AZ1000

600 Delivery pessure (kPa) -35 500 -48 400 Connections inch A (mm) -61 300 FV4 MV4 FV6 MV6 TW6 FV8 MV8 TW8 4.30 (109.2) -75 200 5.22 (132.6) -88 100 4.00 (101.6) 0 -101 5.22 (132.6) 0 1 2 3 4 5 6 7 8 9 10 Flow rate (slpm, N2) 4.34 (110.2) Hastelloy is a registered trademark of Haynes International.

Passage: 20 (Top Ported Common EXH-Integrated), Stations: 10 Stations Top Ported/Valve, Port Size: None, Thread: 00F (G)

Passage: 20 (Top Ported Common EXH-Integrated), Stations: 10 Stations Top Ported/Valve, Port Size: None, Thread: 00N (NPT)

Passage: 20 (Top Ported Common EXH-Integrated), Stations: 10 Stations Top Ported/Valve, Port Size: None, Thread: 00T (NPTF)

Passage: Top Ported Common EXH-Integrated, Stations: 10 Stations Top Ported/Valve, Port Size: None, Thread: G

Passage: Top Ported Common EXH-Integrated, Stations: 10 Stations Top Ported/Valve, Port Size: None, Thread: NPT

Passage: Top Ported Common EXH-Integrated, Stations: 10 Stations Top Ported/Valve, Port Size: None, Thread: NPTF

Refrigerated Air Dryer

Note 3) Refer to pages 101 and 102 for further details on optional specifications.

ZSM1-115/121

7.5006 x 103 1.4503 x 104 1 1.4503 x 101 1 x 103 1 x 103 1 x 102 1.0197 x 102 9.8692 x 103 1.0197 x 102 1 7.5006 1 x 106 1 x 103 1.0197 x 105 7.5006 x 103 1.4503 x 102 1 1 x 10 1.0197 x 10 9.8692 1 x 105 1 x 102 1 x 101 9.8692 x 101 1.0197 x 104 7.5006 x 102 1 1.0197 1.4503 x 10 9.8067 x 104 9.8067 x 101 9.6784 x 101 1 x 104 7.3556 x 102 9.8067 x 102 9.8067 x 10 1 1.4217 x 10 1.0133 x 105

mb1

to 150 50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150 501 to 600 175 175 601 to 700 200 200 701 to 800 73 81 89 89 101 101 1 to 50 86 94 102 102 114 114 51 to 100 98 106 114 114 126 126 101 to 150 111 119 127 127 139 139 201 to 300 161 169 177 177 189 189 301 to 400 186 194 202 202 214 214 401 to 500 227 227 239 239

Square Tube Type Air Cylinder Series MB1

to 150 50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150 501 to 600 175 175 601 to 700 200 200 701 to 800 73 81 89 89 101 101 1 to 50 86 94 102 102 114 114 51 to 100 98 106 114 114 126 126 101 to 150 111 119 127 127 139 139 201 to 300 161 169 177 177 189 189 301 to 400 186 194 202 202 214 214 401 to 500 227 227 239 239

70astamb1

to 150 50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150 501 to 600 175 175 601 to 700 200 200 701 to 800 73 81 89 89 101 101 1 to 50 86 94 102 102 114 114 51 to 100 98 106 114 114 126 126 101 to 150 111 119 127 127 139 139 201 to 300 161 169 177 177 189 189 301 to 400 186 194 202 202 214 214 401 to 500 227 227 239 239

XL-OMY0001

XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 XL1A63-2-101 XL1A80-2-101 XL1A50-10-1 XL1A80-10-1 112 2 1 FKM:No.1349-80 [] XL1A16-2-101-XN1 EPDM Barrel Perfluoro Kalrez Chemraz VMQ FKM for R R R PLASMA No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 R 1Barrel Perfluoro R Kalrez Chemraz

High Vacuum L Type Valve

Bellows assembly (7) XL1A16-2-101 XL1A25-2-101 XL1A40-2-101 XL1A50-2-101 Nut assembly (9) XL1A16-10-1 XL1A25-10-1 XL1A40-10-1 XL1A50-10-1 63 80 Valve size Description Part indication No. Bellows assembly (7) XL1A63-2-101 XL1A80-2-101 Nut assembly (9) XL1A50-10-1 XL1A80-10-1 Note 1) Bellows assembly contains the valve seal 1. It does not contain the valve seal 2.

F

12 1/2 KQL12-04S 22 20.9 17 28.5 37 39.5 22 50.2/39.7 65 16 3/8 KQL16-03S 22 26.5 21 33 38 44.5 24 71/(71) 101 16 1/2 KQL16-04S 22 26.5 21 33 41 46 24 100/(84) 105 Reference dimensions after PT thread installation.

KR

(mm) Note) Applicable tubing L1 M1 Weight (g) D1 L2 Q D2 M2 Model a b Urethane Nylon Applicable tubing KGT04-06 KGT06-08 16.4 16.4 7.1 6.5 6 4 10.4 12.8 16 17 19.5 22.5 18 20 4.5 5.3 21 22 17 18.5 18.5 20.9 12.8 15.2 56 44.5 36 27.2 8 5 10 8 8 6 KGT08-10 26.5 28.5 15.2 18.5 18.5 21 23 26.5 6 6.8 14 21 KGT10-12 12 10 Note) D1: Max. diameter K Applicable tubing M H Male Run Tee: KGY D H (width

SMC Pneumatic Clean Series

Lubrication Model Rubber Air 10-/21-CM220 10-/21-CM225 10-/21-CM232 10-/21-CM240 11-/22-CM220 11-/22-CM225 11-/22-CM232 11-/22-CM240 Relief type Vacuum suction type 1/8 25, 50, 75, 100, 125, 1/4 Non-lube Double acting, 150, 175, 200, 250, 300 single rod 1/8 1/4 Suction flow rate of vacuum suction type (Reference values) Specifications Bore size (mm) Item 20/25/32/40 1.5MPa 1.0MPa 0.05MPa

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

VN LVC LVA E 21 S LQ2 LVH LVD One nut (including insert bushing) of the nuts is not attached. Please refer to below piping example.

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

CXSJ10-10 21-/2211-/12CXSJ10-20 21-/2211-/12CXSJ10-30 21-/2211-/12CXSJ10-40 21-/2211-/12CXSJ10-50 21-/2211-/1279

Compact Cylinder Series CQS

bumper 2 g Option mass: Double clevis style 92 g Mass/Without Auto Switch (g) Cylinder stroke (mm) Bore size (mm) 250 300 200 175 150 125 25 100 15 20 30 35 40 50 75 10 5 45 12 312 279 246 213 56 180 42 49 63 93 100 113 147 36 29 107 16 397 355 313 271 73 229 56 64 82 128 145 187 47 119 38 136 201 g 20 627 562 498 434 101 114 127 370 88 153 178 306 75 140 63 166 25 794 952 715 636 557