Dual Rod Cylinder/High Speed Specification Type Series CXS-XB19

Theoretical Output (N) Operating pressure (MPa) Rod diameter (mm) Piston area (mm) Operating direction Model 0.7 0.6 0.5 0.4 0.3 0.2 0.1 0.15 39.2 33.6 28.0 22.4 16.8 8.4 11.2 56 OUT M L 4 CXS 6 21.7 18.6 15.5 12.4 9.3 4.6 6.2 31 IN 110 94.2 78.5 62.8 47.1 31.4 157 OUT 15.7 M L 6 CXS 10 70.0 60.0 50.0 40.0 30.0 20.0 100 IN 10.0 247 212 177 141 106 70.6 353 OUT 35.3 M L 8 CXS 15 176 151

Uniaxial Electric Actuator Series LJ1

Model IX IY W H Moment of inertia of area LJ1H10 LJ1H20 LJ1H30 LJ1S10 LJ1S20 LJ1S30 24.7 44.8 55 36 56.3 73.3 48 374 836 52 402 1000 70 122 151 70 122 151 7 40 84 15 60 177 IX IY Linear guide IX H IY Slider guide W (Except LJ1H10/LJ1S10) Features 1 rigidity and high linear precision. eved with an AC servomotor and feed screw.

Single Axis Electric Actuator Series LJ1

70 122 151 48 374 836 52 402 1000 Slide screw + Linear guide: 53dB (LJ1H) Low profile/non-coupling type with reduced height and length Low Profile Electric Actuator Series LG1 Series with coupling available Mounting of a non-standard motor is possible.

Air Slide Table Series MXQ

(Unit: N) Cylinder bore size (mm) Rod size (mm) Piston area (mm) Operating direction Operating pressure (MPa) 0.2 0.3 0.4 0.5 0.6 0.7 11 17 23 29 34 40 OUT 57 6 3 8 13 17 21 25 29 42 OUT IN 20 30 40 51 61 71 101 8 4 15 23 30 38 45 53 75 OUT IN 45 68 90 113 136 158 226 12 6 34 51 68 85 102 119 IN 170 80 121 161 201 241 281 OUT 402 16 8 60 91 121 151 181 211 IN 302 OUT 628 126 188 251 314 377

Electric Actuators

Model IX IY W H Sectional secondary moment Top entry Linear guide LJ1H10 LJ1H20 LJ1H30 LJ1S10 LJ1S20 LJ1S30 Slider guide 24.7 44.8 55 36 56.3 73.3 7 40 84 15 60 177 48 374 836 52 402 1000 70 122 151 70 122 151 Left entry Brake Right entry Axial entry Bottom entry Table traveling accuracy T-slots enable highly flexible mounting.

Blue F-2815-151-B80-NORYL F-2815-151-B85-NORYL .016 Grey F-2815-161-B80-NORYL F-2815-161-B85-NORYL .017 Brown F-2815-171-B80-NORYL F-2815-171-B85-NORYL .018 Black / Lavender F-2815

CRBU

Weight (g) CRBUW10 CRBUW15 CRBUW20 CRBUW30 90 Vane style Model 180 180 180 180 270 90 270 90 270 90 270 Rotation angle 47.5 47.1 73 72 143 142 263 258 47 72 140 255 Body of the rotary actuator Single vane Auto switch unit + 2 auto switches 30 30 50 60 Angle adjusting unit 30 47 90 150 Rotation angle 100 100 100 100 90 90 90 90 62.2 63.2 77 81 151 158 289 308 Body of the rotary actuator Double

Compact Guide Cylinder

181 211 25 (20 x 2) 10 OUT 628 126 188 251 314 377 440 IN 471 94 141 188 236 283 330 32 (25 x 2) 12 OUT 982 196 295 393 491 589 687 IN 756 151 227 302 378 453 529 40 (32 x 2) 16 OUT 1608 322 483 643 804 965 1126 IN 1206 241 362 483 603 724 844 50 (40 x 2) 18 OUT 2513 503 754 1005 1257 1508 1759 IN 2004 401 601 802 1002 1203 1403 63 (45 x 2) 20 OUT 3181 636 954 1272 1590 1909 2227 IN 2553

39

J Hexagon socket head plug 2 x 2 x NPT 1/4 G Rc GA E B RD (mm) Bore size (mm) B C D E GA GC J L LA LB MM N P GB 50 63 92 48 12 13.7 95 166 95.5 12 376.6 155.5 78.4 M8 x 1.25 19 8 110 54 15 16.6 99 171.5 100.5 12 391.6 161 78 M10 x 1.5 22 10 Bore size (mm) PA PB PC PD R RB RC RD RR W XA XB XC RA 104.5 50 63 45 45 5 40 46 88 20 20 46 48 78.4 138.5 134 92 55 45 10 55 52 104 25 25 52 54 78 151

CXS

126 101 75.6 50.4 25.2 252 IN 440 377 314 251 188 126 62.8 628 OUT CXS20 10 330 283 236 188 141 94.2 47.1 471 IN 687 589 491 393 295 196 98.2 982 OUT CXS25 12 529 454 378 302 227 151 75.6 756 IN 1126 965 804 643 482 322 161 1608 OUT CXS32 16 844 724 603 482 362 241 121 1206 IN Note) Theoretical output (N) = Pressure (MPa) x Piston area (mm2) Weight (kg) Standard stroke (mm) Model 75

MU

Cylinder Double Acting, Single Rod Series MU Weight (kg) Theoretical Output (N) 25 32 40 50 63 Operating pressure (MPa) Bore size (mm) Bore size (mm) Rod size (mm) Operating direction Piston area (mm2) Basic style 0.18 0.28 0.42 0.80 1.20 0.7 0.6 0.5 0.4 0.3 0.2 Axial foot style 0.25 0.42 0.63 1.14 1.83 344 295 246 196 147 98 491 OUT 25 12 Basic weight Flange style/Rod side, 265 227 189 151

CXS

126 101 75.6 50.4 25.2 252 IN 440 377 314 251 188 126 62.8 628 OUT CXS20 10 330 283 236 188 141 94.2 47.1 471 IN 687 589 491 393 295 196 98.2 982 OUT CXS25 12 529 454 378 302 227 151 75.6 756 IN 1126 965 804 643 482 322 161 1608 OUT CXS32 16 844 724 603 482 362 241 121 1206 IN Note) Theoretical output (N) = Pressure (MPa) x Piston area (mm2) Weight (kg) Standard stroke (mm) Model 75

Series VT 3port, direct operated poppet valves are compact in size, yet provide large flow capacity, and low power consumption.  The series is suitable for use in vacuum applications.  The VT valve is a single valve with 6 functions (universal porting type) such as N.C. valve, N.O. valve, divider valve, selector valve, etc.  The manifold style valve, series VO, can be easily converted from

Stations: 8 Stations, Piping: 3 (P Common, R Individual, A Side), Thread: N (NPT)

Stations: 10 Stations, Piping: 3 (P Common, R Individual, A Side), Thread: N (NPT)

Stations: 14 Stations, Piping: 3 (P Common, R Individual, A Side), Thread: N (NPT)

Stations: 3 Stations, Piping: 3 (P Common, R Individual, A Side), Thread: N (NPT)

Stations: 4 Stations, Piping: 3 (P Common, R Individual, A Side), Thread: F [G (PF)]

Stations: 8 Stations, Piping: 3 (P Common, R Individual, A Side), Thread: F [G (PF)]

Stations: 10 Stations, Piping: 3 (P Common, R Individual, A Side), Thread: F [G (PF)]