MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

Body size 3 4 5 6 1 Pressure gauge 8 3 ARX 1 2 None With pressure switch Nil S None Adapter assembly 4 3 1/4 3/8 1/2 3/4 1 AMR AMR Port size Thread type Thread type ARM Symbol Port size Nil N F Nil N G Rc NPT G Rc NPT G 02 03 04 06 10 1/4 3/8 1/2 3/4 1 The port size of adapter assembly is same as the port size of the body.

Sine Cylinder Series REC

3 w !0 @3 @2 !1 !2 !5 !4 y u i o @1 @0 !8 !6 Component Parts Component Parts Qty. No. Description Material Note No.

Sine Cylinder Series REC

3 w !0 @3 @2 !1 !2 !5 !4 y u i o @1 @0 !8 !6 Component Parts Component Parts Qty. No. Description Material Note No.

Sine Cylinder Series REC

3 w !0 @3 @2 !1 !2 !5 !4 y u i o @1 @0 !8 !6 Component Parts Component Parts Qty. No. Description Material Note No.

Clean Gas Filter

Helium leak volume 4.0 x 10-9 Pam3/sec or less Case/Cover Stainless steel 316 (Interior/Exterior: Electrolytic polishing) Main material Filter medium PTFE membrane Seal Fluororubber (FKM) -8- 2-3 Dimensions 1) SFC100-02, SFC100-03 Model A SFC100-02 Rc1/4 SFC100-03 Rc3/8 2) SFC102-02, SFC102-03 Model A SFC102-02 TSJ1/4 SFC102-03 TSJ3/8 3) SFC105-02, SFC105-03 Model A B C SFC105-02 URJ1/4 22

IS3000

0 1 Standard Micro load Port size Nil 02 N02 With gasket Rc 1/4 NPT 1/4 16-9-3 2 Series IS3000 Construction Precautions IS3000-02/3010-02 (Rc 1/4 thread) Be sure to read before handling.

Manifold Specifications

(Side) (Side) Conduit terminal Conduit Grommet VZS 1 4 1, 1 VFS 1 4 , 3 8 1 8 , 1 4 1 8 , 1 4 Individual EXH (Side) (Side) (Bottom) VS4 Optional piping: Individual SUP and different pressure SUP .

Table of Contents

@2, @3, @4, #2, #3, $1, $2 Seal kit includes @1 to @4, #2, #3, $1, $2.

LEC-OM02904

( 2.1) 3. 4. 5. 46 1. 40 0 40 2. 1. 2. 3. 3. 47 1. (2.6) 2. 3. 8 12 8 (2) 50 1 1. 1. 2. 3. 4. 5. 1 2. 2(51) 1. 2. 3. 1 3. 1. 12 2. 3. 4. 4. OFF 8 13 8 (2) 51 2 1. 2. 1. 2. 3. 4. 3. 1. 2. 3. 4. UVW UVW 5. OFF 1 6. 7. 8 14 8 (2) 52 3 (1.2 ) 1. 4 2. 3. 1. 2. 4. (No.PB08) 5. 1. 2. 3. 6. 1. 2. 7. 8.

HRX-OM-W002

3 3 2 2 2 1 1 1 3 2 3 2 1 1 4 1 2 3 1 4 Model /A /B A E E B 3 2 1 1 BK BL BR BR BR BR BR BR BL BL BL BL BL BL BL BL BL RS232C DIO RS485 FG 13 15 16 12 10 11 14 6 8 9 3 5 7 2 4 1 13 15 16 12 10 11 14 1 1 11 6 8 9 3 8 3 9 6 9 3 6 7 2 5 2 5 7 5 7 2 10 12 13 15 1 4 4 4 14 Thermister T3 t BR BR BR BR BR BR BL BL BL BL BL BL BL BL BL BL BR BR BR BR BR BL BL BL BL BL BL BL BL BL BL BL BL BL BL BL

HRX-OM-X084

breaker PT1 White 20 2A Circulating fluid outlet White 21 3A 22 (CN6) 1/3 Blue 23 21 24 Brown 35 Black Black Black Black 25 Blue 36 FL Flow rate sensor 26 Black 34 27 (CN5) 1/3 Brown 28 White 1 1 1 2 1 3 3 1 2 4 6 7 5 Circulating fluid returnT1 8 9 White Blue (CN1) 2 2 (CN2) (CN6) 1/2 Brown Black (CN6) 3/3 1 3 37 Refrigerator suctionT2 2 4 Black Blue PCB1 38 Circulating fluid outlet 39 Brown

Series VQ Base Mounted Metal Seal/Rubber Seal

1> 0 1 3 4 5 2 6 7 8 9 1 2 3 6 7 0 4 5 Sl unit output No. Sl unit output No.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

How to Order JSXZ 3 1 C N 02 R 5 G D B w y e r t u o !

HRX-OM-X071

cooled type) . 2-4 2.3 Function of Parts . 2-5 2.4 Operation display panel . 2-6 Chapter 3 Transport and Setting Up . 3-1 3.1 Transport. 3-1 3.2 Installation . 3-2 3.2.1 Environment . 3-2 3.2.2 Location . 3-4 3.2.3 Installation and Maintenance Space . 3-6 3.3 Installation . 3-7 3.3.1 Mounting. 3-7 3.3.2 Electrical wiring . 3-8 3.3.3 Preparation and wiring of power supply cable .3-10 3.3.4

REA/REB

Contents Data Set of nos. above @8, @9, #0, #1, #2, #3, #4 REAL10-PS 15 REAL15-PS 10-2-43 43 Series REAL Construction: 20 to 40 @3 !7 #3 !6 @8 #1 !0 !2 !9 u o i @7 @9 @5 @6 @4 e y r !3 q #0 !1 w @0 !8 t !4 !5 @2 @1 #2 #4 #5 #7 #6 #8 Component Parts No. Description Cylinder tube No.

REA/REB

M CV MVGQ L1 CC We = 5 x 103 WgU = 5 x 103 x 1 x 9.8 x 300 = 15 [N] Me3 = 1/3We (L2A) = 1/3 x 15 x 0.182 = 0.91 [Nm] 3 = Me3/Me3max = 0.91/10 = 0.091 3. Dynamic moment RB Me3 Guide central axis J L2 We W Examine Me3.

REA/REB

0 e w #1 #3 !1 @0 i !7 @3 @1 @7 @2 @6 @5 #0 REAL10 Parts list Parts list Note No. Description No.

5 Port Solenoid Valve, Series VQC

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing

Sine Rodless Cylinder Series REA/REB

3 !8 !7 @7 #1 @9 !0 t y e i u !2 !1 w #3 !6 @4 @5 @2 @1 r #0 #4 #2 o !5 @8 @3 @6 REBHT32 Component Parts Component Parts No. Description No.

S Couplers Series KK/KKH/KK13

KKA9S-10M -12M -14M KKA3S-01M-1 -02M-1 -03M-1 KKA4S-02M-1 -03M-1 -04M-1 KKA6S-03M-1 -04M-1 -06M-1 R 1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/2 R 3/4 R 1 R 3/4 R 1 R 1 1/4 R 1 R 1 1/4 R 1 1/2 R 1/8 R 1/4 R 3/8 R 1/4 R 3/8 R 1/2 R 3/8 R 1/2 R 3/4 R 1/2 R 3/4 R 1 R 3/4 R 1 R 1 1/4 R 1 R 1 1/4 R 1 1/2 1/8 1/8 1/4 1/4 With check valve 1/2 1/2 3/4 3/4 1 1 Without check valve 1 1