Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

4 @1 @2 !5 y q r !6 e !0 !3 w @1 @2 !5 t y q r e !0 !3w #0 o @0 !6 i !9 !8 u o @0 !7 i !9 !8 u t @6 @4 #1 @3 @5 Round bar rod end type (D) Chamfered rod end type (K) @7 #4 #2 32, 40, 50 20 Only one roller is provided for 32. @2 u !5q y !4 !9 i@0w!2!1 @1 @2 t u !5 !4!8!9i w!2!1 !0 o e @0 !6 q y !0 o e !6 !8 t @1 Component Parts No.

JXCx-OMU0026

and time . 13 (4) Alarm and error check . 15 3.6 Parameters and Step data . 16 (1) Select the actuator . 16 (2) Setting parameters . 19 (3) Electronic gear ratio setting . 21 (4) Step data settings. 23 3.7 Check using JOG operation . 24 (1) Change to Remote mode . 24 (2) Return to origin . 25 (3) JOG or Inching . 26 3.8 Operation test using Test Drive . 27 (1) Test Drive setting . 27 (2)

JXCx-OMT0005CN

2-3 2byte *1 *2 4-7 4byte *1 *2 8-9 2byte *1 *2 10-11 2byte *1 *2 12-13 2byte *1 *2 1 100 Get/Set 32 No.0 14-15 2byte *1 *2 16-17 2byte *1 *2 18-19 2byte *1 *2 20-23 14byte *1 *2 24-27 24byte *1 *2 28-31 4byte *1 *2 64 100 Get/Set 32 No.63 0-1 2byte *1 *2 28-31 4byte *1 *2 *1 *2 21(P.85 19 - 2IO Class 68h /IO IO IO DeviceNet 0Eh Get_Attribute_Single 10h Set_Attribute_Single Attribute

Prevents Micro-Bubbles

1/4, 3/8 M6 x 1 (SUS) 46 60 99 16 20.5 138 142 47.5 33.5 50 Rc 3/8, 1/2, NPT 3/8, 1/2 M8 x 1.25 30 36 55 44 11 10 75.5 77 4 20 37 3.5 27 Rc 1/4, NPT 1/4 36 47 80 56 15 19 109.5 111.5 7.5 34 46 5.5 37 Rc 3/8, NPT 3/8 PPS 46 60 99.5 68 22 20.5 138.5 142.5 8 42 57 5.5 50 Rc 1/2, NPT 1/2 30 36 58.5 44 14.5 10 79 80.5 4 20 37 3.5 27 Rc 1/4, NPT 1/4 36 47 84 56 19 19 113.5 115.5 7.5 34 46

Digital Flow Switches, Series PF2A, Series PF2W

--27(-M) 24 2-Port size 4-4.5 40 50 Brown 1 OUT1 4 Black White Load (41.5) OUT2 2 + 12 to 24VDC Load 3 Blue PF2A7--67(-M) 4 42 2-3.4 43 Flow direction PF2A711, 721, 751 64 23 116 1.6 88 Connector pin numbers 4 3 FLOW SWITCH U P 34 54 44 SET OUT1 OUT2 DOWN 2 1 FOR AIR Pin no.

Stainless Steel 316 Fittings

Note 2) Value of FEP tube. Union Elbow: KQG2L 2 x Applicable tube Note 2) Effective area (mm2) Applicable tube O.D.

Vacuum

Selection Graph 5: Adsorolion resoonse time 90 63 45 *, 27 < E ' " E 9 9 . 0 E --i 6.3 I ;4.s x \ ! 1 2 7 Eiector size determination by calculation: '1 .

VM

Toggle lever VM220-02-08 VM230-02-08 JIS Symbol 2 port Hexagon nut thick 6, across flats 27 EXH port (3 port only) 3 port Panel mounting hole 0.5 MPa supply 2-5.5 mounting hole 12 N F.O.F.

60

32 J Width across flats G Width across flats G (E) 14 25 31.5 (44) E E 14 J (L) A (C) C A 2 x H Port size E (E) G1/2 2 x H Port size 2 x 5.3 Mounting hole Mounting hole 2 x 5.3 Width across flats 27 Width across flats 27 42 14 34 14 34 42 B B (mm) Model Port size H A Normally open (N.O.)

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

38.5 NN 2 2 3 3 4 5 H 28 30 20 28 23 28 G 9 12 13 15 20 27 N 4 4 4 4 6 6 HA 20 30 20 28 46 56 KA 82.5 132.5 GA 17 12 33 43 43 83 NA 2 2 2 2 4 4 13-/22-MXS8L-10 13-/22-MXS8L-20 13-/22-MXS8L-30 13-/22-MXS8L-40 13-/22-MXS8L-50 13-/22-MXS8L-75 785 MXS 1322Air Slide Table Dimensions: MXS12 1322Basic 2 x M4 x 0.7 thread depth 5 Air Preparation Equipment Pressure Control Equipment Flow Control

Multi-channel Digital Sensor Monitor ( compatible)

Screw shall be tightened 1/4 to 1/2 turns more after touched correctly.

AC Servo Motor Driver (SSCNET /H Type)

(SW1) (SW1) (SW2-3, SW2-4) (SW2-3, SW2-4) 0 1 0 17 1 2 1 18 2 3 2 19 3 4 3 20 4 5 4 21 5 6 5 22 6 7 6 23 ON ON 7 8 7 24 8 9 8 25 1 2 3 4 1 2 3 4 9 10 9 26 A 11 A 27 B 12 B 28 C 13 C 29 D 14 D 30 E 15 E 31 F 16 F 32 -13- Auxiliary axis number Auxiliary axis number Axis selection rotary switch Axis selection rotary switch Control Control setting switch setting switch axis No. axis No.

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

Power supply/Output connection cable (2 m) ZS-28-A D Bracket With M3 x 5L (2 pcs.) ZS-28-B Mounting screw (M3 x 8L) Sensor connector 1 pc. ZS-28-C Panel mount adapter With M3 x 8L (2 pcs.) ZS-27-C Panel mount adapter Panel mount adapter + Front protective cover With M3 x 8L (2 pcs.) ZS-27-D Note) These options are not attached in the factory, but packed together with it for shipment.

IP8001 Series

G1/2 3 1.0MPa 2 1/4NPT M201.5 *2 3 1/4NPT 1/2NPT Construction 4 G1/4 G1/2 0 Standard type 5 G1/4 M201.5*2 2 Output function {analog output (4-20mADC)+ alarm outputX2} 6 G1/4 1/2NPT 3 HART communication function (preparing) Accessory*1 NIL No accessory 1: If two or more accessories are required, the part numbers should be made according to alphabetical order.

CE

18 SR3.5 26.6 3 18 M5 x 0.8 13 40 17 27 5 67.5 14.5 4-M4 x 0.7 Thread depth 7.5 2-M5 x 0.8 (Port size) 71.5 103 + Stroke 24 127 + Stroke 2 10-12-12 High Precision Stroke Reading Cylinder Non-rotating Piston Type Series CEP1 Foot style: CEP1L12 Stroke 4-4.5 (Positioning pin hole) 40 5.5 13 25 6 RE A B +0.05 +0.02 4 REC CX 66 54 CY MQQ M RHC MK(2) RS Q G 47.5 RS H A 17 RZQ 40 27 3.5 51 MI

OMR0031

Note 5) Cables are not included. 15 - 3.2 2 Parts description Details of the parts of the controller. (1) (2) (3) Remove the housing. (10) (8) (4) (5) ON (6) ON (7) OFF 1 2 3 4 5 6 (9) Pulse input signal switch (default) No.

IP8101 Series

alarm 2 mode(on), non-alarm mode(oFF), and change the set value if alarm 2 mode is selected.

Table of Contents - Tubing

I.D. 1 2 3 1 2 3 1 L 210 280 265 D 18 TCU0425B-1 TCU0425B-2 TCU0425B-3 TCU0604B-1 TCU0604B-2 TCU0604B-3 TCU0805B-1 52 35 22 54 27 17 41 1.5 4 2.5 28 1 2 1.5 1 2 24 325 6 4 37 305 330 8 31 5 Burst Pressure Characteristics Chart 725 Burst pressure psi 580 Burst pressure 435 290 145 Max. operating pressure 0 4 32 68 Operating temperature F 104 140 TUB-10 Polyurethane Coil Tubing (Metric) continued

Table of Contents

2 Rod seal NBR !

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

Component Parts Qty. 2 1 1 2 1 1 3 1 1 1 1 1 2 1 2 2 1 1 Qty. 1 1 1 1 1 1 1 1 1 1 1 1 2 1 1 1 No. No.