Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Note 3) Polyurethane is only applicable for the ZFC050-02. SP ZCUK Made to Order (Refer to page 1115 for details.)

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

Add a "" in front of the part numbers for solenoid valves, etc., to be mounted. 2 3 4 Class 2 Class 3 Class 4 Enter together in order, counting from station 1 on the D side. OUT port size Material Symbol 01 02 Port size 1/8 (6A) 1/4 (8A) Stations D side U side 1 2 3 4 5 n Body material Brass Symbol D H Seal material FKM FKM 02 : 10 2 stations : 10 stations All IN ports are 3/8.

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

Valve model Port size VCL2 VCW20-12-01 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCL3 VCW30-12-04 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW30-12-04 VCL4 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 Bracket material: Stainless steel 3 Series VCL Direct Operated

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Applicable tubing O.D.

Pilot Operated Regulator AR425 to 935 Series

How to Order Internal pilot operated relieving type regulator AR 25 4 BG 02 Semi-standard Nil Flow direction: Right to left None (Standard) Regulator R Body size Port size Accessory 4 6 8 9 1 2 1 Symbol 1 Description Applicable model 02 03 04 06 10 12 14 20 1 4 Nil 2 1 8 3 B With bracket AR4 5 to 6 5 AR 25 AR 35 2 1 2 3 4 Gauge G46-10-02 G46-2-02 G Regulating pressure range 1 G46-P10-02-X30

Pressure Relief 3 Port Valve with Locking Holes

VH*-OMX0068-C PRODUCT NAME Pressure Relief 3 Port Valve with Locking Holes MODEL / Series / Product Number VHS20-(F,N)01~(F,N)02(-B,S)(-K,M,R,Z)-D VHS30-(F,N)02~(F,N)03(-B,S)(-K,M,R,Z)-D VHS40-(F,N)02~(F,N)04(-B,S)(-K,M,R,Z)-D VHS40-(F,N)06(-B,S)(-K,M,R,Z)-D VHS50-(F,N)06~(F,N)10(-B,S)(-K,M,R,Z)-D VHS20W-(F,N)01~(F,N)02(-B,S)(-K,M,R,Z)-D VHS30W-(F,N)02~(F,N)03(-B,S)(-K,M,R,Z)-D VHS40W-(F,

Digital Flow Switch (Integrated display type)

(fluid: Dry air) Analogue output accuracy: 3%F.S. max.

Manifold Specifications

Electrical entry SC (T only) Type SU Type SC Type SC Type SU Type SC Type SU AXT622-5A AXT336-4AStations AXT336-5Stations Description AXT336-1A-1 01 02 01 02 01 02 02 03 02 03 02 03 02 03 Manifold block assembly AXT336-1A-2 AXT336-1A-3 AXT336-2A-1AXT336-2A-2AXT336-3A-1AXT336-3A-2q End plate (U side) assembly w End plate (D side) assembly e Terminal assembly Junction cover assembly Tie-rod

MR Unit (Regulator with Mist Separator) AMR3000 to 6000 Series

E 3 Auto-drain Pressure gauge mounting Port size 02 03 04 06 10 ARJ MR unit 1 None With auto drain 0 Flow direction: Right to left Nil Flow direction: Left to right Applicable model 1/4 3/8 1/2 3/4 1 Nil E2 E3 E4 E6 E10 R 3 4 5 6 AMR3 00-02 to 03 AMR4 00-02 to 04 AMR5 00-04 to 06 AMR6 00-10 AR425 to 935 Adapter assembly port size (2 pcs.)

IS3000

0 1 Standard Micro load Port size Nil 02 N02 With gasket Rc 1/4 NPT 1/4 16-9-3 2 Series IS3000 Construction Precautions IS3000-02/3010-02 (Rc 1/4 thread) Be sure to read before handling.

AC

Panel Mount Nut Applicable Body Size All All 30, 40 30, 40 All Symbol 02 03 04 Port Size 1/4 3/8 1/2 *Note: Bracket and/or panel mount nut are not assembled and are supplied loose at time of shipment.

Series AC Epoxy Coated F.R.L.

Panel Mount Nut Applicable Body Size All All 30, 40 30, 40 All Symbol 02 03 04 Port Size 1/4 3/8 1/2 *Note: Bracket and/or panel mount nut are not assembled and are supplied loose at time of shipment.

Clean Gas Filter

Helium leak volume 4.0 x 10-9 Pam3/sec or less Case/Cover Stainless steel 316 (Interior/Exterior: Electrolytic polishing) Main material Filter medium PTFE membrane Seal Fluororubber (FKM) -8- 2-3 Dimensions 1) SFC100-02, SFC100-03 Model A SFC100-02 Rc1/4 SFC100-03 Rc3/8 2) SFC102-02, SFC102-03 Model A SFC102-02 TSJ1/4 SFC102-03 TSJ3/8 3) SFC105-02, SFC105-03 Model A B C SFC105-02 URJ1/4 22

Sine Cylinder Series REC

Lead wire length (m) Load voltage Indicator light Auto switch model None (N) Applicable load Special function Type Electrical entry Pre-wired connector Wiring (Output) 0.5 (Nil) 3 (L) 1 (M) 5 (Z) DC AC M9N M9P M9B H7C G39 K39 M9NW M9PW M9BW H7BA H7NF 3-wire (NPN) IC circuit 5V,12V 3-wire (PNP) Grommet Relay, PLC Reed switch Solid state switch 2-wire 12V Connector IC circuit 3-wire (NPN)

Sine Cylinder Series REC

Lead wire length (m) Load voltage Indicator light Auto switch model None (N) Applicable load Special function Type Electrical entry Pre-wired connector Wiring (Output) 0.5 (Nil) 3 (L) 1 (M) 5 (Z) DC AC M9N M9P M9B H7C G39 K39 M9NW M9PW M9BW H7BA H7NF 3-wire (NPN) IC circuit 5V,12V 3-wire (PNP) Grommet Relay, PLC Reed switch Solid state switch 2-wire 12V Connector IC circuit 3-wire (NPN)

Sine Cylinder Series REC

Lead wire length (m) Load voltage Indicator light Auto switch model None (N) Applicable load Special function Type Electrical entry Pre-wired connector Wiring (Output) 0.5 (Nil) 3 (L) 1 (M) 5 (Z) DC AC M9N M9P M9B H7C G39 K39 M9NW M9PW M9BW H7BA H7NF 3-wire (NPN) IC circuit 5V,12V 3-wire (PNP) Grommet Relay, PLC Reed switch Solid state switch 2-wire 12V Connector IC circuit 3-wire (NPN)

VFM300

3 Stainless steel Spool spring u Stainless steel Plunger 3.5-48 VFM300 Series VFM300 Basic/VFM350-02-00 JIS Symbol 16N F.O.F. 0.5MPa supply 1mm P.T. 2mm O.T. 3mm T.T. Roller Lever/VFM350-02-01, VFM350-02-01S JIS Symbol 8N F.O.F. 0.5MPa supply 2.2mm P.T. 4mm O.T. 6.2mm T.T.

IS3000

N.O. 125 AC 250 AC 30 DC 125 DC 5 3 4 0.4 1.3 0.8 2.5 1.5 0.7 0.5 1.5 1 3 0.05 2 0.05 3 2 3 0.4 0.1 0.1 Insulation resistance: 100 M or more at 500 VDC by megameter Voltage resistance: 1500 VAC, Hz for 1 min.

Series 12-REA Sine rodless cylinder

Operation of the cylinder with its body fixed will damage the wear ring, resulting in increase of particle generation or malfunction. 12-REA40 10-AS2001F-06-X214 10-AS2201F-02-06-X214 10-AS2301F-02-06-X214 12-REA50 10-AS3001F-08-X214 10-AS3201F-02-08-X214 10-AS3301F-02-08-X214 12-REA63 10-AS3001F-08-X214 10-AS3201F-02-08-X214 10-AS3301F-02-08-X214 Although speed adjustment is possible with

Speed Controller: Standard Type In-line Type AS Series

Free flow Controlled flow Weight (g) Sonic conductance dm3/(sbar) Sonic conductance dm3/(sbar) Critical pressure ratio Critical pressure ratio Model Port size Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) AS1000-M3 AS1000-M5 AS2000-01 AS2000-02 AS3000-02 AS3000-03 AS4000-02 AS4000-03 AS4000-04 AS5000-02 AS5000-03 AS5000-04 0.06 20 0.06 20 M3 x 0.5 4.7 0.15 0.22 80 0.25 90 M5 x 0.8 33 0.7