Flow Rate Range: 10 [0.2 to 10 (5 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: Rc1/8, Piping Entry Direction: Bottom Side, Output Specification: 2 NPN Outputs, Unit Specification: Fixed SI Unit, Instruction Manual: -, Calibration Certificate: -, Connector: -, Option: -

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 2 NPN Outputs, Unit Specification: Fixed SI Unit, Instruction Manual: None, Calibration Certificate: -, Connector: -, Option: -

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: Rc1/8, Piping Entry Direction: Straight, Output Specification: 2 NPN Outputs, Unit Specification: Fixed SI Unit, Instruction Manual: -, Calibration Certificate: -, Connector: -, Option: -

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: Rc1/8, Piping Entry Direction: Straight, Output Specification: 2 NPN Outputs, Unit Specification: Fixed SI Unit, Instruction Manual: -, Calibration Certificate: -, Connector: -, Option: -

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) ℓ/min], Flow Adjustment Valve: Yes, Port Size: G1/8, Piping Entry Direction: Straight, Output Specification: 2 PNP Outputs, Unit Specification: Fixed SI Unit, Instruction Manual: -, Calibration Certificate: -, Connector: -, Option: -

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Straight, Output Specification: 2 PNP Outputs, Unit Specification: Unit Switching Function, Instruction Manual: None, Calibration Certificate: -, Connector: -, Option: -

5 Pa?m3/sN02NPT1/4118 g90 gC01Rc1/8114 g86 g1 x 10?5 Pa?m3/s, .16975 lb, ModelPort sizeMass (Bottom ported)Mass (Rear ported)Leakage02R1/4117 g89 g1 x 10?5 Pa?m3/sN02NPT1/4118 g90 gC01Rc1/8114 g86 g1 x 10?5 Pa?m3/s

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

Model Cushion Bore size (mm) 6 10 16 Action Standard stroke (mm) Auto switch mounting Port size Lubrication Model Rubber Air 10-/21-CDU6 10-/21-CDU10 10-/21-CDU16 Relief type Vacuum suction type 5, 10, 15, 20, 25, 30 10-/21-CDU20 20 5, 10, 15, 20, 25, 30, 40, 50 10-/21-CDU25 25 Non-lube Double acting Single rod M5 x 0.8 11-/22-CDU6 11-/22-CDU10 11-/22-CDU16 6 10 16 5, 10, 15, 20, 25, 30

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: 1 [Analog Output (1 to 5 V)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: R (Bracket for w/o

to ø5mm; Port Sizes 6, 10)

Table Accuracy: Basic, Size: 10, Max.

Table Accuracy: Basic, Size: 10, Max.

Table Accuracy: Basic, Size: 10, Max.

Table Accuracy: H (High Precision), Size: 10, Max.

Table Accuracy: H (High Precision), Size: 10, Max.

Table Accuracy: Basic, Size: 10, Max.

Table Accuracy: H (High Precision), Size: 10, Max.

Table Accuracy: Basic, Size: 10, Max.

Table Accuracy: H (High Precision), Size: 10, Max.

Table Accuracy: H (High Precision), Size: 10, Max.