5 Port Solenoid Valve Series VQZ1000/2000/3000

VQZ3 5 (R)-G10 1 3 4 5 02 03 13.5 9 SJ 5 56 2 x 4.5 (For mounting) SY Manual override 5 SV A 4 B 2 45 B A SYJ R2 3 P 1 R1 5 SZ 69.4 16.9 39.1 VP4 Approx. 300 (Lead wire length) 130.7 S0700 + + VQ 57 41.6 26.5 2 x PE port VQ4 20.5 20.5 14 X 12 Y 13.5 11.5 M5 x 0.8 (External pilot port) VQ5 1/4, 3/8 [1(P), 5(R1), 3(R2) port] 21 (18) 21 (18) M5 x 0.8 (Not used) 33 VQC 66

AC Servo Motor Driver (Pulse input type)

Operating method of each mode . 63 7.1 Position control mode . 63 7.1.1 Operation instruction .63 7.2 Speed control mode . 64 7.2.1 Operation instruction .64 7.3 Torque control mode . 66 7.3.1 Operation instruction .66 8.

AC Servo Motor Driver (CC-Link Type ）

Configure a sequence that changes the operation mode earlier, considering the delay time of CC-Link communication. 15 66 15.

AC Servo Motor Driver (CC-Link Type ）

Configure a sequence that changes the operation mode earlier, considering the delay time of CC-Link communication. 15 66 15.

AC Servo Motor Driver (CC-Link Type)

(See LECSC2-T Operation Manual (Simplified Edition), section 5.7.1 for update project.) -66- 5.9.2 To Load saved Project From the Project menu in the setup software, select Open. Please select the "drive path name project name" that you want to read parameters are stored. Please select the file you wish to import project [.mrc2]. Click Open.

ZQ-OM01301

ZQ-OM01301-A Maximum vacuum release flow rate Vacuum release flow rates in product specifications and according to the V port size [L/min (ANR) ] Supply pressure error V Port [MPa] ZQ05A ZQ07A ZQ10A ZQ000A Size Common Individual Common Individual Common Individual Common Individual PD PD PD PD PD PD PD PD 3.2 0.1 16 14 11 23 0.2 26 23 19 38 0.3 39 31 35 28 29 22 52 43 45 39 47 41 38 35 66

ATX-OM-F003E

140 139 6.0 18 1 1/2 3/4 1 380 431 HAW55-20 1612 1038 366 150 1203 276 216 315 264 219 234 305 100 140 66 140 139 6.0 18 2 3/4 1 375 426 HAW75-20 2112 1538 366 150 1703 276 216 315 264 219 234 305 100 140 66 140 139 6.0 18 2 3/4 1 375 426 HAW110-30 1724 950 500 72 1210 365 267 303 356 200 Note 1 70 Note 1 195 8.0 18 3 1 1 1/4 395 459 Note 1) HAW110-30 is 220 HAW Series 6 4 1) Outer dimensions

PSxx-OMU0008CN

) [FAL] 3[nG] -52No.PS-OMU0008CN-D /(66 ) 1 () 1 [F81] , 30 -53No.PS-OMU0008CN-D [F82] [F10][dUAL][LinE] <> [F82] () ( ,) AbY(Z)019 (1 3 ) /() 1 () [F82] (3) QXZ((/)(*) () (1) AZ3 <3 > () -54No.PS-OMU0008CN-D [F90] <> [F90] [on]() [oFF]() [oFF]() 2 [F90] 56 -55No.PS-OMU0008CN-D 1 2 OUT1 3 OUT2 4 5 6 FUNC 7 8 9 10 11 12 2 -56No.PS-OMU0008CN-D [F96]

PSxx-OMV0003CN

"x" 16 (22) 0 R HW-Vx.y x y 0x0016 (23) 0 R FW-Vx.y x y 0x0017 0x0024 (36) 0 R (66 ) (37) 0 R (66 ) 0x0025 0x0028 (40) 0 R 1RW (2) ISDU 0x002 SystemCommand() IO-Link (ParamDownloadStore) 8 bit UInteger 128 Device Reset 129 Application Reset / 130 Restore Factory Settings 160 Zero Clear -65No.PS-OMV0003CN-G (12) 16 bit Record 0 DS () 2 DS 8 DS 10 DS [] () () [(DS )] Data storage

Modular Type Air Filter Series AF

66 F 30 41 50 50 70 70 E 18 16 17 14 23 23 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 AF10 AF20 AF30 AF40 AF40-06 AF50 AF60 Optional specification Model With barb fitting B 137 173 177 253 266 With drain guide B 136 172 176 252 265 Metal bowl B 66 97 142 178 182 258 271 Metal bowl with level gauge B 162 198 202 278 291 AF10 AF20 AF30 AF40 AF40-06 AF50 AF60 27 Air Filter

Rubber seal 5 Port Solenoid Valve Series SYJ5000

Type of actuation Port size Plate fixing screw Manual override Body Option Rated voltage Light/surge voltage suppressor Lead wire Note) Do not loosen plate fixing screw. 23 Series SYJ5000 Flow Characteristics/Weight Flow characteristics Note 1) Weight (g) Note 2, 3) Port size Valve model Type of actuation 14/2 (PA/B) 4, 2 (A, B) 1, 5, 3 (P, EA, EB) 4/25/3 (A/BEA/EB) L/M plug connector 47 66

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

24.5 55 175 20 8 Front flange type: MQMLF 6 20 2.3 33 42 27.5 2-5.5 66 + Stroke 93.5 + Stroke 10, 16, 20, 25 FY FT FX FZ H 2-FC S + Stroke ZZ + Stroke (mm) Bore size (mm) FC FT FX FY FZ H S ZZ 10 5.5 2.3 33 20 42 28 65 101 16 5.5 2.3 42 24 54 30 74 114 20 7 4 60 34 75 40.5 97.5 151 25 7 4 60 40 75 44.5 102.5 160 14 Series MQM Refer to the basic type on page 13 for other dimensions.

Cylinder with Lock Series CLS

54 Cylinder With$ Locking Mechanism 48 68 66 54 Be sure to confirm operation after mounting.

Profile Design ISO/VDMA Air Cylinder Series CP95

4 16 75 5 10 36 16 45 18 11 20 210 100 115 25 75 6.3 89 4 16 85 5 10 41 16 55 18 11 20 230 Mounting type ES Piston rod ball joint to DIN 648K Bore d3 CN S5 K1 K2 I2 G1 G2 G3 EN EU CH H6 ER 32 11 10 6.6 38 51 8.5 21 18 31 14 10.5 32 10 15 40 11 12 6.6 41 54 8.5 24 22 35 16 12 36 10 18 50 15 16 9 50 65 10.5 33 30 45 21 15 45 12 20 63 15 16 9 52 67 10.5 37 35 50 21 15 50 12 23 80 18 20 11 66

Soft Start-up Valve AV2000/3000/4000/5000

1/4 47.5 23.5 65.5 6 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125 66 1/4 23.5 82.5 23 67.5 10.5 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125 66 1/4 23.5 84.5 27.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 112 100 76 3/8 50.5 27.5 68.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 85.5 16 70.5 3.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 87.5 20.5 M6 x 1 Depth 6 32 42 3 57

Modular Type Lubricator Series AL

with barb fitting With drain cock With drain cock Metal bowl Metal bowl with level gauge Metal bowl with drain cock Metal bowl with drain cock Metal bowl with drain cock & level gauge Optional B specifications B B B B B B B Barb fitting Applicable tubing: T0604 Standard specification Accessory specification Bracket mounting size Port size Model R 35 60 80 110 110 110 110 G 27 40 54 54 66

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

-FD NA NB A K F S + Stroke FX 3 H ZZ + Stroke FZ (mm) Bore size (mm) Stroke range (mm) Effective thread length (mm) A B B1 B2 D E F FD FT FX FY FZ GA1 GA2 GA3 GB1 GB2 20 18 38 13 26 10 8 16 7 6 51 21 68 10 12 12 8 10 25 to 300 15.5 25 22 44 17 32 12 10 16 7 9 53 27 70 10 12 12 8 10 25 to 400 19.5 32 24 50 22 38 16 14 19 7 9 55 33 72 11 13 13 8 10 25 to 500 21 40 24 60 24 41 18 16 21 9 9 66

Series H, DL, L, LL Self-align Fittings

M L1 L2 1 4 8 6 DEF06-02 48 20 11 16 16 50.5 46.5 17 15 13 11 19 17 14 12 14 12 6max. 4max. 3 8 DEF08-03 66 3 8 3 8 DEF10-03 10 12 53.5 89 DEF12-03 54.5 34 51 17 17 17 17 15 17 19 19 104 17 19 17 19 7max. 7max. 105 Series H, DL, L, LL Self-align Fittings Plug: DP Applicable tube O.D. Weight (g) Part No.

MXS Series Air Slide Table

Refer to P. 45. 66 66 Air Slide Table (Symmetric type) MXSIL Series Dimensions MXS 6 L /Symmetric type ZZ Z Basic type 20 0.5 18 5 M 3H9 2.5 deep +0.025 0 N -1 x F 2 11 2-M3 X 0.5 thread 5 deep 2.5 (With stroke adjuster at retraction end) 10 F 3H9 2.5 deep +0.025 0 9.5 (With stroke adjuster at extension end) 4-M2.5 X 0.45 thread 3.5 deep 24 32 18 12 4 0.5 5.5 3 Stroke adjuster at extension

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

.@ (66) 3.35 (85) 4.09 (104) 4.84 (123) (142) 6.34 (161) 7.@ 080) (199) (218) 9.33 t237 ) 10.08 (256) 10.83 1275) 11.57 (294) @ NVZ50OO Type 21 Manifold,/ Top Ported inch (mm Grommet (c) (H) L type plug connector (L) 8 :?