S (Stainless Steel), Seal Material: E (EPDM), Port Size: 04 (1/2), Thread Type: N (NPT), Rated Voltage: 5 (24 VDC), Electrical Entry: DZ (DIN Terminal w/Light, w/Surge Voltage Suppressor), Oil Free Option: None, Bracket: B (with Bracket)

Stations: 06 (6 Stations), Piping: B (U Side: Open; D Side: Open), Thread Type: N (NPT), Supply Unit Components: P (w/o Flow Adj. Valve; w/Stop Valve), Return Unit Flow Range: 20 (2 to 16 L/min), Supply/Return Port Size: 04 (1/2)

Material: C (Aluminum Cover, SPCD Case, NBR Gasket/O-ring, Nylon Seal), Element Length: B [ℓ500 (ℓ250 x 2)], Port Size: 04 (1/2 Rc), Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: 100 μm, Element Seal Material: Vessel Replacement or Fiber Element Types Only, Accessory: B (Bracket), Made to Order: X77 (Differential Pressure Indicator)

Seal), Element Length: B [ℓ500 (ℓ250 x 2)], Port Size: 04 (1/2 Rc), Element Type: S (Sintered Metal, Stainless Steel Material), Nominal Filtration Accuracy: 1 μm, Element Seal Material: T (Fluororesin), Accessory: B (Bracket), Made to Order: X78 (Differential Pressure Indication Switch)

Seal), Element Length: B [ℓ500 (ℓ250 x 2)], Port Size: 04 (1/2 Rc), Element Type: S (Sintered Metal, Stainless Steel Material), Nominal Filtration Accuracy: 1 μm, Element Seal Material: V (FKM), Accessory: B (Bracket), Made to Order: X78 (Differential Pressure Indication Switch)

Seal), Element Length: B [ℓ500 (ℓ250 x 2)], Port Size: 04 (1/2 Rc), Element Type: L (Micromesh, Stainless Steel 316/Nickel Brazing Material), Nominal Filtration Accuracy: 10 μm, Element Seal Material: V (FKM), Accessory: B (Bracket), Made to Order: X77 (Differential Pressure Indicator)

Material: T (SCS14 Cover, SS 316 Case, Fluororesin Gasket/O-ring, Fluororesin Seal), Element Length: B [ℓ500 (ℓ250 x 2)], Port Size: 04 (1/2 Rc), Element Type: T [Fiber (Honeycomb), Polypropylene Material], Nominal Filtration Accuracy: 100 μm, Element Seal Material: Vessel Replacement or Fiber Element Types Only, Accessory: B (Bracket), Made to Order: X77 (Differential Pressure Indicator

Body Class: 2 (Orifice Diameter ø4), Valve Type: 0 (Normally Closed), Applicable Tube OD: 04 (ø4), Port B OUT: Ports A & B Same Size, Pilot Port: Body Class 2 - M5 Thread; Body Class 3, 4, 5, 6 - Rc1/8, Material: Body PFA, Actuator Endplate PPS, Diaphragm PTFE, Option: 1 (Flow Rate Adjustment), Specification: None, Z: Z (Pilot Port Thread 1/8)

Body Size: 4000, Thread: N (NPT), Port Size: 04 (1/2), Option: B (w/Bracket), Voltage: 5 (24 VDC), Lead Wire: D (Type D, DIN Terminal w/Connector), Surge Suppressor: Z (with Light/Surge Voltage Suppressor), Manual Override: B (Push-turn Locking Slotted Type), Flow Direction/Pressure Unit: RZ (Flow Direction: Right to Left; Name Plate and Pressure Gauge in Imperial Units)

Body Size: 4000, Thread: N (NPT), Port Size: 04 (1/2), Option: B (w/Bracket), Voltage: 5 (24 VDC), Lead Wire: G (Grommet, Lead Wire Length: 300mm), Surge Suppressor: Z (with Light/Surge Voltage Suppressor), Manual Override: B (Push-turn Locking Slotted Type), Flow Direction/Pressure Unit: RZ (Flow Direction: Right to Left; Name Plate and Pressure Gauge in Imperial Units)

Body Size: 4000, Thread: N (NPT), Port Size: 04 (1/2), Option: B (w/Bracket), Voltage: 5 (24 VDC), Lead Wire: KO (M12 Connector, w/o Cable), Surge Suppressor: Z (with Light/Surge Voltage Suppressor), Manual Override: B (Push-turn Locking Slotted Type), Flow Direction/Pressure Unit: RZ (Flow Direction: Right to Left; Name Plate and Pressure Gauge in Imperial Units)