o L J : In case of manifold. ifications Air and inert gases 20-1OoPS| (1.5-7kgflcm') Operating pressure range P100PSl (P-7kg7cm2) P : supply pressure Pilot pressure range Max.120"F (50'C) Ambied and fluid temDerature Not required Lubrication Mounting position 15G/3G (8.3-20o0Hz) lmoact,/vibration .esistance How To Order : Wihout kacket 6 o F: Wlil bracket vJ3000-13-3 (Factory inslalld Operating
L J : In case of manifold. ifications Air and inert gases 20-1OoPS| (1.5-7kgflcm') Operating pressure range P100PSl (P-7kg7cm2) P : supply pressure Pilot pressure range Max.120"F (50'C) Ambied and fluid temDerature Not required Lubrication Mounting position 15G/3G (8.3-20o0Hz) lmoact,/vibration .esistance How To Order : Wihout kacket 6 o F: Wlil bracket vJ3000-13-3 (Factory inslalld Operating
L J : In case of manifold. ifications Air and inert gases 20-1OoPS| (1.5-7kgflcm') Operating pressure range P100PSl (P-7kg7cm2) P : supply pressure Pilot pressure range Max.120"F (50'C) Ambied and fluid temDerature Not required Lubrication Mounting position 15G/3G (8.3-20o0Hz) lmoact,/vibration .esistance How To Order : Wihout kacket 6 o F: Wlil bracket vJ3000-13-3 (Factory inslalld Operating
FIFI -r-r I I I L-Opllonal Valvo Slr 1 = C l a $ I I P = External Electrical Plug In I p5= "DlN" Connector (with 6'Cord Assy.) I E = 48'Solsnoid Leads (24'STD) I e = Mounting Bs (AXT 33&11) II I F..tur"" D = Recessed non-locking manual operator F = Becessed non-locking manual operator and etectricat indicator light.'
P o w er su p p ly co n n ecto r key Communication connector key 6 Sw i t ch set t i ng Saf et y I nst ruct i ons f or Set t i ng Turn of f t he pow er suppl y w hi l e set t i ng t he sw i t ch. I f t here i s f orei gn m at t er or w at er dropl et s around t he sw i t ch cover, cl ean i t of f bef ore openi ng t he cover.
Valve Body (for Swagelok) Body (for VCR) Spacer (optional) P 33 Series XSA High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm Electrical entry Grommet (G) Electrical entry Conduit (C) F G 27010 F G D 29010 H C G(PF)1/2 DIN terminal (D) F G J C H 29.5 39 H C OUT IN A P G(PF)1/2 6 to 9 22 E B (body dimension) P (fitting size) 2-M5 Thread depth M A Terminal (T) F G2 (Bs) J (XSA S) 25 33 H K
to "AMS20/30/40/60A-R/N/F#D" for dimensions other than "A" and "F".
+ + + + + + + 20 20 stations S P P A, B port size P Nil Rc A, B port M5 x 0.8, C4 P port 1/8 P port 1/8 A A B B B A, B port M5 x 0.8, C4 A M5 M5 x 0.8 F G C4 One-touch fitting for 4 N NPT N3 One-touch fitting for 5/32" T NPTF 13 Series SYJ3000 Flat Ribbon Cable Manifold Common SUP/Common EXH Note) For more than 10 stations, supply air to both sides of P port and exhaust air from
R* P FR* FP Functional option Adjuster option Without option With buffer With end lock Axial piping With buffer, end lock With buffer, axial piping F R P FR FP Note 1 Note 1 Note 1 AS AT X X X X Note 1 A X X X X End lock option is not available for MXS6.
override 34.7 [41.7] M5 x 0.8 (A, B port) 2-1.8 (For manifold mounting) (Light/Surge voltage suppressor) 28 [35] + 22.1 54.4 [56.6] 2 13.5 12.6 15 R P R (Bracket) 15 11 10 1.2 (PE port) 22.1 7 7 15 M5 x 0.8 (P, R port) M8 connector (WO): SYJ3120-WO-M3 (-F) L plug connector (L) : SYJ3120-L-M3 (-F) M plug connector (M): SYJ3120-M-M3 (-F) (2) Approx. 300 (Lead wire length) 28 [35] 12.6 32.5
[F 0] Display units, switch output specifications and diagnostic information selection function Page 32 Units specification Pressure range Default setting ISE20C(H) MPa "Nil" or M ZSE20C(F) kPa ISE20C(H) P psi ZSE20C(F) Item Default setting Switch output specifications PNP Diagnostic information ALL -30No.PS-OMX0002-A [F 1] Setting of OUT1 Page 34 Item Explanation Default setting Output mode
Body type Rc 1 8 Plug-in type VVZS3000-P-01-1 Non plug-in type VVZS3000-P-01-2 Rc 1 4 VVZS3000-P-02-1 VVZS3000-P-02-2 Body type Plug-in type AXT625-12A Non plug-in type Part no. Part no. Body type Plug-in type VVZS3000-22A-1 Non plug-in type VVZS3000-22A-2 Part no.
F E Y2 F Y2 CRQ2X MSQX L L E MRQ 2 x Q4 2 x Q4 K K C B D G D G B C U H U H M T N M T 25.5 N (34.5: Connector type) 2 x R 1 2 x R Auto switch P P W1 W Auto switch Size: 20, 30 Size: 40 W W 2 67 8 15 8 When D-M9m is used 32.5 1.
brnE al 0frli&/.bs,irfor Port size :Non-locking push type (Flush) rf> I l F l B-Lock type (Screw type) > | | ' l xA-l\tonlockng Push type (Extended) . C-b"kt/p. (Lever) Body type.-[-c"*'f ] sf;1 i qo3j, {Botlom pofted 1/8 NPTF oniy.
OUT 4-L J 2-K M M 4-K Port size Port size N Min. clearance for maintenance Drain Min. clearance for maintenance Drain D Lubricator Regulator Air filter D Lubricator Regulator Air filter ACG20 Optional (-Y) Upward facing handle ACG30/40 Optional (-Y) Upward facing handle A P G F E A F E P G 2-L B C 2-L B C H1 H2 H1 H2 OUT IN OUT IN SMC SMC 4-L 2-L J OUT OUT M 2-K M 4-K Port size Port size
brnE al 0frli&/.bs,irfor Port size :Non-locking push type (Flush) rf> I l F l B-Lock type (Screw type) > | | ' l xA-l\tonlockng Push type (Extended) . C-b"kt/p. (Lever) Body type.-[-c"*'f ] sf;1 i qo3j, {Botlom pofted 1/8 NPTF oniy.
Series CH2E/CH2F/CH2G/CH2H Limit stroke charts/Bore sizes 32, 40 Symbol Mounting orientation Symbol Mounting orientation Symbol Mounting orientation Symbol Mounting orientation F F F F F F F F F F F Bore size 32 B rod 2000 5 2 4 8 3 7 1 1000 6 500 Stroke (mm) 100 50 10 0.1 0.5 1 5 10 20 Load (kN) Bore size 40 B rod C rod 2 4 3 7 3 7 5 2000 4 8 1 5 8 6 2 1 1000 6 500 Stroke (mm) 100 50 0.5
m 0.3 MPa Graph (5) F 0.4 MPa Graph (6) m 0.5 MPa Graph (7) F 9-9-6 7 Model Selection Series CLS Selection Graph Graph (5) Graph (2) 0.3 MPa ) P < 0.4 MPa 0.3 MPa ) P < 0.4 MPa 4000 4000 3000 3000 250 2000 2000 200 Load weight: m (kg) Load weight: m (kg) 180 CL 1000 1000 160 700 800 900 700 800 900 250 140 CL1 600 600 125 200 500 500 180 MLGC 400 400 160 300 300 140 CNG 125 200 200 MNB