42

(R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ 1/2 VQ 4/5 VQ 4/5 VQC 1/2 VQC 4/5 VQZ (A) 4 (B) 2 (A) 4 (B) 2 VQ4250 VQ4251 SQ VFS 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VFR VQ7 (A) 4 (B) 2 (A) 4 (B) 2 VQ4351 VQ4350 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQ4451 VQ4450 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQ4551 VQ4550 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

5/16'' EX510 Gateway-type Serial Transmission System Type 20SA 5 port body ported 10-SYJ5000 R P R P. 325 Type 21SA 5 port body ported 10-SYJ3000 P. 297 10-SYJ7000 R P P. 355 Type 32SA 4 port base mounted 10-SYJ3000 R P P. 298 Type 41SA 5 port base mounted 10-SYJ5000 P. 326 10-SYJ7000 P R P. 356 Type 42SA 5 port base mounted 10-SYJ5000 R P P. 326 Type 43SA 5 port base mounted 10-SYJ5000 P

VFS

Note 5) Based on JIS C 4003.

ARM10/11

Metric size Inch size 1 2 3 4 5 6 7 8 9 M 1 station Elbow Straight Elbow OUT side IN side Straight 6 Elbow Straight Elbow OUT side IN side Straight 2 stations Symbol Symbol Note) 3 stations 8 10 6 8 10 4 6 4 6 1/4 5/16 3/8 1/4 5/16 3/8 5/32 1/4 5/32 1/4 4 stations 07 08 09 10 11 12 19 20 21 22 23 24 26 27 28 29 30 31 33 34 35 36 37 38 57 58 59 60 61 62 69 70 71 72 73 74 76 77 78 79 80

ARM10/11

Metric size Inch size 1 2 3 4 5 6 7 8 9 M 1 station Elbow Straight Elbow OUT side IN side Straight 6 Elbow Straight Elbow OUT side IN side Straight 2 stations Symbol Symbol Note) 3 stations 8 10 6 8 10 4 6 4 6 1/4 5/16 3/8 1/4 5/16 3/8 5/32 1/4 5/32 1/4 4 stations 07 08 09 10 11 12 19 20 21 22 23 24 26 27 28 29 30 31 33 34 35 36 37 38 57 58 59 60 61 62 69 70 71 72 73 74 76 77 78 79 80

Compact Manifold Regulator

IN/OUT Piping Position IRV Metric size Inch size Position IN side OUT side VEX IN side Straight 4 6 OUT side IN side Straight OUT side Mounting position Mounting position Bottom Top Bottom Top Symbol Elbow Straight Elbow 4 6 Elbow Straight Elbow Fitting type Symbol Fitting type Symbol 1 2 3 4 4 6 4 6 5/32 1/4 5/32 1/4 5/32 1/4 5/32 1/4 SRH 06 07 08 18 19 20 25 26 27 32 33 34 56 57 58 68 69

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

Flow Rate and Sonic Conductance Universal type Symbol AS121FG AS221FG-02 AS321FG AS421FG AS221FG-01 Model AS131FG AS231FG-02 AS331FG AS431FG AS231FG-01 3.2 6 8 10 12 3.2 6 4 6 8 10 4 4 8 10 12 Metric size 6 10 Tubing Flow Direction Symbols on Body 1/8" 3/16" 5/32" 3/16" 1/4" 5/16" 3/8" 3/8" 1/2" 1/4" 1/8" O.D. 5/32" 5/16" 5/32" 1/4" Meter-out type Meter-in type Inch size 3/16" 5/16" 3/8"

Series KP/KPQ/KPG

D Plug-in Reducer: KPQR, KPGR Applicable tubing D Effective area mm Note 1) D Model L TPH TPS Applicable fitting size d Applicable tubing O.D. mm Weight g M A 39.4 20.1 3 KPQR04-06 KPGR04-06 6 4 10.4 18 4 4 M A L 41.9 20.2 4 KPQR04-08 KPGR04-08 8 42.5 20.8 4 KPQR06-08 KPGR06-08 6 12.8 19.5 10 10 45 21.2 5 KPQR06-10 KPGR06-10 Applicable fitting size d 10 47 23.2 5 KPQR08-10 KPGR08-10 8 15.2

Series KP/KPQ/KPG

D Plug-in Reducer: KPQR, KPGR Applicable tubing D Effective area mm Note 1) D Model L TPH TPS Applicable fitting size d Applicable tubing O.D. mm Weight g M A 39.4 20.1 3 KPQR04-06 KPGR04-06 6 4 10.4 18 4 4 M A L 41.9 20.2 4 KPQR04-08 KPGR04-08 8 42.5 20.8 4 KPQR06-08 KPGR06-08 6 12.8 19.5 10 10 45 21.2 5 KPQR06-10 KPGR06-10 Applicable fitting size d 10 47 23.2 5 KPQR08-10 KPGR08-10 8 15.2

KP/KPQ/KPG

D Plug-in Reducer: KPQR, KPGR Applicable tubing D Effective area mm Note 1) D Model L TPH TPS Applicable fitting size d Applicable tubing O.D. mm Weight g M A KPGR04-06 KPQR04-06 3 39.4 20.1 6 4 M A L 10.4 18 4 4 KPGR04-08 KPQR04-08 41.9 20.2 4 8 KPQR06-08 KPGR06-08 20.8 4 42.5 6 12.8 19.5 10 10 KPQR06-10 KPGR06-10 5 21.2 45 Applicable fitting size d 10 KPGR08-10 KPQR08-10 5 47 23.2 8 15.2

5 Port Solenoid Valve Series VQZ1000/2000/3000

SY3000-44-3A P.941 P.941 Base Mounted Blanking plate assembly VVQZ1000-10A-5 (for VQZ1000) VVQZ2000-10A-5 (for VQZ2000) VVQZ3000-10A-5 (for VQZ3000) Restrictor spacer (Applicable to VQZ2000) VVQZ2000-20A-5 Individual SUP spacer VVQZ1000-P-5-M5 (for VQZ1000) VVQZ2000-P-5-01 (for VQZ2000) VVQZ3000-P-5-02 (for VQZ3000) Individual EXH spacer VVQZ1000-R-5-M5 (for VQZ1000) VVQZ2000-R-5-01 (for

0.4

KQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-01 KQ2P-03 KQ2P-07 KQ2P-09 3.2 4 6 8 16 16 18 20.5 31.5 32 35 39 1/8" 5/32" 1/4" 5/16" 16 16 18 20.5 31.5 32 35 39 3.2 6 8 10 5 6 8.5 10 Port plug VVQ0-58A The plug is used to block the cylinder port.

Magnetically Coupled Rodless Cylinder

5 5 D-Z7/ Z80 6 9 A B CY1HT D-Y5/ Y6/ Y7 5 6 Some auto switches cannot be mounted.

LX Series Compact Electric Actuators

ao . , , , , t o o 3 . , , . , 05 stePping a ''.a: ' , . a , : a : l r : : i : l ::: I iob' ' ', ' t99;:9i1':i1:t t: llli,2.gtepping O8: 12mm lead , , . , , 1 ( } . u 5 asbinriea,i : r iri llliqq'i'' o5 stepoinq 30 08; zmm lead o2 stepping 80 08; 5mm lead 10.03 30 08; 2mm lead s5 stepping 80 08; 5mm lead a I a a a 100 O8; 6mm lead o2 stepping I M <-iD;;,;; uo200 08; 12mm lead 10.05 100 08

V

ZPT04U 4 4.8 1.6 3 6 5 8 0.8 D E E P T Y P E ZPT06U 6 7 2.5 3 6 5 8 0.8 Model A B C D E F G Y ZPT08U 8 9 2.5 3 6 5 8 1 ZPT10D 10 12 15 24 35.5 58.5 71.5 6 ZPT16D 16 18 16 25 36.5 59.5 72.5 7 Courtesy of Steven Engineering, Inc. !

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

View port G1/2 5 10 30 50 100 300 Flow rate (L/min) Conditions Fluid: Turbine oil Class 2 VG56 Measured pressure: 14 MPa Viscosity: 45 mm2/s Filter material: Paper Nominal filtration: 10 m FH64 Series Refer to page 529 for Microswitch for differential pressure indication switch. 16 0.1 10/12 0.05 0.04 0.03 06/08 Pressure drop (MPa) 0.02 03/04 0.01 0.005 0.003 5 10 30 50 100 300 Flow rate

Compact 5-Port Solenoid Valve

(A)4 2(B) (A)4 2(B) 4(A) 2(B) (EA)5 1 3(EB) (EA)5 1 3(EB) (P) (P) 3-position pressure center 5(EA) 3(EB) 1(P) (A)4 2(B) N.O. valve x 2 pcs. 2(B) 4(A) (EA)5 1 3(EB) (P) 3(EB) 5(EA) 1(P) N.C. valve, N.O. valve x 1 pc. of each 2(B) 4(A) 3(EB) 5(EA) 1(P) Component Parts No.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Metric size ZFC7 ZFC5 Symbol Applicable tubing O.D. 4 6 8 10 12 3 4 5 6 7 Option Nil B None With bracket Inch size B D E F 5/32" 1/4" 5/16" 3/8" Max.

VFR

Max. 8 stations Individual Individual 8 Bottom 08 8 stations Option 3-5-17 18 Series VFR2000 Plug-in Type: With D-sub Connector (For wiring specifications, refer to page 3-5-8.)

Fieldbus System

S0710-5 S0710-5 S0720-5 S0720-5 S0720-5 S07A0-5 S07A0-5 62 72 102.4 39 12 12 12 12 12 21.8 5 4 4 x M4 mounting hole SI unit n 8 7 6 5 4 3 2 1 Stations D side U side [Communication connector D-sub] C8: 3(R) port C8: 8 One-touch fitting DIN rail clamping screw 76.7 76.7 33.6 33.6 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A (12) (12) 17.5 6.5 9.6 8.5 17.2 (7.5) (7.5) C8: