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0 u !0 !2 w y r !0 e 1 New PFA Body 2 New PFA Sensor 3 Super PFA Tube 4 PPS Housing A 5 PPS Housing B 6 PPS Housing C 7 POM Bushing 8 PPS Cap 9 FKM Gasket 10 FKM O-ring 11 SUS304 Thread 12 PVC Lead wire !1 q t i PF2D540 o !0 u !0 !2ywr e !

---I -~ _:_::-::: : ::-0.7ipa ~,,:-~~.'. "". 0~~1~00 ~~2~0~~~ ~ 0 30~0-4~OLO-~50~0~~60~0 0 1500 3000 4500 6000 7500 Air flow rate Qlmin (ANR) Air flow rate Qlmin (ANR) AMH350 AMH850 0.5MPa )7MPa I I // ",0.06I-Air pressure 0.3MPa '" 0.06 Inlel air pressure 0.3MPa / a. V o/pa ~pa ::;; a. V~V ::;; Q) /-Y :; ~0 . 04 '// ~ / /,/ ~ 0.04

zoo ~ ) 2 ~ i 100 E 12 z ,; 2 ~ E , E :; 100 V ~ " I ~ , , " , f< ' ~ 0 u: , ' l ~ ~ 0 w 0 5 10 ~ V " ~ 0 ] w 0 5 10 Needle revolullOOs (RevolutIOns) Needle revolutions (Revolutions) ASP530F ASP630F 12. 1500 'E 20 E 12 11~14:l~ z ~ ~ ~IOOO 15 . , g j " . 000 14 'E ' , ' h E cr z 12 ,; "'500 . l/ : 4 i 1,(" 0 to, 1~ OS, D9 10 ~ E ~ " , "' g 10 : ; ~.; 0 --:' 500 ~ ~ 5 :J" ~ -r ~ 0 w

M8x1.2S 6.6 A 0 9 67 76 89 8 Ml 0X l .5 15 50 98. Max 1.25 9 80 92 108 8 M1 OX 1.S 15 18 M1 Oxl .5 9 63 103.5 MIOx l .S 11 99 116 13' 10 M1 6X2.0 21 22 M12xl .7S 11 123 Ml 2x 1.75 80 Clevis Mount: C0020P 0 -0 OM-DO Special cap bolt (mm) eo.. _ N CD CL ew ev A 0 R CU ex cz RR Ll H H Thread e I (mm) C Depth M8xl .2S M8x l .25 14 117 I .

Setting Setting range 10 0 to 6 1 0 to 9 1: The station number should be any number from 00 to 63. If a node is set to a number greater than 63, the "NS" LED will light up.

@smcromania.ro Russia +7 8127185445 www.smc-pneumatik.ru info@smc-pneumatik.ru Slovakia +421 (0)413213212 www.smc.sk office@smc.sk Slovenia +386 (0)73885412 www.smc.si office@smc.si Spain +34 902184100 www.smc.eu post@smc.smces.es Sweden +46 (0)86031200 www.smc.nu post@smc.nu Switzerland +41 (0)523963131 www.smc.ch info@smc.ch Turkey +90 212 489 0 440 www.smcpnomatik.com.tr info@smcpnomatik.com.tr

L/minCFM(ft 3/min) <> [F 0] [F 0][rEF] [rEF][] (SI) () [Uni][] [F 0] -26No.PF-OMP0001CN-F [ Ft] PFMB7501 PFMB7102 PFMB7202 0.217.7 cfm 0.435.3 cfm 0.870.6 cfm 0.437.1 cfm 0.874.2 cfm 0.437.1 cfm 3 0999,999,999 ft 0.1 cfm 3 1 ft 3/pulse 1 ft 3/pulse 0.1 ft -0.918.6 cfm -1.837.1 cfm -3.674.2 cfm (-0.20.2 [ 0]) (-0.40.4 [ 0]) (-0.80.8 [ 0]) 3 0999,999,999 ft 0.1 cfm

0 @0 oi @3 u@4 @8@7@2r !9 #0 w #1 #0 t q @9 e #1 @1 !9t@5 @6 #0@1q!1w#1#0@2@9#1@1 40 to 63 @4@0@8oiu@3!1#1#2@8@4!2@7!3#3r!4@6!6e #7 #6 !5 !9t@5 @6 y#0@1w#0#5!7#4q@9@2!8#1#2!7#5#4@1 Parts list Parts list Description Material Note No. No.

20 0 0 40 30 0 10 30 20 104 or less 104 or less 4.8 x 104 3.8 x 104 Heat aging Weather resistance Ozone resistance Gas permeability resistance / / / / / / / Gasoline/Gas oil / / / / Benzene/Toluene / Alcohol / / / / / / Ether / Ketone (MEK) / / / / Ethyl acetate Water / / / / Organic acid Organic acid of high concentration Organic acid of low concentration / / Strong alkali Weak alkali

20 0 0 40 30 0 10 30 20 104 or less 104 or less 4.8 x 104 3.8 x 104 Heat aging Weather resistance Ozone resistance Gas permeability resistance / / / / / / / Gasoline/Gas oil / / / / Benzene/Toluene / Alcohol / / / / / / Ether / Ketone (MEK) / / / / Ethyl acetate Water / / / / Organic acid Organic acid of high concentration Organic acid of low concentration / / Strong alkali Weak alkali

20 0 0 40 30 0 10 30 20 104 or less 104 or less 4.8 x 104 3.8 x 104 Heat aging Weather resistance Ozone resistance Gas permeability resistance / / / / / / / Gasoline/Gas oil / / / / Benzene/Toluene / Alcohol / / / / / / Ether / Ketone (MEK) / / / / Ethyl acetate Water / / / / Organic acid Organic acid of high concentration Organic acid of low concentration / / Strong alkali Weak alkali

20 0 0 40 30 0 10 30 20 104 or less 104 or less 4.8 x 104 3.8 x 104 Heat aging Weather resistance Ozone resistance Gas permeability resistance / / / / / / / Gasoline/Gas oil / / / / Benzene/Toluene / Alcohol / / / / / / Ether / Ketone (MEK) / / / / Ethyl acetate Water / / / / Organic acid Organic acid of high concentration Organic acid of low concentration / / Strong alkali Weak alkali

Bit: 7 0 Do not operate the product outside of the specifications. Do not use for flammable or harmful fluids. Fire, malfunction, or damage to the product can result. Verify the specifications before use. Bit No. 6 4 6 4 2 0 0 0 Solenoid on side A 0 2 4 6 8 16 28 30 Output No.

to 60C (No freezing) Ambient and fluid temperature +8 0 +10 0 +8 0 +10 0 +8 0 +10 0 +8 0 +10 0 90, 180 90 , 100 180 , 190 90, 180 90 , 100 180 , 190 Note) Rotating angle 5 at each rotation end 5 at each rotation end Angle adjustment range Cylinder bore size 6 8 Port size M3 x 0.5 Note) If optimum accuracy of the (rotating) angle is required, select an actuator with external stopper.

B port A port B port A port +8 0 00 20t 1 0 t 9 fla la gle e f gl sin sin of of ge ge an an n r tio ta n r Ro +8 0 io Ro tat tat Ro 80 io t 1 n r fla an ge gle of sin +10 0 Ro tat 90 ion t 1 ra fla ng le e o ing f s With external stopper For 90 For 180 Single flat Single flat A n 5 5 gl e ge ge ad an an ju t r t r st en m en en stm m t r st ju ju an ad ad ge le e Ang 5 gl n A B port

oFF] 44 -22No.PF-OMJ0005CN-I [F 0] L/min CFM(ft 3/min)10 -2 <> [F 0] [Uni] [F 0] [ Ft] PFM710 PFM725 PFM750 PFM711 N2Ar 0.835.3 1.888.3 4177 8353 -2 -2 -2 -2 CFM10 CFM10 CFM10 CFM10 CO2 0.817.6 1.844.1 488 8176 -2 -2 -2 -2 CFM10 CFM10 CFM10 CFM10 N2Ar 0.837.1 1.892.7 4186 8371 -2 -2 -2 -2 CFM10 CFM10 CFM10 CFM10 / CO2 0.818.5 1.846.3 493 8185 -2 -2 -2 -2 CFM10 CFM10 CFM10 CFM10

0 2000 4000 6000 8000 0 0 50 100 150 200 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) AL20 Rc 1/4 AL50 Rc 1 0.1 0.1 A portion of the air introduced from the IN side pressurizes the lubricant inside the bowl.

Nominal filtration rating: 30 m 0 to 101 kPa 100 to 100 kPa 849 Compact Vacuum Ejector Series ZA How to Order Ejector Unit ZA1 1 07 K1 P1 5 L 0 1 Nozzle nominal size Vacuum (V) port 05 07 0.5 0.7 Symbol 1 2 4 5 Applicable tubing O.D. Part no. KJS23-M5 KJS04-M5 KJL23-M5 KJL04-M5 3.2 (Straight) 4 (Straight) 3.2 (Elbow) 4 (Elbow) Solenoid valve combination (Refer to Table (1).)