Compact Cylinder with Solenoid Valve/

Minimum Stroke for Auto Switch Mounting (mm) D-M9 10 D-M9V 5 D-M9W 15 D-M9WV 10 D-A9 10 D-A9V 5 Number of auto switches mounted Bore size (mm) 32 1, 40 50 2, 63 1 10 5 15 15 10 10 2 1 The outline dimensions for 5 mm stroke will be the same as those for 10 mm stroke. 2 The outline dimensions for 10 mm stroke will be the same as those for 15 mm stroke. 7 Prior to Use Auto Switches Common Specifications

3 Port Solenoid Valve

Z type 24 VDC: 7% to +10% 12 VDC: 4% to +10% T type 24 VDC: 5% to +10% 12 VDC: 6% to +10% Response Time Response time ms (at 0.5 MPa) 7 or less Mass Valve model Number of solenoids 1 pc. (Single) 2 pcs.

PFxx-OMX0007

oC Detection method Heating type sensor (branch flow type) Rated flow range 10 to 1000 L/min 20 to 2000 L/min Instantaneous flow 10 to 1050 L/min 20 to 2100 L/min Set point range Accumulated flow 0 to 999,999,999,990 L Flow specifications Instantaneous flow 1 L/min 2 L/min Minimum resolution Accumulated flow 10 L Accumulated volume per pulse (Pulse width = 50 msec.)

HRX-OM-I051

Alarm1 Water Leak Detect FLT 01 Alarm2 Incorrect Phase Error FLT 02 Alarm3 RFGT High Press FLT 03 Alarm4 CPRSR Overheat FLT 04 Alarm5 Reservoir Low Level FLT 05 Alarm6 Reservoir Low Level WRN 06 Alarm7 Reservoir High Level WRN 07 Alarm8 Temp. Fuse Cutout FLT 08 Alarm9 Reservoir High Temp. FLT 09 Alarm10*1 10 Alarm11 Reservoir High Temp.

IMPACT BLOW GUN

.*2 Screw-in type Nil Without nozzle 01 Symbol Size Nil Rc3/8 N NPT3/8 F G3/8 50 mm IBG1-12-10-50 02 100 mm IBG1-12-10-100 03 150 mm IBG1-12-10-150 04 300 mm IBG1-12-10-300 11 Long nozzle*1 With S coupler/One-touch fitting 50 mm IBG1-12-10-50S 12 100 mm IBG1-12-10-100S 13 150 mm IBG1-12-10-150S 14 300 mm IBG1-12-10-300S Symbol Applicable tubing O.D. Part no.

No more element replacement!

How to Order 0 N FNR10 10 Size Port size Symbol 0 1 1.1 l Symbol Capacity Applicable model Port size 10 Rc1 FN11l1 FN11l2 1.8 l Seal material Symbol N V NBR Material FKM Specifications FNR100V-10 FNR101N-10 FNR101V-10 Model FNR100N-10 1.1 l Tank capacity 1.8 l Port size Rc1 Bowl & Cover Stainless steel 304 Material O-ring FKM FKM NBR NBR Weight 1.5 kg 1.9 kg FN11l1l (Element l 250) FN11l2l

CKZ2N

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 FAX: 03-5298-5362 URL http://www.smcworld.com 2006 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing KQ printing KQ 120DN Printed in Japan.

PEEK

LU B edition Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 FAX: 03-5298-5362 URL http://www.smcworld.com 2007 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing JU printing LU 13500DN Printed in Japan.

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External pilot solenoid SGH 1 Y A G 1 T Z B1 10 0 30 3 SGHA 1 A G B1 10 0 3 30 Air operated q w e r t y u i o !0 !1 !

In-line Air Filter

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2012 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing QY printing QY 8150SZ Printed in Japan. D-G

Compressed Air Preparation Filter

70 0.01 2 40 6000 100 40 0.1 3 90 1000 20 1 4 10 +3 5 5 10 +7 6 0 < Cp 5 +10 7 5 < Cp 10 Cw 0.5 8 0 < Cw 5 9 5 < Cw 10 x Cp > 10 Cw > 10 > 5 [How to Perform a Test to Check the Performance] ISO 12500, which sets out the test method to be used in order to check the filter performance for each of the three kinds of contaminants, is indicated below.

New

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2012 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing QW printing QW 8150SZ Printed in Japan. D-DN

Low Profile

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 https://www.smcworld.com 2019 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing AA printing AA 0AA Printed in Japan. D-G

c

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2012 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing QQ printing QQ 7850SZ Printed in Japan. D-DN

Process Pump

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 URL http://www.smcworld.com 2010 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing OY printing OY 7150SZ Printed in Japan. D-DN

Peltier-type Chiller Thermo-con/ Compact Type

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 https://www.smcworld.com 2022 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. D-G

2/3 Port Valve

B(9.5) B(12.7) B(19.1) 1B(25.4) 1 B(31.8) 1 B(38.1) 2B(50.8) VNA 111 211 311 411 511 611 711 AS 420-03 420-04 500-06 600-10 800-12 900-14 900-20 Caution Warning 1Piping When operation is suspended, surge pressure will be generated between the cylinder and VNA11A.

Vacuum Pad with Ejector

Piping 10 7.1 Piping connections to the PD Ports 10 7.2 Piping connections to the Supply (P) port 11 8. Construction 12 9. Dimensions 15 10.

Cylinder with lock

Cylinder specification Bore size (mm) 32 40 50 63 80 100 Double acting/single rod Operating method Air Fluid 1.5MPa Proof pressure 1.0MPa Max. operating pressure 0.08MPa Min. operating pressure Without auto switch: -10 to 70 With auto switch -10 to 60 Ambient and fluid temperature Operating fluid temperature Not required (non-lube) Lubrication 50~1,000mm/s * Piston speed Allowable stroke

SYJ300-OMU0003

SYJ700 1 1 SYJ700-9-1(-Q) 1/8 7 2 SYJ700-9-2(-Q) 1/4 3 8 V111(T)4 Assy SYJ5000-13-3A 5 Assy 6 SUS CE -Q 3 SYJ700 SYJ7000 SYJ700 SYJ7000 SYJ7000 3 A B Assy SYJ700-3-1A(-Q) SYJ700-3-2A(-Q) SYJ700 SYJ700 M3 : 0.8N.m O 21 No.SYJ300-OMU0003 Assy SYJ72(R)(-Q)) (SYJ74(R)(-Q)) SYJ700-10-1A M3 : 0.8N.m :SYJ700-10-2A , (SYJ700-5-3) SYJ700-10-1AAss'y CE SYJ700-10-2A-1-Q SYJ700