Wedge Cam Operation Provides

Bore size (mm) Opening/Closing stroke (mm) Long stroke 12 16 20 25 Standard stroke 4 6 10 14 11 14 18 22 2.4-2 High Precision and Rigidity. High Precision and Rigidity. Environmental Conditions. Environmental Conditions.

PFA/PFW

2 3 4 5 Description Attachment Seal Mesh Body Sensor Material ADC NBR SUS PBT PBT Flow direction 5 Series PFA Digital Flow Switch for Air For Air Dimensions (mm)/ Integrated Display Type 1in=25.4mm Scale: 70% PFA7 0-m 1 5 -27 (N) -67 (N) 67 98 58 6 82 17 1.6 60 FLOW SWITCH UP 34 54 44 SET OUT1 OUT2 DOWN FOR AIR 24 2-Piping port size 4-4.5 40 50 (41.5) 4 3 42 2 1 4 Connector pin numbers 43

LJ1H

A B C D 43 44 Non-standard Motor Series LJ1H10 High Rigidity Direct Acting Guide Motor Output Ground Ball Screw 50W 12mm/12mm lead Horizontal Mount How to Order Stroke 1 LJ1H10 G PB 1 F W X10 Cable entry direction Top entry Left entry Motor specification Switch Cable entry direction Power supply voltage Matsushita Electric Industrial Co., Ltd.

Auto Switch Guide

(For MDB) Put a round head Phillips screw (M3 x 0.5 x 14 l) through the auto switch's through-hole (2 locations), and then push it down into the M3 tapped part on the switch mounting bracket while turning it lightly. 3.

JXCx-OMT0028CN

0255 15 0255 4 16 0255 17 0255 ID1 18 (ID=1) 19 ID2 2039 ID1 ID3 4059 ID1 ID4 6079 ID1 ID5 8099 ID1 ID6 100119 ID1 ID7 120139 ID1 ID8 140159 ID1 ID9 160179 ID1 ID10 180199 ID1 ID11 200219 ID1 ID12 220239 ID1 240249 250253 254,255 (GW [IN Data] Address.14 Address.17) 4 codeAddress.14 Address.14 Address.17 ) Address.15 Address.14 (code:1-148) 00h 94h 15bit 8bit 7bit 0bit

AC Servo Motor Driver (CC-Link Type)

-43- 5.5.6 Parameter setting when using it by I/O signal (CN6 connector use) Please configure PD12External DI function selection 1 and PD14External DI function selection 3 in Hexadecimal (HEX).

1

0 0.1 2 21 5 M4 x 0.7 depth 7 Width across flats 6 length 3.5 M8 x 1.25 24 20 8 6.5 M4 x 0.7 25 17.5 15 17 16.5 10 14 0 0.1 2 24 6 M5 x 0.8 depth 7.5 Width across flats 8 length 3.5 M10 x 1.25 27 25 8 6.5 M5 x 0.8 32 17.5 15 17 20 10 18 0 0.1 2 24 6 M5 x 0.8 depth 8 Width across flats 8 length 3.5 M10 x 1.25 34.5 32 12 6.5 M5 x 0.8 40 23.5 20.5 22 24 14 24 0 0.1 2 30 8 M6 x 1 depth 10 Width

3 Port Solenoid Valve Series VQ100 1

37 4 53 47 5 63 57 6 73 67 7 83 77 8 93 87 9 10 113 107 11 123 117 12 133 127 13 143 137 14 153 147 15 163 157 16 173 167 17 183 177 18 193 187 19 203 197 20 213 207 1 23 17 103 97 VQ VKF Plug Lead Unit, Type U (Large Flow Type) Mounted Manifold (VV3Q12U) L1 L2 7 VQZ Round head combination screw M1.7 x 14 7 Manual override VZ 7 14 P E P E 37.4 16 VS 29 32 43.8 VFN 4-PT 1/8 P , E port 2-3.5

3 Port Solenoid Valve/

Piping adapter Spacer with Bracket Mounting Position Dual residual pressure release valve (-X538) Dual residual pressure release valve with soft start-up function (-X555) (Max. 10) 201.8 82.9 (14) (14) 201.8 (Max. 10) 82.9 IN OUT IN OUT d c b a d a b c Model a b c d Note Model a b c d Note VP544-5DZ1-03-X538 33.9 57.2 95.7 220.7 AW30-03G-A Y300T-A E300-03-A VP544-5DZ1-03-X555 33.9 57.2 129.2

ZSE30A(F)/ISE30A

Pin description 1 2 3 4 DC (+) OUT (2) DC () OUT (1) 1 2 3 4 4 Black 3 Blue 43

Pneumatic Transfer System Series MF

From back 2 x 2-M8 x 1.25, thread depth 16 14 56 12 (Max. 35) 94 82 43 (body width) 4 2-M10 x 1.0 Adjustment bolt 78 60 8 90 24 86 85 60 80 15 12 (absorber stroke) 2-RB1412 shock absorber M14 x 1.5 2-Rc(PT) 3/8 Cylinder port 129 Note) 244 + Stroke 7 7 134 2-10 through 12 110 48 43 75.5 11.5 21 87 85 65.5 75 55 SMC Body (Support bracket) (MY-S32A (B)) Note) The dimension can be adjusted to

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

58 40.5 46.5 99 43 66 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 1/8 VCL21 86 22 23 46 44 44 58 41.5 46.5 99 44 66 18 36 67 31 8.5 12.5 28 18 12.8 M4 6 1/4 99 24 25 56.5 46 54.5 60 52 48.5 101 54.5 68 22 40 81.5 36.5 11 15 32 20 19 M5 8 1/4, 3/8 VCL31 104 24 25 59 46 57 60 54.5 48.5 101 57 68 30 50 84 36.5 13.5 15 32 25 23 M5 8 1/2 107 26 26.5 64.5 48 62.5 62 60 50.5 103 62.5 70 22 45 89 41

F/ISE

Normal operation Value clear Initial setting P.14 Adjust the zero point of atmospheric pressure. Detects and displays pressure and operates switch. Set "Output mode", "Response time" and "Auto/ Manual mode." Auto preset P.14 P.16 The pressure set point is calibrated automatically at the time of adsorption or primary pressure confirmation.

P

ZF Flat with ribs (C) Flat style (U) ZP ZP02Ul to 08Ul ZP10Cl to 50Cl ZCU Vacuum related Model Nom.size C10 A 10 B 12 C 4 D 13 E 7.7 F 12 Y 1.7 ZP10Cl ZP13Cl ZP16Cl ZP20Cl ZP25Cl ZP32Cl ZP40Cl ZP50Cl C13 13 15 4 13 7.7 12 1.8 ZP10Ul to 50Ul C16 16 18 4 13 8.2 12.5 1.2 C20 20 23 4 15 9.5 14 1.7 C25 25 28 4 15 9.5 14 1.8 C32 32 35 4 15 10 14.5 2.3 C40 40 43 7 18 13.7 18.5 3.3 C50 50 53 7 18

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

9, @0 25 CXS32A-PS 32 8-29-13 14 Series CXS Dimensions: 20 53.5 19 43 9 2-cushion needle 2-M5 x 0.8 thread depth 4.5 (Piping port) S ZZ 12 SS 12 25 30 Z 6 23 1 M8 x 1.25 x 6l (Hexagon socket head set screw) (Steel ball) (4.5) 1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com

AC Servo Motor Driver (Pulse input type/Positioning type)

COM3 15 LA Encoder A-phase pulse (differential line driver) Y004 CR 5 16 LAR (Note 15) COM2 17 LB Encoder B-phase pulse (differential line driver) 18 LBR X INP 10 19 LZ Encoder Z -phase pulse (differential line driver) 20 LZR X X RD 11 21 14 LG SD Control common OP LG Plate 14 SD Plate (Note 7) (Note 3, 5) Forced stop CN1 EM1 8 Servo-on SON 4 Reset (Note 10, 11) RES 3 Forward rotation stroke

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

18 NPT 1/8 AS231FG-01-08 AS231FG-N01-05 36.1 31.1 32.1 27.1 28.2 41.7 18.5 23.9 30.9 26.8 8 15.2 3/16" 11.4 12.9 21 14 10.9 14 16.5 12.7 16.2 AS231FG-02-04 AS231FG-N01-07 21.9 40.1 37.2 16 25.6 30.6 29.9 4 10.4 1/4" 13.2 10.9 32 19 18.5 16.2 12.9 16.2 AS231FG-02-06 AS231FG-N01-09 25.2 42.6 41.7 17 28.2 34 30.9 6 12.8 5/16" 15.2 33 21 21 18.4 R 1/4 40.4 35.4 18.5 17 34.4 29.4 AS231FG-02-08

VQ

35.1 32.4 H 43.5 43.3 W 44.8 38.9 H 32.2 37.2 Latching 16.4 12.5 VG 7.5 100V AC or more 12.9 P=10 n-M5 A port VP Equation: L1=10n+13 L2=10n+7 n: Station (Max. 20 stations) Dimenshions n L L1 L2 2 33 27 3 43 37 4 53 47 5 63 57 6 73 67 7 83 77 8 93 87 9 103 97 10 113 107 11 123 117 12 133 127 13 143 137 14 153 147 15 163 157 16 173 167 17 183 177 18 193 187 19 203 197 20 213 207 1 23 17 VQ

EXxx-OMY0006CN

X PROFINET FW 24 H watch dog FW EX##-OMY0004 1 No.EX##-OMY0006CN . 1 . 2 2. . 10 2.1. . 10 2.2. . 11 2.3. . 12 2.4. . 12 2.5. . 13 2.6. . 13 3. . 14 3.1. . 14 3.2. . 15 3.3. ()UT1/UT2 . 16 3.4. . 20 4. . 21 5. . 22 5.1. . 22 5.2. . 23 6. . 24 7. . 25 7.1. . 25 7.2. . 27 8. . 33 8.1. . 33 8.2. . 36 9. . 44 9.1. IO . 44 9.2. . 48 10.

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

2-M3 x 0.5 thread depth 6 (Thread for mounting attachment) 15 15 6 5 5 6 12-5-13 14 Series MHR2/MDHR2 Nominal Size 20 Without auto switch: MHR2-20R 57 54 3-M4 x 0.7 thread depth 8 B MHR2-20E Port Location P.C.D.36 (Mounting thread) 60 120 14 120 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-