3 Port Solenoid Valve/

M12 connector pin number X X VP544(R)/744(R)-X538 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) y t r y t r y t r w q e w q e w q e 3(R) 3(R) 3(R) 1(P) 1(P) 1(P) X X VP544(R)/744(R)-X555 Internal pilot External pilot External pilot/With check valve 2(A) 2(A) 2(A) y t r y t r y t r 3(R) w q e 3(R) w q e w q e

Air Cylinder NCQ7 Series Compact Cylinder

Type Borc D Type S T y p e ' DC Type ' -T rtpe A B , " , ,.

asilltr

Type Borc D Type S T y p e ' DC Type ' -T rtpe A B , " , ,.

ISO Cylinder

A T AL A H Auto Switch Made to Order T MM H 118 C85/C75 Series Made to Order Please contact SMC for detailed dimensions, specifications, and lead times.

Dedicated Controller

ENT 84 13 Series LC1 Options T-nuts and T-brackets for Mounting Be sure to use when mounting the controller. Note) The controller unit includes either T-nuts or T-brackets.

Cylinder with Lock

Double Acting, Single Rod Double Acting, Double Rod Double Acting, Single Rod Double Acting, Double Rod Symbol: A0 Symbol: A1 Symbol: A2 Symbol: A3 DA C0.5 C 30 30 H H W1 T H A H Symbol: A4 Symbol: A5 Symbol: A6 Symbol: A7 RD B RD AL MM AL MM 30 H L 30 30 30 H L W H H Symbol: A8 Symbol: A9 Symbol: A10 Symbol: A11 C0.5 file chamfer AL B MM WA C R sphere TP R sphere DC 30 H W1 T H H H Symbol

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

Keeper plate Rod end nut 30 d JIS class 2 threads 2-d l 0.2 B D C m T H H B Material: Rolled steel Material: Carbon steel Bore size (mm) Cap bolt Bore size (mm) Rod series Part no.

High Vacuum Angle Valve

Temperature distribution of the 120C specification Comparison with a KF25 flange 140 e, r, t 120 eBody 1 Temperature [C] 100 rBody 2 tBody 3 80 q, w 60 40 Heater wBellows 20 qValve 0 0 30 60 90 Time [Minute] Lightweight, Compact Large conductance, small body, excellent resistance against fluorine corrosion (body) XLA series Model A1 [mm] B [mm] Weight [kg] Conductance1 [L/s] XLA-16-2 40 108

: T (w/o Operation Manual, Calibration Certificate)

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

A22 Symbol: A23 Symbol: A24 30 30 DA L RD MM 30 MM DA 30 MM MM DB DB T T C B A H AL H A L K H A A W H H Symbol: A25 Symbol: A26 Symbol: A27 Symbol: A28 Symbol: A29 DA 30 MM MM DA 30 DA 30 30 MM L W MM A L H AL H LB K A AL A H L A H T AL L K H MM Symbol: A30 30 MM W A T H 84 Simple Specials Series CP96/C96 Symbol Change of Trunnion Bracket Mounting Position 2 -XC14 Series C85 Series

Pulse Valve

1 u y t r e w q i r e IN w IN q t y u i o !0 u y t o i !0 Component Parts Component Parts No. Description Material 1 Body ADC 2 Main valve Resin 3 O-ring NBR 4 Bonnet ADC 5 Seal NBR 6 Washer Fe (Chromated) 7 Compression nut ADC 8 Hexagon bolt Stainless steel No. Description Material No.

LEKF-OMZ0035

C2 LECSC2-T 200 to 230 2 2 S2 LECSS2-T 200 to 240 5 5 N2 LECSN2-T 200 to 240 A 10 E2 LECSN2-T-E 200 to 240 92 LECSN2-T-9 200 to 240 I/O cable length P2 LECSN2-T-P 200 to 240 Nil Without cable H Without cable Connector only 1 1.5 [m] Applicable Stroke Table Stroke Size 50 100 150 200 250 300 350 400 450 500 600 700 800 900 1000 1100 1200 25 32 40 -9- AC servo motor LECY* series L E K F S

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

0 q t r i S u y o !4 !8 !

17

Shock absorber Lock plate 1191 MY1B Series Construction 25, 32, 40 MY1B25 to 40 r @3 @9 y u t !5 w @7 !1 !7 !8 !9 @0 e #7 i !6 @5 #5 q #9 #4 !3 #2 !2 @1 !0 @2 @6 #6 #3 @8 #1 @4 o #8 !

NAIV

241 4.86 (123.5) (5s) lz3;.(1s) (20) nm2[ , t % 7.62 6.8i] 4!

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: SI Unit Only, Piping Specification: R 1/8, Lead Wire: w/o Lead Wire, Bracket: Panel Mount Adapter + Front Protection Cover, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: SI Unit Only, Piping Specification: R 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: -, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: SI Unit Only, Piping Specification: R 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: Panel Mount Adapter + Front Protection Cover, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: R 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: -, Operation Manual: -

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Initial value psi, Piping Specification: R 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: Bracket B, Horizontal Mounting, Operation Manual: -