Base Mounted Wiring: Plug-in w/D-sub Connector on D Side, Stations: 06 Stations, Passage: P: Common, EA,EB: Common, Port A,B: Side, Port Size: 1/2, Thread: -, Exhaust Cleaner Mounting Direction: -

.: 06 (ø6), Seal Method: w/o Sealant, Option: B (None)

Nozzle Diameter: 07 (ø0.7mm), Vacuum Pressure: S (-90 kPa), SUP: 06 (One-touch Fitting ø6), VAC: 06 (One-touch Fitting ø6), EXH: 06 (One-touch Fitting ø6)

Nozzle Diameter: 05 (ø0.5mm), Vacuum Pressure: S (-90 kPa), SUP: 06 (One-touch Fitting ø6), VAC: 06 (One-touch Fitting ø6), EXH: 06 (One-touch Fitting ø6)

Series: 25A-LEFS (Secondary Battery, Ball Screw Drive), Accuracy: Basic Type, Size: 25, Motor Mounting Position: In-line, Motor Type: Step Motor (Servo/24 VDC), Lead Screw: A (LEFS16: 10mm, LEFS25: 12mm, LEFS32: 16mm, LEFS40: 20mm), Stroke: 50mm, Motor Option: B (w/Lock), Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: R (Robotic Cable, Flexible Cable), Actuator Cable Length:

Series: 25A-ISE20, Rated Pressure Range: C (-0.1 to 1 MPa), Output Specification: T (PNP Open Collector 2 Outputs + Analog Voltage Output), Unit Specifications: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: B (Panel

Series: 25A-PFM7, Flow Rate Range: 10 [0.2 to 10 (5) L/min], Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: B (2 PNP Outputs), Unit Specification: M (Fixed SI Unit), Operation Manual: With Instruction Manual, Calibration Certificate: None, Connector: W (Lead Wire w/Connector, 2 m; Rubber Cover for Connector, Silicon Rubber), Option: R (Bracket for w/o Flow

Series: 25A-PFM7, Flow Rate Range: 25 [0.5 to 25 (12.5) L/min], Port Size: F01 (G1/8), Piping Entry Direction: Straight, Output Specification: B (2 PNP Outputs), Unit Specification: M (Fixed SI Unit), Operation Manual: With Instruction Manual, Calibration Certificate: None, Connector: W (Lead Wire w/Connector, 2 m; Rubber Cover for Connector, Silicon Rubber), Option: R (Bracket for w/o Flow

Series: 25A-PFM7, Flow Rate Range: 11 [2 to 100 (50) L/min], Port Size: 02 (Rc1/4), Piping Entry Direction: Straight, Output Specification: B (2 PNP Outputs), Unit Specification: Unit Switching Function, Operation Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate), Connector: W (Lead Wire w/Connector, 2 m; Rubber Cover for Connector, Silicon Rubber), Option

Series: 25A-PFM7, Flow Rate Range: 50 [1 to 50 (25) L/min], Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: B (2 PNP Outputs), Unit Specification: M (Fixed SI Unit), Operation Manual: With Instruction Manual, Calibration Certificate: None, Connector: W (Lead Wire w/Connector, 2 m; Rubber Cover for Connector, Silicon Rubber), Option: R (Bracket

Series: 25A-ZSE20, Rated Pressure Range: A (0 to -101 kPa), Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: B (Panel Mount Adapter), Operation Manual

Series: 25A-LEFS (Secondary Battery, Ball Screw Drive), Accuracy: Basic Type, Size: 25, Motor Mounting Position: R (Right Side Parallel), Motor Type: Step Motor (Servo/24 VDC), Lead Screw: A (LEFS16: 10mm, LEFS25: 12mm, LEFS32: 16mm, LEFS40: 20mm), Stroke: 400mm, Motor Option: w/o Option, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: R (Robotic Cable, Flexible Cable), Actuator

Series: 25A-LEFS (Secondary Battery, Ball Screw Drive), Accuracy: Basic Type, Size: 32, Motor Mounting Position: R (Right Side Parallel), Motor Type: Step Motor (Servo/24 VDC), Lead Screw: A (LEFS16: 10mm, LEFS25: 12mm, LEFS32: 16mm, LEFS40: 20mm), Stroke: 300mm, Motor Option: w/o Option, Positioning Pin Hole: Housing B Bottom, Actuator Cable Type: R (Robotic Cable, Flexible Cable), Actuator

Series: 25A-PFM7, Flow Rate Range: 11 [2 to 100 (50) L/min], Port Size: C6 (ø6 One-touch Fitting), Piping Entry Direction: Straight, Output Specification: B (2 PNP Outputs), Unit Specification: M (Fixed SI Unit), Operation Manual: With Instruction Manual, Calibration Certificate: None, Connector: W (Lead Wire w/Connector, 2 m; Rubber Cover for Connector, Silicon Rubber), Option: R (Bracket

Special Applications: 10-AR (Clean Series), Body Size: 40, Reverse Flow: No, Thread: Rc, Port Size: 06 [3/4 (Size 40, 50)], Accessory, Not Attached: None, Option: N (Non-relieving)

Special Applications: 10-AR (Clean Series), Body Size: 50, Reverse Flow: No, Thread: Rc, Port Size: 06 [3/4 (Size 40, 50)], Accessory, Not Attached: None, Option: 1 (0.02 - 0.2MPa Setting)

Body Size: 40, Back Flow: w/o Backflow, Thread: Rc, Port Size: 06 (3/4), Options: w/o Mounting Option, Set Pressure: 0.05 to 0.85 MPa Setting, Bowl: 8 (Metal Bowl w/Level Gauge), Bowl Guard: None, Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Units: Product: MPa, °C; Pressure Gauge: MPa

Body Size: 40, Back Flow: w/o Backflow, Thread: Rc, Port Size: 06 (3/4), Options: w/o Mounting Option, Set Pressure: 0.05 to 0.85 MPa Setting, Bowl: 8 (Metal Bowl w/Level Gauge), Bowl Guard: None, Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: R (Flow Direction: Right to Left), Drain Cock w/Barb Fitting: None, Pressure Units: Product: MPa, °C; Pressure Gauge

Rated Flow Range: 40 (5 to 40 L/min), Flow Adjustment Valve: None, Thread: Rc, Port Size: 06 (3/4), Output Specification: B (OUT1: PNP; OUT2: PNP), Temperature Sensor: None, Lead Wire: Lead Wire w/M8 Connector, 3m, Unit Specification: G (Instantaneous Flow Rate: Gal/min; Accumulated Flow: Gal; Temp: °C), Bracket: None, Calibration Certificate: None, Made to Order: X109 (EPDM Seal Material

Body Size: 50, Thread: Rc, Port: 06 (3/4), Option: Standard, Attachment: SV (S + V), Semi-Standard 1: Standard, Semi-Standard 2: R (Flow Direction: Right->Left)