MTS

Width across flats 3.5 23 9 4.5 4.5 6.5 3.5 2-M3 x 0.5 (Port size) 2-M3 x 0.5 (Port size for axial piping type MTS8-P) 9 2-M3 x 0.5, effective length 5 0.2 5 +0.035 +0.025 4 16 0.2 22 12 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 41 + Stroke M2.5 x 0.45 12 53

Rotary Actuator/Vane Style Series CRB1

(Example) For M3: L1 = 6 Applicable shaft types: S, Y L2 + (3 x P) L1 + ( 3 x P) Q1 = M Y axis S axis (mm) (mm) Q1 Q2 L1 = Shaft type Shaft type S Y S Y Size Size L2 + (3 x P) L2 = 50 50 M3, M4, M5, M6 M3, M4, M5 M3, M4, M5 L2= 63 63 M4, M5, M6 M4, M5, M6 M4, M5, M6 Q2 = M 80 80 M4, M5, M6, M8 M4, M5, M6 Q2 = M M4, M5, M6 100 100 M5, M6, M8, M10 M5, M6, M8 M5, M6, M8 Symbol: A33 Machine

IDX-OM-O004E

Specification for Option M 11 . 1 Safety instructions . 11 1 11 . 2 Specifications . 11 1 11 . 3 Installation of motor type auto drain . 11 2 11 . 4 Electric wiring diagram . 11 2 Chapter 12 Specification for Option R 12 . 1 Safety instructions . 12 1 12 . 2 Specifications . 12 1 12 . 3 Power supply connection procedure . 12 1 12 . 4 Cautions for handling the GFCI . 12 2 12 . 5 Electric

S Couplers

/O.D. 5/8 6/9 6.5/10 8/12 8.5/12.5 11/16 Applicable hose I.D.

VQZ1000/2000/3000

L dimension 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 285.5 21 273 No.

ITV

(For details, refer to page 14-8-11 in Specific Product Precautions.) 26.5 PPA Bushing assembly 2.7 AL Note) For dimensions of the cable connector, refer to single unit on page 14-8-8. 14-8-9 10 Series ITV0 Dimensions Manifold 20 40 20 40 4-M3 x 0.5 thread depth 3 Mounting hole 11 11 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

11.5 12 17 9 9 9 9 13 13 11.5 12 17 17.5 18 23 15 7 9.5 10 15 15 7 19 11 18 18.5 23.5 15.5 9.5 12 12.5 17.5 17 11 21 15 22.5 23 28 20 9.5 12 12.5 17.5 21.5 11 25.5 15 30.5 31 36 28 3 5.5 6 11 29.5 4.5 33.5 8.5 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.

ZPT/ZPX

A B d H Model H A SN-015A M14 x 1 19 21.9 5 ZPNA-M16 M16 x 1.5 22 25.4 6 ZPNA-M18 M18 x 1.5 27 31.2 9 ZPNA-M22 M22 x 1.5 30 34.6 8 Bolts (Hexagonal Socket Head Cap Screw) Dimensions d B (mm) A B d L 8 11 5.5 M3 x 0.5 L 8 12 7 M4 x 0.7 A 10 15 8.5 M5 x 0.8 13-11-96

CLQ

11 Series CLQ Construction: 20 to 32 i o !

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Copper, fluorine and silicone-free + Low particulate generation Action 21 22 Relief type Vacuum suction type D Double acting Rod end thread Nil M Standard (Rod end female thread) Rod end male thread Model Model Bore size (mm) Port size Relief port Action Standard stroke (mm) 10-/21-CQSB12 10-/21-CQSB16 10-/21-CQSB20 10-/21-CQSB25 11-/22-CQSB12 11-/22-CQSB16 11-/22-CQSB20 11-/22-CQSB25 12

Plate Cylinder with Lock Series MLU

I-MU02 I-MU03 I-MU04 I-MU05 R1 3 4 5 6 NZ 18 22 26 32 NX 9 11 13 16 NO 21 24 27 39 NL 8 10 10 16 R1 8.5 10 11 16 NDH10 NL 8.5 10 11 16 NX 9 11 13 16 NO 19.5 24 26 36 U1 11 14 15 20 U1 13 14 17 23 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 Knuckle pin and snap ring are included. Clevis pin and knuckle pin Rod end nut 30 d Dd9 d D C l m m t t L H B (mm) (mm) Part no.

MLGP

Hexagon socket head cap screw (M3 x 0.5 x 16l) 2 pcs.

MLGP

Hexagon socket head cap screw (M3 x 0.5 x 16l) 2 pcs.

MHC2

5 10 Attachment mounting limiting range 16 11 2-M3 x 0.5 through Prepared hole dia. 2.6 through 5 2.5 2-M2 x 0.4 depth 6 (Mounting thread) 4 2 2 When closed 10 When open 30 13.6 14 20 12 0.05 10 4 6 +0.022 0 7H8 depth 1.5 29 (41) M3 x 0.5 (Finger opening port) 4 -0.005 -0.025 0.8 1.3 M3 x 0.5 Finger closing port 5.5 14.3 In the case of MHCA2-6S, finger opening port is a breathing hole.

MHC2

MHY MHW Option JIS Symbol Double acting MRHQ Body Option/End Boss Type Type of piping port MHCA2-6 M3 x 0.5 M3 x 0.5 With 4 one-touch fitting With 4 hose nipple M3 x 0.5 Symbol Piping port location Applicable model Misc.

ZR

x 0.35 x 19 M3 x 0.35 x 23 M3 x 0.35 x 24 M3 x 0.35 x 28 M3 x 0.35 x 68 M3 x 0.35 x 72 M3 x 0.35 x 73 M3 x 0.35 x 77 y u Components Ejector unit + Vacuum switch/Filter unit i o For nozzle size 10, 13, 15 M3 x 0.35 x 84 4 [For ZSE4 spec.]

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

14 14 H 13.5 12.5 13 20 20.5 22 29 33 33 I 28 34 40 50 58 72 J 4.5 4.5 6 6 8 8 10 12 12 N 9.5 11 11 18 18.5 20 26 25 25 Q NN S 62 63 83 106 111 124 150 176 188 K 5 4 11 8 10 15 16 25 26 V A 4 4 4 8 8 8 10 T C 8 14 14 26 32 32 41 L 35 38 57 66 70 80 92 110 122 MM NA 10 14 17 24 30 36 46 55 69 Model 12-CY3B6 12-CY3B10 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 12-CY3B50 12-CY3B63

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Power supply terminal Power supply terminal The circuits above are for the double wiring specification with up to 11 or 12 stations. Connect to SOL.A for a single solenoid.

Low Friction Cylinders Series MQ

x 0.5 8 to 11 M4 x 0.7 7 35 + Stroke CY 7 35 + Stroke Standard type MQQT 8.5 40 + Stroke CX M5 x 0.8 M6 x 1 13 to 17 9 45 + Stroke 7.5 50 + Stroke MQ M8 x 1.25 16 to 22 M6 x 1 6 50 + Stroke M4 x 0.7 8 to 11 M3 x 0.5 7 65 + Stroke RHC 5.5 70 + Stroke Lateral load resisting type MQQL (Built-in ball bushing) 8 80 + Stroke RZQ M5 x 0.8 M6 x 1 13 to 17 6.5 85 + Stroke 7 105 + Stroke M6 x 1 M8

17

m3 1.