MU

Cylinder Double Acting, Single Rod Series MU Weight (kg) Theoretical Output (N) 25 32 40 50 63 Operating pressure (MPa) Bore size (mm) Bore size (mm) Rod size (mm) Operating direction Piston area (mm2) Basic style 0.18 0.28 0.42 0.80 1.20 0.7 0.6 0.5 0.4 0.3 0.2 Axial foot style 0.25 0.42 0.63 1.14 1.83 344 295 246 196 147 98 491 OUT 25 12 Basic weight Flange style/Rod side, 265 227 189 151

C95

-200 Hub 201-300 Hub 101-150 Hub 51-100 Hub 1-50 Hub 151-200 Hub 201-300 42 43 52 52 58 65 23 23 25 25 29 29 12.5 12.5 12.5 12.5 12.5 12.5 25 25 25 25 25 25 37.5 37.5 37.5 37.5 37.5 37.5 50 50 50 50 50 50 75 75 75 75 75 75 75 75 87 87 103 103 88 88 100 100 116 116 100 100 112 112 128 128 113 113 125 125 141 141 138 138 150 150 166 166 32 40 50 63 80 100 1.11-8 Series C95 Accessories Rear

Compact Type

75.6 50.4 25.2 252 IN 440 377 314 251 188 126 62.8 628 OUT CXS20 10 330 283 236 188 141 94.2 47.1 471 IN 687 589 491 393 295 196 98.2 982 OUT CXS25 12 529 454 378 302 227 151 75.6 756 IN 1126 965 804 643 482 322 161 1608 OUT CXS32 16 844 724 603 482 362 241 121 1206 IN Note) Theoretical output (N) = Pressure (MPa) x Piston area (mm2) Weight (kg) Standard stroke (mm) Model 75 100 50

P-E00-1A Models to accommodate a wide variety of applications Electric Actuators CAT. E101 A

70 122 151 48 374 836 52 402 1000 Slide screw + Linear guide: 53dB (LJ1H) Low profile/non-coupling type with reduced height and length Low Profile Electric Actuator Series LG1 Series with coupling available Mounting of a non-standard motor is possible.

Table of Contents

Series LXP Guide Rod Type . 2 Phase Stepper Motor Without Motor Brake Ball 146 149 151 153 154 164 184 185 187 188 189 190 191 191 192 193 194 195 197 199 199 199 200 201 202 203 203 203 204 204 206 209 209 211 216 223 217 225 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

MXW

Data Symbol Specifications Anti-corrosive specifications for guide unit (N) -X42 Operating pressure (MPa) Bore size (mm) Rod size (mm) Operating direction Piston area (mm2) 0.7 0.6 0.5 0.4 0.3 0.2 71 61 51 40 30 20 101 R 4 8 53 45 38 30 23 15 75 L 158 136 113 90 68 45 226 R 6 12 119 102 85 68 51 34 170 L 281 241 201 161 121 80 402 R 8 16 211 181 151 121 91 60 302 L 440 377 314 251 188 126

Compact Type Dual-Rod Cylinder Series CXSJ

75.6 50.4 25.2 252 IN 440 377 314 251 188 126 62.8 628 OUT CXS20 10 330 283 236 188 141 94.2 47.1 471 IN 687 589 491 393 295 196 98.2 982 OUT CXS25 12 529 454 378 302 227 151 75.6 756 IN 1126 965 804 643 482 322 161 1608 OUT CXS32 16 844 724 603 482 362 241 121 1206 IN Note) Theoretical output (N) = Pressure (MPa) x Piston area (mm2) Weight (kg) Standard stroke (mm) Model 75 100 50

Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

Theoretical Output (N) Operating pressure (MPa) Rod diameter (mm) Piston area (mm) Operating direction Model 0.7 0.6 0.5 0.4 0.3 0.2 0.1 0.15 39.2 33.6 28.0 22.4 16.8 8.4 11.2 56 OUT M L 4 CXS 6 21.7 18.6 15.5 12.4 9.3 4.6 6.2 31 IN 110 94.2 78.5 62.8 47.1 31.4 157 OUT 15.7 M L 6 CXS 10 70.0 60.0 50.0 40.0 30.0 20.0 100 IN 10.0 247 212 177 141 106 70.6 353 OUT 35.3 M L 8 CXS 15 176 151

Uniaxial Electric Actuator Series LJ1

Model IX IY W H Moment of inertia of area LJ1H10 LJ1H20 LJ1H30 LJ1S10 LJ1S20 LJ1S30 24.7 44.8 55 36 56.3 73.3 48 374 836 52 402 1000 70 122 151 70 122 151 7 40 84 15 60 177 IX IY Linear guide IX H IY Slider guide W (Except LJ1H10/LJ1S10) Features 1 rigidity and high linear precision. eved with an AC servomotor and feed screw.

Single Axis Electric Actuator Series LJ1

70 122 151 48 374 836 52 402 1000 Slide screw + Linear guide: 53dB (LJ1H) Low profile/non-coupling type with reduced height and length Low Profile Electric Actuator Series LG1 Series with coupling available Mounting of a non-standard motor is possible.

Air Slide Table Series MXQ

(Unit: N) Cylinder bore size (mm) Rod size (mm) Piston area (mm) Operating direction Operating pressure (MPa) 0.2 0.3 0.4 0.5 0.6 0.7 11 17 23 29 34 40 OUT 57 6 3 8 13 17 21 25 29 42 OUT IN 20 30 40 51 61 71 101 8 4 15 23 30 38 45 53 75 OUT IN 45 68 90 113 136 158 226 12 6 34 51 68 85 102 119 IN 170 80 121 161 201 241 281 OUT 402 16 8 60 91 121 151 181 211 IN 302 OUT 628 126 188 251 314 377

Electric Actuators

Model IX IY W H Sectional secondary moment Top entry Linear guide LJ1H10 LJ1H20 LJ1H30 LJ1S10 LJ1S20 LJ1S30 Slider guide 24.7 44.8 55 36 56.3 73.3 7 40 84 15 60 177 48 374 836 52 402 1000 70 122 151 70 122 151 Left entry Brake Right entry Axial entry Bottom entry Table traveling accuracy T-slots enable highly flexible mounting.

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

Station n L1 L2 Station 2 35.5 28.5 Station 20 224.5 217.5 3 46 39 4 56.5 49.5 5 67 60 6 77.5 70.5 7 88 81 8 98.5 91.5 9 109 102 10 119.5 112.5 11 130 123 12 140.5 133.5 13 151 144 14 161.5 154.5 15 172 165 16 182.5 175.5 17 193 186 18 203.5 196.5 19 214 207 17 Series SYJ3000 C4 N3 Type 32 Manifold: Side Ported/SS5YJ3-32Stations -M5, [ ]: AC (Lead wire length) 91.7 [96.1] Approx. 300 C4

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

Stations L1 L2 3 46 39 6 77.5 70.5 8 98.5 91.5 10 119.5 112.5 20 224.5 217.5 2 35.5 28.5 4 56.5 49.5 5 67 60 7 88 81 9 109 102 11 130 123 12 140.5 133.5 13 151 144 14 161.5 154.5 15 172 165 16 182.5 175.5 17 193 186 18 203.5 196.5 19 214 207 29 Series SYJ3000 Manifold Drawings Type 31 Manifold: Side Ported / SS5YJ3-31 Station M3 (mm) Grommet (G) , (H) 4-M5 0.8 (P, R port) 52.4(GZ:53.1) [

3 Port Solenoid Valve Series SYJ300/500/700

Station n L1 L2 3 46 39 6 77.5 70.5 8 98.5 91.5 10 119.5 112.5 20 224.5 217.5 2 35.5 28.5 4 56.5 49.5 5 67 60 7 88 81 9 109 102 11 130 123 12 140.5 133.5 13 151 144 14 161.5 154.5 15 172 165 16 182.5 175.5 17 193 186 18 203.5 196.5 19 214 207 10 Series SYJ300 Type 41 Manifold: Side Ported/SS3YJ3-41Stations -M3 [ ] for AC Grommet (G) Type 41 Manifold: Side Ported (Pilot valve is on the A

3 Port Solenoid Valve, VQ100 Series, Base Mounted Type

175 185.5 6 92 141 161 187.5 198 7 102 151 171 200 210.5 8 112 161 181 212.5 223 10 132 181 201 225 235.5 13 162 211 231 262.5 273 14 172 221 241 275 285.5 11 142 191 211 237.5 248 16 192 241 261 287.5 298 12 152 201 221 250 260.5 15 182 231 251 275 285.5 L1 L2 (L3) (L4) (L5) *SG Type: L2=10n+68 (L3)=L3(Std.)+25 (L4)=L4(Std.)+25 (L5)=L5(Std.)+25 11 Series VQ100 Non Plug-in Unit Manifold

MU

(mm) Size direction Fluid Air 0.2 0.3 0.4 0.5 0.6 0.7 Proof pressure 1.05MPa OUT 491 98 147 196 246 295 344 25 12 Max. operating pressure 0.7MPa IN 378 76 113 151 189 227 265 Min. operating pressure 0.05MPa OUT 804 161 241 322 402 482 563 32 14 Ambient and fluid temperature 10 to 60C IN 650 130 195 260 325 390 455 Lubrication Not required (Non-lube) OUT 1257 251 377 503 629 754 880 40 16

MXQ

471 94 141 188 236 283 330 OUT 982 196 295 393 491 589 687 25 12 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com IN 756 151 227 302 378 454 529 Note) Theoretical output (N) = Pressure (MPa) x Piston area (mm2) Weight (g) Standard stroke (mm) Additional weight of

Compact

Auto Switch Proper Mounting Position Auto Switch Mounting Height Operating Range Auto Switch Mounting Groove Position Auto Switch Mounting 25 12 OUT 491 98 147 196 245 295 344 IN 378 76 113 151 189 227 264 Weight [g] Bore size [mm] Standard stroke [mm] 5 10 15 20 25 30 35 40 45 50 12 105 114 124 132 142 152 16 126 136 146 156 166 175 20 195 211 225 239 255 270 285 300 314 329 25 284 304

Thermo-chiller

Weight (dry state) 333 lbs (151 kg) 340 lbs (154 kg) Compliant standards CE marking EMC Directive 2004/108/EC Machinery Directive 2006/42/EC Note 4) q Ambient temperature: 90F (32C), w Circulating fluid: Tap water, e Circulating fluid flow rate: Rated flow, r Power supply: 200 VAC Note 5) q Ambient temperature: 90F (32C), w Circulating fluid: Tap water, e Circulating fluid temperature: 68F