Electro-Pneumatic Valve NVEP/NVEF Series

A Flow Rate Type (NVEfl which controls air flow by varying current through the solenoid. fi#fr $.E#E ,q Ff i l F l E K f:-J r r l tr-t NVEF2l2c) vEF2isO a t{YEF2l4O Flow Rate (NVEF:I) B -P{ Reasure ryp (l{vEP3t d | | vEP3r20 F'---r-. .l t EBrrO Index 2. 3 Port Electro-Pneumatic Proportional Valve NVEF, NVEP Specifications P O H o w t o O r d e r . . . . . . . .

PA3000/5000/PAX1000

Printed in Japan. 1st printing September, 1999 D-SMC.L.A. P-80 (D)

ARM10/11

A B C D E F G H Composition of assembly Set nut (1349172) ARM2500 136314 30 34 70 5.4 15.4 55 2.3 M33 x 1.5 Bracket (B220) Set nut (131532) ARM3000 136414 41 40 75.5 6.5 8 53 2.3 M42 x 1.5 Bracket (B320) Note) Tighten the set nut securely and fix it.

The cost effective and clean looking AC series allows you to pick a combination of modular style air preparation equipment that best suits your needs. The series, available in 8 size options to ensure optimum performance, offers energy savings, with higher flow rates. Simple assembly and maintenance reduces downtime. Easy maintenance, Attaches with SMC's standard interface, Diverge piping

Air Suction Filter With One-touch Fittings ZFB Series

M Element Replacement Procedure Body Model A B C D E F G H I J K L M N Size ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 12.8 4 6 53 54 8.5 14.4 15.5 50 15 17.5 24 12.5 26 22.5 48 Metric size Inch size 15.2 6 8 9.5 16.6 17.5 61 16 19.5 27 13.5 28 65 24.5 52 Collar part arrow 57 8 10 69.5 70 18.5 11 18 21.5 65 17 21 29.5 14.5 30 27 Transparent cover 3 16 1 4 " 1 4 " 3 8 " 1

ARJ1020F

Description ARJM104, 6, 10 Manifold base How to Order ARJ1020F-M5-06 ARJ1020F-M5-04 M5 ARJ 20 10 F 04 1 Option Miniature regulator 1 Set at 0.2MPa Port size Only the adjusting spring is different from standard.

3 Port Direct Operated Solenoid Valve Metal Seal, Body Ported 1

E F G H J K L M N P U T S R VS3135-02 VS3135-03 VS3135-04 VS3145-04 VS3145-06 VFN 1 4, 3 8, 1 2 64 64 65 70 1 136 35 9 64 54 19 32 50 50 118 96 120 60 7 1 2, 3 4 82 68 88 92 1 181 53 12 81 70 35 36 66 52 133 96 140 66 9 DC C Model VS3135-02 VS3135-03 VS3135-04 VS3145-04 VS3145-06 A B Port size Rc 1 4, 3 8, 1 2 64 50.8 163 196 68 60.5 1 2, 3 4 4-16-7

Compact manifold regulator ARM5 Series

Accessories Pressure gauge Note) Extension tie-rod Symbol Yes Yes None None A B C D Note) Pressure gauges are not compatible with copper-free and fluorine-free specifications. 702 Compact Manifold Regulator ARM5A/B Series Centralized Supply Block 50 2 ARM5A 1 S 01 18.6 ARJ 16 1.

HEC-OM-S008

P V < 2 3 . 0 o C # 1 S V 3 0 . 0 o C M O D E R e m : 0 5.10.4 Circulating fluid set temperature The circulating fluid set temperature can be set by specifying the circulating fluid target temperature during Serial Remote mode.

CEx-OMQ0010

b. c d. 3. 4. a0~60 b25~85%RH c d e 5. f g. h i 6. j k L 2. 7. 8. 1. 9. 2. 10. 11. ()70% ()35% 1. 15% 1. 2. 3 3. () 1. 0.1~1.0MPa 0.3~0.5MPa 0~60 ()35% 2. ) 1. 1. 2. 2. 3. 1. 1. ( 2. 6 ) 3. 2. 50% 4. (6 ) 3. 5. 4. () 0.5 5. 1 2 3. F.G. 1. 4. 1 ISO VG32 1. 2. 1. 2. 3. 1. 2 1. 2. 2. 14.5mT CE2 1.5~2 15,000 18cm 3. 4. IP65 5.

VG342

(Normally open) B 4 VP 5 6 24 VDC 12 VDC Thread type VG Rc Nil G F 7 240 VAC, 50/60 Hz 9 Other VP NPT N Option NPTF T Electrical entry S070 G Grommet D DIN terminal Port size VQ 04 06 10 1 2 Rc T Conduit terminal E Grommet terminal 3 4 Rc Rc 1 VKF Light/Surge voltage suppressor VQZ Nil None S With surge voltage suppressor (Only grommet type is only available.)

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

4 Way 4 and 5 Port Rubber Seal Solenoid Pilot Valve Series SYJ3000 Interchangeable with the NVJ Series Low Power Consumption: 0.5W Base Mounted/Body Ported Configurations Manifolds with Built-in One-Touch Fittings P R O D U C T S Q Q Q Table of Contents Q Q Q Features & Benefits .4-5 Q Q Preferred Option Program .6 Q Specifications Q Valve .8 Manifold .9 Q Q How

3

7 M A Rated flow range Calibration certificate 501 5 to 500 L/min 102 10 to 1000 L/min 202 20 to 2000 L/min Nil None A Note 8) Yes Note 8) Made to Order: Certificate in both English and Japanese Thread type Option 2 Nil Rc N NPT F G Note 1) Nil No bracket With bracket Note 7) Note 1) ISO228 compliant Port size R Symbol Port size Rated flow range 501 102 202 04 1/2 V V 06 3/4 V Note 7

Regulator Unit Combination: Others, Port Size: Rc3/8, Case Material: [Resin] Polycarbonate Case, Case Guard: No, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: -, Residual Pressure Relief 3-Port Connection Valve: None, Set Pressure: -, Pressure Unit: Name plate and pressure gauge unit: MPa, T shape

Regulator Unit Combination: Others, Port Size: Rc3/8, Case Material: [Resin] Polycarbonate Case, Case Guard: No, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: No (No Pressure Port Plug), Residual Pressure Relief 3-Port Connection Valve: None, Set Pressure: 0.05 to 0.7 MPa, Pressure Unit: Name plate

Regulator Unit Combination: Others, Port Size: G1/2, Case Material: [Resin] Polycarbonate Case, Case Guard: No, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: No (No Pressure Port Plug), Residual Pressure Relief 3-Port Connection Valve: None, Set Pressure: 0.05 to 0.7 MPa, Pressure Unit: Name plate

Regulator Unit Combination: Others, Port Size: NPT3/8, Case Material: [Resin] Polycarbonate Case, Case Guard: No, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: -, Residual Pressure Relief 3-Port Connection Valve: None, Set Pressure: -, Pressure Unit: Name plate and pressure gauge unit: MPa, T shape

Regulator Unit Combination: Others, Port Size: NPT1/2, Case Material: [Resin] Polycarbonate Case, Case Guard: No, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: -, Residual Pressure Relief 3-Port Connection Valve: None, Set Pressure: -, Pressure Unit: Name plate and pressure gauge unit: MPa, T shape

Speed Controller: Standard Type Large Flow In-line Type AS Series

Description Material AS800 AS900 6 7 8 O-ring O-ring Spring NBR NBR Stainless steel KA00069 KA00460 14115 KA00072 KA00462 14124 ASN AQ ASV Dimensions: AS420/500/600 Dimensions: AS800/900 AK VCHC ASR ASQ 2 x Port size 2 x Port size L3 L2 L1 D Dimensions L1 L2 D Min. L3 (1) Model Port size Max.

CEx-OMQ0013

YES NO NO 2 YES YES NO NO YES 10 2-2 (CEU2) (AC100V,15) (24V10,0.4A) (0.3MPa0.5MPa) 3) () (CE1-R**) (CE2**) 11 2-3 40 VFS240R VFS210 AR425 8/6 AN200-02 AS4000-02 50 VFS240R VFS210 AR425 10/7.5 AN200-02 AS4000-02 63 VFS340R VFS210 AR425 12/9 AN300-03 AS4000-03 80 VFS440R VFS310 AR425 12/9 AN300-03 AS420-03 100 VFS440R VFS310 AR425 12/9 AN400-04 AS420-04 12 * 3. 3-1 () 40 50 63 80