MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

Series Standard Specifications AMR3000 AMR4000 AMR5000 AMR6000 Model 1 1 4, 3 8 1 4, 3 8, 1 2 1 2, 3 4 3 4, Port size Fluid Air Proof pressure 1.5 MPa 1.0 MPa Max. operating pressure 0.05 to 0.85 MPa Setting pressure range 5 to 60C (No freezing) Ambient and fluid temperature Relieving type Construction 0.3 m Filtration Max. 1.0 mgf/Nm3 ( 0.8 ppm) (1)(2) Oil mist density in the outlet side 750

AMR3000 to 6000

Filtration Max. 1.0 mgf/Nm3 ( 0.8 ppm) (1)(2) Oil mist density in the outlet side IR 750 1500 3500 6000 Rated flow (/min (ANR)) (3) 1.8 2.8 3.5 6.7 VEX Weight (kg) Note 1) Compressed air density: 30 mgf/Nm3. Note 2) An element for the mist separator is included on the inlet side. Mineral grease is applied on the sliding parts inside the regulator.

AMR3000 to 6000

Filtration Max. 1.0 mgf/Nm3 ( 0.8 ppm) (1)(2) Oil mist density in the outlet side IR 750 1500 3500 6000 Rated flow (/min (ANR)) (3) 1.8 2.8 3.5 6.7 VEX Weight (kg) Note 1) Compressed air density: 30 mgf/Nm3. Note 2) An element for the mist separator is included on the inlet side. Mineral grease is applied on the sliding parts inside the regulator.

ChemicalThermo-con

Heat exchanger Radiating method W Water-cooled Temperature controller 007 B HED C 2 Cooling capacity Communication 003 005 007 A B RS-485 RS-232C 300 W 500 W 750 W Temperature controller Power supply 2 Single-phase 180 to 242 VAC 50/60 Hz 176 ChemicalThermo-con Series HED Main Specifications (For details, please consult our Product Specifications information.)

AFF

BM57 Accessory (Option)/For AFF75A to AFF220A AFF75A AFF125A AD402-03-2 G46-15-02 AFF150A AFF220A Applicable model Auto drain (2 pcs. each) Pressure gauge (2 pcs. each) Companion flange (2 pcs. each) Anchor bolt (3 pcs. each) AI-2S 2BJIS 10KFF 3BJIS 10KFF 4BJIS 10KFF Model AFF2B AFF4B AFF8B AFF11B AFF22B AFF37B AFF75B AFF75A AFF125A AFF150A AFF220A Model Note) Rated flow (l/min (ANR)) 300 750

MHS

MPa 0.20.6 0.10.6 -1060 mm 0.01 c.p.m. 120 60 21 37 63 111 177 280 502 1 N 23 42 71 123 195 306 537 mm 4 4 6 8 8 12 16 g 58 96 134 265 345 515 952 1) 1625 L=20mm 3263 L=30mm 0.5MPa MHS3 16D MHS320D MHS325D MHS332D MHS340D MHS350D MHS363D MHS380D MHS3100D MHS3125D MHS3mm 16 20 25 32 40 50 63 80 100 125 MPa 0.20.6 0.10.6 -1060 mm 0.01 c.p.m. 120 60 30 14 25 42 74 118 187 335 500 750

CJ5-S

40 37 32 100 50 25 82 11 9 28 20 71 13 89 M10 x 1.5 10 22 7 M22 x 1.5 80 3/8 130 210 100 Up to 750 110 40 37 41 125 60 30 100 14 10 29 20 71 16 M12 x 1.75 10 26 8 M26 x 1.5 100 1/2 131 212 Flange bracket and plug bolt are installed when shipped from factory.

Vacuum Gripper

ZPT10UT-A6 4 4 4 4 ZP10UT ZP 13 UT ZPT13UT-A6 4 4 4 4 ZP13UT ZP 16 UT ZPT16UT-A6 4 4 4 4 ZP16UT ZP 10 U ZPG10U-7A-X2 7 7 7 7 ZP10U ZPT2-7A-X2 ZP 13 U ZPG13U-7A-X2 7 7 7 8 ZP13U ZP 16 U ZPG16U-7A-X2 7 7 7 8 ZP16U ZP 20 U ZPG20U-7A-X2 9 10 10 10 ZP20U ZPT3-7A-X2 ZP 25 U ZPG25U-7A-X2 10 10 10 11 ZP25U ZP 32 U ZPG32U-7A-X2 10 11 11 12 ZP32U ZP 10 C ZPG10C-7A-X2 7 7 7 7 ZP10C ZPT2-7A-X2

Digital Flow Switches Series PF2A

Rc NPT G Symbol N M12 3 m lead wire with connector Without lead wire Note) Fixed units: Real-time flow rate: l/min Accumulated flow: l Port size Output specification Port size Applicable model Flow rate (l/min) Symbol Symbol Output specification 100 200 500 50 10 01 02 03 04 1/8 1/4 3/8 1/2 27 NPN open collector 2 outputs PF2A710/750 PF2A711/721 PF2A751 67 PNP open collector 2 outputs

LJ1H

Positioning distance (mm) 1500 750 100 10 1 10 151.1 76.1 11.1 2.1 1.2 100 16.1 8.6 2.1 1.2 1.1 Speed (mm/s) 250 7.2 4.2 1.6 1.2 1.1 500 4.3 2.8 1.5 1.2 1.1 Values will vary slightly depending on the operating conditions.

ZP

), Thin flat with ribs (CT) Thin flat Thin flat with ribs ZP 10 UT N 7 7 Pad diameter ZX Material 12 12 Y Y 10 N 10 NBR ZR 13 S 13 Silicon rubber A A 16 U 16 Urethane rubber B B ZM F Fluoro rubber GN ZPUT ZPCT Conductive NBR Pad type ZH GS Conductive silicon rubber UT Thin flat Dimensions (mm) Dimensions (mm) CT Thin flat with ribs ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South

ZP

), Thin flat with ribs (CT) Thin flat Thin flat with ribs ZP 10 UT N 7 7 Pad diameter ZX Material 12 12 Y Y 10 N 10 NBR ZR 13 S 13 Silicon rubber A A 16 U 16 Urethane rubber B B ZM F Fluoro rubber GN ZPUT ZPCT Conductive NBR Pad type ZH GS Conductive silicon rubber UT Thin flat Dimensions (mm) Dimensions (mm) CT Thin flat with ribs ZU A A B B Y Y Model Model ZP10UT ZP10CT 10 10 11 11 1 0.8

In-line Air Filter

Body size Body size 20 L/min 100 L/min Symbol Filtration area 750 mm2 Specifications Different diameters (IN side < OUT side) Different diameters (IN side > OUT side) Blue element Filtration: 10 m FKM/Oil free (Seal) Nylon Symbol X01 X02 X03 X04 X05 X06 5 7 1260 mm2 Applicable tubing O.D.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Motorless LAT LZ LC3F2 Weight Series LEFS25mV6 Stroke [mm] 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 Product weight [kg] 2.06 2.20 2.34 2.50 2.62 2.75 2.90 3.05 3.18 3.30 3.46 3.60 3.74 3.88 4.02 4.20 Additional weight with lock [kg] 0.3 Series LEFS32mV7 Stroke [mm] 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 Product weight [kg] 3.40

Suction Filter with Case FH99 Series

Petroleum, Water-glycol, Emulsion: NBR; Phosphoric ester: FKM, EPDM Model/Rated Flow Rate Model Port size Note 2) INLET OUTLET Rated flow rate (L/min) FH990-04 FH990-06 FH990-08 FH990-10 FH990-12 FH990-16 FH991-20 FH991-24 FH991-28 FH991-32 1B 1/2B 20 1B 3/4B 50 1 1/2B 1B 100 1 1/2B 1 1/4B 150 2B 1 1/2B 200 2B 2B 300 2 1/2B 2 1/2B 450 3B 3B 600 3 1/2B 3 1/2B 750 4B 4B 900 Note 2) Both flange

Electric Actuator/Slider Type

LEFS32 -700 1041 1071 706 830 12 5 750 LEFS32 -750 1091 1121 756 880 12 5 750 LEFS32 -800 1141 1171 806 930 14 6 900 17 Series LEFS Electric Actuator/Slider Type Ball Screw Drive Dimensions: In-line Motor LEFS LEFB LEJS LEJB LEY LEYG LECYM/LECYU Model Selection LEFS40 Encoder cable (7) 4 x M8 x 1.25 thread depth 13 (170) Motor cable (7) 106 60 Body mounting reference plane Note 1) 74 58

CM2

Rubber bumper50 to 750 mm/s (Standard equipment) Air cushion50 to 1000 mm/s DReduced piston rod deflection -X The clearance between the bushing and the piston rod, and between the tube and the wear ring have been decreased to achieve higher accuracy.

Electric Actuator / Slider Type 《 AC Servo Motor 》

Initial value Recommended value Electronic gear numerator *3 PA06 1 32768 Electronic gear denominator *3 PA07 1 2500 1500 750 3000 2000 1000 3750 2500 1250 Feel length multiplication (STM) (Multiplier) PA05 0 0(Less than stroke 1000)/ 0001(Stroke 1000 or more) Home position return type PC02 0 3Stopper type Home position return direction PC03 0001 1 (Motor side) Home position return Speed

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

6 to 400 24 to 1200 16 to 800 8 to 400 30 to 1200 20 to 850 10 to 300 Speed*1 [mm/s] 501 to 600 30 to 1200 20 to 850 10 to 300 Actuator specifications Parallel Stroke range Up to 500 20 to 900 12 to 600 6 to 300 24 to 800 16 to 650 8 to 325 30 to 750 20 to 550 10 to 300 501 to 600 30 to 750 20 to 550 10 to 300 Max. acceleration/deceleration [mm/s2] 3000 Positioning repeatability [mm] 0.01

Process Gas Diaphragm Valve

Specifications Wetted Parts Material AZ3652 Select compatible materials of construction for the gas Vacuum to 250 psig (1.7 MPa) 375 psig (2.6 MPa) 750 psig (5.1 MPa) -40 to 71 C (No freezing) AZ4652 S 316L SS Electropolish + Passivation Ni-Co Alloy PCTFE (Option: Polyimide) Operating Parameters Gas Operating pressure Proof pressure Burst pressure Ambient and operating temperature Cv Wetted