Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

L1 With auto switch Without auto switch Standard stroke (mm) Bore (mm) L LD LG LH LT LX LY LZ X Y Inch Metric 24 25.5 28.5 32.5 LS 15 15 24 24 B 27 27 36 39 A 54 54 65 69 LS 10 10 14 14 B 22 22 26 29 A 49 49 55 59 12 16 20 25 21.5 21.5 22.5 24.5 13.5 13.5 14.5 15 5 to 30 5 to 30 5 to 50 5 to 50 4.5 4.5 6.6 6.6 2.8 2.8 4 4 17 19 24 26 2 2 3.2 3.2 34 38 48 52 29.5 33.5 42 46 44 48 62 66 8 8

V

15 40.5 6.5 3.3 ZPT16 U C 16 18 12.5 17.5 20 38.5 25 43.5 3.5 1.2 ZPT50U C 50 53 19.5 25.5 3 15 51.5 4.5 15 41.5 7.5 3.8 D E E P T Y P E D E E P T Y P E G:M5x0.8 G:M6x1 Model A B C D E F E F Y H:M6x1 H:M6x1 H O W T O O R D E R S E E N E X T P A G E Model A B D E Y C F G C F G ZPT10D 10 12 15 20 20 41 25 46 6 ZPT40D 40 43 29 35.5 3 25 61 4.5 15 51 17 ZPT16D 16 18 16 21 20 42 25 47 7 Courtesy

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Stroke adjusting range (One side) 0 to 10 mm 0 to 15 mm [Built-in adjusting bolts (2 pcs.)]

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

to 35C) 5% F.S. 1 digit (0 to 50C) 2% F.S. 2% F.S. (15 to 35C) 2% F.S. (15 to 35C) Monitor unit Monitor unit Monitor unit Monitor unit (15 to 35C) 3% F.S. (15 to 35C) 5% F.S. (0 to 50C) 5% F.S. (0 to 50C) 0.5% F.S. 0.5% F.S. 0.5% F.S. (0 to 50C) 0.5% F.S. (0 to 50C) 5% F.S. (0 to 50C) 5% F.S. 5% F.S. (0 to 50C) (0 to 50C) (0 to 50C) (0 to 50C) Repeatability 1% F .S.

Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Thread size M4 x 0.7 8 2 46 Effective thread length (mm) Quantity P.C.D.

Cylinder with Lock Series MNB

Bore size (mm) Bore size (mm) B DA DB DL DU DC DX DE DO DR DT DS DH DD A B A+ B+ 90 Z H10 (Aperture) 32 40 50 63 80 100 54 42 32 22 44 14 62 9 6.6 7 33 224 10 15 + 0.058 0 10 32, 40 MB-B03 45 25 160 63 42 32 22 44 14 62 9 6.6 7 33 235 10 15 + 0.058 0 10 75 53 43 30 60 20 81 10.5 9 8 45 271 11.5 18 + 0.070 0 14 50, 63 MB-B05 60 40 190 90 53 43 30 60 20 81 10.5 9 8 45 285 11.5 18 + 0.084 0

Round Type Hydraulic Cylinder

12 16 12 8 46 6 8 32 5.5 7 28 121 5.5 40 55 13 28 19 15 32 Up to 800 21 M14 x 1.5 24 22 38 16 19 12 8 53 8 9 40 7.5 7 30 133 6 45 60 13 36 19 15 40 Up to 800 21 M16 x 1.5 24 24 41 18 21 14 11 54 10 11 48 7.5 9 35 158 6 55 75 19 44 24 21 (mm) Foot bracket plate thickness is dimension LT + 1 mm.

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

(for 4) C6 (for 6) M5 (M5 thread) 4.5 (0.25) 12 or less 15 or less VQ1130 Metal seal 3 position 2 position Single VQ1 30 Side 1 to 16 stations Options: 6.3 (0.35) 15 or less 20 or less VQ1131 Rubber seal VQ1000 VV5Q13VQ1 31 424 57 Built-in silencer Direct exhaust 4.5 (0.25) 12 or less 15 or less VQ1230 Metal seal Double (latching) 6.3 (0.35) 15 or less 20 or less VQ1231 Rubber seal Valve

Air Cylinder Series MB

side) 1 15 20 D-P5DWL (n2) 2 (n2) 2 15 + 65 n = 2,4,6,8... 20 + 65 n = 2,4,6,8... n 12

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

Internal Pilot Manifold L Dimension n: Stations L n 2 110.5 100 86 12 3 123 112.5 96.5 13 4 135.5 125 107 14 5 148 137.5 117.5 15 6 160.5 150 128 16 7 173 162.5 138.5 17 8 173 162.5 149 12 9 185.5 175 159.5 13 10 198 187.5 170 14 11 210.5 200 180.5 15 12 223 212.5 191 16 13 235.5 225 201.5 17 14 235.5 225 212 12 15 248 237.5 222.5 13 16 260.5 250 233 14 17 273 262.5 243.5 15 18 285.5 275

Auto Switch Guide

(Red Green Red) D-B59W D-A79W D-A59W D-H7NW/H7PW/H7BW D-G59W/G5PW/K59W D-F79W/F7PW/J79W D-F7NWV/F7BWV D-F59W/F5PW/J59W D-F9NW/F9PW/F9BW D-F9NWV/F9PWV/F9BWV D-Y7NW/Y7PW/Y7BW Band Grommet 9-15-23 Solid state switch Reed switch Rail Grommet 9-15-24 Tie-rod Grommet 9-15-25 2-color indication 9-15-42 Band Grommet CL 9-15-43 9-15-44 Rail Grommet CL1 9-15-45 Tie-rod Grommet 9-15-46 MLGC 9-15-47

Cylinder with Lock Series CNS

BBA1 is also included when switches are shipped separately. 1pc. 110 15 2 pcs.

SMC Pneumatic Clean Series

With air cushion 4-FD E-0.05 0 FT F FX0.15 B (mm) Bore size 40 B 61 E 25 F 2 FX 46 FD 6.6 FT 8 50 63 76 92 30 32 2 2 58 70 9 11 9 9 Note) End boss is machined on the flange for E.

Series CG1-Z 10-/11- ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 21-/22- Air Cylinder: Double acting, Single rod

Fittings & Tubing Air Cylinders Rotary Actuators B LH 15 LT W 2 x LC (Knock pin position) Y X M W X Y 4 x LD LX Z LS + Stroke LZ ZZ + Stroke (mm) 7 7 6 6 LD 3 3 3 3 LT 4 4 4 4 LC 51 (60) 53 (61) 53 (61) 53 (61) LS Z 30 25 22 20 LH 135 (144) 125.5 (133.5) 123.5 (131.5) 118 (126) ZZ B 54 44 36 32 LX 4 3.5 3.5 3 M 16.5 16 15 15 X 8.5 8 7 7 Y 71 58 49 44 LZ 10 10 10 10 W Bore size 54.5 45 38.5

Clamp Cylinder with Lock Series CLK1

15 35 18 15 2-M6 thread depth 11 2-M6 thread depth 11 20 20 A 17 17 40 A 20 20 15 45 60 25 45 60 A Applicable clamp cylinder A Applicable clamp cylinder Part no.

Pressure Gauge Guide

The installation torque is 0.3 to 0.5 Nm. 14-11-15

CL

Minimum Stroke for Auto Switch Mounting (mm) No. of auto switches mounted 2 Different sides Auto switch model Same side n Different sides 1 Same side D-C7 D-C80 15 50 + 45 (n 2) 50 10 n 2 2 15 + 45 ( ) (n = 2, 4, 6) D-H7 D-H7W D-H7BAL D-H7NF 15 60 + 45 (n 2) 60 10 D-C73C D-C80C D-H7C n 2 2 15 + 50 ( ) (n = 2, 4, 6) 65 + 50 (n 2) 15 65 10 n 2 2 D-B5 D-B64 15 + 50 ( ) (n = 2, 4, 6) 15

High Vacuum Angle Valve, XL Series

For further details, refer to mounting positions under Replacement heaters/Part Nos. on page 46.

Applicable Auto Switch Model

17 17 17 17 17 17 13 13 13 14 14 15 Note) Average value at normal temperature including hysteresis.

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

Bore size (mm) 32 40 50 63 80 100 125 l2 d3 CN S5 K1 G1 G2 EN EU CH H6 11 10 6.6 38 51 8.5 21 18 31 14 10.5 32 10 15 11 12 6.6 41 54 8.5 24 22 35 16 12 36 10 18 15 16 9 50 65 10.5 33 30 45 21 15 45 12 20 67 50 23 15 16 9 52 10.5 37 35 21 15 50 12 18 20 11 66 86 11.5 47 40 60 25 18 63 14 27 18 20 11 76 96 12.5 55 50 70 25 18 71 15 30 20 30 13.5 94 124 17 70 60 90 37 25 90 20 40 Black color