MGQ

MGQM, MGQL Common Dimensions Bore size (mm) Standard stroke (mm) B Z G NN F MM ML DA L R C H K Q X GA GB J P PW S T TA TB V W YY YL 32 40 50 63 80 100 1/8 1/8 1/4 1/4 3/8 3/8 16 17 17 19 21 25 51 51 59 72 92 112 12.5 14 14 16.5 19 23 114 96 48 112 80 100 8 8 10 10 16 16 20 20 25 25 30 35 16 16 20 20 25 30 38 38 44 44 56 62 37.5 44 44 49 56.5 66 26 26 30 36.5 46.5 56.5 30 30 40 50 60 80 47.5

AN

Model Model Model Port size R(PT) Effective area (mm2) Weight (g) Dimensions (mm) Weight Effective area Port size Model Dimensions (mm) R(PT) (mm2) (g) AN200-02 35 17 63 22 19 25 84 25 22 35 92 30 27 165 107 46 36 225 132 50 41 490 200 74 55 580 233 74 60 820 263 86 70 A B D A B D 1 4 1 4 AN202-02 35 16 64 22 19 33 84 28 24 47 95 34 24 AN300-03 60 3 8 AN302-03 60 3 8 AN402-04 90 1 2 AN400

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

Refer to page 17-6-3 for Safety Instructions and 17-5-59 to 17-5-61 for High Purity Chemical Valve Precautions.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

32 AS221FG-02-06 AS221FG-N02-03 25.2 34.4 18.2 17 25.2 34.4 12.8 10.4 6 5/32" 16 18.5 35.4 40.4 17 34.4 29.4 R 1/4 32 AS221FG-02-08 AS221FG-N02-05 18.2 24.9 34.2 34 18.5 27.2 36.4 15.2 11.4 8 3/16" 17 NPT 1/4 AS221FG-02-10 AS221FG-N02-07 17.5 25.2 34.5 20 36 21 33.9 43.2 18.5 13.2 10 1/4" 40.4 35.4 34.4 29.4 18.5 34 18.5 AS321FG-02-06 AS221FG-N02-09 27.2 36.4 60 17 27.8 39.3 12.8 15.2 6

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

02-02 ZH15DS-02-03-03 ZH15DL-02-03-03 12 31.5 28.5 7.8 17 24 12 31.5 28.5 17 24 12 31.5 29.5 17 24 12 31.5 29.5 17 24 14 33.5 33 20 28 14 33.5 33 20 28 17 36.5 38.5 22 30 17 36.5 38.5 22 30 7.8 7.8 7.8 9.6 9.6 10.7 10.7 Rc 1 8 Rc 1 4 Rc 1 4 Rc 3 8 Rc 3 8 19 43 44.5 27 35 12 19 43 44.5 27 35 12 13-5-7 8 Series ZH Body Ported Type (Without silencer): ZH18D ---, ZH20D --S L S L One-touch connection

CHKD/CHKG

x 4 45 21 106 17 26 depth 17.5 146 3/8 36 15 36 Note 1) Body dimensions are the same with or without auto switches.

VM

Push pull VZM550-01-37 Panel mounting hole Stroke 2.7 Position indicator Hexagon nut thick 5, across flats 17 JIS Symbol 2-3.2 mounting hole 20 N F.O.F. 2.7 mm T.T. 5-6-46 45 5 Port Mechanical Valve Series VZM500 External pilot type VZM551 type With foot bracket VZM55-01--F 2-4.5 mounting hole (External pilot port) SA VA SA VA VM Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San

HRX-OM-X071

5.5.1 Switch to advanced setting mode . 5-17 5.5.2 Display contents of monitor menu . 5-17 5.5.3 Display contents of the standard setting menu . 5-19 5.5.4 Alarm setting menu . 5-33 5.5.5 Communication setting menu . 5-46 5.5.6 Reset menu . 5-54 5.5.7 Information Monitor Menu. 5-58 5.5.8 Alarm History menu . 5-62 Chapter 6 Option . 6-1 6.1 Option DMWith electric conductivity control function

Rubber seal 5 Port Solenoid Valve Series SYJ7000

M3: 0.8 Nm 61 Series SYJ7000 Type 20: Top Proted/SS5YJ7-20Stations -00 [ ]: AC Grommet (G) Approx. 300 (Lead wire length) 6 L2 L1 4-4.5 (For mounting) 6.5 (DIN 7.8) 20.3 (DIN 21.6) 15.5 3 8 3.3 122 [126.4] 17 16.5 107.4 [111.8] B A B A B A B A B A P R R 50 25 57.3 (DIN 58.6) 56.5 (DIN 57.8) P R R 17 17 79.5 [81.7] 78.7 [80.9] 1/8 (P, R port) 1/8 (A, B port) Manual override (Pitch) P = 19

Compact manifold regulator ARM5 Series

L dimension 11 148 12 160.5 13 173 14 185.5 15 198 16 210.5 17 223 18 235.5 19 248 20 260.5 No. L dimension 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 No.

VXP21/22/23

$%&' 2 0 17-3-43 2 The VX series will be revised shortly. Series VXP21/22/23 Normally Closed (N.C.)

Thermo-chiller/Rack Mount Type

] 59/60 59/60 61/64 61/64 Accessories18 Power supply connector, Particle filter element and maintenance handle19, Operation manual Weight10 [kg] 40 46 1 No condensation should be present.

SFOD-OMT0009CN

*ALARM3 17 1) 7 N.C. *ALARM4 37 1) 27 N.C. -COM3 18 1) 8 N.C. -COM3 19 -COM3 38 1) 28 N.C. -COM4 20 1) 9 N.C. -COM4 39 1) 29 N.C.

VXD21/22/23

Refer to Glossary on page 17-3-15 for details of max. operating pressure differential and max. system pressure.

39

68 46 48 11 8 30 32 63.5 71.5 12 3.5 78.4 138.5 134 92 50 45 10 55 52 78 52 54 11 8 30 32 63.5 71.5 12 3.5 78 151 146.5 17 Series CKZ3T Dimensions Without switch XA (mm) Bore size (mm) XA 50 63 100.5 107.5 Metal cover type Leave sufficient space to open and close the metal cover when operating the manual release.

Transfer

17 FF 6 6 6 FH 12 16 16 TA 7 12 12 TT Max. 16.5 Max. 20 Max. 25 Applicable cylinder ML2B25 ML2B32 ML2B40 D-X 717 ML2B Series Dimensions Side support A MY-SA 2 x G F E 2 x H A B C D Side support B MY-SB 2 x J A B C D A 61 70 87 B 75 84 105 C D E F G H J Part no.

CJP

Symbol A A' Bore size (mm) NN MM K J H GB GA E D C CD B CK Q R 6 10 15 +0.040 0 3 M3 x 0.5 8 6 17 11 6 10.5 3 16.5 14 4 9 7 7 M10 x 1.0 0 0.5 17 +0.065 0 5 M4 x 0.7 8 7 20 17 6 13 5 20 15 6.5 12 8 10 M12 x 1.0 0 0.5 22 +0.065 0 6 M5 x 0.8 8 9 24 18.5 6 15.5 6 24.5 20 8 14 10 12 M14 x 1.0 Symbol Z S 5 st 10 st 15 st 20 st 30 st ZZ Bore size (mm) 5 st 10 st 15 st 20 st 30 st 5 st 10 st 15

CJP

Symbol A A' Bore size (mm) NN MM K J H GB GA E D C CD B CK Q R 6 10 15 +0.040 0 3 M3 x 0.5 8 6 17 11 6 10.5 3 16.5 14 4 9 7 M10 x 1.0 7 0 0.5 17 +0.065 0 5 M4 x 0.7 8 7 20 17 6 13 5 20 15 6.5 12 8 M12 x 1.0 10 0 0.5 22 +0.065 0 6 M5 x 0.8 8 9 24 18.5 6 15.5 6 24.5 20 8 14 10 M14 x 1.0 12 Symbol Z S 5 st 10 st 15 st 20 st 30 st ZZ Bore size (mm) 5 st 10 st 15 st 20 st 30 st 5 st 10 st 15

VFS

14 16 17 9.0 9.0 9.0 VFS600 0.30 0.15 0.15 0.30 0.15 0.15 0.25 0.25 0.25 0.32 0.17 0.20 0.30 0.23 0.25 15 16 17 15 16 17 14 16 16 14 16 17 14 16 18 9.0 9.0 9.0 3.7 3.7 3.9 3.7 3.7 3.9 4.0 4.1 4.1 3.8 3.8 4.2 3.7 3.9 4.6 0.30 0.15 0.13 0.30 0.15 0.13 0.24 0.24 0.23 0.25 0.18 0.13 0.31 0.22 0.22 3 8 4.1 4.5 4.7 4.1 4.5 4.7 4.1 4.1 4.1 3.5 4.1 4.1 3.8 4.1 4.3 Single 1 2 3 4 VFS5100 VFS5110

VCA

LVQ LQ LVN TI/ TIL PA PAX PB 17-2-19