Guide Cylinder/Compact Type Series MGC

Refer to front matters 42 and 43 for Safety Instructions and pages 3 to 11 for Actuator and Auto Switch Precautions. Mounting and Adjustment Warning Caution 1. Installing a protective cover (In the case of rear plate) During mounting, handling and operation, the rear plate makes reciprocating movements.

HRX-OM-W058

Table 9-6 Compliance EMC Directive 2014/30/EU Machinery Directive 2006/42/EC CE Marking RoHS Directive 2011/65/EU 9.7 Compliance HRS-R Series 9-10 HRX-OM-W058 Chapter 9 Documents 9.8 Sample DoC. Sample DoC.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 Rc 133 52.45 42 19 3.5 19 20.95 20.95 133 52.45 42 19 3.5 19 151.1 60.95 47.7 19 3.5 24 26.75 151.1 60.95 47.7 19 3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1 2 Rc1 2 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 19 47 57.5 17 10 19 47 57.5 10 24 50 69.3 12 24 50 69.3 12 Rc Rc3 8 Rc1 2 Rc1 2 17 22 22 13-5-

Digital Flow Switch ( compatible)

Part number Description Note ZS-40-A Lead wire with M8 connector Length: 3 m ZS-42-A Bracket With mounting screws for PF2MC7501/7102 (M3 x 5, 2 pcs.) ZS-42-B Bracket With mounting screws for PF2MC7202 (M3 x 5, 2 pcs.)

Digital Flow Switch ( compatible)

Part number Description Note ZS-40-A Lead wire with M8 connector Length: 3 m ZS-42-A Bracket With mounting screws for PFMC7501/7102 (M3 x 5, 2 pcs.) ZS-42-B Bracket With mounting screws for PFMC7202 (M3 x 5, 2 pcs.)

Large Size Vacuum Module: Series ZR

(ANR)) Type S 22 38 54 62 84 ZA Type L 42 52 74 88 105 Air consumption (l/min (ANR)) 46 78 95 185 150 ZX Maximum vacuum pressure L: -53 kPa S: -84 kPa ZR Built-in silencer, Manifold exhaust Individual exhaust port Exhaust release (Ejector exhaust) ZM Valve unit ZR1-V Supply valve (Pilot type)/Release valve (Pilot type) Component equipment ZMA N.C./N.O.

VCW

93 36.5 13.5 15 32 25 23 M5 24 59.5 46 57.5 60 55 48.5 101 57.5 68 1/2 22 45 96.5 41 11 17 36 22.5 23 M5 26 65 48 63 62 60.5 50.5 103 63 70 1/4, 3/8 VCW42 30 50 101 41 13.5 17 36 25 23 M5 26 67 48 65 62 62.5 50.5 103 65 70 1/2 35 60 108.5 41 17.5 17 36 30 28.2 M5 26 70.5 48 68.5 62 66 50.5 103 68.5 70 3/4 5 Series VCW How to Order Manifolds How to Order Manifold Assemblies (Example) VV2C

VCW

93 36.5 13.5 15 32 25 23 M5 24 59.5 46 57.5 60 55 48.5 101 57.5 68 1/2 22 45 96.5 41 11 17 36 22.5 23 M5 26 65 48 63 62 60.5 50.5 103 63 70 1/4, 3/8 VCW42 30 50 101 41 13.5 17 36 25 23 M5 26 67 48 65 62 62.5 50.5 103 65 70 1/2 35 60 108.5 41 17.5 17 36 30 28.2 M5 26 70.5 48 68.5 62 66 50.5 103 68.5 70 3/4 4.5-7 Series VCW How to Order Manifolds How to Order Manifold Assemblies (Example)

Step Motor Controller (Servo / 24 VDC)

Return to origin . 41 8.1 Return to origin . 41 8.2 Positioning operation . 41 8.3 Pushing operation. 42 (1) Pushing operation is successfully performed. . 42 (2) Pushing operation is failed (pushing the air) . 42 (3) Movement of the work piece after the completion of the pushing process .. 42 8.4 Controller input signal response time . 43 8.5 Methods of interrupting operation . 43 9.

/

T 67.5 U 30 30 33 T 62.5 U 48.5 T 63.5 U 65.5 V 53.5 T 62.5 V 69.5 a 42 51 56 b 66 78 86 d 57 74 81 e 34 51 58 f 39 63 80 90 14 17 20 28 35 42 3/8, 1/2 3/4 1 30 30 35 27 27 32 34 43 47 103.5 19.5 44.5 24 29 33 3.5 4.5 4.5 29 37 43 VXED2140 VXED2150 VXED2260 115 19.5 51.5 74 69 48.5 70 65.5 53.5 69 100.5 69.5 45.5 133 22.5 60 88 83 51.5 84 68.5 56.5 83 103.5 72.5 49.5 31 Pilot Operated 2 Port

Digital Flow Switches

PF2A710, 750 60 82 98 67 58 6 1.6 17 Brown 1 Load Load OUT1 Main circuit Main circuit 4 Load Load Black FLOW SWITCH OUT2 UP 2 + 12 to 24 VDC White 54 44 SET 3 OUT1 OUT2 Blue DOWN FOR AIR PF2A7--27(-M) 24 2-Port size 40 50 4-4.5 Brown 1 OUT1 4 Black Load Load (42.2) White OUT2 2 + 12 to 24 VDC Load Load 3 Blue PF2A7--67(-M) 42 4 43 2-3.4 Flow direction PF2A711, 721, 751 64 23 116 1.6 88

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

93 36.5 13.5 15 32 25 23 M5 24 59.5 46 57.5 60 55 48.5 101 57.5 68 1/2 22 45 96.5 41 11 17 36 22.5 23 M5 26 65 48 63 62 60.5 50.5 103 63 70 1/4, 3/8 VCW42 30 50 101 41 13.5 17 36 25 23 M5 26 67 48 65 62 62.5 50.5 103 65 70 1/2 35 60 108.5 41 17.5 17 36 30 28.2 M5 26 70.5 48 68.5 62 66 50.5 103 68.5 70 3/4 5 Series VCW How to Order Manifolds How to Order Manifold Assemblies (Example) VV2C

CXS

MTS Smaller and lightweight MY CY Dimensions/Weight Note) Bore size (mm) Dimensions (mm) Weight (kg) Series Height Width Overall length MG Overall length 0.057 CXSJ6 42 + Stroke 32 13.4 CX Basic type 6 Additional dimension for each bore size compared to the basic type 2 mm (20) 3 mm (25) 5 mm (32) CXS6 0.095 58.5 + Stroke 37 16 Series CXS 6, 10, 15, 20, 25, 32 D0.114 CXSJ10 56 + Stroke 42

CXS

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0.057 CXSJ6 42 + Stroke 32 13.4 CX Basic type 6 Additional dimension for each bore size compared to the basic type 2 mm (20) 3 mm (25) 5 mm (32) CXS6 0.095 58.5 + Stroke 37 16 Series CXS 6, 10, 15, 20, 25, 32 D0.114 CXSJ10 56 + Stroke 42 CXS basic type

Thermo-chiller

Applicable model Minimum operating ow rate (50/60 Hz) HRS-BP007 HRS1007.4/11.0 gal/min [28/42 L/min] HRS150q To circulating fluid return port y To circulating fluid outlet r t w u r t r e r Parts List No.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

11 27 25 60 27 30 6 19 8 14 1/4 3/8 3/8 1/2 1/2 Refer to p.3.4-18 for further information on rod end nuts and accessories. 58 13 17 up to 600 20 17 52 12 11 27 47.3 61 M8 X 1.25 M18 X 1.5 159 40 90 17 11 30 25 70 7 19 0 32 35 18 58 17 up to 600 20 17 64 10 11 27 54.8 M18 X 1.5 170 40 15.5 68.5 M10 X 1.25 98 17 14 31 25 7 19 0 85 32 35 18 71 21 up to 750 21 25 78 14 13 32 65.8 M22 X 1.5

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

84 25 6 19 8 1/4 3/8 3/8 1/2 1/2 Refer to p.3.8-18 for further information on rod end nuts and accessories. 14 up to 600 11 52 20 13 40 12 17 17 58 27 47.3 61 M8 M18 X 1.5 159 35 32 70 7 11 19 30 17 90 0 25 18 up to 600 11 64 20 15.5 40 10 17 17 58 27 54.8 68.5 M10 X 1.25 M18 X 1.5 170 32 85 35 7 14 19 31 17 98 0 25 18 up to 750 102 13 78 25 18.5 52 14 21 21 71 32 65.8 80.5 M12 X 1.75 M22

Step Motor Controller

R A-phase pulse detector (Differential line driver) 9 PG0 LZ 8 5 LAR PG0 COM 10 LZR 9 6 LB B-phase pulse detector (Differential line driver) LG 3 7 LBR Control common SD Plate 34 LG Control common 10 m or less Note 5) 33 OP Z-phase pulse detector (Open collector) 1 P15R Plate SD 10 m or less 2 m or less Note 4) CN1 EMG Emergency stop 42 SON 15 Servo ON Note 4) CN6 RES 19 Reset 3 MO1 PC 17

C95

Bore size (mm) Bolt Tightening torque (Nm) Width across flats 125 M12 x 1.75 x 25l 10 30.1 160, 200 M16 x 2 x 30l 14 99 M20 x 2.5 x 35l 17 193.5 250 Foot Others M20 x 2.5 x 30l 17 6-12-42 ISO Cylinder/Standard: Double Acting, Low Friction Series C95Q 32, 40, 50, 63, 80, 100 How to Order CJ1 A53 S CA C95QD B 32 100 R Standard CJP CJ2 Number of auto switches CM2 Built-in magnet 2 1 3 n S 3

HRX-OM-X027

Table 9-6 Compliance EMC Directive 2014/30/EU Machinery Directive 2006/42/EC CE Marking RoHS Directive 2011/65/EU HRS-R Series 9.7 Compliance 9-9 HRX-OM-X027 Chapter 9 Documents 9.8 Sample DoC. Sample DoC.