HRX-OM-Q026

Monthly check . 7-4 7.2.3 Inspection every 3 months . 7-5 7.2.4 Inspection during winter season . 7-7 7.3 Consumables . 7-7 7.4 Operation Stop for an Extended Period of Time . 7-8 7.4.1 Discharge of the circulating fluid . 7-8 7.4.2 Discharge of the facility water (Water-cooled type) . 7-9 Chapter 8 Documents . 8-1 8.1 Specifications . 8-1 8.1.1 HRSH100/150/200/250/300-A-20. 8-1 8.1.2 HRSH100

SX

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

HRX-OM-X010

) 1-55 1-55 HRX-OM-X010 Chapter 1 Safety 1.8 Material Safety Data Sheet (SDS) HRZ Series 1-56 HRX-OM-X010 Chapter 1 Safety HRZ Series 1.8 Material Safety Data Sheet (SDS) 1-57 1-57 HRX-OM-X010 Chapter 1 Safety 1.8.5 Ethylene glycol aqueous solution 60% 1.8 Material Safety Data Sheet (SDS) HRZ Series 1-58 HRX-OM-X010 Chapter 1 Safety HRZ Series 1.8 Material Safety Data Sheet (SDS) 1-59 1-59

HRX-OM-M090

fluid and facility water . 8-7 Chapter 9 Documents . 9-1 9.1 Specifications List . 9-1 9.1.1 Product specification . 9-1 9.1.2 Refrigerant with GWP reference . 9-4 9.1.3 Communication specifications . 9-5 9.2 Outline dimensions . 9-6 9.3 Flow Chart . 9-7 9.3.1 HRS012-A-0 HRS018-A-0 HRS024-A-20 . 9-7 9.3.2 HRS012-W-0 HRS018-W-0 HRS024-W-20 . 9-7 9.4 Cooling capacity . 9-8 9.4.1 HRS012--10

HRX-OM-W060

. 6-2 6.4 Other Errors . 6-5 Chapter 7 Control, Inspection and Cleaning . 7-1 7.1 Quality Control of Circulating Fluid and Facility Water . 7-1 7.2 Inspection and Cleaning . 7-2 7.2.1 Daily check . 7-2 HRL Series HRX-OM-W060 Contents 7.2.2 Monthly check . 7-3 7.2.3 Inspection every 3 months. 7-4 7.3 Operation Stop for an Extended Period of Time . 7-5 7.3.1 Discharge of the circulating fluid

HRX-OM-X037

[CH2 High-Pressure Pump Mounted] . 6-2 Chapter 7 Alarm Notifications and Troubleshooting . 7-1 7.1 Alarm Notification . 7-1 7.2 Operation of this product when an alarm occurs . 7-1 7.3 Troubleshooting . 7-2 7.3.1 Alarm contents, causes, and troubleshooting . 7-2 7.4 Other Errors . 7-5 HRL Series HRX-OM-X037 Contents Chapter 8 Control, Inspection and Cleaning . 8-1 8.1 Quality Control of

Electric Actuator with Integrated Guide

2 3 4 5 6 7 A B Without switch and switch rail Photo micro sensor 1 pc., Photo micro sensor rail 1 pc.

LG1H

MFMCA0050AEB (for motor) MFECA0050EAB (for encoder) LG1-1-G05 1 (for motor) 2 LG1-1-R05 MR-JCCBL5M (for encoder) DP9320081-2 (for motor) DP9320089-2 (for encoder) LG1-1-Y05 3 1 When the Matsushita Electric Industrial Co., Ltd. motor driver is selected, in addition to the cable, a power connector (MOLEX 556910R) and an interface connector (Sumitomo/3-M Limited 10126-3000VE) are also required

0.4

19 6 18 5 17 4 16 3 15 2 14 1 Station 1 VQ 1/2 VQ 1/2 Station 2 VV5Q11 VQ 4/5 Station 3 Station 4 Stations VQC 1/2 D side U side Station 5 VQC 4/5 Station 6 Station 7 VQZ Connector terminal no.

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

7 o #0 !6 i @7 @1 @9 @6 @4 #9 !0 !9 u #6 20 t #8 Single acting (TL, TM) Double acting spring type (BL, BM) q y $0 $1 #4 r !1 e #5 @2 #7 #7 !2 #7 #3 @5 @5 #1 32 w 50, 63, 80 @3 Double acting (DL, DM) !3 !5 #6 o @5 @4 i @1 @6 !0 @7 @9 !6 t u !7 !8 q #8 $1 Single acting spring extended (TL, TM) Double acting spring type (BL, BM) y r $0 !1 !

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Body Material Aluminum Body Material Brass A A 2 x J 4 x J A A 2 x J 4 x J B C F B B C F B 1/8, 1/4, 3/8 1/8, 1/4, 3/8 1/8, 1/4, 3/8 1/8, 1/4, 3/8 C F C D E D E F D E D E Body Material: Aluminum [mm] Body Material: Brass [mm] Size Port size A B C D E F J 20 1/8, 1/4 11 36 6 34 46 1.5 5.3 30 1/4, 3/8 13 46 7 40 56 1.5 Size Port size A B C D E F J 20 1/8 52 24 9 36 64 1.5 6 20, 30 1/4, 3/8

HRX-OM-Z002

for use . 1-6 1.5.2 Personal protective equipment . 1-6 1.6 EMERGENCY MEASURES . 1-7 1.7 WASTE DISPOSAL . 1-7 1.7.1 Disposal of refrigerant and compressor oil. 1-7 1.7.2 Disposal of the product . 1-7 1.8 SAFETY DATA SHEETSDS . 1-8 Chapter 2 Names and Functions of Parts . 2-1 2.1 NAME OF EACH PART . 2-1 2.1.1 HRLE050-A-20-(In case of Air-cooled refrigeration) . 2-1 2.1.2 HRLE050-W-20-(In

Table of Contents

Vane Style Size: 1, 3, 7, 20 .

Air Cylinder CP Series Cylinder Positioner Assembly

60 l66l 8.03 t2a4) 4,66 '220) 1.57 4.02 h02) t.o7 (78) 0.98 (25) 2.05 (52) t.55 i14l 0.43 121) ).43 t l l I 1.89 (44) M22xL5 1.46 ) 7 9 (20t 457 1 1 1 5 1 1 . 1 0 (2Al r.21 :;dd5r 3 1 . 5 : 3 : l 2.36 (60) 2.gJ 171) 9.25 t235) I0.04 t255) 2.56 (65) 0.49 1 2 5 ) 1 . 1 5 t80l 9.61 1244\ (264) 1.57 4.57 ( 1 1 6 ) 3.62 (92) 1 . 1 8 (30) 2.05 (52) ).55 (14) 0 4 3 t21) 1.43 l l 1 ) 2.25 (54) M26xl

Dual Rod Cylinder Series CXSJ/CXS

8 @1 @2 w !4 !2 !5 t @0 @3 @4 @5 !9 !8 @1 @2 @6 !4 !2 !3 y !0 !1 e q @8!6 u !7 o i !3 y !0 !1 @7 r q @8 !6 u !7 o i CXSJM10 CXSJL10 r !9 !8 @2 !6 @9 !7 o i @4 @5 !8 r !9 @2 !6 @9 !7 o i Piston rod B-side piston Rod cover Piston rod B-side piston Rod cover Component Parts: Standard Piping No. Description No.

24

7 !1 !7 !1 !8 12 to 25 Over 100 stroke 50 or more !

ZP3

Form w 1 Material C 04 4 4.5 1.2 7 6 0.5 06 6 6.5 N S U F GN GS HS A 0.8 08 8 8.5 10 10 11 9 7 1 13 13 14 1.2 16 16 17 B ZP3 (10 to 16) (4 to 8) UM 2 1 N: NBR, S: Silicone rubber, U: Urethane rubber, F: FKM, GN: Conductive NBR, GS: Conductive silicone rubber, HS: Semiconductive silicone rubber Construction p. 160 Mounting Bracket Assembly From p. 162 With adapter 4 to 16 w q ZP3 T N 04 A5

/

2 9.4 65 (2.7) 2.4 2.6 7 MPa 2-port 3/4 12.4 112 (4.7) 4.7 5.3 1 15.4 155 (6.5) 6.6 7.2 3/8 9.4 50 (2.1) 56 (2.3) 1.6 1.7 11 1/2 10.5 55 (2.3) 73 (3.0) 1.6 1.7 3 MPa 15 3/4 12 90 (3.8) 92 (3.8) 2.6 2.8 17 1 15.2 135 (5.6) 140 (5.8) 4.8 5.4 3-port 7.5 3/8 6 26 (1.1) 23 (1.0) 1.6 1.7 10.1 1/2 7.6 45 (1.9) 49 (2.0) 2.6 2.8 7 MPa 12.8 3/4 10 78 (3.3) 65 (2.7) 4.8 5.4 15.4 1 11.5 102 (4.3

Parallel Style Air Gripper Series MHZ

7 9 4 7 5 4 3.5 10 8 7 5.5 3 7 5.5 3.5 11 13 3.5 6.5 1 4 2 11 13 5 7 2 5 3 2 1.5 8 6 5 3.5 1 5 3.5 1.5 Open Close Open Close Open Close Open Close Open Close Open Close Open Close Open Close Open Close Open Close Open Close Open Close Open Close Open Close Open Close Open Close Open Close Open Close Open Close Open Close Open Close Open Close Open Close Open Close MHZ2-

SMC Basic Pneumatics

0 r ooozj -;,2. ---,7 I 2 1 ../ p : (bar) lq 7. 5. 7 7-, 15{)00 -t-.-71--Z -_ 500 400 300 ?