KJ

(inch) Connection thread UNF NPT H (Width across flats) 8.4 9.6 <10-32 UNF> <10-32 UNF> Min. port size D1 Note) D2 L1 M A Weight (g) Model L2 L3 Applicable tubing L1 M 5 18 6 18 19 16 19 37 30 38 67 60 70 85 104 10 14 11 15.5 14 11.5 14 17.5 17 20 20.5 17.5 19.5 21 24 12.7 15.5 2.3 2.5 2.5 2.8 3.5 2.3 20 29.5 20 29.5 29.5 27 29.5 38.5 31 38.5 45 41 45 42 50 16.5 25.5 16 25.5 25.5 23.5 25.5

Sine Cylinder Series REC

18 15.5 34 26 13 8 13 10.5 10 41 4 60 75 20 20, 25, 32 25 22 19.5 40 32 13 10 17 10.5 10 45 4 60 75 26 32 22 19.5 40 32 13 12 17 10.5 11 45 4 60 75 26 40 24 21 52 41 16 14 22 13.5 12.5 50 5 66 36 82 32 MM N NA NN P S Z ZZ H1 H2 I K KA Bore (mm) 20 30 M20 x 1.5 1/8 37 200 146 M8 x 1.25 20 5 8 33.5 5 6 25 34.5 M26 x 1.5 1/8 41 204 146 M10 x 1.25 20 6 8 37.5 5.5 8 32 42.5 M26 x 1.5 1/8 41

Sine Cylinder Series REC

18 15.5 34 26 13 8 13 10.5 10 41 4 60 75 20 20, 25, 32 25 22 19.5 40 32 13 10 17 10.5 10 45 4 60 75 26 32 22 19.5 40 32 13 12 17 10.5 11 45 4 60 75 26 40 24 21 52 41 16 14 22 13.5 12.5 50 5 66 36 82 32 MM N NA NN P S Z ZZ H1 H2 I K KA Bore (mm) 20 30 M20 x 1.5 1/8 37 200 146 M8 x 1.25 20 5 8 33.5 5 6 25 34.5 M26 x 1.5 1/8 41 204 146 M10 x 1.25 20 6 8 37.5 5.5 8 32 42.5 M26 x 1.5 1/8 41

Sine Cylinder Series REC

18 15.5 34 26 13 8 13 10.5 10 41 4 60 75 20 20, 25, 32 25 22 19.5 40 32 13 10 17 10.5 10 45 4 60 75 26 32 22 19.5 40 32 13 12 17 10.5 11 45 4 60 75 26 40 24 21 52 41 16 14 22 13.5 12.5 50 5 66 36 82 32 MM N NA NN P S Z ZZ H1 H2 I K KA Bore (mm) 20 30 M20 x 1.5 1/8 37 200 146 M8 x 1.25 20 5 8 33.5 5 6 25 34.5 M26 x 1.5 1/8 41 204 146 M10 x 1.25 20 6 8 37.5 5.5 8 32 42.5 M26 x 1.5 1/8 41

Free Mount Cylinder Series CU

size (mm) Q QA P R T S Z S Z 15st 81 92 101 110 118 129 5 st 38 41 45 41 45 47 10 st 43 46 50 46 50 52 15 st 48 56 60 56 60 62 5 st 61 67 76 75 83 94 10 st 71 77 86 85 93 104 15 st 81 92 101 100 108 119 5 st 38 41 45 51 55 57 10 st 43 46 50 56 60 62 15 st 48 56 60 66 70 72 5 st 61 67 76 85 93 104 10 st 71 77 86 95 103 114 -X 6 10 16 20 25 32 7 9 12 16 20 24 6 depth 4.8 6 depth 5 7.6 depth

KR

(mm) Connection thread R A M Weight (g) Note) Model 10 D1 D2 L1 L2 KRY06-02S KRY06-01S 1 8 12 20 34 14 22 36 31 29 39 39 23 27 29 24.5 28.5 30.5 27 30 32 36 31 33 37 10 20 42.5 41 1 4 19 14 17 12 14 17 6 12.8 10.6 6.4 3 8 1 8 KRY06-03S 43.5 20.5 2-applicable tubing KRY08-01S KRY08-02S KRY08-03S KRY10-01S KRY10-02S KRY10-03S 1 4 3 8 1 8 1 4 3 8 45.5 47 49.5 50.5 52 25.6 17.7 15.2 12 23 8 17

LVQ

37.2 25 31.2 82 2 1 23.5 47 29.5 59 45.4 104.5 22 109 37.5 55.5 6 7 20 37.2 25 31.2 87.5 2 1 35 70 41 82 75 145 25 141 50.2 78.2 10 7 20 50.8 38.5 45 128 2 1 35 70 41 82 75 154.5 32 150 60 88 10 7 20 50.8 38.5 45 137.5 17-5-71 10 Series LVQ Dimensions With by-pass Double acting valve N M LVQ20 SMC C A B D (Max.

o

r r tr t: t; :r:'r : Tspe 41 Manifold: Side Ported,/ NVV5J3-41'E!sE@-M5,B3T inch (mm) Grommet(G). (H) ' ?

o

r r tr t: t; :r:'r : Tspe 41 Manifold: Side Ported,/ NVV5J3-41'E!sE@-M5,B3T inch (mm) Grommet(G). (H) ' ?

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

r r tr t: t; :r:'r : Tspe 41 Manifold: Side Ported,/ NVV5J3-41'E!sE@-M5,B3T inch (mm) Grommet(G). (H) ' ?

MGP

m (kg) Load weight m (kg) 20 20 20 20 20 20 16 16 16 16 16 16 1 1 12 12 12 12 12 12 0.5 10 20 30 31 50 100 101 300 200 0.5 10 20 30 31 50 100 101 300 200 Stroke (mm) Stroke (mm) MGPL32 to 63 MGPL32 to 63 50 50 Load weight m (kg) Load weight m (kg) 63 63 50, 63 50 50 50, 63 50, 63 10 10 40 40 40 50, 63 40 40 40 32 32 32 32 32 32 5 10 20 30 50 40 51 100 101 300 200 5 10 20 30 50 40 51 100

CG1

acting/Spring extend (mm) C95 A B A B Bore size Auto switch model Bore size Auto switch model Hs Hs C92 25 50 75 100 125 150 200 25 50 75 100 125 150 200 All strokes All strokes 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 D-C7 D-C7 55 55 80 80 105 24.5 (27) 45.5 45.5 70.5 70.5 95.5 24.5

High Vacuum Angle Valve

65 170 66 2 11 55 41 20 15 63 70 183 79 2 11 75 52 20 17.5 68 88 217 100 3 11 87 95 70 20 20 72 90 256 117 3 11 114 110 83 20 26.5 98 108 321 154 3 11 134 130 102 20 38 133 138 335 200 3 11 190 180 153 30 40 114 Note 1) Dimension E applies when heater option is included.

A

ANA1-12 11/4 280 544 200 74 60 ANA1-14 11/2 450 612 230 74 60 ANA1-20 2 610 873 271 86 70 ANB1-01 1/8 15 10 51 22 ANB1-02 1/4 35 22 81 25 18 ANB1-03 3/8 60 35 93 30 21 ANB1-04 1/2 90 94 107 46 24 ANB1-06 3/4 160 175 133 50 41 ANB1-10 1 280 462 190 74 41 ANB1-12 11/4 450 612 230 74 60 ANB1-14 11/2 610 871 271 86 70 D I M E N S I O N S ANA1-10~20 ANB1-06~14 ANA1-01~06 ANB1-01~04 D I M E N

VQ5000

3 12 53 2-6.5 Mounting hole 35 2-6.5 Mounting hole 35 53 Manual override 18 31.5 37 41 50 98 PE X PE X P R1 R2 R2 R1 P 27.5 27.5 41 41 1/8 Port PE Rc1/8 External pilot port 27.5 27.5 41 41 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 5-1/2 Ports P, A, B, R1, R2 Numbers inside ( ) are for metal seal 3 position type 7 Series VQ5000 Base Mounted Type How to Order Manifolds

IZx-OMT0049

Y Transistor Input/Output IZTP 41 L Y IO-Link Model Model Symbol Model Symbol Model Standard type 40 41 AC type 42 Dual AC type DIN rail bracket Symbol Type Nil None Y Include Controller IZTC 40 3 W IZTC 41 3 W Transistor InputOutput IZTC 41 L J G W IO-Link Model Input/Output specifications Model Symbol Input/Output Model Symbol Model Symbol Nil NPN 41 AC type, Dual AC type 40 Standard

3 Port Air Operated Valve

-42 Individual VV3PA5-41 Common VPA500 Common 2 to 20 stations W = 190n + 150 3/8 VPA544 VV3PA5-42 Individual VV3PA7-41 Common VPA700 2 to 20 stations W = 410n + 380 1/2 VPA744 VV3PA7-42 Individual Note) Supply pressure to 1(P) ports and exhaust air from 3(R) ports on both sides for 10 stations or more.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

A B C D E EE F G H J K Applicable size Y200T-D 3.2 67 29 51 24 33 11.5 5.5 15.5 3.5 30 JSXM20 Y300T-D 4.2 85 42.5 67.5 35 14 7 20 6 41 JSXM30 Y400T-D 5.2 115 50 85.5 40 55 18 9 26 7 50 JSXM40 45 JSX10, 20, 30 Series Table of UL-compliant Products * Refer to the table below for UL-compliant products.

VZ100/300/500

Manifold base VV3Z5-20 VV3Z5-21(R) VV3Z5-40 VV3Z5-41(R) Applicable base Sub-plate VV3Z5-40-2 VV3Z5-41-2 VV3Z5-41-1 VV3Z5-41R-2 VV3Z5-41R-1 DXT201-15-6A Applicable base VV3Z5-20-1 VV3Z5-21-1 VV3Z5-21R-1 Manifold base Manifold base DXT201-15-4A Note) Only in the case of assembled with manifold base at the time of shipment.

Industrial Filters

750 20 90 32 330 216.3 230 490 1160 1485 80 120 25 (1B) 40 (1 1/2B) 50 (2B) 20 (3/4B) 20 (3/4B) 500 4 1000 20 105 41 330 216.3 230 490 1415 1750 80 120 25 (1B) 40 (1 1/2B) 50 (2B) 25 (1B) 20 (3/4B) 570 7 500 20 115 37 400 267.4 230 510 915 1250 100 150 25 (1B) 40 (1 1/2B) 50 (2B) 25 (1B) 20 (3/4B) 570 7 750 20 130 50 400 267.4 230 510 1175 1510 100 150 25 (1B) 40 (1 1/2B) 50 (2B) 25 (1B)