Precision Cylinder Series MTS 4.5 (opposite side also) 14 15 4 28 0.2 28 0.2 38 36 26 53.5 102.5 + Stroke 18 25 M5 x 0.8 120.5 + Stroke 16 0.2 22 24 0.2 4-M5 x 0.8, effective length 8 Rod end male threads 10h7 0 0.015 Width across flats 8 M6 x 1 M6 x 1.0 9.8 11.5 10 5 10 12 4.5 34.5 Stud bolt part number: MT-S20 Rod end nut part number: NT-015A 11.5 Width across flats 14 With end lock 3 119.5 + Stroke 137.5 + Stroke
x 0.8 12.5 M5 x 0.8 32 (25 x 2) 25, 50, 100 150, 200 44.5 30 12 11.5 3 32 15 7.5 13 109 16 8 16 21 M6 x 1 15 M6 x 1 40 (32 x 2) 54 37 16 13 4 41 19.5 21 12 17.5 9 120 20.5 4 20.5 27 M8 x 1.25 20 M6 x 1 Bore size OA OB OL P PD PE PW Q R S T U VA WA X YY YL Z Nil TN TF Nil TN TF 20 (16 x 2) 4.3 8 3.5 M5 x 0.8 7.5 19 21 10 36 18 66 54 75 15.9 29 M5 x 0.8 7.5 4.5 25 (20 x 2) 4.3 8 4 M5
No.PS-OML0002CN-G // ZSE30A(F) ISE30A 2 8 10 11 14 14 17 18 21 21 24 24 24 F0 26 F1 OUT1 27 F2 OUT2 30 F3 30 F4 31 F5 32 F6 34 F7 35 F8 36 37 F90 37 F97 39 F98 41 F99 43 44 47 48 49 56 56 58 -1No.PS-OML0002CN-G (ISO/IEC)(JIS) 1) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating
B (+) () () (+) 18 18 SOL. A (+) () 19 COM (+) () 19 Station 10 SOL. B (+) () 20 COM (+) () 20 SOL. A (+) () 21 Negative COM. spec. Positive COM. spec. Station 11 SOL. B (+) () 22 SOL. A (+) () 23 Station 12 SOL. B (+) () 24 COM () (+) 25 Special Wiring Specifications (Option) COM () (+) 26 Positive COM. spec. Negative COM. spec. COM.
) 36 (33) 66 0.5 59 (54) 52 (49) 41 (39) 79 0.1 0.2 4 0.3 40 (30) 37 (29) 31 (23) 54 2) 46 (37) 49 (44) 41 (36) 68 0.5 63 (57) 57 (51) 46 (43) 82 0.1 0.2 6 0.3 43 (34) 39 (30) 35 (28) 54 2) 49 (41) 53 (50) 47 (43) 68 0.5 67 (64) 61 (59) 54 (51) 81 1) ( ) 2) ZQ05A0.35MPaZQ07AZQ10A0.43MPaZQ000A0.4MPa 3) (PD) V PD [MPa] ZQ05A ZQ07A ZQ10A ZQ000A 0.05 11 10 8 16 0.15 22 20 17 32 3.2 0.25
Positioning pin hole 2.5 12 55.5 20 69 Auto Switch Mounting Groove Dimensions M5 x 0.8 (Finger opening port) 18 8 3 4 25 7 M5 x 0.8 (Finger closing port) 2.5 MHY2-16D2 Opening/Closing direction through-hole type 4 x 3.4 through (Hole for mounting attachment) 8 -0.005 -0.025 4 7 14 (Limted area for mounting attachment) Do not extend the attachment from limited area for mounting to avoid
E 41 SN LQ1 LQ1 fittings Nut (including insert bushing), 1 location removed Fitting type E Union elbow T Union tee Applicable tubing size Metric size Inch size Applicable process pump Applicable process pump Applicable Applicable Reducing Reducing Class No.
2-5.5 through Angle adjustment bolt 6 Adjustment: Max.10.2 2-M5 x 0.8 1.5 7 +0.030 0 3-4H9 long groove depth 3 ( A , B , C ) 4-M5 x 0.8 depth 10 B port A port 0.5 6g6 0.004 0.012 14h9 0 0.043 42 0 0.062 48h9 41 7 Rotary Table High Precision Type Series MSUA These drawings indicate the condition when the B port is pressurized.
75 75 B 108 160 201 239 242 E 28 40 57 73 73 P 30 44 46 54 56 K 0 5 3.5 1.5 1.2 M 25 30 41 50 50 N 28 34 40 54 54 Q 4.5 5.4 6.5 8.5 8.5 H 26 63 66 76 76 G 25 40 55 80 80 Y 14 19 21 21 U 2 2.3 2.3 2.3 2.3 T 40 55 53 70 70 Z 6 7 7 7 W 18.5 28.5 38.5 42.5 42.5 B 125 177 242 278 278 V 18 30 31 35.5 37 J 27 30.5 38.5 38.5 S 6.5 15.4 8 10.5 10.5 AW10 AW20 AW30 AW40 AW40-06 M5 x 0.8 1/8, 1/4
50 60 68 64 76 86 91 18 24 30 35 28 34 40 40 11.5 14 15 17.5 15 17 20 20 20.5 25 30 34 12.8 19 23 23 M4 M5 M5 M5 VCA21 VCA31 1/4 1/4, 3/8 3/8, 1/2 3/4 VCA41 4 Series VCA How to Order Manifolds (VCA20) VV2C A 2 02 02 How to Order Manifold Assemblies (Example) Enter the valve and option models to be mounted under the manifold base part number.
M5 x 0.8 (Relief port) 2 x 2 x 6.5 counterbore M4 x 0.7 effective depth 8 (Piping port) 2 x 2 x M4 x 0.7 effective depth 7 Note 2) 38 2 x 3.5 through 8 29 20 0.5 Flat washer 6 10 4 4 20 27 + Stroke 3.5 29 30.5 + Stroke 20 2 x 2 x 9 counterbore M5 x 0.8 effective depth 7 18 5.5 2 x M5 x 0.8 M5 x 0.8 (Relief port) (Piping port) 5.5 2 x 2 x M6 x 1.0 effective depth 10 Note 3) 2 x 5.4 through
M1 M2 M3 m1 m2 m3 16 25 40 16 25 40 16 25 40 5 4 3.5 18 16 14 MY2H 13 14 10 35 35 30 45 33 28 68 66 57 7 6 7 15 13 13 MY2H 28 26 26 32 30 30 60 50 60 62 62 62 46 55 46 20 18 18 MY2HT 100 120 100 38 35 35 200 220 200 80 80 80 The above values are the maximum allowable values for moment and load.
ConlrolNet and CANopen protoclos, with 64 l/O t\r12ll\,18 connecbr slection available (t.
Compatible Driver Pulse input type/ Positioning type Pulse input type CC-Link direct input type SSCNET#type Driver type Series LECSA LECSB LECSC LECSS Number of point tables Up to 7 Up to 255 Pulse input v v Applicable network CC-Link SSCNET# Control encoder Incremental 17-bit encoder Absolute 18-bit encoder Absolute 18-bit encoder Absolute 18-bit encoder Communication function USB
Note 1) When using D-F8, mount it at a distance of 10mm or more from magnetic substances such as iron. -18- Specifications Table 1.
to 1.5-19 Port size Rc (PT)1/8, M5 X 0.8 (The port is plugged for delivery.)
OUT1 output mode selection in Initial Setting on page 16-2-41. SET Press the SET button.
H A 30 ZPNA-M22 34.6 Bolts Dimensions (mm) A 11 d M3 x 0.5 12 7 M4 x 0.7 B 5.5 L 8 8 10 15 8.5 M5 x 0.8 13-11-82
Q + Stroke (NA) Cylinder form 12 16 d Bore size (mm) Standard stroke (mm) A B C E G GP H HA HG HN HP HT J JK L LD Slide Ball bushing 12 15, 25 8 4 16 25 7.5 50 34 6 14.5 34 33 18 M5 x 0.8 9.5 68 4.3 8.5 10 16 15, 25 9.5 5 18 29 6.5 65 40 6.5 16 39.5 39 21 M6 x 1 9.5 75 5.2 7.5 12 20 25, 50 11 6.5 25 36 8.5 80 46 9 18 44.1 45 24 M8 x 1.25 10 86 6.9 9.5 16 25 25, 50 11 6.5 25 40 8.5 90 54 9
Port size Body size M5 M5 x 0.8 U10/32 10-32UNF 1 M5 x 0.8 10-32UNF 1 2 0 M5 06 AS 1F S G Body size 1 S Body size 2/3/4 AS 2 2 0 1F S G 01 06 With indicator Body size Made to Order Refer to page 698 for details. 2 1/8, 1/4 3 3/8 4 1/2 Type 2 Elbow 3 Universal Seal method Nil Without sealant S With sealant Control type Note) 0 Meter-out 1 Meter-in Note) Face seal type is used for the G thread