Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

117 112 107 102 97 92 87 82 196 186 176 171 166 156 146 141 136 131 126 121 116 111 106 60 40 30 182 172 162 157 152 142 132 127 122 117 112 107 102 97 92 212 202 192 187 182 172 162 157 152 147 142 137 132 127 122 70 50 40 8-29-9 10 Series CXS Proper Auto Switch Mounting Position (Detection at stroke end) Electrical entry direction: Inward Electrical entry direction: Outward D B A C Operating

CXS

132 142 147 152 162 CXS25 212 122 127 132 137 142 147 152 157 162 172 182 187 192 202 70 50 40 97 182 92 112 117 122 127 132 142 152 157 162 172 102 107 CXS32 17 Series CXS Auto Switch Proper Mounting Positions for Stroke End Detection Electrical entry direction: Inward Electrical entry direction: Outward D B A C B D-Z7, D-Z8, D-Y7W D-Y5, D-Y7 D-Y6, D-Y7V D-Y7WV D-Y7BAL Bore size (mm) A

Electric Actuator/Slider Type

cable Lock cable (3.5) 15 20 Motor cable (2 x 5) 20 20 Cable length 400 65 65 Cable length 250 132.5 Cable length 250 Motor cable (2 x 5) 5H9 ( ) depth 8 (Depth of counterbore 3) + 0.030 0 65 (2.4) 137 94 (2.4) 73.5 116.5 4 x M6 x 1 thread depth 12.5 (Depth of counterbore 3) 7.5 44 7.5 Body mounting reference plane Note 1) 60 5.5 5H9 ( ) depth 8 (Depth of counterbore 3) + 0.030 0 42 70 122

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

ZZ + Stroke H 3.5 (mm) ZZ S P I E D A H H1 13.5 10.5 10.5 10.5 FL Bore size H2 41 32 32 26 B2 22 17 17 13 B1 AL K 11 8 8 8 13 F 12 10 8 6 KA MM NA NN G 0 50 45 45 41 6 6 5 8 8 8 40 32 25 20 24 22 22 18 21 19.5 19.5 15.5 14 12 10 8 20-0.033 M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 M26 x 1.5 M26 x 1.5 M20 x 1.5 46.5 37.5 33.5 28 7 5.5 5.5 5 42.5 34.5 30 24 154 122 120 116 1/8 88 64 62 62 16

SMC Pneumatic Clean Series

MM NA 20, 25 2-Eh8 D Standard port Relief port 45 AL 1.5 A 1.5 K F N N H S + Stroke F ZZ + Stroke 32, 40 (mm) H2 22 17 17 13 B1 41 32 32 26 B2 H H1 11 8 8 8 13 F Bore size AL K MM NA NN G ZZ S P N I E D A 0 50 45 45 41 6 6 5 8 8 8 14 12 10 8 20-0.033 21 19.5 19.5 15.5 154 122 120 116 1/8 24 22 22 18 40 32 25 20 42.5 34.5 30 24 21.5 15 15 15 88 64 62 62 7 5.5 5.5 5 46.5 37.5 33.5 28 M26 x

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Cylinder stroke (mm) Refer to Standard Stroke on page 7-6-122. Applicable Auto Switch/Refer to page 7-9-1 for further information on auto switches.

Battery-less

100 45 LEFS25E-150 100 45 LEFS25E-200 220 45 LEFS25E-250 220 45 LEFS25E-300 340 45 LEFS25E-350 340 45 LEFS25E-400 340 45 LEFS25E-450 460 45 LEFS25E-500 460 45 LEFS25E-550 580 45 LEFS25E-600 580 45 LEFS25E-650 580 45 LEFS25E-700 700 45 LEFS25E-750 700 45 LEFS25E-800 820 45 30 LEFS Series Battery-less Absolute (Step Motor 24 VDC) Dimensions: In-line Motor LEFS32E 5H9 (+0.030 0 ) depth 5 (122

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

depth 4 +0.030 0 4H9 ( ) depth 4 +0.030 0 B-B A-A (mm) Model F 28 28 38 34 34 36 36 N 4 4 4 6 6 8 10 G 18 18 20 9 23 12 H 32 32 40 39 36 36 NN 2 2 2 3 3 4 5 GA 18 18 20 38 48 59 84 HA 32 32 40 39 39 72 72 I 12 12 14 15 13 17 17 J 34 34 42 58 70 110 135 K 26.5 36.5 46.5 56.5 66.5 91.5 116.5 KA 117.5 142.5 NA 4 4 4 4 4 8 8 M 67 67 77 94 104 148 173 Z 66 66 76 93 103 147 172 ZZ 95 95 105 122

CV/MVGQ

RB J Stroke range QY H H1 H2 HX I K MM N NA NN S ZZ F Q Eh8 B1 B2 D AL A Bore size (mm) 20 25 32 40 Up to 300 19.8 14 41 5 8 65.3 28 5 M8 x 1.25 15 24 M20 x 1.5 62 116 13 8 15.5 13 26 18 20 0 0.033 DUp to 300 45 120 13 22 14 6 8 70.5 33.5 5.5 M10 x 1.25 15 30 M26 x 1.5 62 19.5 17 32 10 22 26 0 0.033 Up to 300 13 25.8 16 45 6 8 76.5 37.5 5.5 M10 x 1.25 15 34.5 M26 x 1.5 64 122 19.5 17 32 12

CV/MVGQ

RB J Stroke range Q H1 NN F H MM ZZ H2 HX QY I K N NA S AL A B2 D Eh8 B1 Bore size (mm) 20 25 32 40 Up to 300 13 41 116 14 5 62 19.8 5 8 65.3 28 M8 x 1.25 15 24 M20 x 1.5 18 8 15.5 13 26 20 0 0.033 DUp to 300 13 45 120 14 5.5 62 22 6 8 70.5 33.5 M10 x 1.25 15 30 M26 x 1.5 22 10 19.5 17 32 26 0 0.033 Up to 300 13 45 122 16 5.5 64 25.8 6 8 76.5 37.5 M10 x 1.25 15 34.5 M26 x 1.5 22 12 19.5 17

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Screw Drive LEFS Series AC Servo Motor Dimensions: Motor Parallel LEFS32R 5H9 ( ) depth 8 (Depth of counterbore 3) +0.030 0 With lock/LEFS32V7-B W X (2.4) 4 x M6 x 1 thread depth 12.5 (Depth of counterbore 3) Encoder cable (7) Motor cable (7) LEF Z Body mounting Note 1) reference plane LEJ 60 132.5 LEL 44 LEM LEY 5.5 5H9 ( ) depth 8 (Depth of counterbore 3) +0.030 0 LES 42 70 LEPY LEPS (122

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

124 151 Double lock 123 123 123 147 Double lock 128 132 132 156 Front lock 142 146 148 179 20 25 32 40 Clevis Rear trunnion Bore size (mm) Z ZZ Double lock 139 143 143 167 Z ZZ Double lock 163 167 167 201 Double lock 129 133 133 156.5 Rear lock 143 147 147 182 Rear lock 118 122 122 148.5 Rear lock 128 132 132 159 Rear lock 152 156 156 193 Front lock 144 148 150 185 Front lock 119 123 125

CLK1

Shaft: 12d9 Clevis width CLK1A: 16.5 F +0.3 0 +0.4 0 Hole: 12H8 Z + Stroke S + Stroke 1.5 27 CLK1B: 19.5 40 57 97 ZZ + Stroke 2 (mm) Symbol BX BY D F GA GB IA K L M N S W Wc Ws Z ZZ Bore size 40 56 54 16 44 77 10 47 14 55 M12 x 1.5 86 112.5 5 39 27.5 114 228 50 64 64 20 55 78.5 10 58 17 58 M16 x 1.5 87.5 117 7 41 33 118.5 232.5 63 74 74 20 69 82 12 72 17 58 M16 x 1.5 91 120.5 5.5 48 39 122

CY1

(variations on the order of 30%) D-Y7W D-Y7WV D-Z7 D-Z80 D-Z7 D-Z80 D-Y7W D-Y7WV Cylinder model CY1H10 65.5 65.5 65.5 59.5 59.5 59.5 CY1H15 72 72 72 122 122 122 CY1H20 77.5 77.5 77.5 127.5 127.5 127.5 CY1H25 86 86 86 164 164 164 CY1HT25 86 86 86 164 164 164 CY1HT32 82 82 82 183 183 183 Note) 50mm is the minimum stroke available with 2 auto switches mounted.

Table of Contents

74 12-3-19 20 Series MHF2 Dimensions MHF2-16D2 4H9 +0.030 0 depth 3 36 36 36 4H9 +0.030 0 depth 3 4-M5 x 0.8 thread depth 12 Mounting thread 6 127.5 5 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Finger closing port M5 x 0.8 50 142 2-M5 x 0.8 thread depth 5.5 122

Clamp Cylinder with Lock Series CLK1

Shaft: 12d9 Clevis width CLK1A: 16.5 F +0.3 0 +0.4 0 Hole: 12H8 Z + Stroke S + Stroke 1.5 27 CLK1B: 19.5 40 57 97 ZZ + Stroke 2 (mm) Symbol BX BY D F GA GB IA K L M N S W Wc Ws Z ZZ Bore size 40 56 54 16 44 77 10 47 14 55 M12 x 1.5 86 112.5 5 39 27.5 114 228 50 64 64 20 55 78.5 10 58 17 58 M16 x 1.5 87.5 117 7 41 33 118.5 232.5 63 74 74 20 69 82 12 72 17 58 M16 x 1.5 91 120.5 5.5 48 39 122

Base Mounted Wiring: 01T1 (Plug-in w/Terminal Block, One-piece Junction Cover), Stations: 8 Stations, Passage: 1 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Side], Port Size: 02 (1/4), Thread: N (NPT), Control Unit: A (AirReleaseValve, FilterReg w/Press.Diff.Drain, BlankPlate for Press.Sw.), Voltage Air Release Valve: 5 (24VDC)

This is a legacy product, and replaced byVV5FS2-01T1-051-02T

Base Mounted Wiring: 01T1 (Plug-in w/Terminal Block, One-piece Junction Cover), Stations: 12 Stations, Passage: 1 [P(SUP): Common, E(EXH): Common, Port A,B(CYL): Side], Port Size: 02 (1/4)

Base Mounted Wiring: 01T1 (Plug-in w/Terminal Block, One-piece Junction Cover), Stations: 4 Stations, Passage: 3 [P(SUP): Common, E(EXH): Individual, Port A,B(CYL): Side], Port Size: 02 (1/4)