Brake mechanism added

15 14 9 9 10 10 11 D-B59W 14 14 17 16 18 D-A9 and D-A9V cannot be mounted on 50.

ZP3

Form w 1 Material e r Vacuum inlet Flat Type with Groove C2 Connection thread 04 20 12 1.2 M10 x 1 3 Width across flats 7 06 08 1.8 10 13 16 A12 30 18 M12 x 1 2 Width across flats 14 N S U F GN GS HS Pad diameter: 10 to 16 A10 ZP3 T UM B5 M5 0.8 Width across flats 14 D 5 E E B A Dimensions Per Vacuum Inlet: One-touch Fitting Model A B Fitting part min. hole size Fitting part no.

Environment

1000 1000 1000 1000 X Motorless 500 500 500 500 LAT 0 0 0 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 4 8 12 16 20 24 0 10 20 30 40 50 60 LZ Work load [kg] Work load [kg] Work load [kg] Work load [kg] 2000 2000 2000 2000 LC3F2 Mey 1500 1500 1500 1500 L5 [mm] L5 [mm] L5 [mm] L5 [mm] m 1000 1000 1000 1000 Wall L5 Y 500 500 500 500 0 0 0 0 4 8 12 16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14

IDG

/100SV 614 14-19-51

5 Port Air Operated Valve

AXT620-32-1 (M4 x 48, With spring washer) For mounting valve M4: 1.4 Nm 1509 VFA3000/5000 Series Dimensions: VFA3000 Series/Base Mounted 2 position single VFA3140(-P) 02 03 2 position double VFA3240(-P) 02 03 28 33 28 33 1/4, 3/8 [4 (A), 2 (B) port] 1/4, 3/8 [4 (A), 2 (B) port] 13 13 22 22 1/8 (Pilot port: Upward) 81 1/8 (Pilot port: Upward) 46 20 36 36 20 46 4A 2B 4A 2B 26.4 26.4 35 42

Rotary Actuator/Vane Type

[mm] [mm] Size CRB2 CRBU2 X Y X Y 10 3 to 14 1 to 14 1 to 14 1 to 14 15 4 to 18 1.5 to 18 1.5 to 18 1.5 to 18 20 4.5 to 20 1.5 to 20 1.5 to 20 1.5 to 20 30 5 to 22 2 to 22 2 to 22 2 to 22 40 18 to 30 18 to 30 18 to 30 18 to 30 Size CRB2 CRBU2 X Y X Y 10 3 to 14 1 to 14 1 to 14 1 to 14 15 4 to 18 1.5 to 18 1.5 to 18 1.5 to 18 20 4.5 to 20 1.5 to 20 1.5 to 20 1.5 to 20 30 5 to 22 2 to 22 2

ARM10/11

manifold options, please refer to pages 14-4-34 to 14-4-38.

ARM10/11

manifold options, please refer to pages 14-4-34 to 14-4-38.

Fieldbus System

14 14 14 14 14 14 D side U side For the I/O Unit part number mounted, refer to the following pages.

MXW

Roll moment Mr = W x 9.8 (L3 + C) Pitch moment Mp = W x 9.8 (L1 + A1) A1: Moment center position distance compensation amount B1: Moment center position distance compensation amount (mm) C1: Moment center position distance compensation amount L3 C1 MXW8 MXW12 MXW16 MXW20 MXW25 39 48 58 75 97 (mm) (mm) MXW8 MXW12 MXW16 MXW20 MXW25 23 29 37 49 63 L1 A1 MXW8 MXW12 MXW16 MXW20 MXW25 10 10 14

HRX-OM-W002

21 12 10 15 16 17 18 19 13 15 10 16 17 24 11 14 9 8 6 3 9 3 3 7 5 2 2 5 2 5 4 4 4 1 1 1 1 1 1 21 21 11 9 8 6 3 9 3 3 22 23 25 26 27 28 23 7 5 2 2 5 2 5 35 36 20 12 10 15 16 17 18 19 13 15 10 16 17 4 4 4 24 14 34 2B 1B 1A 3A 2A 3B Main Board PCB2 2/2 1/2 23 22 25 26 27 22 37 38 39 40 32 20 20 21 10 12 13 15 16 15 16 18 24 24 11 14 3 9 8 6 2 7 7 2 5 (CN8) 4 4 1 1 1 5 1 21 11 3 9 8 6 2 22 25

High Vacuum Angle Valve

Please contact SMC for details. 14 XLG Series Specifications Model XLG-16-2 XLG-25-2 XLG-40-2 XLG-50-2 XLG-63-2 XLG-80-2 Valve type Double acting (Dual operation), Pressurize to open/close Fluid Inert gas under vacuum Operating temperature [C] XLG 5 to 60 (High-temperature type: 5 to 150) Operating pressure [Pa(abs)] Atmospheric pressure to 1 x 105 Conductance [L/s]*1 5 14 45 80 160 200 Leakage

Sine Rodless Cylinder Series REBR Direct Mount Type

33.5 33.5 45 17 42 19 M5 x 0.8 106 44 71.5 M5 x 0.8 8 125 29 24 63 46 46 61.5 25 58.5 28 M6 x 1.0 138 56 86 M6 x 1.0 10 Model N S TW Z ZZ NL NT P PA PB PP W XB REBH15 REBH25 161 65 194 17.5 15 8 M5 x 0.8 50 62 21 88.5 16.5 209 75 250 23.5 20.5 18 9 Rc 1/8 65 75 27 103 9.5 79 Series REBH Dimensions/25, 32 Dual axis type/REBHT LL 138 4-M thread depth MM PA XB PB 2-Rc 1/8 LW S + Stroke EB

3 Port Solenoid Valve Series SYJ300/500/700

173.5 165.5 15 184 176 16 194.5 186.5 17 205 197 18 215.5 207.5 19 226 218 14

ZQ-OM01401

--1 ZQA-Q25LO--VQ100 (ZQ ) Assy(DC24V ) VQZ1000V-85-1A 97mm 41 - No.ZQ-OM01401-B 13. (1),(2) (3),(4) (4),(5) (6) (14) (7) (8) (9) (6),(10) (11) (12) (13) (3),(4), (5),(6),(14) (15) (7) (8) (16) 42 - No.ZQ-OM01401-B No. (1) (2) (3) ON 10 (%) (4) (5) Assy (6) (7) (8) 0.72[V] (9) Ass'y (10) 43 - No.ZQ-OM01401-B No. (11) (12) (13) (14) Ass'y (15) ON/OFF (16) (ZQ-ZSV-A

44

10 14 10 14 12 14 17 14 17 22 14 17 22 14 17 22 14 17 22 19 22 16.1 19.9 16.1 19.9 17.2 21 20.1 23.3 24.7 25 26.4 30.6 25 26.4 30.6 25 26.4 30.6 25 26.4 30.6 29.3 33.3 17.4 19.6 17.4 19.6 19.6 21.8 24.7 26.3 27.3 29.6 30.6 33.5 29.6 30.6 33.5 29.6 30.6 33.5 29.6 30.6 33.5 36.3 39 9 18 9 18 12 21 22 30 42 37 47 74 36 46 73 38 49 75 40 51 77 75 96 4 2.5 1.8 1.4 7 8 14.5 5 KG 4 3 2.3 2.3 Applicable

3

AB B MK MK Basic (mm) MK2T A B C D E F Yh9 G 45 52 64 77 H 16 16 20 20 I 9 9 11 14 J 7 7 8 10.5 K M6 x 1.0 M6 x 1.0 M8 x 1.25 M10 x 1.5 L 10 10 14 18 S 31.5 29 34 34.5 T 10.5 9 11.5 10.5 W 14 15 19 19 X 3 3 3.5 3.5 Z 6.5 6.5 7.5 7.5 AA 4.5 5 7 7 AB 1 1 1 1.4 AC 5.5 5.5 6.6 9 AE 1/8 1/8 1/4 1/4 Model 30 30 37 48 MKB32-Z MKB40-Z MKB50-Z MKB63-Z 0 0.062 0 0.062 0 0.062 0 0.062 49.5 57 71 84

Magnetically Coupled Rodless Cylinder

to each bore size. 9 Series CY3B Magnetically Coupled Rodless Cylinder Basic Type Dimensions Basic type CY3B15 to 40 4-MM thread depth J L 0 0.1 H B 2-P (Piping port) G E G NN ( I ) D X NA R Mounting nut N W K N S + Stroke F F ZZ + Stroke H B E G Mounting nut NN NA F N CY3B15 (mm) Model CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 B 35 36 46 60 70 NA 17 24 30 36 46 R 28 34 40 50 S 83 106 111 124 150

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

to each bore size. 9 Series CY3B Magnetically Coupled Rodless Cylinder Basic Type Dimensions Basic type CY3B15 to 40 4-MM thread depth J L 0 0.1 H B 2-P (Piping port) G E G NN ( I ) D X NA R Mounting nut N W K N S + Stroke F F ZZ + Stroke H B E G Mounting nut NN NA F N CY3B15 (mm) Model CY3B15 CY3B20 CY3B25 CY3B32 CY3B40 B 35 36 46 60 70 NA 17 24 30 36 46 R 28 34 40 50 S 83 106 111 124

ZX

Combination PS ZQ Philips screw Vacuum switch ZSE3, ZSP1 Vacuum switch ZSE2 M2.5 x 63 M2.5 x 61 P3270148-39 (M2.5 x 39) PV M2.5 x 14 ZF Filter unit ZX1-F Plate A P3200150 ZP ZCU Ejector assembly AMJ 1(PV PS PD) PD PE Misc.