Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Precision Control, Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Bleed, Reverse Flow Function (Relief): [Included] Yes, Supply Side Connection Type: Rc, Supply Side, Connection Diameter: 1/8, Flow Direction: [Right] From Left to Right, Control Side Connection

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Precision Control, Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Bleed, Reverse Flow Function (Relief): [Included] Yes, Supply Side Connection Type: Rc, Supply Side, Connection Diameter: 1/8, Flow Direction: [Right] From Left to Right, Control Side Connection

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Precision Control, Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Bleed, Reverse Flow Function (Relief): [Included] Yes, Supply Side Connection Type: Rc, Supply Side, Connection Diameter: 1/8, Flow Direction: [Right] From Left to Right, Control Side Connection

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Precision Control, Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Bleed, Reverse Flow Function (Relief): [Included] Yes, Supply Side Connection Type: Rc, Supply Side, Connection Diameter: 1/8, Flow Direction: [Right] From Left to Right, Control Side Connection

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Precision Control, Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Bleed, Reverse Flow Function (Relief): [Included] Yes, Supply Side Connection Type: Rc, Supply Side, Connection Diameter: 1/8, Flow Direction: [Right] From Left to Right, Control Side Connection

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Precision Control, Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Bleed, Reverse Flow Function (Relief): [Included] Yes, Supply Side Connection Type: Rc, Supply Side, Connection Diameter: 1/4, Flow Direction: [Right] From Left to Right, Control Side Connection

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Precision Control, Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Bleed, Reverse Flow Function (Relief): [Included] Yes, Supply Side Connection Type: Rc, Supply Side, Connection Diameter: 1/4, Flow Direction: [Right] From Left to Right, Control Side Connection

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Precision Control, Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Bleed, Reverse Flow Function (Relief): [Included] Yes, Supply Side Connection Type: Rc, Supply Side, Connection Diameter: 1/4, Flow Direction: [Right] From Left to Right, Control Side Connection

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Precision Control, Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Bleed, Reverse Flow Function (Relief): No, Supply Side Connection Type: G, Supply Side, Connection Diameter: 3/8, Flow Direction: [Right] From Left to Right, Control Side Connection Type: G, Control

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Precision Control, Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Bleed, Reverse Flow Function (Relief): [Included] Yes, Supply Side Connection Type: Rc, Supply Side, Connection Diameter: 1/4, Flow Direction: [Right] From Left to Right, Control Side Connection

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Precision Control, Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Bleed, Reverse Flow Function (Relief): [Included] Yes, Supply Side Connection Type: Rc, Supply Side, Connection Diameter: 1/4, Flow Direction: [Right] From Left to Right, Control Side Connection

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Precision Control, Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Bleed, Reverse Flow Function (Relief): [Included] Yes, Supply Side Connection Type: G, Supply Side, Connection Diameter: 3/8, Flow Direction: [Right] From Left to Right, Control Side Connection

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

P(SUP) port P A P A A A A A A A 24.5 (11) 13.5 R B R B B B B B B B (7.5) 7 2-C6 R(EXH) port 19.2 P = 11 2n-C3, C4, C6, M5 C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 threads Broken lines indicate DIN rail mount type [-D] and connector top entry [-JU].

VFR

C8 (A, B port) D side Bottom ported: VV5FR2-01TStation 2Port size C6, C8 Light/Surge voltage suppressor (At FZ) 2-Rc 1/8 (PE port) 2-G 3/4 (Electrical entry) C6: Max. 6 C8: Max. 6.5 6-Rc 1/4 (P, EA, EB port) With terminal block (One-piece junction cover): VV5FR2-01T1Station 1Port size U side 5n-Rc 1/8 (Pitch) P = 28 Stations 2n-Rc 1/8, 1/4 C6, C8 (A, B port) D side Bottom ported: VV5FR2-

Vacuum System Peripherals:

(When port sizes for A, B ports are mixed, indicate C4 or C6 in cell .)

42

SYJ SZ VF VP4 VQ 1/2 VQ 4/5 VQ 4/5 VQC 1/2 VQC 4/5 Plug lead type Plug-in type VQZ Lead wire length L 0: Approx. 600 mm L 1: Approx. 1500 mm L 2: Approx. 3000 mm 1/4", 3/8" C6, C8, C10, C12, N7, N9, N11 4(A), 2(B) port SQ 1/4", 3/8" C6, C8, C10, C12, N7, N9, N11 4(A), 2(B) port 106.5 155.4 (Single) 164.4 (Double) 178.5 (3-position) 3.5 VFS 3.5 139.9 (Single) 148.9 (Double) 163 (3-position

SYJ300/500/700

C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-41R-01 Type SS3YJ5-41R-C4 C4 C6 Type SS3YJ5-41R-C6 Note) Value at manifold base mounted, 2 position single operating How to Order Manifold (Example) Instruct

VZS

VV5ZS2 C6 06 51G 1 VFN Thread type Series VZS2000 Manifold Standard Nil NPT Rc N T F Plug-in type Stacking type manifold base with attachment plug lead wire NPTF G Option Port size Rc 1 8 01 Embedded type One-touch fitting Applicable tubing O.D.: 4 Stations C4 02 2 stations C6 Embedded type One-touch fitting Applicable tubing O.D.: 6 15 stations 15 Symbol Max. 15 stations.

3 Port Air Operated Valve Series SYJA300

C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-41R-01 Type SS3YJ5-41R-C4 C4 C6 Type SS3YJ5-41R-C6 Note) Value at manifold base mounted, 2 position single operating How to Order Manifold (Example) Instruct

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

C4 C6 C4 C6 Stations L1 L2 L3 L4 3 4 5 6 7 8 9 10 2 123 135.5 125 102 16.5 148 148 160.5 150 173 185.5 175 198 210.5 200 112.5 91.5 15.5 137.5 137.5 123 12.5 162.5 144 14.5 187.5 165 16.5 133.5 13.5 154.5 15.5 175.5 17.5 112.5 17.5 Stations SS5Y3-45GUBC4 C6 2 3 4 5 6 7 8 9 10 Stations L1 L2 L3 L4 135.5 125 108 13.5 148 160.5 150 129 15.5 173 185.5 175 150 17.5 185.5 175 198 210.5 200 223