XL

-6 Port A pressure Pa 1.3 x 10 -9 {1 x 10 -8} at ordinary temperatures, excluding gas permeation Internal External 1.3 x 10 -11 {1 x 10 -10} at ordinary temperatures, excluding gas permeation Leakage Pa m 3/s {Torr l/s} VCR 1.3 x 10 -11 {1 x 10 -10} Fitting Swagelok 1.3 x 10 -10 {1 x 10 -9} VCR/SWJ (Swagelok) Piping connection system 3/8B Connection size 1/4B 5 to 40C (41 to 104F) Operating

High Vacuum Angle Valve, XL Series

In the case of oxygen at room temperature and 10-6Torr, one atomic layer impinges in a few seconds. O After a few seconds at 10-6Torr 41

AC

G27-10-R1-X2092pcs. G46-10-012pcs. G27-10-R1-X2092pcs. G46-10-012pcs.

0.55

-42 Individual VV3PA5-41 Common VPA500 Common 2 to 20 stations W = 190n + 150 3/8 VPA544 VV3PA5-42 Individual VV3PA7-41 Common VPA700 2 to 20 stations W = 410n + 380 1/2 VPA744 VV3PA7-42 Individual Note) Supply pressure to 1(P) ports and exhaust air from 3(R) ports on both sides for 10 stations or more.

LEC-OM071xx

-41 10 List of Parameters (contd) Parameter Setting Range Units Factory When ClassificaSize Name No.

42

58.5 L2 L1 P = 41 58.5 3 3 2 2 1 1 34.5 48 68.5 Stations Stations 34.5 48 216 with AMC610-10 installed ( 261.5 with AMC810-14 installed) D side entry (LD) 216 with AMC610-10 installed ( 261.5 with AMC810-14 installed) U side D side U side D side =100 with AMC610-10 installed 100 with AMC610-10 installed 100 with AMC610-10 installed = 100 with AMC610-10 installed 118 (135) (=105 with

Table of Contents

VXF(A)2160 Tank 41l 6 x 10 pcs. VXF(A)2160 Tank 41l 6 x 6 pcs. 10 x 12 pcs. 10 x 12 pcs. Without tube (VXF2280) Without tube Without tube (VXF2280) Flow rate Q (Nl) 10 x 12 pcs. 10 x 8 pcs. 10 x 12 pcs. 10 x 8 pcs. VXF(A)2280 Tank 70l 10 x 8 pcs. VXF(A)2280 Tank 70l 10 x 8 pcs. 10 x 10 pcs. 10 x 10 pcs. 100 mm 100 mm 10 x 10 pcs. 10 x 10 pcs. 10 x 8 pcs. 10 x 8 pcs.

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

8 8 8 7 5.5 5.5 5 50 45 45 41 1/4 1/8 1/8 14 12 10 16 13 13 10 8 M14 x 1.5 M32 x 2 134 3.2 23 The bracket is shipped together.

AC Servo Motor Driver

10 10 10 Note.

Modular/F.R.L. Units Series AC

A NPT 1/4 NPT 3/8 NPT 1/2 C 40 53 70 F 40 53 70 E 10 14 18 G 57 73 H 18 16 17 J 30 41 50 T M4 X 0.7 M4 X 0.7 M5 X 0.8 K 27 40 54 S 32 44 60 AF20 AF30 AF40 Auto Drain mm Dimensions Mounting Bracket Kit (Optional) AF30P-050AS-X480 AF40P-050AS-X480 Model Port Size D 158 194 M 6.5 8.5 R 35 47 N 8 10.5 Q 2.3 2.3 L 23 26 P 53 70 W 34.5 41 A NPT 3/8 NPT 1/2 C 53 70 F 53 70 E 14 18 G 57 73 H 16

5 Port Solenoid Valve

, so switching from the F kit (D-sub connector) to the S kit (serial transmission) can be done simply by changing the kit section. 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 5 6 7 8 9 10 6 7 8 9 10 (Refer to the connector wiring diagram.)

VQ5000

U side entry (LU) 46.8 59.2 9 9 19 R4.5 R4.5 2n-3/8, 1/2 (ports A, B) 2Rc1/8 (external pilot port) n n Manual override 19 Indicator light 6 6 Indicator light 5 5 SMC SMC SMC SMC SMC 2n-3/8, 1/2 (ports A, B) Manual override 4 4 L1 P=41 58.5 L2 L1 P=41 58.5 3 3 2 2 P=41 68.5 34.5 48 68.5 P=41 1 1 Stations Stations 34.5 48 (approx. 261.5 with AMC810-14 installed) Approx. 216 with AMC610-10 installed

Air Fittings & Tubing

KQ2W23-M5 30 8 31 10 M5 X 0.8 8 9.6 37 43 10 17.5 15.5 38 42 19 2.8 2.4 41 3.2 1 8 KQ2W23-01S KQ2W23-02S 10 14 1 4 8 32 38.5 18 30 37.5 KQ2W04-M5 KQ2W04-01S M5 X 0.8 11 3.0 3.0 8 10.4 16 4 1 8 4.0 4.0 23 14 10 10 1 4 KQ2W04-02S 43.5 42.5 38 11 26 33.5 42.5 30.5 40 KQ2W06-M5 KQ2W06-01S 3 3 8 M5 X 0.8 8 1 8 10 6 17 12.8 20 10 1 4 46 46.5 17 14 KQ2W06-02S 10.9 8.6 41 3 8 KQ2W06-03S 48

AC Servo Motor Driver (Network card type ）

20 40 70 100 200 Bend radius [mm] 10 7 10.

NCQ2/CQ2

Basic Style CQ2 NCQ2 CQ2 NCQ2 A B Bore size (mm) 5 st 36.5 39 41 42.5 H1 C C F K M D S V E H L N O U 10 st 38 40.5 41.5 42.5 5 st 33 35.5 36.5 37.5 10 st 41.5 44 46 47.5 inch 12 16 20 25 #8-32UNC #8-32UNC #10-32UNF 1/4-28UNF 6 8 7 12 5.4 5.4 7 10 6 8 10 12 32 38 47 52 6.5 5.5 5.5 5.5 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 5 6 8 10 3.5 3.5 4.5 5 22 28 36 40 3.5 3.5 5.5 5.5 6.5 depth 3.5 6.5 depth

SX

Purchasing order is available in units of 10 pieces.

KJ

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

CM2

8 32 41 32 52 20 36 20 33.5 M10 X 1.25 19.5 17 32 6 M26 X 1.5 15 5.5 30 10 22 9 13 10 8 40 45 40 60 25 40 26 34.5 37.5 M10 X 1.25 19.5 17 32 6 M26 X 1.5 15 5.5 12 22 9 13 10 8 40 45 40 60 32 40 26 21 M14 X 1.5 21.5 M32 X 2 44.5 42.5 46.5 22 41 8 7 14 24 10 16 11 11 53 50 53 77 40 32 Dimensions by stroke Boss-cut Built-in One-touch fitting (mm) (mm) Stroke Stroke 1 to 50 51 to 100 101 to

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

U side entry (LU) 46.8 59.2 9 9 19 R4.5 R4.5 2n-3/8, 1/2 (ports A, B) 2Rc1/8 (external pilot port) n n Manual override 19 Indicator light 6 6 Indicator light 5 5 SMC SMC SMC SMC SMC 2n-3/8, 1/2 (ports A, B) Manual override 4 4 L1 P=41 58.5 L2 L1 P=41 58.5 3 3 2 2 P=41 68.5 34.5 48 68.5 P=41 1 1 Stations Stations 34.5 48 (approx. 261.5 with AMC810-14 installed) Approx. 216 with AMC610-10 installed

ZX

Pitch = 10 M5 (or M6) (V port) Vacuum pad connection port Note) Dimensions : For mounting bracket B : For mounting spacer 2. 13-2-24 24 Vacuum Module: Ejector System Series ZX Adsorption confirmation switch (ZSP1) ZX1-K6-P Spacer 1: ZX1-S1 Adjusting needle ZX 41 1 20 ZR 51 ZM (Mounting hole) ZH 3.6 (Mounting hole) 2-R1.8 (Mounting hole) 1 10 19 17.8 ZU Courtesy of Steven Engineering, Inc