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.@ (66) 1.30 (33) Millimeters in Parntheses PARTS LIST NVSA 31i|5 I xTo1gr5 axTo2l-14 3 I xTo195 AXT103-4 4 1 So.inc spoolrsiurn xTo10.15 xT103.5 ABP566O1E 4FP568.119 I slvs assarnblv conslsls ol sDoot snd slsev {malchrl s4, and (4J cLtax 5 Spacer AXT36!

An application which has the possibility of having negative effects on people, property, or animals, requiring special safety analysis. 33 Series MSQ Rotary Table Precations 1 Be sure to read before handling. Selection Design Warning Warning 1. Keep the speed setting within the products allowable energy value.

[Foundations bolt set] AB IDF Size Applicable Thermo-cooler Material Quantity per set Symbol HRG001HRG002HRG005500 Stainless steel 4 HRG010HRG015501 Note) Refer to page 33 for dimensions.

Refer to p.0-33 to 0-36 for Safety Instructions and common precautions.

238 B 160 220 239 C 73 86 92 E 30 38 F 45.5 58.5 75.5 G 40 55 80 J 26 29.5 37.5 K 5 3.5 1.5 M 30 41 50 N 51 64 81 Q 24 35 40 U 5 7 7 V 33 45 50 W 34.5 41 AC21B AC31B AC41B * Without relief valve option ** With relief valve option 2 Series AC21~41 F.R.L.

Stroke Against Lateral Load D 17 24 27 29 0.7 W W W 500 82 103 116 127 0.3 Bushing (Bearing) fR U 62 79 89 97 0.5 Lateral load applied to rod end (fR) N 100 52 66 75 81 0.7 50 33 43 49 53 0.3 10 23 31 36 39 T 0.5 REC40 REC32 REC25 REC20 5 18 25 29 31 0.7 2 Rod side flange style: F Head side flange style: G 182 167 148 118 Foot style: L 0.3 1 L 140 128 114 90 0.5 0.5 W W W F REA 117 108 95

L n L: Dimensions n: Stations 1 2 3 4 5 6 7 8 9 10 11 12 L1 L2 53.7 63.9 74.1 84.3 94.5 104.7 114.9 125.1 135.3 145.5 155.7 165.9 20.4 30.6 40.8 51 61.2 71.4 81.6 91.8 102 112.2 122.4 132.6 7 Series VV100 Dimensions VV100-10F D1A B F1 F2 U Stations 1 2 Bracket option: F2 (For bottom ported) 4 x M3 for mounting (Bracket) 20 39 33 3.5 Bracket option: F1 (For side ported) 1 (Pitch) P = 10.2

238 B 160 220 239 C 73 86 92 E 30 38 F 45.5 58.5 75.5 G 40 55 80 J 26 29.5 37.5 K 5 3.5 1.5 M 30 41 50 N 51 64 81 Q 24 35 40 U 5 7 7 V 33 45 50 W 34.5 41 AC21B AC31B AC41B * Without relief valve option ** With relief valve option 2 Series AC21~41 F.R.L.

0.2 33 0.2 20 42 8 8 2 x M3 x 0.5 through 3.4 through 6.5 counterbore with depth 5.5 (Opposite side: Same) 2 x M4 x 0.7 through 6.5 (16) (8 + Stroke) 2 x M3 x 0.5 through 4 33 0.2 CX2 6 CXW For bolt holder, refer to page 560, Mounting.

Without DIN connector 24 VAC Seal material: EPDM 48 VAC Special voltage G thread 220 VAC NPT thread 240 VAC With bracket 12 VDC DIN terminal with light Mounting holes on the bottom side of the body Conduit terminal with light Special electrical entry direction Dimensions Pages 32, 33 (Single unit) 11 Series VX21/22/23 Manifold For Medium Vacuum (0.1 Paabs or more) For other fluids, please

OPTIONS AND AUXILIARY EQUIPMENT (3) Outline drawing (a) EMC filter HF3010A-UN [Unit: mm] 3-M4 4-5.5 7 3-M4 M4 32 2 110 4 85 2 IN Approx.41 258 4 65 4 273 2 288 4 300 5 11 33 11.

(SW1) (SW1) (SW2-3, SW2-4) (SW2-3, SW2-4) 0 33 0 49 1 34 1 50 2 35 2 51 3 36 3 52 4 37 4 53 5 38 5 54 6 39 6 55 ON ON 7 40 7 56 8 41 8 57 1 2 3 4 1 2 3 4 9 42 9 58 A 43 A 59 B 44 B 60 C 45 C 61 D 46 D 62 E 47 E 63 F 48 F 64 -14- 5. Parameter list (Driver side) Please configure the appropriate parameters to enable correct driver operation. Refer to [5.

37 29 31 25 54 44 47 40 50 38 42 40 68 61 Standard supply pressureNote 1) 0.5 65 60 57 53 48 46 81 80 6 0.1 19 18 15 24 0.2 31 29 26 39 0.3 46 35 43 33 38 30 55 47 53 44 58 51 52 48 69 64 Standard supply pressureNote 1) 0.5 72 65 66 62 59 56 83 81 Note 1) ZQ05A0.35MPaZQ07AZQ10A0.43MPaZQ000A0.4MPa 12.

8 0.3 to 0.5[MPa] (P) (PV) 8 0 to -101.3[kPa] (PS) 8 0.3 to 0.5[MPa] (PD) 1)2) 4 0 to 0.45[MPa] (PE) 4 M53.246 (V) 1) P PS 0.05 MPa 20.1MPa 14 - No.ZQ-OM01401-B 3.4.2 1PEM3 1/4 0.4~0.5Nm) 2PM5 1/6 1/4 1.0~1.5Nm) 3) 3.4.3 1 2 3 4 1 2) 3) 1) 0.1mm 2 0.1mm 3) +0.15mm -0.2mm 15 - No.ZQ-OM01401-B 3.4.4 1 2, 3 4 5 URL http://www.smcworld.com& 3.5 3.5.1 1 2 6 33

For details of how to set each function, refer to the relevant setting of function section in this manual. 33 - NO.

ZQ-OM01601 // ZQ-ZSV 2 9 10 11 14 14 15 16 16 19 19 19 F0 21 F1 OUT1 22 F2 OUT2 24 F3 26 F4 27 F6 29 F11 30 F80 31 F81 32 F90 33 F96 35 F98 36 F99 38 39 42 43 44 50 51 51 1 - *1) *2) (ISO/IEC)(JIS) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems. ISO 4413: Hydraulic fluid power -General rules relating to systems.

10.4 15.9 ( DIN 17.1) 1/4 (P, R port) 1/4 (P, R port) (Pitch) P = 17 24.5 (Station n) (Station 1) (Station n) (Station 1) Built-in speed controller (Light/surge voltage suppressor) (Light/surge voltage suppressor) 56.5 Max. 13.5 61.6 [68.6] 61.6 [68.6] + + + + + + 46.2 46.2 A A A A 33 24.5 25 B B B B 1 6 8.5 8.5 (Pitch) P = 16 33 (Pitch) P = 17 One-touch fitting (A, B port) 24.5 1/8 (A,

Note 1) 36 2 x 4-M22 x 2.5 thread depth 38 109 + Stroke 17 M24 x 3 effective thread depth 33 126 + Stroke 182 226 Width across flats 55 Note 1) 2 x 4-M22 x 2.5 threads through for strokes of 20mm or less.

15.5 MHK2-12S 120 12 2.0 (9) 4 9 13 2.7 Normally open Normally closed MHK2-16S 16 5.2 (23) 6 14.6 20.6 4.0 MHK2-20S 20 7.6 (34) 10 16 26 8.4 L1 MHK2-25S 25 13.0 (58) 14 19 33 15.6 Single acting L2 MHK2-12C 12 2.7 (12) 4 9 13 2.7 MHK2-16C 16 5.6 (25) 6 14.6 20.6 4.1 MHK2-20C 20 9.9 (44) 10 16 26 8.4 MHK2-25C 25 16.4 (73) 14 19 33 15.6 MHKL2 Series Long stroke model / Open diameter mm (L2)

HS Auto switch Auto switch 36 12 24.5 A B 33 6.5 49 A B G 1/2 (applicable cable O.D. 6.8 to 9.6) D-G5, D-K5, D-G5W, D-G5BA, D-K59W, D-G59F, D-G5NT D-A4 Approx. HS Approx.