Basic type / Direct mount type Series CY3B/CY3R

TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 CY3B6 CY3B10 CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 CY3B50 CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d b C H B DH 4 4 8 8 10 B 8 14 26 32 41 C 9.2 16.2 30 37 47.3 d M6 x 1.0

Aluminum High Vacuum Angle Valve

-1-1 XLG160-30-1H-1 100 XLA100-30-1 XLA100A-30-1 XLA100-30-1H XLA100A-30-1H XLAV100-30-1 XLAV100A-30-1 XLC100-30-1-1 XLC1 00-30-1H-1 XLF100-30-1 XLF100A-30-1 XLF100-30-1H XLF100A-30-1H XLFV100-30-1 XLFV100A-30-1 XLD100-30-1 XLD100-30-1H XLDV100-30-1 XLG100-30-1-1 XLG100-30-1H-1 80 XLA80-30-1 XLA80A-30-1 XLA80-30-1H XLA80A-30-1H XLAV80-30-1 XLAV80A-30-1 XLC80-30-1-1 XLC80-30-1H-1 XLCV80

Fieldbus System

thread (Rc, G, NPT/NPTF) 3/4 [3(R) port] 1/2: 1/2" Female thread (Rc, G, NPT/NPTF) 1/2 [1(P) port] 11.5 15.7 101.2 8 95.5 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 77.3 72 56.6 43.5 42.7 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 20.6 21.5 11.5 1/8: 1/8" Female thread (Rc, G, NPT/NPTF) 1/8 (External pilot port) 27 31 1/8: 1/8" Female thread (Rc, G, NPT/NPTF) 1/8 (Pilot EXH port) 38.7 (6.5) 25 65.5 1/4, 3/8,

MY1

1 !2 !

Digital Flow Switches

g 1,100 g Port size (Rc, NPT, G) 3/8 3/8, 1/2 1/2, 3/4 3/4, 1 Note 1) The system accuracy when combined with PF2W2/3.

Fieldbus System

thread (Rc, G, NPT/NPTF) 1/2 [1(P) port] 11.5 101.2 15.7 8 95.5 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 77.3 72 56.6 43.5 42.7 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 20.6 21.5 11.5 1/8: 1/8" female thread (Rc, G, NPT/NPTF) 1/8 (External pilot port) 27 31 1/8: 1/8" female thread (Rc, G, NPT/NPTF) 1/8 (Pilot EXH port) 38.7 (6.5) 25 65.5 1/4, 3/8, C8, C10, C12 [4(A), 2(B) port] 1/4: 1/4" female thread (Rc

Compact Manifold Regulator Series ARM5

8 1 8 ARM1000 57 1 8 1 8 VEX1 1 4 1 8 ARM2000 136 1 8 1 8 SRH How to Order SRP ARM 1000 A1 5 01 G SRF Option Regulator for manifold Nil 1 0.7 MPa setting (Standard) 0.2 MPa setting ARX20 Number of stations Note 1) Pressure gauge for 1.0 MPa is used.

ZP

1 2 3 5 8 0 0 0 1 1 3 5 8 16 27 53 84 1 0 0 1 1 0 ZCU AMJ Misc.

JXCx-OMT0001CN

[] (1) ():1 ():1 Undefined No.11 1 4096 X 800 1 (2) ():1 ():2 1600 1 (3) ():2 ():1 400 1 ):1 ():1 01 40974096 1 1 [] 1 LEY16C-300 2.5mm 1/1 2 LEY16B-300 5mm 25/50 3 LEY16A-300 10mm 25/100 1 800 2.5mm Undefined No.12 1 4096 X 2 3 =1 /2 (3 ) =2.5mm/5mm (2.5mm/10mm) =25/50 (25/100) 1 -50No.JXC-OMT0001CN-C 9.3 XX X () 1:CW 2:CCW X ORIG direction 1 2 1 2: XX ORIG

HRX-OM-T002

HRX-OM-T002 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before using the product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.4 Product Label . 1-3 1.5 Safety Measures . 1-4 1.5.1 Safety Instructions for Use . 1-4 1.5.2 Personal protective equipment . 1-4 1.6 Emergency Measures.

HRX-OM-W032

HRX-OM-W032 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before Using the Product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.4 Product Label . 1-3 1.5 Safety Measures . 1-4 1.5.1 Safety instructions for use . 1-4 1.5.2 Personal protective equipment . 1-4 1.6 Emergency Measures.

HRX-OM-S004

HRX-OM-S004 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before using the product . 1-1 1.2 Reading the Manual . 1-1 1.3 Hazards . 1-2 1.3.1 Level of hazards . 1-2 1.3.2 Definition of Serious injury and Minor injury . 1-2 1.4 Product Label . 1-3 1.5 Safety Measures . 1-4 1.5.1 Safety Instructions for Use . 1-4 1.5.2 Personal protective equipment . 1-4 1.6 Emergency Measures.

2-Color Display Digital Flow Switch Series PFM

Piping Variations PFM Female thread: Rc 1/8, 1/4 NPT 1/8, 1/4 G 1/8, 1/4 One-touch fitting: 4, 6, 8, 1/4 Bottom Straight Bottom Straight PFMV Without flow adjustment With flow adjustment PF2A S S 1 2 1 2 S S 1 1 2 2 PF2W PF2D IN 1 IN 1 IN IN IF S S 1 2 S 1 2 S 1 2 1 2 IN IN 1 IN IN 1 Mounting Bracket Bottom mounting Panel mount DIN rail Through-hole mounting 901 Main Functions Selection

5 Port Solenoid Valve, Series VQC

EXH spacer VVQ4000-R-1SUP/EXH block plate VVQ4000-16A 02 03 ^{Residual pressure release valve perfect spacer VVQ4000-25A-1 Note 1) SUP stop valve spacer VVQ4000-37A-1 Interface regulator ARBQ4000-00-1 A B P Throttle valve spacer VVQ4000-20A-1 PUSH LOCK Note1) Perfect spacers with residual pressure release valve cannot be combined with external pilot specifications}

Tamper Proof and Flat Head Screw

Applicable cylinder bore size (mm) Metric sizes (mm) Inch sizes (inches) Cylinder side port size Elbow type Model AS121F AS221F AS321F AS421F 3/16 1/4 5/16 3.2 4 6 8 10 12 6 to 20 20 to 40 40 to 63 63 to 100 1/8 5/32 3/8 1/2 M5 1/8, 1/4 1/4, 3/8 1/2 Universal type AS131F AS231F AS331F AS431F 6 to 20 20 to 40 40 to 63 63 to 100 M5 1/8, 1/4 1/4, 3/8 1/2 Speed controller with One-touch fitting

AC Servo Motor Driver (SSCNET /H Type)

temperature of servo motor 1 SD (Note 1) (Note 1) (Note 1) 46.2 Abnormal temperature of servo motor 2 SD (Note 1) (Note 1) (Note 1) 46 Servo motor overheat 46.3 Thermistor disconnected SD (Note 1) (Note 1) (Note 1) (Note 1) 46.5 Abnormal temperature of servo motor 3 DB (Note 1) (Note 1) (Note 1) 46.6 Abnormal temperature of servo motor 4 DB (Note 1) (Note 1) (Note 1) 47 Cooling fan error

A_HEC-OM-K001

A_HEC-OM-K001-1.7 Contents Contents Chapter 1 Safety Instructions . 1-1 1.1 Before using the Chemical Thermo-con . 1-1 1.2 Safety training . 1-1 1.3 Hazard Levels . 1-2 1.3.1 Definitions of Serious injury and Minor injury . 1-3 1.3.2 Symbols . 1-3 1.4 Hazard Warning Labels . 1-5 1.4.1 Location of hazard warning labels . 1-6 1.5 Safety Measures . 1-12 1.5.1 Precautions . 1-12 1.5.2 Protective

5 Port Air Operated Valve

0.76 (A)4 2(B) 1 (P) (EA)5 3(EB) 2 position double VFA1000 VFA3000 (B)2 4(A) 5(EA) 1 (P) (EB)3 Body ported Base mounted VFA3000 VFA5000 1/8 1/4 4.0 P.1498 2(B) (A)4 (EA)5 1 (P) 3(EB) Upward 3 position closed center 2(B) (A)4 VFA5000 (EA)5 1 (P) 3(EB) 3 position exhaust center 2(B) (A)4 1/4 3/8 8.8 (EA)5 1 (P) 3(EB) 3 position pressure center 2(B) (A)4 Lateral (EA)5 1 (P) 3(EB) VFA3000 2

3 Port Air Operated Valve Series SYJA300 1

Rc 1/8 Body ported 80 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 M5 x 0.8 130 (Without subplate 80) N.C. Base mounted (with sub-plate) SYJA724-01 SYJA724-02 N.O.

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

8 1 8 1 8 1 8 Note 1) M thread (M5 x 0.8) is applicable for 12 and 16 piping ports.