70pvpump .-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com AIR SUP (Pilot air supply port) Rc 1/4 FLUID IN Rc 1/4, 3/8 FLUID OUT Rc 1/4, 3/8 PROCESS PUMP AIR SUP 110 45 29 FLUID IN FLUID OUT AIR EXH 33 AIR EXH (Pilot air exhaust port) Rc 1/4 75 5 120 32.5 45.5 Bottom 17-5-162 23 Process Pump Built-in Solenoid
Refer to p.0-33 to 0-36 for Safety Instructions and common precautions.
L size Blank plate with 2 screws and gasket 39 498 38 485.5 37 473 36 460.5 35 448 34 435.5 33 423 32 410.5 31 398 No. L size 40 510.5 2.9-15
or less 25 or less 0.70 Rubber seal VQC1301 0.65 0.20 0.16 0.42 0.18 26 or less 20 or less 0.68 Metal seal VQC1400 0.72 0.15 0.16 0.25 0.18 Symbols Exhaust center 78 33 or less 25 or less 0.70 Rubber seal VQC1401 1.0 0.20 0.16 0.30 0.25 2-position single 26 or less 20 or less 0.70 Metal seal VQC1500 0.72 0.15 0.16 0.25 0.18 Pressure center (A)( 4 B) 2 33 or less 25 or less 0.85 Rubber seal
Rubber seal 16.2 (0.9) VQZ332 33 or less 25 or less 92 VQZ300 Metal seal 13.5 (0.75) VQZ322 22 or less 17 or less N.O.
I E = 48'Solsnoid Leads (24'STD) I e = Mounting Bs (AXT 33&11) II I F..tur"" D = Recessed non-locking manual operator F = Becessed non-locking manual operator and etectricat indicator light.' K = Recessed locking manual operator J = Recessed locking manual operator and electrical indicator light.'
.@ (66) 1.30 (33) Millimeters in Parntheses PARTS LIST NVSA 31i|5 I xTo1gr5 axTo2l-14 3 I xTo195 AXT103-4 4 1 So.inc spoolrsiurn xTo10.15 xT103.5 ABP566O1E 4FP568.119 I slvs assarnblv conslsls ol sDoot snd slsev {malchrl s4, and (4J cLtax 5 Spacer AXT36!
An application which has the possibility of having negative effects on people, property, or animals, requiring special safety analysis. 33 Series MSQ Rotary Table Precations 1 Be sure to read before handling. Selection Design Warning Warning 1. Keep the speed setting within the products allowable energy value.
[Foundations bolt set] AB IDF Size Applicable Thermo-cooler Material Quantity per set Symbol HRG001HRG002HRG005500 Stainless steel 4 HRG010HRG015501 Note) Refer to page 33 for dimensions.
Refer to p.0-33 to 0-36 for Safety Instructions and common precautions.
238 B 160 220 239 C 73 86 92 E 30 38 F 45.5 58.5 75.5 G 40 55 80 J 26 29.5 37.5 K 5 3.5 1.5 M 30 41 50 N 51 64 81 Q 24 35 40 U 5 7 7 V 33 45 50 W 34.5 41 AC21B AC31B AC41B * Without relief valve option ** With relief valve option 2 Series AC21~41 F.R.L.
Stroke Against Lateral Load D 17 24 27 29 0.7 W W W 500 82 103 116 127 0.3 Bushing (Bearing) fR U 62 79 89 97 0.5 Lateral load applied to rod end (fR) N 100 52 66 75 81 0.7 50 33 43 49 53 0.3 10 23 31 36 39 T 0.5 REC40 REC32 REC25 REC20 5 18 25 29 31 0.7 2 Rod side flange style: F Head side flange style: G 182 167 148 118 Foot style: L 0.3 1 L 140 128 114 90 0.5 0.5 W W W F REA 117 108 95
L n L: Dimensions n: Stations 1 2 3 4 5 6 7 8 9 10 11 12 L1 L2 53.7 63.9 74.1 84.3 94.5 104.7 114.9 125.1 135.3 145.5 155.7 165.9 20.4 30.6 40.8 51 61.2 71.4 81.6 91.8 102 112.2 122.4 132.6 7 Series VV100 Dimensions VV100-10F D1A B F1 F2 U Stations 1 2 Bracket option: F2 (For bottom ported) 4 x M3 for mounting (Bracket) 20 39 33 3.5 Bracket option: F1 (For side ported) 1 (Pitch) P = 10.2
238 B 160 220 239 C 73 86 92 E 30 38 F 45.5 58.5 75.5 G 40 55 80 J 26 29.5 37.5 K 5 3.5 1.5 M 30 41 50 N 51 64 81 Q 24 35 40 U 5 7 7 V 33 45 50 W 34.5 41 AC21B AC31B AC41B * Without relief valve option ** With relief valve option 2 Series AC21~41 F.R.L.
0.2 33 0.2 20 42 8 8 2 x M3 x 0.5 through 3.4 through 6.5 counterbore with depth 5.5 (Opposite side: Same) 2 x M4 x 0.7 through 6.5 (16) (8 + Stroke) 2 x M3 x 0.5 through 4 33 0.2 CX2 6 CXW For bolt holder, refer to page 560, Mounting.
Without DIN connector 24 VAC Seal material: EPDM 48 VAC Special voltage G thread 220 VAC NPT thread 240 VAC With bracket 12 VDC DIN terminal with light Mounting holes on the bottom side of the body Conduit terminal with light Special electrical entry direction Dimensions Pages 32, 33 (Single unit) 11 Series VX21/22/23 Manifold For Medium Vacuum (0.1 Paabs or more) For other fluids, please
OPTIONS AND AUXILIARY EQUIPMENT (3) Outline drawing (a) EMC filter HF3010A-UN [Unit: mm] 3-M4 4-5.5 7 3-M4 M4 32 2 110 4 85 2 IN Approx.41 258 4 65 4 273 2 288 4 300 5 11 33 11.
(SW1) (SW1) (SW2-3, SW2-4) (SW2-3, SW2-4) 0 33 0 49 1 34 1 50 2 35 2 51 3 36 3 52 4 37 4 53 5 38 5 54 6 39 6 55 ON ON 7 40 7 56 8 41 8 57 1 2 3 4 1 2 3 4 9 42 9 58 A 43 A 59 B 44 B 60 C 45 C 61 D 46 D 62 E 47 E 63 F 48 F 64 -14- 5. Parameter list (Driver side) Please configure the appropriate parameters to enable correct driver operation. Refer to [5.
37 29 31 25 54 44 47 40 50 38 42 40 68 61 Standard supply pressureNote 1) 0.5 65 60 57 53 48 46 81 80 6 0.1 19 18 15 24 0.2 31 29 26 39 0.3 46 35 43 33 38 30 55 47 53 44 58 51 52 48 69 64 Standard supply pressureNote 1) 0.5 72 65 66 62 59 56 83 81 Note 1) ZQ05A0.35MPaZQ07AZQ10A0.43MPaZQ000A0.4MPa 12.
8 0.3 to 0.5[MPa] (P) (PV) 8 0 to -101.3[kPa] (PS) 8 0.3 to 0.5[MPa] (PD) 1)2) 4 0 to 0.45[MPa] (PE) 4 M53.246 (V) 1) P PS 0.05 MPa 20.1MPa 14 - No.ZQ-OM01401-B 3.4.2 1PEM3 1/4 0.4~0.5Nm) 2PM5 1/6 1/4 1.0~1.5Nm) 3) 3.4.3 1 2 3 4 1 2) 3) 1) 0.1mm 2 0.1mm 3) +0.15mm -0.2mm 15 - No.ZQ-OM01401-B 3.4.4 1 2, 3 4 5 URL http://www.smcworld.com& 3.5 3.5.1 1 2 6 33