reduces flow setting time

Metal parts material Applicable tubing material Metric size Inch size Seal method Body size Port size 2 3.2 4 6 8 10 12 16 1/8" 5/32" 1/4" 5/16" 3/8" 1/2" Note) Gasket seal 1 M5 x 0.8 Note) 10-32UNF Note) 1/8 2 Note) Note) 1/4 Sealant R 3 1/4 NPT Brass/ Steel wire 3/8 Nylon (T,TIA Series) Soft nylon (TS,TISA Series) Note) Stainless steel 4 1/2 Note) 1/8 2 Note) 1/4 Polyurethane (T,TIUB

Process Pump

1/8 With LQ3 fitting With LQ1 fitting (6.35) (1.2) 55 15 FLUID IN FLUID OUT 4.5 30 41 7 (140) (149) 139 87 77 79 2 (2 x R2.25) 4.5 FLUID IN Rc, NPT, G 1/8 With nut (LQ1/LQ3 fittings) 1/4" tube extension Caution 1.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

0.49 0.51 0.54 0.50 0.50 0.59 0.55 0.52 0.53 1/8 1/8 1/8 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/8 C6 C8 1/8 C6 C8 1/8 1/8 C6 C8 Type SS5YJ7-20 Body ported SYJ72 for internal pilot Type SS5YJ7-21 Type SS5YJ7-40 Base mounted Type SS5YJ7-41 SYJ74 for internal pilot Type SS5YJ7-42-C6 Type SS5YJ7-42-C8 Note) Value at manifold base mounted, 2 position single operating How to Order Manifold (Example) Instruct

Series AK1000

) tGauge port (Outlet) 2P 3P 4PL 5PC MPA MPA MPA 1 1 1 0 0 40 2) Other range available.

Process Pump

2) Note 2) Note 1, 2) Note 1, 2) Note 1, 2) 1.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Metric size Inch size 100 200 205 300 400 M5 standard 3.2 1/8 standard 23 04 06 08 10 12 01 03 05 07 09 11 13 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 1/4 standard 4 6 8 10 12 3/8 standard 1/2 standard With One-touch fittings Use 1/8" tube.

JXCx-OMT0034CN

N.C. 1 N.C. 2 1 1 1 1 SD+ 3 2 2 2 2 SD4 3 3 3 3 N.C. 5 4 4 4 4 N.C. 6 N.C. 7 1 2 3 4 1 2 3 4 N.C. 8 CN4 CN4 No. No.

Stainless Steel One-touch Fittings Series KG

A M Weight (g) M5 D L P Nylon Urethane KGU04-01 KGU04-M5 M5 0.8 4 11 20 13 12 22 35 10.4 36 38 40 2.2 2.2 39.5 42 46 11 16 1 8 4 10.4 4.2 4.2 1 4 KGU04-02 14 KGU06-M5 KGU06-01 KGU06-02 KGU06-03 KGU08-01 2.2 2.2 M5 0.8 39 41.5 43 44.5 48.5 49.5 50 55 55.5 57 42.5 45.5 49 51 13 1 8 1 4 3 8 1 8 17 12.8 6 12.8 13.4 13.4 14 17 52.5 55.5 56.5 25.6 17.7 16 24 36 17 15.2 1 4 KGU08-02 8 18.5 15.2

Process Pump Series PA3000/5000/PAX1000 Series PB1000

button 100 125 23 RESET (175) AIR SUP (pilot air supply port) 1/4 FLUID IN 1/4, 3/8 FLUID OUT 1/4, 3/8 PROCESS PUMP AIR SUP 110 45 29 FLUID IN FLUID OUT AIR EXH 33 AIR EXH (pilot air exhaust port) 1/4 75 5 120 32.5 45.5 Bottom 15 Series PB1000 Process Pump Built-in Solenoid Valve Type/Air operated Type (External Switching Type) How to Order 1 0 1 01 PB 1 Body size Option/Part no. 1 1/8

Series KG Stainless Steel One-touch Fittings

A M Weight (g) M5 D L P Nylon Urethane KGU04-01 KGU04-M5 M5 0.8 4 11 20 13 12 22 35 10.4 36 38 40 2.2 2.2 39.5 42 46 11 16 1 8 4 10.4 4.2 4.2 1 4 KGU04-02 14 KGU06-M5 KGU06-01 KGU06-02 KGU06-03 KGU08-01 2.2 2.2 39 41.5 43 44.5 48.5 49.5 50 55 55.5 57 M5 0.8 42.5 45.5 49 51 13 1 8 1 4 3 8 1 8 17 12.8 6 12.8 13.4 13.4 14 17 52.5 55.5 56.5 25.6 17.7 16 24 36 17 15.2 1 4 KGU08-02 8 18.5 15.2

Clean One-touch Fittings and Tubing Series KP/KPQ/KPG

8 1/4 M5 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 8 10 14 8 10 14 12 14 8 15.3 22 26 15.8 23.2 27.2 24.4 28.4 29.9 31.9 33.1 37.1 32.5 36.5 40.5 35 40 44 44.5 48.5 53.5 55 58 60.5 6 13 19 7 14 20 14 22 29 39 41 68 4 4 4 18 20.7 10.4 D1 10 M M L1 8 L2 A 6 D1 10 10 19.5 22.8 12.8 10 D2 H 8 15.2 18 26 21.5 26.3 12 Connection threads (R) (R) 10 18.5 29 41 24 29.4 2-Applicable tubing 17 17 20.9 12 46 58

Process Valve

2.5 2.6 1 4 1 5.7 5.8 32 Symbol Valve type Type 4.1 4.2 1 2 1 N.C.

Environment

1 Controller/Driver type*1 !

4/5 Port Air Operated Valve Series SYJA3000 1

1.6 14 89 18 2-1.8 (Bleed port) 55 With fiflter (80 mesh) 2-1.8 (Bleed port) 40 25.5 20 11.5 12 R1 R2 P With fiflter (80 mesh) 18 22 22 1/4 27.2 63 1/8 (Piping port) (R1, R2 port) 5-2-28

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

1 @1 !8 !5 w !9 !0 !7 u !7 w @1 !9 !3 @3 !2 !0 o @0 i A A MX MTS MY CY !4 !3 y e !2 q r t o !6 @0 !4 !1 q !6 i t y e !5 r u !

Large Size 3 Port Solenoid Valve VP3145/3165/3185 Series Rubber Seal

78 55 55 3/4, 1, 1 1/4 (IN, OUT port) 1 1/4 (EXH port) 22.6 (Guide) 36 82.6 36 In the case of B spec. of -X81 (N.O. spec.), VF3140 solenoid has to be positioned at left, when looking at the EXH port in the front face.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

M5 x 0.8 34 92 9 13 45 17.7 47 15 3H9 3.5 M5 x 0.8 8 32 27 3H9 3.5 19 3H9 3.5 M10 x 1.5 15 M6 x 1 M10 x 1 M5 x 0.8 37 117 10 12 60 25 54 20.5 4H9 4.5 M6 x 1 10 43 36 4H9 4.5 24 4H9 4.5 M10 x 1.5 15 M6 x 1 M10 x 1 Rc 1/8 40 127 11.5 14 65 25 57 23 4H9 4.5 M6 x 1 10 48 39 4H9 4.5 28 4H9 4.5 M12 x 1.75 18 M8 x 1.25 M14 x 1.5 Rc 1/8 46 152 14.5 15 75 31.4 66 26.5 5H9 5.5 M8 x 1.25 12 55 45 5H9

Compact

I ':"1 6 65 274 1 7 7 1 7 7 6 52 55 -r5 loo . 6 . 202 202 6 8 65 320 227 227 6 47 75 litzs . 70 345 252 252 6 47 150 6 8 370 277 2 7 7 r 1 65 T-slot A dimensions T-slot B dimensions $unies tX$ tilo To 0[dEl' tlect|'ic Acl||at0 AC Servo Motor 100vAc TS45O1N -rslsotl I Nole 1) l Applicable Applicable TarnaFwa Sek I 2OOVAC TS45O1N AppLicable L Applicable 3 -.'

PF2D

(1 L/min flow rate).

Coolant Valve

Main port 1, 2 Pilot port 12(P1), 10(P2) A B K C D E F H J Note) Model 1 8 1 4 1 4 VNC5-32A VNC6-40A VNC7-50A 1 4 1 2 1 1 2 105 120 140 211.5 (213.5) 229 (231) 252 (254) 77 96 113 55 63 74 53 60 74 26.5 30 37 120.5 137 160 20 24 24 129.5 147 170 Note) ( ): CE-compliant product (-Q) 622 A Coolant Valve: Air Operated/External Pilot Solenoid VNC Series Flange Type/Port size: 32F, 40F, 50F Pg9