16 26 QW 46 60 72 RR1 TT 15.5 21.0 26.0 RR2 17.9 24.0 29.0 UU 16 16 21 VV 16 19 23 W 122 144 160 WW 11 13 20 YW 70 88 104 Z 240 300 360 Bore size (mm) 25 32 40 60 80 100 12.7 18.5 20.0 18.9 22.0 25.5 Hole Size for Centralized Piping on the Bottom (Mounting side should be machined to these dimensions.)
16 26 QW 46 60 72 RR1 TT 15.5 21.0 26.0 RR2 17.9 24.0 29.0 UU 16 16 21 VV 16 19 23 W 122 144 160 WW 11 13 20 YW 70 88 104 Z 240 300 360 Bore size (mm) 25 32 40 60 80 100 12.7 18.5 20.0 18.9 22.0 25.5 Hole Size for Centralized Piping on the Bottom (Mounting side should be machined to these dimensions.)
How to Order Valve T VQZ212 5M N7 Example/Valve VQZ212R 5M C6 External pilot specification Thread (Cylinder ports, and P/R ports) Rc(PT) N NPT External pilot port T NPTF M3 X 0.5 (VQZ200) M5 X 0.8 (VQZ300) F G(PF) Note) R port of VQZ200 is only PF 1/16 Cylinder ports Symbol M5 02 N1 N3 N7 N9 N11 3/8" 1/8" 5/32" 1/4" 5/16" M5 Tube O.D.
2-M6 x 1 thread depth 12 (Mounting hole) 34 45 24 27 30 8 2 +0.2 +0.1 17 26H9 +0.052 depth 3 0 30 40 21 4-M5 x 0.8 thread depth 6 M5 x 0.8 (Finger closing port) (Thread for mounting attachment) Auto Switch Mounting Groove Dimensions 30.3 45 20 O S 16 4.5 4.5 23 10 M5 x 0.8 (Finger operating port) 5 MHW2-25D1 Right angle finger type 6.45 5.5 37 18 12 6 15 16 4-M5 x 0.8 (Thread for mounting
Groove Dimensions 30.3 45 20 O S 16 4.5 4.5 23 10 M5 x 0.8 (Finger operating port) 5 MHW2-25D1 Right angle finger type 6.45 5.5 37 18 12 6 15 16 4-M5 x 0.8 (Thread for mounting attachment) 30 45 21 12-10-20 20 180 Angular Style Air Gripper Rack & Pinion Style Series MHW2 MHW2-32D Flat finger type (Standard) 24 MHZ MHF 2-M6 x 1 thread depth 10 (Mounting hole) 21 MHL 61.5 83.5 MHR 4-M6 x 1
175, 200 50.5 75.5 50.5 52.5 39 41 10 10 0 25 23 9 2.5 25 50.5 77 50.5 53.5 37.5 40.5 10 14 0 26.5 23.5 10 3 Bore size [mm] G GA GB GC H HA J K L MM ML NN OA OB OL P PA PB PW Q 100 st or less Over 100 st Nil TN TF 12 25 10 6 7 10 54 M5 12.5 12.5 17 M4 x 0.7 10 M4 x 0.7 4.3 8 4.5 M5 x 0.8 11.5 8 16 14 16 29 12.5 5.5 7.5 11.5 59 M3.5 14.5 14.5 20 M5 x 0.8 11 M5 x 0.8 4.3 8 4.5 M5 x 0.8 11.5
16 26 QW 46 60 72 RR1 18.9 22.0 RR2 17.9 24.0 TT 15.5 21.0 26.0 UU 16 16 21 VV 16 19 23 W 122 144 160 WW 11 13 20 YW 070 088 104 Z 240 300 360 60 80 100 25.50 29 .0 Hole sizes for centralized piping on the bottom Applicable O-ring C9 C9 C11.2 Bore size (mm) 25 32 40 D 11.4 11.4 13.4 d 6 6 8 WX 38 48 54 Y 9 11 14 S 4 6 9 (Mounting side should be machined to these dimensions.) 6 Series MY1W
position 30.3 45 16 O S 4.5 4.5 23 10 M5 X 0.8 (Finger opening port) 5 6.45 MHW2-25D1 5.5 Right angle finger 37 18 12 6 15 16 4-M5 X 0.8 (Thread for mounting attachment) 30 21 45 MHW2-25D.SMHW2, #2 MHW2-25D1.SMHW2, #6 2.8-20 180 Angular Gripper Series MHW2 MHW2-32D Flat finger (Standard) 24 2-M6 X 1 Depth 10 (Mounting thread) 21 61.5 83.5 4-M6 X 1 Depth 12 (Mounting thread) Bottom through
M5 x 0.8 Body side VZA222-P-M5 M5 x 0.8 0.13 0.35 0.52 0.15 0.43 0.60 N.O. M5 x 0.8 Body side VZA214-1P-01 M5 x 0.8 0.22 0.35 0.85 0.25 0.30 1.0 N.C. Rc 1/8 Sub-plate side VZA214-2P-01 M5 x 0.8 0.22 0.35 0.85 0.25 0.30 1.0 N.C. Rc 1/8 Body side VZA224-1P-01 M5 x 0.8 0.22 0.35 0.85 0.21 0.25 0.90 N.O. Rc 1/8 Sub-plate side VZA224-2P-01 M5 x 0.8 0.22 0.35 0.85 0.21 0.25 0.90 N.O.
OA OB OL P PD PE PW Q R S T U VA WA X YY YL Z Nil TN TF Nil TN TF 20 (16 x 2) 4.3 8 3.5 M5 x 0.8 7.5 19 21 10 36 18 66 54 75 15.9 29 M5 x 0.8 7.5 4.5 25 (20 x 2) 4.3 8 4 M5 x 0.8 9.5 22 22 12 38 22 75 60 84 12.7 31 M5 x 0.8 7.5 4.5 32 (25 x 2) 5.4 9.5 5 M5 x 0.8 12.5 23 23 16 44 28 89 70 98 12.7 33 M6 x 1 9 6 40 (32 x 2) 6.7 11 6 Rc1/8 NPT1/8 G1/8 13 16.5 26 27.5 20 43 33 97 71
D1 D2 L A M M5, M6 Nylon Urethane M5 0.8 M6 1.0 KXH04-M5 KXH04-M6 KXH04-01S KXH06-M5 KXH06-M6 KXH06-01S KXH06-02S KXH08-01S KXH08-02S KXH08-03S KXH10-02S KXH10-03S KXH10-04S KXH12-03S KXH12-04S 38.5 11 13 39 35 8 10.4 2.5 4.0 4.0 16 4 1 8 M5 0.8 M6 1.0 40 39.5 40 42 45 46 49 50 58 59 62 60 63 16 36 12 2.5 3 4.0 4.0 5.6 5.6 15 8 36 6 12.8 15 17 1 8 1 4 1 8 38 39 42 43 44 20 26 28 34 42 68
4 30 40 45 72 6 20 20 50 55 25 25 82 6 60 30 92 60 30 6 33 MXH Series Compact Slide Dimensions 10 LT (mm) 11 19 11 LA LB J-M4 x 0.7 Depth 8 3-M5 x 0.8 through Bottom hole dia. 4.3 6-7.5 counter bore depth 4.4 Plug for port (hexagon socket head set screw) 4-M5 x 0.8 x 4l 2-M5 x 0.8 Guide rail width 7 4-M4 x 0.7 Depth 7.5 4-M4 x 0.7 Depth 6 23 5 13 8 18 21.5 46 47 20 23 5 20 6.5 6.5 5 NS 12.5
11 3 11 14 M4 x 0.7 10 M4 x 0.7 25 (20 x 2) 39.5 28 10 8.5 3 26 12 7.5 11 93 13 4.5 13 17 M5 x 0.8 12.5 M5 x 0.8 32 (25 x 2) 25, 50, 100 150, 200 44.5 30 12 11.5 3 32 15 7.5 13 109 16 8 16 21 M6 x 1 15 M6 x 1 40 (32 x 2) 54 37 16 13 4 41 19.5 21 12 17.5 9 120 20.5 4 20.5 27 M8 x 1.25 20 M6 x 1 Bore size OA OB OL P PD PE PW Q R S T U VA WA X YY YL Z Nil TN TF Nil TN TF 20 (16 x 2) 4.3
x 35 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 M5 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 M5 x 40 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 110 x 135 M5 x 45 x 50 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 90 x 115 x 140 M6 x 55 x 60 x 65 x 70 x 75 x 80 x 85 x 90 x 95 x 120 x 145 6.5 8.5 7.5 6.5 9 6.5 12.5 5 Compact Cylinder/Guide Rod Type Series CQM Dimensions 12 to 25 V V 16
x 0.8 10-32UNF M6 x 1.0 1/4-20UNC 14 46 10 5 69 67.5 5 33 23.3 7 40 5.5 9 7 66 35 10 M5 x 0.8 10-32UNF M6 x 1.0 1/4-20UNC 14 58 12 6 86 84.5 7 42 29.7 8 50 6.6 11 8 80 41 14 M6 x 1.0 1/4-20UNC M8 x 1.25 5/16-18UNC 19 7-5-8 9 Series CQM Compact Cylinder: Guide Rod Type Double Acting, Single Rod Proper Auto Switch Mounting Position (Detection at stroke end) and Its Mounting Height Reed switch
19 26 9 39 36 Misc. 6.5 2-6.5 through 2-11 depth of counter bore 2.8 D8 46 101 10 Angle adjustment bolt 20+0.030 0 3-5H9 depth 6 (one each on three sides) 3-R2.5 12 2 +0.030 0 3-5H9 long groove depth 4 (one each on three sides) 50h9 0 -0.062 M5 x 0.8 Port A M5 x 0.8 Port B 4-M6 x 1 depth 10 I N J E A D P A A M N 16.5 27 6.5 8 17.5 26 R SMC R E 16 8 O P P T A I R R G Y R A I 48 36 Side A
M5 x 0.8 0.42 0.47 0.13 0.47 (0.44) 0.41 (0.37) 0.13 (0.12) 3 position 39 VA 0.50 (0.41) 0.48 (0.35) 0.15 (0.11) 0.47 0.43 0.13 44 46 Single Double 2 position SA 0.29 0.18 0.64 0.34 0.72 0.17 0.28 0.15 0.59 0.30 0.59 0.15 Closed center Exhaust center Pressure center C4 VA 48 SYA320-C4 One-touch M5 x 0.8 M5 x 0.8 0.35 0.16 0.42 (0.41) 0.34 (0.37) 0.63 0.11 (0.11) 3 position fitting for 4
01 02 Symbol Mixed M5 threads 1/8 thread 1/4 thread 1/8" 5/32" 1/4" 5/16" 3/8" Applicable tubing O.D.
Kit components 40 MGF 40-PS Items 19 through 23 from the table above. 63 MGF 63-PS 100 MGF100-PS 4 Series MGF Dimensions 40 MGF40 Scale: 50% 4-M8 x 1.25 through 100 120 90 9.5 36.5 + Stroke 8 46 + Stroke 7.5 18.5 2-Rc 1/8 port for extending cylinder Breathing hole for guide (with element) When the cylinder is extended 38 Port for retracting cylinder M5: T-slot for hexagon bolt 4-M8 x 1.25
x 0.5 M5 x 0.8 14.6 closed (mounting screw attachment ) Finger closing port 4 15 3 Max. 7.3 7 +0.03 0 3-4H9 42 78 Depth 6 (one each on three sides) 22.5 M5 x 0.8 Finger opening port 3-R2 29 15 16 10 22 8 31 51.5 18 40 Angle adjustment bolt 6 2-5.5 through 4-M5 x 0.8 3-R2 2-9.5 depth of counter bore 3 Depth 8 (two on opposite side) 11 2 10 +0.03 0 3-4H9 long groove depth 4 M5 x 0.8 Port A