Rotary Cylinder Series MRQ

(mm) (mm) Stroke 5 10 15 15 25 30 40 50 75 100 Y 12.5 15 15 15 20 15 17.5 17.5 25 30 DQ 20 20 20 20 30 E 68 68 70.5 70.5 70.5 68 70.5 75.5 80.5 83 349 Series MRQ With Auto Switch Refer to pages 761 to 809 concerning further information on specifications of the auto switch single body.

Compact Vacuum Unit Ejector/ Vacuum Pump System

Accessories to supply valve/ release valve Model Accessories ZB1-VQ110UMounting screws (M1.7 x 15); 2pcs. ZB1-VQ110U-B Mounting screws (M1.7 x 22); 2pcs. ZB1-VQ110LMounting screws (M1.7 x 22); 2pcs. ZB1-VQ120UMounting screws (M1.7 x 15); 2pcs. ZB1-VQ120U-B Mounting screws (M1.7 x 22); 2pcs. ZB1-VQ110Mounting screws (M1.7 x 15); 2pcs.

Mechanically Jointed Rodless Cylinder Series MY2

6 MY1B MY1M MY1C MY1H MY1HT MY1W MY2C MY2H MY3A MY3B MY3M @4 @0 #1 @7 @6 #2 #4 Replacement Parts: Seal Kit MY2H16G/MY2HT16G Description Seal belt Dust seal band O-ring Scraper Piston seal Cushion seal Tube gasket O-ring MY2H25G/MY2HT25G MY25-16AStroke MY2H25-16BStroke 4 x 1.8 x 1.1 MY2H40G/MY2HT40G MY40-16AStroke MY2H40-16BStroke 7.15 x 3.75 x 1.7 No. 14 15 43 18 39 40 41 42 Qty. 1 1 2 2

Air Cylinder NCA1 Series

/16 3/8 2 3/4 2 7/16 1/2 15/16 3/8 3 1/4 2 1/2 7/16 1/2 15/16 3/8 3 3/4 3 1/4 9/16 3/4 1 1/4 1/2 4 3/4 4 9/16 3/4 1 1/4 1/2 5 1/2 5 13/16 1 1 9/16 11/16 6 7/8 6 13/16 1 1 9/16 11/16 7 7/8 MS4 1.5 ~ 6 SIDE TAPPED BORE ROD KK A B V W Y ADD STROKEIM MM SM LB P SN XT 1 1/2 5/8 7/16-20 3/4 1.125 1/4 5/8 1 15/16 4 2 1/4 2 1/4 1 15/16 1 1/2 1 3/4-16 1 1/8 1.5 1/2 1 2 5/16 4 2 1/4 2 1/4 2 5/16 2

NCA1

/16 3/8 2 3/4 2 7/16 1/2 15/16 3/8 3 1/4 2 1/2 7/16 1/2 15/16 3/8 3 3/4 3 1/4 9/16 3/4 1 1/4 1/2 4 3/4 4 9/16 3/4 1 1/4 1/2 5 1/2 5 13/16 1 1 9/16 11/16 6 7/8 6 13/16 1 1 9/16 11/16 7 7/8 MS4 1.5 ~ 6 SIDE TAPPED BORE ROD KK A B V W Y ADD STROKEIM MM SM LB P SN XT 1 1/2 5/8 7/16-20 3/4 1.125 1/4 5/8 1 15/16 4 2 1/4 2 1/4 1 15/16 1 1/2 1 3/4-16 1 1/8 1.5 1/2 1 2 5/16 4 2 1/4 2 1/4 2 5/16 2

Rotary Gripper Series MRHQ

x 0.5 M5 x 0.8 14.6 closed (mounting screw attachment ) Finger closing port 4 15 3 Max. 7.3 7 +0.03 0 3-4H9 42 78 Depth 6 (one each on three sides) 22.5 M5 x 0.8 Finger opening port 3-R2 29 15 16 10 22 8 31 51.5 18 40 Angle adjustment bolt 6 2-5.5 through 4-M5 x 0.8 3-R2 2-9.5 depth of counter bore 3 Depth 8 (two on opposite side) 11 2 10 +0.03 0 3-4H9 long groove depth 4 M5 x 0.8 Port A

Rotary Table Series MSU

2-5.5 through Angle adjustment bolt 6 Adjustment: Max.10.2 2-M5 x 0.8 1.5 7 +0.030 0 3-4H9 long groove depth 3 ( A , B , C ) 4-M5 x 0.8 depth 10 B port A port 0.5 6g6 0.004 0.012 14h9 0 0.043 42 0 0.062 48h9 41 7 Rotary Table High Precision Type Series MSUA These drawings indicate the condition when the B port is pressurized.

Compact Hydraulic Cylinder Double Acting/Single Rod Series CH
QB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

15 20 20 2 pcs. 5 10 15 10 20 15 Auto Switch Mounting Bracket Part Nos.

MIW/MIS

8.5 20.5 33 4.5 17 20.5 31 4.5 15 20.5 41 4.5 15 20.5 51 4.5 35 22.5 43 6.5 27 22.5 33 6.5 17 22.5 43 6.5 27 22.5 53 6.5 37 MIW12-12D MIW20-20D 6 4 4 2 18.5 29 6.5 20.5 31 8.5 MIS12-10D MIS20-10D 4 2 6 4 2.5 4 18.5 39 6.5 20.5 41 8.5 MIS12-20D MIS20-20D 6 4 4 2 18.5 49 6.5 20.5 51 8.5 MIS12-30D MIS20-30D 6 4 4 2 13 Series MIW/MIS Auto Switch Common Specifications Auto Switch

Compact Hydraulic Cylinder Series CH
KGB

8 58 11 81 1/4 24 10 24 63 20 depth13 90 77 13 35.5 30 M27 x 3 33 9 69 13 100 1/4 27.5 10 27.5 80 23 depth 15.2 105 88 17 45 41 M30 x 3.5 36 14 86 15 121 3/8 31 15 31 100 26 depth 17.5 132 106 26 56 50 M39 x 4 45 21 106 17 146 3/8 36 15 36 Note) Body dimensions are the same with or without auto switches.

ZSE F/ISE

OUT1 output mode selection in Initial Setting on page 16-2-41. SET Press the SET button.

IZx-OMP0064

IZS40 IZS41 IZS42 0 1 Remote Remote controller *1 controller *1 1 3 1 0.1 2 5 3 0.5 3 8 5 1 4 10 10 3 5 15 15 5 6 20 20 10 7 30 30 15 8 DC + DC + 20 9 DC DC 30 *1: Set when remote controller is used. 5-3-2.

48

Note 3) 10 to 15 in decimal number are displayed as follows in the 7-segment LED.

Heavy Duty Stopper Cylinder Series RSH/RS1H

Double acting spring type Single acting RSH20T-PS RSH32T-PS RSH50T-PS RSH63T-PS RSH80T-PS Double acting RSH20D-PS RSH32D-PS RSH50D-PS RSH63D-PS RSH80D-PS RSH-R20 RSH-R32 RS1H-R50 RS1H-R63 RS1H-R80 Set of items 37 to 41 in above table Set of items 37 to 41 in above table (not including 39) The seal kits for 20 to 32 consist of items 37 to 41 and those for 50 to 80 consist of items 37 to 41

Escapements Series MIW/MIS

8.5 20.5 33 4.5 17 20.5 31 4.5 15 20.5 41 4.5 15 20.5 51 4.5 35 22.5 43 6.5 27 22.5 33 6.5 17 22.5 43 6.5 27 22.5 53 6.5 37 MIW12-12D MIW20-20D 6 4 4 2 18.5 29 6.5 20.5 31 8.5 MIS12-10D MIS20-10D 4 2 6 4 2.5 4 18.5 39 6.5 20.5 41 8.5 MIS12-20D MIS20-20D 6 4 4 2 18.5 49 6.5 20.5 51 8.5 MIS12-30D MIS20-30D 6 4 4 2 13 Series MIW/MIS Auto Switch Common Specifications Auto Switch

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

52 70 83 G 41 63 68 72 98 H J K P.C.D L1 6-6.6 8-8.4 L2 XMD-25 XMD-40 XMD-50 XMD-63 XMD-80 50 65 70 88 90 16 20 20 20 20 7.5 15 17.5 19.5 26.5 P.C.D 58.7 P.C.D 92.1 C D XYD/In-line type G Fd C (K flange) J K H B S M 45 A Fn (KF flange) E K (mm) Model A 86.7 114 128 163 193 B 48 66 79 100 117 C 1 2 2 3 3 D 23.5 38 53 61 80 E 40 55 75 87 114 Fn 95 110 Fd 26 41 52 70 83 G 66 84 95 121

Lubrication Equipment

A B 63 63 80 85 90 100 C Port size Rc(PT) INA-11-402 INA-11-403 INA-11-404 INA-11-405 INA-11-406 INA-11-407 Model No. 1/4 15 15 15 20 22 22 141 164.5 170 180 230 251 3/8 1/4 , 3/8 , 1/2 3/4 B C D E F Port size Rc(PT) 3/4 , 1 1 Model No. A 1 2 150 165 42.7 76.3 45 65 40 60 35 40 80 80 ALBA90-10 ALBA90-20 1.17-24

HRX-OM-Q026

Ambient temperature (C) Recommended circulating fluids 10 to 45 Tap water, ethylene glycol aqueous solution 15(wt)% -5 to 10 Ethylene glycol aqueous solution 15(wt)% -20 to -5 Ethylene glycol aqueous solution 40(wt)% Circulating fluid temperature(C) Recommended circulating fluids 10 to 35 Tap water, ethylene glycol aqueous solution 15(wt)% 5 to 10 Ethylene glycol aqueous solution 15(wt)%

Base Mounted Metal Seal/Rubber Seal Series VQ

M5 fittings for M5 thread are attached without being incorporated.

Series CE1

19 41 46 43.5 4.4-16