HEC-OM-S019

Main functions Auto tuning, Off set function, Temperature sensor fine control function, Upper / lower temperature limit alarm function, Output shut off alarm, Serial communication Temp: 0 to 40 C Humidity : 35 to 85%RH Altitude : up to 1000m Environment : No corrosive gas, solvent such as thinner and flammable gas Temp :-40 to 70 C (No dew condensation and icing) Humidity : 5 to 95%RH Environment

XL-OMV0005

Suffix symbol for seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 Note 1) Barrel Perfluoro R is a registered trademark of MATSUMURA OIL Co.,Ltd. Kalrez R is a registered trademark of E.

XLGR Series

Note4) Two O-rings (8) are require per valve. 6 XL-OMP0001 Additional symbols of the seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA ULTIC ARMOR R Combination No. 2101-80. 70W 4079 SS592 SS630 SSE38 1232-70. 3310-75.

Pressure Sensor for General Fluids

(at 25 oC) Enclosure IP65 Withstand voltage 500 VAC, 1 minute, Between lead block and case Insulation resistance 100 M or more at 500 VDC Between lead block and case Environ mental Operating temperature range Operation: -10 to 60 oC, Storage: -20 to 70 oC (No condensation or freezing) Operating humidity range Operation, Storage: 35 to 85%RH (No condensation) Standard CE, RoHS Piping specifications

Pressure Sensor for General Fluids

(at 25 oC) Enclosure IP65 Withstand voltage 500 VAC, 1 minute, Between lead block and case Insulation resistance 100 M or more (at 500 VDC) Between lead block and case Environ mental Operating temperature range Operation: -10 to 60 oC, Storage: -20 to 70 oC (No condensation or freezing) Operating humidity range Operation, Storage: 35 to 85%RH (No condensation) Standard CE marked (EMC directive

Air cylinder

Specifications 1-1 Specifications Fluid Air Proof pressure 1.5 MPa Max. operating pressure 1.0 Mpa Min. operating pressure 0.05Mpa -10 to +70 oC. With magnet built in: -10 to +60 o Ambient and fluid C temperature (No freezing) Lubrication Not required (non-lube) Stroke length tolerance Cushion Rubber bumper Piston speed 50 to 750 mm/s Warning Confirm the specifications.

CM2x-OM0230Q

-2- / *3) 1 1.5 *3)1 1 () -3- 1. 1-1. 1.5MPa 1.0MPa 0.05MPa -10~+70-10~+60 50~750 mm/s () 2. 2-1. AF AR 4 - 1) 5 2) 3) 5 4) 1 ISO VG-32 2-2. 1) 2) 3) 4) 5) 6 7) 5 - 8 9) , 10) 11) 3 1) P10 [2-6.] 2) 3) 4) 5) 6) 7) (40) 6 - 2-3. 1) 1 P10 [2-6.] fR Ft N () mm 1.

CG1-OM0227

-2- / *3) 1 1.5 *3)1 1 () -3- 1. 1-1. 1.5MPa 1.0MPa 0.05MPa -10+70-10+60 +1.4mm 1000st 0 +1.8mm 1500st 0 / 2063 501000mm/sec 80100 50700mm/sec (P9, [2-6.]) () 2. 2-1.

AIR CYLINDER

Usable stroke by buckling strength Usablestroke by Mounting style buckling strength (cm) Pressure Symbol and sketch (MPa) Symbol of bracket Rod side Frang e F Head side flange 103 92 113 Foot: 79 70 86 L G 66 58 72 45 38 47 33 27 34 26 22 27 96 83 106 Center Clevis trunnion 71 61 76 CD T 59 50 62 135 119 147 101 89 111 84 74 91 Rod side Frang e F Head side flange 301

CG1x-OM0006N

-2- / *3) 1 1.5 3) 1 1 () -3- 1.5 3 NBR ,, , FKM <> <> CG1 4 - GR-R-010(10g) CG5-S 542 50 2040 2 50 5 - 1. 1-1. 1.5MPa 1.0MPa 0.05MPa -10~+70-10~+60 +1.4mm 11000st 0 +1.8mm 10011500st 0 / 2063 501000mm/sec 80100 50700mm/sec (P14, [2-6-3.]) 1 () 2 6 2. 2-1.

Cylinder with lock

Cylinder specification Bore size (mm) 32 40 50 63 80 100 Double acting/single rod Operating method Air Fluid 1.5MPa Proof pressure 1.0MPa Max. operating pressure 0.08MPa Min. operating pressure Without auto switch: -10 to 70 With auto switch -10 to 60 Ambient and fluid temperature Operating fluid temperature Not required (non-lube) Lubrication 50~1,000mm/s * Piston speed Allowable stroke

CE

20 3263 2 1 0.8 JIS B0209 3-2 76 *1 23 14.5mT DC12VDC24V(10) 1 40mA 0.1mmCEU5 *2 (20) 0.2mm Max DC24V,40mA A /B DC500V50M12E 33.3Hz 6.8G X,Y 2 Z 4 JIS D1601 30G X,Y,Z 3 *3 IP-65(IEC60529 *1)SMC CEU5 *2)CEU5 *3) 3-3 3-3-1 J mm 12 20 32 40 50 63 E 0.022 0.055 0.15 0.26 0.46 0.77 3-3-2 g (mm) mm 25 50 75 100 125 150 175 200 250 300 400 500 12 28 33 38 43 48 53 20 70

CEx-OML0058

Maximum load for horizontal mounting: 70% or less of the holding force (Maximum static load) for spring lock Selection Maximum load for vertical mounting: 35% or less of the holding force (Maximum static load) for spring lock Warning 1. Confirm the specifications.

CEx-OMQ0010

j k L 2. 7. 8. 1. 9. 2. 10. 11. ()70% ()35% 1. 15% 1. 2. 3 3. () 1. 0.1~1.0MPa 0.3~0.5MPa 0~60 ()35% 2. ) 1. 1. 2. 2. 3. 1. 1. ( 2. 6 ) 3. 2. 50% 4. (6 ) 3. 5. 4. () 0.5 5. 1 2 3. F.G. 1. 4. 1 ISO VG32 1. 2. 1. 2. 3. 1. 2 1. 2. 2. 14.5mT CE2 1.5~2 15,000 18cm 3. 4. IP65 5.

MONOSASHI-KUN WITH BRAKE CONTROLLER

Maximum load for horizontal mounting: 70% or less of the holding force (Maximum static load) for spring lock Selection Maximum load for vertical mounting: 35% or Warning less of the holding force (Maximum static load) for spring lock 1. Confirm the specifications.

CEx-OMQ0013

l. 2. 8. ,,, 9. 1. 10. 2. 11. 3. 1. 1. 0.11.0MPa 0.30.5MPa :060 2. 3 2. 1. 3. 5 2. 35% 1. ( 6 ) ()70% ()35% 2. 50% ( 6 ) 15% 3. 1. 4. () 0.5 3. 5. F.G. 4. 1. 1. 2. 2. 3. 1. 1. 2. 2 3. 2. 1.52 4. 5. 1. 1ISO VG32 1. 2. 1. 2. 3. 1. 2. 1. 2. 14.5mT CE2 3. 15,000 18cm 4. 3. 4. IP65 5. (DC1224V) 1. 1-1 CEU2 1 2 32 32 1 16 P1 P2 P3 .

CEx-OMG0106

Maximum load for horizontal mounting: 70% or less of the holding force (Maximum static load) for spring lock Selection Maximum load for vertical mounting: 35% or less of the holding force (Maximum static load) for spring lock Warning 1. Confirm the specifications.

CEx-OMQ0011

. - 10. 11. ( )70% ( )35% 1. 1. 1. 1. 1. 1. 1. 1. 2. 2. 2. 2. 3 1. 1. 1. 1. 0.10.8MPa 0.30.5MPa :560 3. 3. 3. 3. ( ( ( ( ) ) ) ) 2. 2. 2. 2. 35% ) 1. 1. 1. 1. 5 2. 2. 2. 2. - 1. 1. 1. 1. 1. 1. 1. 1. ( ( ( ( 6 6 6 6 ) ) ) ) 2. 2. 2. 2. 3. 3. 3. 3. 2. 2. 2. 2. 50% 50% 50% 50% ( ( ( ( 6 6 6 6 ) ) ) ) 1. 1. 1. 1. () 2. 2. 2. 2. 3. 3. 3. 3. 3. 3. 3. 3. 4. 4. 4. 4.

Cylinder with lock

Cylinder specification Bore size (mm) 32 40 50 63 80 100 Action Double acting/single rod Fluid Air Proof pressure 1.5MPa Max. operating pressure 1.0MPa Min. operating pressure 0.08MPa Without auto switch-10 to 70 Ambient and fluid (No freezing) temperatures With auto switch-10 to 60 Lubricant Not required (Non-lube) Piston speed 50 to 1,000mm/s * Stroke length tolerance [mm] Up to 500st+2.0

Cylinder with lock

Cylinder specification Bore size (mm) 32 40 50 63 80 100 Action Double acting/single rod Fluid Air Proof pressure 1.5MPa Max. operating pressure 1.0MPa Min. operating pressure 0.08MPa Without auto switch-10 to 70 Ambient and fluid (No freezing) temperatures With auto switch-10 to 60 Lubricant Not required (Non-lube) Piston speed 50 to 1,000mm/s * Stroke length tolerance [mm] Up to 500st+2.0