ZP

M22 x 1.5 Width across flat 14 (Hexagon) 1/8 (Rc, NPT, NPTF) Width across flat 14 (Hexagon) Width across flat 30 (Hexagon) 1/8 (Rc, NPT, NPTF) 8 8 Width across flat 27 (Hexagon) 35 16 Width across flat 27 (Hexagon) 35 16 9 9 9 9 M18 x 1.5 Width across flat 21 (Hexagon) 4 x M5 x 10 (J) M18 x 1.5 Width across flat 21 (Hexagon) 4 x M4 x 8 (J) (J) Width across flat 21 (Hexagon) 70 I 45 I I H

Table of Contents

(mm) WC 20 24 32 42 52 BF VA 4H9 4H9 5H9 6H9 6H9 UC M5 x 0.8 M5 x 0.8 M6 x 1 M8 x 1.25 M8 x 1.25 ZD 6 10 12 16 20 VB 4 4 5 6 6 BG UE 5.5 5.5 6.6 8.6 8.6 AJ 9 9 11 13 13 UD 10 10 12 16 16 AG 19 22 35 AH 9 12 15 18 20 FX 22 26 32 40 50 AF 18 21 30 35 48 BE 48 58 68 WD 1.5 1.5 1.5 2 2 ZG 15 16 18 22 26 ZF 20 21 28 32 41 ZE 5 8 10 14 17 Model MHSH3-32DB MHSH3-40DB MHSH3-50DB MHSH3-63DB MHSH3

SQ1000/2000

A 3 3 () Station 5 16 SOL. B 4 16 () 17 5 SOL. A 4 () 18 6 Station 6 SOL. B 19 17 () 7 20 SOL. A 8 5 () Station 7 21 SOL. B 9 18 () 22 10 SOL. A 23 6 () 11 Station 8 SOL.

5

Applicable bore size A1 L L1 MM Y-J010C 10 8 15.2 21 M4 x 0.7 Part no. Applicable bore size B1 C1 d H1 Part no. Applicable bore size B2 C2 d H2 SNJ-010C 10 11 12.7 M8 x 1.0 4 NTJ-010C 10 7 8.1 M4 x 0.7 3.2 Y-J016C 16 11 16.6 21 M5 x 0.8 SNJ-016C 16 14 16.2 M10 x 1.0 4 Part no.

KR

(mm) (1) L D Applicable tubing Nylon Urethane KGR04-08 KGR04-06 1.8 2.0 3.3 3 2.5 3 4.7 4 6 8 10 4 8 10 12 10 12 12 16 16 17.5 18 18.5 21 34.5 36.5 39.5 37 37 39.5 42 41 42 44.5 50.5 50.5 10.4 16 5.6 4 KGR04-10 12.8 KGR06-04 KGR06-08 KGR06-10 KGR06-12 KGR08-10 KGR08-12 KGR10-12 KGR10-16 KGR12-16 4 4 12.8 17 6 18.5 Applicable fitting size d 13.1 10.4 15.2 20 4.0 4.6 33 8 15.2 20 18.5 26.1

Smooth Cylinder/Low Speed Cylinder

A A1 E1 L1 MM RR1 U1 NZ L 42 56 71 79 14 18 21 21 22 28 38 44 30 40 50 55 M14 x 1.5 12 16 21 24 14 20 27 31 I-G04 I-G05 I-G08 I-G10 10 14 18 22 18 22 28 32 +0.058 0 0.3 0.5 36 42 56 71 79 16 20 23 24 22 28 38 44 30 40 50 55 M14 x 1.5 12 16 21 24 14 20 27 31 41.6 Y-G04 Y-G05 Y-G08 Y-G10 10 18 22 28 32 IY-G04 IY-G05 IY-G08 IY-G10 +0.5 +0.3 +0.058 0 M18 x 1.5 +0.070 0 0.3 0.5 44 M18 x 1.5 50.6

Series KV2 Fittings

16 16 16 17 17 17 17 21 21 21 21 21 21.8 21.8 21.8 22 22 22 25 17 16 16 16 21 17 17 17 17 17 21 21 21 16.8 20.4 20.4 2 22 22 25 1.6 1.6 1.6 1.6 3.5 3.5 3.5 3.5 3.5 3.5 5.4 5.4 5.4 4.6 7.0 7.0 8.5 8.5 8.5 9.8 23 15 16 23 40 16 23 37 40 53 36 44 68 76 64 76 43 51 76 126 100/400 100/400 100/400 100/400 100/200 100/400 100/400 100/400 100/200 100/200 100/200 100/200 100/100 100/100 100/100 100

CQ2

A A1 L1 MM RR1 U1 NZ L A1 MM U1 L1 E1 10 12 16 20 22 28 38 44 +0.048 0 5 6.4 8 10 18 22 28 32 0.2 0.4 0.1 0.3 0.2 0.4 0.2 0.4 0.3 0.5 0.3 0.5 0.3 0.5 0.3 0.5 +0.048 0 5 6.5 8 10 18 22 28 32 21.5 28 34 41 42 56 71 79 10 21.5 32 34 41 42 56 71 79 6 8 8.5 10.5 14 18 21 21 16 25 25 30 30 40 50 55 M5 X 0.8 M6 X 1 6.3 8.1 10.3 12.8 12 16 21 24 7 14 11.5 14 14 20 27 31 6 11 8.5 16

Series SV

18 L2 5 (Rail mounting hole pitch: 12.5) L1 DIN rail holding screw (for DIN rail mounting) (Station 1) (Station n2) (Station n1) (Station 1) n1 = Valve stations n2 = Input block stations Light/Surge voltage suppressor L2 = L1 10.5 L3 = 16 x n1 + 60 L4 = L3 + 81 + 21 x n2 L5 = (L1 L4)/2 L6 = 16 x n1 + 48 L7 = 21 x n2 + 81.5 63.5 60 52.5 12 (for DIN rail mounting) (7.5) L1: DIN rail overall

0.4

Digital Unit M12 connector (5 pins) M8 connector (3 pins) D-sub connector Spring type terminal block Input Unit 8 inputs 8 inputs 8 inputs 16 inputs 16 inputs 16 inputs 8 inputs 8 inputs 8 inputs 16 inputs 16 inputs 16 inputs 16 inputs 16 inputs 16 inputs Output Unit 8 outputs 8 outputs 8 outputs 16 outputs 16 outputs 16 outputs 16 outputs 16 outputs 16 outputs Input/ Output Unit 8 inputs

Tamper Proof and Flat Head Screw

8 AS221F-N01-07ST AS221F-01-10ST 15 1/4" 13.2 23.9 31 18.5 18.5 21 33.1 40.2 10 AS221F-N01-09ST AS221F-02-04ST 5/16" 15.2 25.3 32.4 15 21 10.4 16 4 34.4 25.2 AS221F-N02-03ST AS221F-02-06ST 5/32" 10.4 25.2 34.4 16 12.8 17 6 18.2 40.7 R 1/4 17 1.5 36.7 18.5 7 AS221F-N02-05ST AS221F-02-08ST 18.2 3/16" 11.4 24.9 34.2 17 15.2 18.5 27.2 8 36.4 AS221F-N02-07ST AS221F-02-10ST 18.5 7 33.9 20 40.7

LEC-OM071xx

2.4.3 Setting Parameters.2-16 2.5 Monitor Displays.2-16 3.

High Purity Fluoropolymer

Model L M N W H E H Class 4, 5 LQ2U2A 1/4" 3/16" 1/8" 3/8" 1/4" 1/2" 3/8" 3/4" 1/2" LQ2U2B LQ2U2C 19 18 19.9 16 55 LQ2U5B LQ2U5A LQ2U4B LQ2U4A LQ2U3B LQ2U3A 65 22 24 26.2 24 77 64 28 30 33.1 21 30 88 75 32 36 40 26 36 86 30 Series LQ1 2 Options Panel mounting nut Class LQN P 2 Symbol 1 2 3 4 5 6 LQ2 2 3 4 5 LQ1 11 12 13 14 15 16 Used to secure a panel with a panel mount union.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

H E A B L1 L2 M F G 2 LQ1R1A-M 1/8" 1/4" 3/16" 1/8" 1/4" 3/16" 1/8" 3/8" 1/4" 3/8" 1/4" 1/2" 3/8" 1/2" 3/8" 3/4" 1/2" 3/4" 1/2" 1" 3/4" 1" 3/4" 12 15.5 1/8" 10 4 8 18.5 11.5 LQ1R4C-M LQ1R4B-M LQ1R4A-M LQ1R3D-M LQ1R3C-M LQ1R3B-M LQ1R3A-M LQ1R2F-M LQ1R2E-M LQ1R2D-M LQ1R2C-M LQ1R2B-M LQ1R2A-M 1/8" 19.5 4 16 14 15 6 12 28 16.5 22 1/4" 1/4" 19 25 5 17 20 9 18 36.5 23 21 27 3/8" 3/8" 23 29 6 21

Air Cylinder

13 21 130 133 141 8 40 93 96 101 16 24 24 21 16 21 159 162 167 11 Axial foot: CBM2L Bore size Stroke A * -H -R -W N L ZZ + Stroke LS + Stroke N L CBM2G Bore size Stroke A Head flange: * -H -R -W Rod flange: CBM2F Bore size Stroke A * -H -R -W N L Z + Stroke Single clevis: CBM2C Bore size Stroke A -H -R -W N L Double clevis: CBM2D Bore size Stroke A -H -R -W N L ZZ + Stroke Z + Stroke

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

A 10 12 16 20 22 28 38 44 10 6 8 8.5 10.5 14 18 21 21 16 25 25 30 30 40 50 55 M5 x 0.8 M6 x 1 M8 x 1.25 6.3 8.1 10.3 12.8 12 16 21 24 7 14 11.5 14 14 20 27 31 21.5 6 16 21 25 30 30 40 50 55 M5 x 0.8 M6 x 1 M8 x 1.25 6.3 7 14.6 21.5 32 34 41 42 56 71 79 10 I-G012 I-Z015A I-G02 I-G03 I-G04 I-G05 I-G08 I-G10 Y-G012 Y-Z015A Y-G02 Y-G03 Y-G04 Y-G05 Y-G08 Y-G10 5 5 8 10 10 14 18 22 +0.048 0 5 6.4

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

12 M6 x 1 depth 13 21 125 st or more 32 32 32 350 to 600 201 82 37 52 65 114 90 16 14 38 12 M6 x 1 depth 13 21 150 st or more 40 40 40 350 to 800 238 92 44 62 84 138 101 20 15 47 12 M8 x 1.25 depth 16 25 200 st or more 50 50 50 350 to 1000 285 104 55 75 94 164 116 25 16 58 14 M10 x 1.5 depth 21 26 250 st or more 8-21-22 22 Guide Cylinder Series MGG Basic style: MGGB 63 to 100 4-F through

Table of Contents

20 16 (15) 19 (16) 22 (18) 3.6 4.0 5.2 3.6 4.0 5.2 4.0 4.7 5.3 3.9 4.5 5.1 0.22 0.15 0.13 0.22 0.15 0.13 0.28 0.27 0.19 0.28 0.24 0.15 15 17 21 15 17 21 16 18 22 16 18 21 2.5 Single VP4150 2 position 3 position 3.3 3.0 VP4250 Double 3.8 3.6 Closed center VP4350 4.4 3.6 VP4450 Exhaust center 4.4 ( ): Denotes the normal position.

MGP

Bore size (mm) Bore size (mm) DB DL DM HR LL MO Over 175st Over 75st to 175st 25st or less Over 25st to 75st Over 175st Over 75st to 175st Over 25st to 75st 98 25st or less 22 22 9.5 21 15 15 84.5 118 140 16 13.5 33.5 55.5 0 32 32 26 23 11.5 25.5 21 19 91 98 118 140 16 7 27 49 0 40 40 24 23 13 27 21 19 50 97 114 134 161 20 0 17 37 64 50 25 25.5 11 25 21 19 63 102 114 134 161 20 0 12 32 59

Table of Contents

Detailed Dimensions of U Section (mm) (mm) PB PG Q PP1 QW QQ RR1 SS TT UU W WW Model PP2 RR2 XX Z ZZ U1 U2 U3 U4 U5 U6 VV Model 50 7 206 12.7 46 16 18.9 4.1 15.5 16 84 11 MY1M25 MY1M25 17.2 17.9 16 38 220 Rc 1/16 5.5 3 2 3.4 5.8 5 60 8 264 15.5 60 16 22 4 21 16 102 13 MY1M32 MY1M32 18.5 24 19 48 280 Rc 1/16 5.5 3 2 3.4 5.8 7 29 9 26 21 118 20 MY1M40 23 54 Rc 1/8 340 MY1M40 6.5 3.8 2 4.5 7.3