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Allowable load a b Allowable thrust loadN Allowable momentNm Size Allowable radial load a b Basic type High precision N type 1 31 41 41 0.56 0.84 2 32 45 45 0.82 1.2 3 33 48 48 1.1 1.6 7 54 71 71 1.5 2.2 Unit used as flange mount Rotary table can be mounted from three directions-Two side of axial direction and one side of lateral face.

Crack on the back of the belt 41 - 7.6 How to detach and attach the dust seal band For the internal-check as the maintenance, the method of detaching and attaching the dust seal band is shown as the following. 1. Loosen the fixing bolts of end side of the Band holder. (The picture shows LEFB, but LEFS is same instruction as LEFB.)

(CN2SW) . 16 4.3 (LEC) . 17 5. . 19 5.1 CN4 . 19 5.2 CN3 . 19 5.3 CN1CONT . 19 5.4 CN2PC/TB . 20 .CN4 . 21 6.1 . 21 1 - 6.2 . 21 6.3 . 22 . 23 7.CN3 . 24 8.CN1IF (CONT) . 25 8.1 . 25 8.2 . 27 9.CN2TB/PC . 28 9.1 . 28 10.LED . 29 10.1 LED . 29 10.2 IF LED . 29 11. . 30 11.1 . 30 11.2 . 30 11.3 . 30 11.4 . 32 12. . 33 12.1 . 33 12.1.1 . 39 12.2 IF ( ) . 40 12.3 (IO ) . 41

MEM MEM 5/8 41/64 27/32 1 1/8 3/8 MEM 1/4 Typ. Slim line coupler not shown 5/8 27/32 1 1 C6 C2-SL C2 C4 C8 C6 C3 C1 C5 C2 1/2 C7 C3 1/2 Reducing Couplings not shown Note not shown not shown 1 1/8 7/16 Dia. 3/8 Dia. Typ. 3/8 Dia. 5/16 Dia. Typ. 1/4 Dia.

C D 15 (mm) Auto switch model A D-F9 B C D D-A9 D-F9 D-A9 D-F9 D-A9 D-F9 Bore size (mm) 17.5 15 D-A9 21.5 76.5 72.5 56.5 60.5 Note) Auto switches cannot be installed in Area C in the case of 15. 25, 32 (mm) A D-Y5 D-Y7 D-Y7W B C D Auto switch model D-Y5 D-Y7 D-Y7W D-Y5 D-Y7 D-Y7W D-Y5 D-Y7 D-Y7W D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 Bore size (mm) 25 22 101 103 47 47 78 78 22 32 30.5

Change of controller and actuator settings . 31 (3) Change of the parameter protect setting . 32 4.3 Step data setting . 33 (1) Step data setting . 33 (2) Saving or Loading the Step data . 35 4.4 Monitor function . 36 4.5 Teaching . 36 4.6 Test Drive . 39 (1) Test Drive . 39 (2) JOG, Inching, and Return to origin in the Teaching window. 40 (3) Single step operation in Step Data window . 41

by the user. . 7 (5) Software installation . 7 2. 2 Controller settings . 8 (1) Start the setup software . 8 (2) Basic Parameter Setup . 9 (3) Step data setting . 9 3Start up procedureTest operation using a computer . 11 3. 1 Test operation using a computer (Step data operation) . 11 3. 2 Test operation using a computer (Continuous operation) 13 4Start up procedureOperation by PLC . 15 41

. <> [F 6] [FSC] 1 [F 6] -30NO.ZK2-OM00801-B [F11] <> [F11] 1000 100 [F11] [MPa]/[kPa]/[kgf/cm 2]/[bar]/[psi]/[inHg] ([kgf/cm2]/[bar]/[psi]/[inHg] 22[F 0] -31NO.ZK2-OM00801-B [F80] 30 OFF <> [F80] 2 1 [F80] 1 OFF 1 2 30 () 2 ON OFF -32NO.ZK2-OM00801-B [F81] <> [F81] [F81] 000 41 -33NO.ZK2-OM00801-B [F90] <> [F90] [on] [oFF] 1 [oFF]() 2 [F90] 1 35 -34NO.ZK2

ZQ-OM01501 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2021 SMC Corporation All Rights Reserved

(1F.S.) 1 LoC1 ( [LoC]) < -> 5 LoCUnL () ,/ 39 - < -> 5 [UnL] [LoC] 5 [LoC] [UnL] 41 -/ [UnL], [FAL]3[LoC] 40 - [000] <> (40 -)(40 -) [UnL] 5 [000] / 1 / ( ) 1 (/30 ) 41 - /ON/OFF OUT2 OUT1 (V) OUT2 OUT1 (V) H_3 P_1 H_3 100 H_3 P.25F 2OUT2 P_1-60kPa H_3 45 P_1H_3-60-45-105 P_1H_3 -105 H_3 P_1 P_1 H_3 100 H_3 42 - , (1015 ) 43 - () No.1 ON ON OFF Yes No No

No.PS-OMU0002CN-D // ZSE20A(F) ISE20A 2 8 10 11 15 15 17 19 [] 22 23 3 24 26 28 28 28 F0 30 F1 OUT1 31 F2 OUT2 34 F3 36 F4 37 F5 FUNC 39 F6 41 F10 42 F11 48 F80 49 F81 50 F82 52 F90 53 F96 55 F97 56 F98 58 F99 60 61 65 65 66 75 75 78 -1No.PS-OMU0002CN-D 1 (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO

No.PS-OMS0006CN-G / / ZSE20(F) ISE20 2 8 10 11 14 14 16 18 [] 20 21 3 22 24 26 26 26 F0 28 F1 OUT1 29 F3 32 F4 33 F6 35 F10 36 F11 41 F80 42 F81 43 F82 45 F90 46 F98 48 F99 49 50 54 54 55 62 62 64 -1No.PS-OMS0006CN-G *1) (ISO/IEC)(JIS) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules

No.PS-OMV0008CN-E / / ISE70G--L2 ISE75G--L2 ISE76G--L2 ISE77G--L2 ISE78G--L2 2 9 10 12 15 15 17 19 21 22 3 23 25 27 27 28 F0 30 F1 OUT1 32 F2 OUT2 35 F3 37 F4 38 F6 40 F10 41 F11 47 F14 Zero-cut 48 F80 49 F81 50 F90 52 F96 54 F98 55 F99 57 58 IO-Link 63 IO-Link 63 63 64 IO-Link 67 76 76 77 86 88 -1No.PS-OMV0008CN-E (ISO/IEC)(JIS) *1) *2) *1) ISO

EDS Enable (SC_MonOp) 1 1 Disable Auto (SC_RstOp) 2 Manual Enable 3 (OC_Mon) 6 Disable Clear OFF 2 6 Hold 4 (Fault_MD) ForceON ON Clear OFF 2 3 6 Hold 5 (Idle_MD) ForceON ON Enable Val165000 5 ON ON/OFF (Counter) 6 6 4 Disable 1() 2Hold/Clear Handheld 3PLC 41 5x1000 6DeviceNet TM(DeviceNet TM2) -46No.EX-OMN0029CN-D No. (H.T.) H.T.

-14-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 16-1-11 to 16-1-13 for Precautions on every series. 3 m 30 5 m 50 16-6-8 3 Compact Pressure Switch Series ZSE2/ISE2 ZSE2/ISE2 Specifications ZSE2 For vacuum ISE2L For low pressure ISE2 For high pressure Operating pressure range/ Regulating pressure range Proof pressure 0 to 101

www.stevenengineering.com I 7.23 INSTRUMENTATION ELECTRO-PNEUMATIC REGULATOR D I M E N S I O N S S E R I E S VY110 0 101 02 D I M E N S I O N S S E R I E S VY120 0 101 02 D I M E N S I O N S S E R I E S VY130 0 102 03 04 Courtesy of Steven Engineering, Inc. ! 230 Ryan Way, South San Francisco, CA 94080-6370 ! Main Office: (650) 588-9200 ! Outside Local Area: (800) 258-9200 !

2.5 (63.5) 0.07 10 A 0.00 0 0 100 200 300 400 500 600 700 800 Flow rate (slpm, N2) 0.88 (22.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) AZ1402TA Inlet pressure: 2 psig (14 kPa) 760 0 -8 700 Delivery pressure (mm Hg) -21 600 Delivery pessure (kPa) -35 500 -48 400 Connections inch A (mm) -61 300 FV4 MV4 FV6 MV6 TW6 FV8 MV8 TW8 4.30 (109.2) -75 200 5.22 (132.6) -88 100 4.00 (101.6) 0 -101

DC12~24V DC12~24V DC(+) DC(-) 8 / / 9 () 10 / 5m / 11 20~30 20 "-M" (kPaMPa) SI kPa,MPa ( ) "-M" 12 13 -33No.PS-OMH0005CN-D No. 14 15 () () ( ) ( ) / 16 ON ON OFF PSE530 PSE530 OFF -34No.PS-OMH0005CN-D OUT1 OUT2 80mA 5 F.S.(2.5F.S.) 2 -35No.PS-OMH0005CN-D PSE20 1 01 MPa 0-101 kPa 0101 kPa -101101 kPa -0.11 MPa 10-101 kPa -10101 kPa -101101 kPa 0.1 kPa 0.1 kPa 0.1 kPa

1 16 4 1 1 15 2 13 3. 3. 3. 3. 3-1. ,,,2 2 3-2. 2 2 2 32 40 VF3000 VZ3000 AS2000 6/4 14 4. 4. 4. 4. 4-1. , ,, ,4.1 , ,4.1 ,,, 4.1 4.1 [N] 5 10 15 20 25 30 40 50 75 100 32 14 13 13 13 13 13 12 11 10 9 40 23 22 22 21 21 21 19 18 16 15 , , , 4.24.34.2, 15 4.2 4.2 [N] [MPa] [mm 2] 0.15 0.2 0.3 0.4 0.5 0.6 0.7 [mm] OUT 804 121 161 241 322 402 482 536 32 12.2 IN 675 101

) . 24 3.9 EtherNet/IP . 25 (1) . 25 (2) PLC . 25 (3) LED . 25 3.10 PLC . 25 4. . 26 4.1. . 26 4.2 EtherNet/IP . 27 4.3. . 28 4.4. . 30 -1No.JXC-OMT0001CN-C 1 . 30 2DIN . 30 4.5 . 31 (1) . 31 (2) . 32 (3) . 33 5. . 34 5.1 (IP ) . 34 5.2 PLC () . 35 TM . 36 TMEtherNet/IP 5.3 RSLogix5000 6. . 38 6.1 . 38 (1):C PWR . 38 (2):M PWR . 38 (3) : CI . 39 6.2 . 40 (1) . 40 (2) . 41