MK

Auto switch model 12 16 20 25 32 40 50 63 CC D-A7/A80 D-A7H/A80H D-A73C/A80C 12 12 12 11 10 12 RB Applicable bore size (mm) Electrical entry (Fetching direction) Type Model Features D-A79W D-A9/A9V 13 13 13 14 14 16 6 7.5 9.5 9.5 9.5 11.5 J D-A80 D-A80H D-A80C D-A90 D-A90V Grommet (Perpendicular) Grommet (In-line) Connector (Perpendicular) Grommet (In-line) Grommet (Perpendicular) D-F7

Plug-in Unit

5 D-side end plate assembly Manifold block assembly !6 D-side end plate assembly part no. !7 Manifold block assembly part no.

New

D-DN

TABLE OF CONTENTS

Listed and CSA Certified for Hazardous LocationsClass I, Div 1, Group C and D Class II, Div 1, Groups E, F, and G; Div 2 Groups A,B,C,D,E,F, AND G. Mtg.

JXCx-OMT0005CN

RESET SVON <> <> <>(M24V) (01-145) D RESET SVON <> <> <> (01-146) D RESET SVON <> 67 - <> <>(DC24V) D RESET SVON (01-147) <> <> <> (01-148) D RESET SVON <> <> (01-149) D RESET SVON <> <> Communicati on error. (01-150) D RESET SVON <> (01-192) E <> <> <> ON(SVON ON) (01-193) E <>ONSVON ON <> (01-194) E <> 68 - <> <> (1-195) E <> (01-196) E <> <>EEPROM

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Body Material Aluminum Body Material Brass A A 2 x J 4 x J A A 2 x J 4 x J B C F B B C F B 1/8, 1/4, 3/8 1/8, 1/4, 3/8 1/8, 1/4, 3/8 1/8, 1/4, 3/8 C F C D E D E F D E D E Body Material: Aluminum [mm] Body Material: Brass [mm] Size Port size A B C D E F J 20 1/8, 1/4 11 36 6 34 46 1.5 5.3 30 1/4, 3/8 13 46 7 40 56 1.5 Size Port size A B C D E F J 20 1/8 52 24 9 36 64 1.5 6 20, 30 1/4, 3/8

XL

Example) D-F9NL Main switch circuit Main switch circuit Output Black [White] () Blue [Black] D-F9P (+) Brown [Red] Auto Switch Dimensions (mm) 1in=25.4mm Output Black [White] D-F9N, D-F9P, D-F9B () Blue [Black] D-F9B (+) Brown [Red] L dimension (mm) Part No.

High Vacuum Angle Valve, XL Series

Example) D-F9NL Main switch circuit Main switch circuit Output Black [White] () Blue [Black] D-F9P (+) Brown [Red] Auto Switch Dimensions (mm) 1in=25.4mm Output Black [White] D-F9N, D-F9P, D-F9B () Blue [Black] D-F9B (+) Brown [Red] L dimension (mm) Part No.

Vacuum Unit

Option -D Port combination: PV = PS PD Port layout No. 13 Circuit example Single unit: ZK2GlRlllA-l-D PV (= PS) PV PD EXH (including PE) PD High-noise reduction silencer exhaust EXH V System Ejector Body type Single unit Exhaust type High-noise reduction silencer exhaust V P (R type) Supply valve: Self-holding type Release valve: N.C.

Series KG Stainless Steel One-touch Fittings

D L 4 KGC06-00 KGC04-00 3 3 4 6 KGC08-00 KGC10-00 10.4 17 16 12.8 18.5 17 15.2 20.5 18.5 18.5 23 21 6 8 10 12 20.9 24 22 8 KGC12-00 16 26.5 28 25 13 KGC16-00 130

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

B A C Operating Range D B D-Z7/Z8, D-Y7W D-Y5, D-Y7 D-Y6, D-Y7V D-Y7WV D-Y7BAL Bore size (mm) A C 11.5 (10) 18.5 (17) 26.5 (25) 34 (32.5) 34 (32.5) 44 (42.5) D 0.5 (1) 3.5 (2) 0.5 (1) 3 (1.5) 5 (3.5) 5 (3.5) C 13 20 28 36 36 46 D C 5.5 12.5 20.5 28 28 38 Auto switch model Bore size (mm) 6 10 15 20 25 32 9 7 9 9 9 11 6 10 15 20 25 32 5.5 2.5 5.5 3 1 1 2 5 2 4.5 6.5 6.5 4.5 7.5 4.5 7 9 9 15.5

LEH_C

/LEHZ .10 2.1 LEHZ () . 10 2.1.1 . 10 2.1.2 . 11 2.1.3 . 12 2.2 LEHZJ () . 13 2.2.1 . 13 2.2.2 . 14 2.2.3 . 15 2.2.4 . 16 3./LEHF .17 3.1 . 17 3.2 . 18 3.3 . 19 4.

High Vacuum Angle Valve

D-G

LJ1H

B C D A Non-standard Motors: The following motors will be mounted when a motor mounted type is specified.

HRX-OM-X084

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-9 Connection of RS-232C 3.3 Installation HRR Series 3-18 HRX-OM-X084 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

JXCx-OMT0061CN

(1) D <> <> <>(C24V) RESET SVON (1) 1-147 D <> <> <> (1-148) RESET SVON (1) D <> 74 - <> 1-149 RESET SVON D <> <> <> *2 LED PLC 11 10: RESET SVON PLC 1-150 D LED RWr0,bit F (LRUN) *2 ON PLC RWw0,bit 2:ON Ry0B: RESET ON OFF PC/TB Ry0B: RESET ON PLC PLC PC/TB PC:TB: <> 1-192 E <> <> ON(SVON ON) 1-193 E <>ON SVON ON <> 1-194 E <> <> 1-195 E <> <

o

(M5) s Port 5 A ] I "4;f D q-ttFor subplate/type 41, S41,46S46 manibld.

o

(M5) s Port 5 A ] I "4;f D q-ttFor subplate/type 41, S41,46S46 manibld.

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

(M5) s Port 5 A ] I "4;f D q-ttFor subplate/type 41, S41,46S46 manibld.

Fluoropolymer Piping Equipment

Class Class No. 1 1 2 2 2 2 2 2 3 3 3 3 3 3 3 3 3 3 4 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 6 6 6 6 6 6 1 2 1 2 C 3 4 F 1 2 3 4 5 6 7 E 9 10 1 2 3 4 5 6 F 9 1 2 3 4 5 7 8 9 1 2 3 4 5 6 1/8" A A B C D E F A B C D E F A B C D E F G A B C D E F G H A B C D E F 1 2 2 2 2 2 2 3 3 3 3 3 3 4 4 4 4 4 4 4 5 5 5 5 5 5 5 5 6 6 6 6 6 6 1/8" 1/8" 1/8" Branch tee female Run tee male Run tee female 1/4" A A 1/4