High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

(Refer to page 121.)

Battery-less

[mm] Size Stroke range [mm] A B C D EH EV H J K L M O1 R S T T2 U V X2 Y Without lock With lock 16 10 to 100 101 90.5 10 16 34 34.3 M5 x 0.8 18 14 10.5 25.5 M4 x 0.7 7 35 90.5 0.5 28 100.5 145.5 22.5 101 to 300 121 110.5 25 15 to 100 130.5 116 13 20 44 45.5 M8 x 1.25 24 17 14.5 34 M5 x 0.8 8 46 92 7.5 1 42 88.5 129 26.5 101 to 400 155.5 141 32 20 to 100 148.5 130 13 25 51 56.5 M8 x 1.25

CHKD/CHKG

14 70 28 126 24 27 24 M20 x 2.5 8 11 43 24 104 83.5 20 depth 13 140 16 77 35.5 146 30 33 33 M27 x 3 9 13 52 30 121 102 23 depth 15.2 161 18 88 45 172 41 38 36 M30 x 3.5 14 15 63 35 144 123.5 26 depth 17.5 189 22 106 56 208 50 43 45 M39 x 4 21 17 76 40 174 149 Note 1) Body dimensions are the same with or without auto switches.

CV/MVGQ

112 121 58.5 Operating Range Auto switch model Bore size (mm) 40 50 63 80 100 8 7 9 9.5 10.5 Other than the models listed in How to Order, the following auto switches are applicable.

Slide Unit Series CX2/CXWM/CXWL

M8 x 1.25 thread depth 15 8H7 depth 12 +0.015 0 2 x 2 x Rc 1/8 Plug (R 1/8) 1 position for set screw for fixing adjusting bolt (M6) 2 x Rc 1/8 Cylinder port 2 x M6 x 1.0 thread depth 7 2 x 2 x M8 x 1.25 thread depth 15 2 x 2 x 8H7 depth 12 +0.015 0 4 x 6.9 through 4 x 11 counterbore depth 7 (mm) F L P Q S SS G Z ZZ Model CXWM32-25 CXWM32-50 37 41 22 143 27 96 27.5 123 163 38 65 45 193 52 121

CV/MVGQ

112 121 58.5 Operating Range Auto switch model Bore size (mm) 40 50 63 80 100 8 7 9 9.5 10.5 Other than the models listed in How to Order, the following auto switches are applicable.

CXWM/CXWL

Theoretical Output (N) Operating pressure (MPa) Piston area (mm 2) Model Rod size (mm) 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 CXWM106 101 20 30 40 51 61 71 81 91 CXWM1610 245 49 74 98 123 147 172 196 221 CXWM2012 402 80 121 161 201 241 281 322 362 CXWM2514 597 119 179 239 299 358 418 478 537 CXWM32Made to Order Specifications (For details, refer to page 8-31-1.) 20 980 196 294 392 490 588 686 784

MGQ

OUT 113 23 34 45 57 68 79 90 102 113 12 6 IN 85 17 26 34 43 51 60 68 77 85 OUT 201 40 60 80 101 121 141 161 181 201 Symbol Specifications 16 8 IN 151 30 45 60 76 91 106 121 136 151 -XA Change of rod end shape OUT 314 63 94 126 157 188 220 251 283 314 Heat resistant cylinder (150C) -XB6 20 10 Low speed cylinder (10 to 50 mm/s) -XB9 IN 236 47 71 94 118 142 165 189 212 236 Intermediate stroke

LEC-T1_C

. /.110 8.1 .110 8.2 .111 8.3 .112 8.4 .113 8.5 .114 8.6 .114 9. .115 9.1 /.115 9.2 .115 9.3 .117 9.4 .117 9.5 .118 9.6 .118 9.7 .118 10. .119 .121 .121 1TB Ver1.**.121 2TB Ver2.**.123 4 - LEC-T1 Series/ (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

112 121 (11.5) (10.5) The factors in parentheses are for long stroke and non lubrication style.

CJ2

Weight/Spring Extend (T) (g) 6 10 16 Bore size (mm) Copper Free 15 Stroke 17 28 64 30 Stroke 21 34 80 45 Stroke 23 43 100 Mounting Bore size Stroke Action Port location on head cover 20-CJ2 60 Stroke 27 51 121 Basic weight Copper free 75 Stroke 140 100 Stroke 178 To eliminate influences of copper ions or halogen ions during CRT manufacturing processes, copper and fluorine materials are not

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

VD WA WB WH ZY E R L2 L9 H SL 32 Up to 1000 22 30 12 G 1/8 13 M6 x 1 6 M10 x 1.25 10 28.9 16 94 4 4 7 26 190 47 32.5 15 4 48 8 40 Up to 1000 24 35 16 G 1/4 14 M6 x 1 6.5 M12 x 1.25 13 32.6 16 105 4 5 8.9 30 213 54 38 17 4 54 8 50 Up to 1000 32 40 20 G 1/4 14 M8 x 1.25 8 M16 x 1.5 17 32 16 106 4 6 5.1 37 244 66 46.5 24 5 69 63 Up to 1000 32 45 20 G 3/8 16 M8 x 1.25 8 M16 x 1.5 17 38.6 16 121

MXS

(Unit: N) Operating pressure (MPa) Bore size (mm) Rod diameter (mm) Piston area (mm2) Operating direction MXP 0.2 0.3 0.4 0.5 0.6 0.7 11 17 23 29 34 40 OUT 57 6 MG 3 8 13 17 21 25 29 42 OUT IN 20 30 40 51 61 71 101 8 4 MGP Standard Stroke 15 23 30 38 45 53 75 OUT IN 45 68 90 226 113 136 158 Model Standard stroke (mm) 12 6 MGQ 34 51 68 85 IN 170 102 119 MXS 6 10, 20, 30, 40, 50 80 121 161

MXQ

(N) Bore size (mm) Rod size (mm) Piston area (mm2) Operating direction Operating pressure (MPa) 0.2 0.3 0.4 0.5 0.6 0.7 11 17 23 29 34 40 OUT 57 6 3 8 13 17 21 25 29 42 OUT IN 20 30 40 51 61 71 101 8 4 15 23 30 38 45 53 75 OUT IN 45 68 90 113 136 158 226 12 6 34 51 68 85 102 119 IN 170 80 121 161 201 241 281 OUT 402 16 8 60 91 121 151 181 211 IN 302 OUT 628 126 188 251 314 377 440 20 10 IN

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

112 121 (11.5) (10.5) The factors in parentheses are for long stroke and non lubrication style.

Electric Actuator

Electric Actuator New New Slider Type High Rigidity RoHS Low-profile/Low center of gravity Height dimension reduced by approx. 31% (Reduced by 28 mm) Series Work load lb (kg) Speed (mm/s) Motor output (W) LEJS40 New New 121 (55) 600 100 LJ1H20 66 (30) (Existing model) 500 100 LJ1H20 90 mm 62 mm LEJS40 Type AC Servo Motor (100/200 W) Size: 40, 63 Ball Screw Drive Series LEJS Max. work load

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

RT SL SW VD WA WB WH ZY Bore size [mm] 32 Up to 1000 22 30 16 12 47 G 1/8 28.9 48 M10 x 1.25 15 94 4 6 13 32.5 M6 x 1 8 10 4 4 7 26 190 40 Up to 1000 24 35 16 16 54 G 1/4 32.6 54 M12 x 1.25 17 105 4 6.5 14 38 M6 x 1 8 13 4 5 8.9 30 213 50 Up to 1000 32 40 16 20 66 G 1/4 32 69 M16 x 1.5 24 106 5 8 14 46.5 M8 x 1.25 17 4 6 5.1 37 244 63 Up to 1000 32 45 16 20 77 G 3/8 38.6 69 M16 x 1.5 24 121

Basic type / Direct mount type Series CY3B/CY3R

Hexagon wrench Laser marking 121 Series CYV Model Selection 1 Caution on Design (1) The allowable load mass moment differs depending on the workpiece mounting method, cylinder mounting orientation and piston speed.

C85

99.5(103) {120(123.5)} 115(118.5) {146(149.5)} 107.5(111) {128(131.5)} 123(126.5) {154(157.5)} 8 16 3.2 4.5 40 35 26 3.2 30 25 11 22 23.8 12.8 4.5 12.8 5 10 16 3.2 4.5 40 35 26 3.2 30 25 11 22 23.8 12.8 4.5 12.8 5 12 20 4 5.5 52 42 33 4 40 32 14 30 32 18 5.5 18 6 16 20 4 5.5 52 42 33 4 40 32 14 30 32 18 5.5 18 6 20 91{116} 141 166 25 5 6.6 66 54 42 5 50 40 17 40 36 19 6.6 19 8 96{121

Air Slide Table Series MXS

Operating direction Operating pressure (MPa) For clean room specifications, refer to Pneumatic Clean Series catalog. 0.7 0.6 0.5 0.4 0.3 0.2 40 34 29 23 17 11 57 OUT IN 6 3 29 25 21 17 13 8 42 Standard Stroke 71 61 51 40 30 20 101 OUT IN 8 4 53 45 38 30 23 15 75 Model Standard stroke (mm) 158 136 113 90 68 45 226 OUT IN 12 6 10, 20, 30, 40, 50 MXS6 119 102 85 68 51 34 170 281 241 201 161 121