VDW Thread type Voltage Rc G NPT Nil F N 1 2 3 4 5 6 100 VAC (50/60 Hz) 200 VAC (50/60 Hz) 110 VAC (50/60 Hz) 220 VAC (50/60 Hz) 24 VDC 12 VDC Port size Please consult with SMC regarding other voltages.
OUT1 [CoL][] ON OFF ON OFF [F 1] OUT1 -38No.PF-OMO0004CN-E [F 2] OUT2 OUT2 (31 )(32 ) OUT2()[---] <>OUT2 [F 2] [F 2][oU2] [oU2][] [2ot][] 40 41 42 43 -39No.PF-OMO0004CN-E a.
Contact P/A regarding the specifications for PSI unit and F .
Magnet With auto switch only 9 Magnet plate Stainless steel With auto switch only 10 Scraper 11 Rod seal 12 Piston seal NBR 13 Tube gasket 14 Piston gasket 269 CHKD Series Dimensions Basic type/CHKDB 2 x Rc P F with effective thread depth G F with effective thread depth G Q Q Width across flats f c R D R a b g e H E E h + Stroke C B + Stroke 4 x K through 8 x L counter bore 4 x K through
Use the attached mounting screw (M3 x 0.5 x 14) for mounting. The mounting screw (M3 x 0.5 x 7) attached to the digital pressure switch assembly will not be required.
Use the attached mounting screw (M3 x 0.5 x 14) for mounting. The mounting screw (M3 x 0.5 x 7) attached to the digital pressure switch assembly will not be required.
ZSM PF2 IF Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Data Special fitting types are used in semiconductor production equipment (Metal gasket seal fittings) Leak rate: 1 x 10 10 Pa.m3/s ZSE/ISE60(F)-A2 ZSE/ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (Metal gasket seal fittings
Nil Metric thread (M3, M5) Rc NPT G N F Bore size Bore size Applicable series M3 M5 01 02 03 04 M3 x 0.5 M5 x 0.8 1/8 1/4 3/8 1/2 AS1000 AS1000 AS2000 AS2000, 3000, 4000, 5000 AS3000, 4000, 5000 AS4000, 5000 650 A AS Series Speed Controller: Standard Type In-line Type Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.
case of M3 Dimensions with broken lines stand for a locking knob type.
Function: 1 (2 Position Single), Piping: 2 (Body Ported), Exhaust: 0 (Individual), Specifications: T (Power Saver), Voltage: 5 (24VDC), Lead Wire: G (Grommet Lead Wire 0.3m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Type, Port Size: M3 (Body Ported M3X0.5)
Function: Normally Closed, Piping: Body Ported, Body Option: Standard, Voltage: 24VDC, Lead Wire: Grommet Lead Wire 0.3m, Surge Suppressor: Light & Surge Suppressor, Manual Override: Non-locking Push Style, Port Size: Base Mounted w/Sub-plate/Body Ported Mfld M3X0.5, Option: -
Function: Normally Open, Piping: Base Mounted, Body Option: Large Flow Style, Voltage: 24VDC, Lead Wire: Grommet Lead Wire 0.3m, Surge Suppressor: Light & Surge Suppressor, Manual Override: Non-locking Push Style, Port Size: Base Mounted w/Sub-plate/Body Ported Mfld M3X0.5, Option: -
Function: Normally Closed, Piping: Body Ported, Body Option: Large Flow Style, Voltage: 24VDC, Lead Wire: Grommet Lead Wire 0.3m, Surge Suppressor: Light & Surge Suppressor, Manual Override: Non-locking Push Style, Port Size: Base Mounted w/Sub-plate/Body Ported Mfld M3X0.5, Option: -
Function: 1 (Normally Closed), Piping: 2 (Body Ported), Body Option: M (Common EXH), Specifications: Standard, Rated Voltage: 5 (24VDC), Lead Wire: G (Grommet Lead Wire 0.3m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: None, Port Size: M3 (Body Ported M3X0.5)
Function: 1 (Normally Closed), Piping: 2 (Body Ported), Body Option: Individual EXH, Specifications: T (Power Saver), Rated Voltage: 5 (24VDC), Lead Wire: G (Grommet Lead Wire 0.3m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: None, Port Size: M3 (Body Ported M3X0.5)
Function: 2 (Normally Open), Piping: 2 (Body Ported), Body Option: R (External Pilot), Specifications: Standard, Rated Voltage: 5 (24VDC), Lead Wire: G (Grommet Lead Wire 0.3m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: None, Port Size: M3 (Body Ported M3X0.5)
Function: 1 (Normally Closed), Piping: 2 (Body Ported), Body Option: Individual EXH, Specifications: Standard, Rated Voltage: 5 (24VDC), Lead Wire: G (Grommet Lead Wire 0.3m), Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: None, Port Size: M3 (Body Ported M3X0.5)
Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard, Valve Type: 5-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Pressure Differential Return), Valve Positions: 2-Position Exhaust, Pipe Port Type: M, Port Size: M3, Pressure Rating(MPa): 0.15 to 0.7, Driving Type: Pilot Type Spool, Pilot Air Supply
Type: Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard, Valve Type: 5-Port Valve, Actuation: -, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 3-Position Closed Center, Pipe Port Type: M, Port Size: M3, Pressure Rating(MPa): 0.2 to 0.7, Driving Type: Pilot Type Spool, Pilot Air Supply: Internal, Seal Type
Solenoid Valves, Application: Single Unit, Mounting Orientation: Direct, Voltage: DC24V, Specification: Standard / Low Vacuum Compatible / Lubrication Free / Copper-Free Fluoropolymer Material / Low Current, Valve Type: 3-Port Valve, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: M, Port Size: M3