HRX-OM-X037

HRL Series 3.3 Installation 3-41 HRX-OM-X037 Chapter 3 Transport and Setting Up Recommended piping circuit User's equipment Thermo-chiller 1 2 2 Circulating fluid outlet for CH2 Optical 2 2 systems Circulating fluid return port CH2 1 4 4 Circulating fluid outlet CH1 for Laser 4 4 source Circulating fluid return port CH1 3 For water-cooled type 5 4 6 Facility water inlet Facility 4 5 water

PF2A/PF2W

Connector pin numbers PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 4 0.5 4 0.5 4 3 16 2 16 2 40 5 40 5 2 1 Pin no.

Digital Flow Switches

Connector pin numbers PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 4 0.5 4 0.5 4 3 16 2 16 2 40 5 40 5 2 1 Pin no.

Digital Flow Switches, Series PF2A, Series PF2W

Connector pin numbers PF2W504T--1 PF2W520T--1 PF2W540T--1 PF2W504T--2 PF2W520T--2 PF2W540T--2 4 0.5 4 0.5 4 3 16 2 16 2 40 5 40 5 2 1 Pin no.

Model Selection 1

Single unit 1/8 to 3/4 2, 3, 4, 5, 7, 10 0 to 2 (1) 17-2-36 VV2CL2/3/4 N.C. Manifold 2, 3, 4, 5, 7 1/8, 1/4, (3/8) 17-2-42 VCS20/30/40 Single unit N.C. 2, 3, 4, 5, 7, 10 1/8 to 3/4 0 to 1 (1) 17-2-46 VV2CS2/3/4 N.C. Manifold 2, 3, 4, 5, 7 1/8, 1/4, (3/8) 2 port Direct operated 2, 3, 4, 5, 7, (10) (2) 17-2-52 VCW20/30/40 Single unit N.C.

Vacuum Unit

) () () () () () () 24 23 22 21 20 19 18 17 16 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 Release valve Supply valve Supply valve 1 1 2 2 stations Release valve 2 stations Release valve 14 Supply valve 2 Supply valve 3 4 3 stations 15 Release valve 3 stations Release valve 3 5 6 Supply valve Supply valve 16 4 stations Release valve 4 stations Release valve 4 7 8 Supply valve 17 Supply valve 5 5

Vacuum

ts 4 ly""iliffifl"yi;i'':1t.:t Statlons 02-2 stations System type. AEjectors B External Vacuum 'For plug (X) posirioning onty.

Vacuum

ts 4 ly""iliffifl"yi;i'':1t.:ti Statlons 02-2 stations System type. AEjectors B External Vacuum 'For plug (X) posirioning onty.

ZQ-OM01401

) (3) (4) 1 (1) 2) 01 1 S () 02 2 P () : 08 8 (3) (PD) 1) 1 B (: P ) 3 (: PD ) C 2) 1) 3)12S 0.5 8 0.7 6 (4) 1.0 4 2) 8 4 A 4) Assy 6 - No.ZQ-OM01401-B ZQ000 U A-K15L B-EA M G-3 3-N (1) (2) (3) (4) (5) (6) (7) (8) (9) (10) (1) U (6) M 6) (2) M SI (kPa) 6) (:psi) P K1 N.C.

HRL

45 0.5 to 45*9 0.5 to 45 Circulating fluid system Pump capacity Particle filter nominal filtration rating (Accessory) m 5 5 5 5 5 5 Circulating fluid outlet, circulating fluid return port CH1: Rc1 (Symbol F: G1, Symbol N: NPT1)/CH2: Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) Tank drain port CH1: Rc3/4 (Symbol F: G3/4, Symbol N: NPT3/4)/CH2: Rc1/2 (Symbol F: G1/2, Symbol N: NPT1/2) CH1: Stainless

RHC

2-B 1-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B 2-A 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B 2-B 20 8, 10 1/4 CX 500 9.5 0 1,000 2,000 3,000 CY Maximum speed Vmax (mm/s) 50 12, 16 1/4, 3/8 1000 19 MQQ M 63 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 3/8, 16 3/8

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

fitting for 4 Elbow bottom ported With One-touch fitting for 6 M5 threads Elbow with mixed port sizes Nil None Back pressure check valve on all stations Note 2) C3 C4 C6 M5 CM B D D G1 G2 G3 J K N R S With DIN rail (Rail length: Standard) With DIN rail (Rail length: Special) Note 3) Regulator unit with 1 unit Note 4) U side n Regulator unit with 2 units Note 4) L3 8 7 6 5 4 3 2 1 Regulator

High Power Cylinder Series RHC

A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B 6 1/8,1/4 500 1.5 0 1,000 2,000 3,000 6 1/4, 3/8 10 1/4, 3/8 Maximum speed Vmax [mm/s] 1000 3 25 20 1500 4.5 Composite effective area So [mm] Composite effective area So [mm] Composite effective area So [mm] 10 1/4,3/

ISA2

Example) G36-P4-01-X30 Regulator 2 Port Solenoid Valve AR 20 E 02 1 VCA27A S 5 DL 02 4 Q Port size Thread type Voltage CE marked 02 02N 02F Rc 1/4 NPT 1/4 G 1/4 Rc NPT G Nil N F 1 2 3 4 5 6 36 100 VAC 200 VAC 110 VAC 220 VAC 24 VDC 12 VDC 230 VAC Throttle Option (The shape of pressure gauge) Note 2) Nil S B K Without throttle and manual lock With throttle With manual lock With manual lock

Title not found

r^rE_aEIl_I ItrtrElEll+trMElr cG1 C D G l T T series i I .2: 3. .4, i.5. .6-l '?

Title not found

2.2A (53J 8 . 1 1 1206) 2.O5 l52l '11.2\2 6 0 (66J 8 4 3 (?

5 Port Solenoid Valve Series SQ1000/2000

1.TURN B 74.5 28 5.5 35 13 Approx. 10 2-M4 clamping screw Applicable connector: Flat cable connector (20P) (conforms to MIL-C-83503) Triangle mark indicator position EXH. outlet Approx. 9 D side U side Station 1 2 3 4 5 6 7 8 n 37 60 Approx. 9 Release for switching connector direction C8: R(EXH) port C8: P(SUP) port For top ports 4 4 4 4 4 4 4 4 R 3 2 2 2 2 2 2 2 2 P 1 13 29.5 26 2n-C3,

IZN10_C

IZ*-OMS0001 : : IZN10 IZN10 IZN10 IZN10 0120-837-838 9:00~1700~ -1- 1. 1. 1. 1. 3 3 3 3 2. 2. 2. 2. 5 5 5 5 3. 3. 3. 3. 6 6 6 6 4. 4. 4. 4. 4 4 4 4-1. 1. 1. 1. 7 7 7 7 4 4 4 4-2. 2. 2. 2. 10 10 10 10 4 4 4 4-3. 3. 3. 3. 16 16 16 16 4 4 4 4-4. 4. 4. 4. 17 17 17 17 4 4 4 4-5. 5. 5. 5. 17 17 17 17 5. 5. 5. 5. 18 18 18 18 6. 6. 6. 6. 20 20 20 20 7. 7. 7. 7. 7 7 7 7-1. 1. 1. 1. 21 21 21 21 7

3 Port Solenoid Valve Rubber Seal Series SY100 1

For blowing off 2. For vacuum control 3. For driving single acting cylinders 4.

Air Cylinder CP Series Cylinder Positioner Assembly

2.2A (53J 8 . 1 1 1206) 2.O5 l52l '11.2\2 6 0 (66J 8 4 3 (?